公开(公告)号：US11629946B2

公开(公告)日：2023-04-18

申请号：US16625684

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa ,  Hirokazu Yamamoto ,  Takuo Koyama

IPC: G02B9/02 ,  G01B9/02 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14 ,  G01J3/453

Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.

公开(公告)号：US11624605B2

公开(公告)日：2023-04-11

申请号：US16625696

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa ,  Hirokazu Yamamoto ,  Takuo Koyama

IPC: G01B9/02 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14 ,  G01J3/453

Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a part of an optical path between the beam splitter unit 3 and the fixed mirror 16. The light transmitting portion 14 is a portion that corrects an optical path difference that occurs between an optical path between the beam splitter unit 3 and the movable mirror 22 and the optical path between the beam splitter unit 3 and the fixed mirror 16. The second surface 21b of the base 21 and the third surface 13a of the optical function member 13 are joined to each other.

公开(公告)号：US11513339B2

公开(公告)日：2022-11-29

申请号：US16492691

申请日：2018-03-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Tatsuya Sugimoto ,  Kyosuke Kotani

IPC: G02B26/08 ,  G02B27/14 ,  B81B3/00 ,  G01J3/45

Abstract: An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region which is penetrated by the movable mirror, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. A portion of the movable mirror is positioned in the space.

公开(公告)号：US11067380B2

公开(公告)日：2021-07-20

申请号：US16625681

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/02 ,  G02B26/08 ,  B81B3/00

Abstract: An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.

公开(公告)号：US11022492B2

公开(公告)日：2021-06-01

申请号：US16625682

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa

IPC: G01J3/45 ,  G01J3/14 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01B9/02 ,  G02B7/182 ,  G02B26/08

Abstract: An optical module 1A includes a mirror unit 2 including a movable mirror 22 and a fixed mirror 16, a beam splitter unit 3, a light incident unit 4, a first light detector 6, a second light source 7, a second light detector 8, a holding unit 130, a first mirror 51, a second mirror 52, and a third mirror 53. The holding unit 130 holds the first light detector 6, the second light detector 8, and the second light source 7 so as to face that same side, and to be aligned in this order. A length of an optical path between the unit 3 and the detector 6 is shorter than a length of an optical path between the unit 3 and the detector 8, and a length of an optical path between the unit 3 and the source 7.

公开(公告)号：US10422696B2

公开(公告)日：2019-09-24

申请号：US16072634

申请日：2017-02-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Yoshihisa Warashina ,  Tomofumi Suzuki ,  Kohei Kasamori ,  Ryosuke Okumura ,  Kyosuke Kotani

IPC: G01B11/00 ,  G01J3/453 ,  G01J3/02 ,  G01J3/45 ,  G02B26/06 ,  G01B11/02

Abstract: An optical module includes an actuator that includes a movable part to be moved along a predetermined direction; a first interference optical system that includes a first movable mirror, a first stationary mirror, and a first beam splitter; and a second interference optical system that includes a second movable mirror, a second stationary mirror, and a second beam splitter. The first interference optical system is adapted so that first light reciprocates m times (m is a natural number) between the first beam splitter and the first movable mirror along the predetermined direction. The second interference optical system is adapted so that second light reciprocates n times (n is a natural number greater than m) between the second beam splitter and the second movable mirror along the predetermined direction.

公开(公告)号：US12136893B2

公开(公告)日：2024-11-05

申请号：US16625687

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

IPC: G02B26/08 ,  H02N1/00

Abstract: An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.

公开(公告)号：US11906727B2

公开(公告)日：2024-02-20

申请号：US16761294

申请日：2018-08-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani ,  Yutaka Kuramoto ,  Daiki Suzuki

IPC: B81C1/00 ,  G02B26/10 ,  G02B7/182 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B26/0841 ,  B81C1/00555 ,  G02B7/1821 ,  G02B26/105 ,  H02N1/008 ,  B81B2201/042 ,  B81C2201/013 ,  B81C2201/0174 ,  B81C2201/0198

Abstract: A method for manufacturing an optical device includes: preparing a semiconductor substrate that includes a portion corresponding to a base, a movable unit, and an elastic support portion; forming a first resist layer in a region corresponding to the base on a surface of a first semiconductor layer which is opposite to an insulating layer; forming a depression in the first semiconductor layer by etching the first semiconductor layer using the first resist layer as a mask; forming a second resist layer in a region corresponding to a rib portion on a bottom surface of the depression, a side surface of the depression, and the surface of the first semiconductor layer which is opposite to the insulating layer; and forming the rib portion by etching the first semiconductor layer until reaching the insulating layer using the second resist layer as a mask.

公开(公告)号：US11898841B2

公开(公告)日：2024-02-13

申请号：US17426325

申请日：2020-01-17

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Yuya Iwazaki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Hiromichi Tozuka

IPC: G01B9/02 ,  G01B9/02015 ,  G01J3/45

CPC classification number: G01B9/02015 ,  G01J3/45

Abstract: A processer of an optical module is configured to control a voltage signal having a frequency for causing a movable mirror to resonate, and perform an intensity acquisition process. The intensity acquisition process is a process of acquiring a measurement light intensity of the interference light of the measurement light M times at a first time interval based on the frequency in each of a plurality of cycles among P cycles continuous in the voltage signal, acquiring an addition value of a plurality of the measurement light intensities mutually corresponding for the same number of times, acquiring a laser light intensity of the interference light of the laser light N times at a second time interval based on the frequency in each of the plurality of cycles, and acquiring an addition value of a plurality of the laser light intensities mutually corresponding for the same number of times.

公开(公告)号：US11879731B2

公开(公告)日：2024-01-23

申请号：US17943474

申请日：2022-09-13

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa ,  Hirokazu Yamamoto ,  Takuo Koyama

IPC: G01B9/02 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14 ,  G01J3/453

CPC classification number: G01B9/02051 ,  B81B3/00 ,  B81B3/007 ,  B81B3/0021 ,  G01B9/02049 ,  G01J3/021 ,  G01J3/0202 ,  G01J3/0237 ,  G01J3/108 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B26/0816 ,  G02B26/0833 ,  G02B26/0841 ,  G02B27/144 ,  B81B2201/042 ,  B81B2203/0154 ,  G01B2290/25 ,  G01B2290/35 ,  G01J3/4532 ,  G01J3/4535 ,  G01J2003/104

Abstract: A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.