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公开(公告)号：US20150355029A1
公开(公告)日：2015-12-10
申请号：US14121915
申请日：2014-11-04
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
CPC classification number: G02B17/0621 , G01J1/0411 , G01J1/0414 , G01J4/00 , G01J4/04 , G01N21/21 , G02B19/0023 , G02B19/0076 , G02B27/0012 , G02B27/286
Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
Abstract translation: 一种反射光学系统，其优选地需要存在具有光束反射表面的凸面镜和凹面镜，其应用实现将电磁辐射束聚焦到样本上（其可以沿着不同于 输入光束），基于调整的入射角和来自各种反射镜的反射，对输入光束偏振态的偏振状态的影响最小化。
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公开(公告)号：US11740176B2
公开(公告)日：2023-08-29
申请号：US17803029
申请日：2022-01-18
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Stefan Schoeche , Craig M. Herzinger , Steven E. Green , Martin M. Liphardt , James D. Welch
IPC: G01N21/21
CPC classification number: G01N21/211 , G01N2021/213 , G01N2201/021 , G01N2201/06113 , G01N2201/12
Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
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公开(公告)号：US10338362B1
公开(公告)日：2019-07-02
申请号：US15998118
申请日：2018-07-03
Applicant: J.A. WOOLLAM CO., INC
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer , Duane E. Meyer
Abstract: In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
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公开(公告)号：US09933357B1
公开(公告)日：2018-04-03
申请号：US15530584
申请日：2017-02-03
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Ping He , Gregory K. Pribil , Martin M. Liphardt
IPC: G01N21/21
CPC classification number: G01N21/211 , G01J3/0286 , G01J4/04 , G01N2201/0227 , G01N2201/023 , G01N2201/084
Abstract: An ellipsometer system with polarization state generator and polarization state analyzer components inside at least one internal environment supporting encasement, said at least one encasement being present inside said environmental chamber.
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15.发明授权公开(公告)号：US09546943B1
公开(公告)日：2017-01-17
申请号：US14999015
申请日：2016-03-18
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Jeremy A. Vanderslice , Christopher A. Goeden , Martin M. Liphardt
CPC classification number: G01N15/0826 , G01N15/088 , G01N21/211 , G01N2015/0846
Abstract: A system for and method of investigating changes in optical properties of a porous effective substrate surface related to, for instance, effective surface depth and refractive index, pore size, pore volume and pore size distribution at atmospheric pressure.
Abstract translation: 涉及多孔有效衬底表面的光学性能变化的系统和方法，其与例如有效表面深度和折射率，孔径，孔体积和在大气压下的孔径分布有关。
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Patent Agency Ranking
公开(公告)号：US08749785B2
公开(公告)日：2014-06-10
申请号：US13694658
申请日：2012-12-26
Applicant: J.A. Woollam Co, Inc.
Inventor： Martin M. Liphardt
CPC classification number: G01J4/00 , G01J3/0208 , G01J3/0229 , G02B3/00 , G02B5/005 , G02B27/46 , G02B27/58
Abstract: A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength, optionally as an element of an ellipsometer or polarimeter system.
Abstract translation: 聚焦元件和滤光元件的组合，其自然地调节作为波长的函数的通过聚焦元件的电磁辐射束的横截面积，可选地作为椭偏仪或偏振计系统的元件。
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公开(公告)号：US11821833B2
公开(公告)日：2023-11-21
申请号：US17803102
申请日：2022-02-05
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Stefan Schoeche , Craig M. Herzinger , Steven E. Green , Martin M. Liphardt , James D. Welch
IPC: G01N21/21
CPC classification number: G01N21/211 , G01N2201/021 , G01N2201/06113 , G01N2201/12
Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
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公开(公告)号：US20230194414A1
公开(公告)日：2023-06-22
申请号：US17803102
申请日：2022-02-05
Applicant: J.A WOOLLAM CO., INC.
Inventor： Stefan Schoeche , Craig M. Herzinger , Steven E. Green , Martin M. Liphardt , James D. Welch
IPC: G01N21/21
CPC classification number: G01N21/211 , G01N2201/12 , G01N2201/021 , G01N2201/06113
Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 um to 1000 µm), utilizing a tunable quantum cascade laser (QCL) source with the capability if reducing speckle and standing wave effects, dual-rotatable optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.
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公开(公告)号：US10422739B1
公开(公告)日：2019-09-24
申请号：US16350017
申请日：2018-09-12
Applicant: J.A. WOOLLAM CO., INC
Inventor： Jeremy A. Van Derslice , Martin M. Liphardt
Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
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20.发明授权公开(公告)号：US09921395B1
公开(公告)日：2018-03-20
申请号：US15530014
申请日：2016-11-18
Applicant: J.A. WOOLLAM CO., INC
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
CPC classification number: G02B17/0663 , G01J1/0411 , G01J1/0414 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G01N2201/0636 , G02B17/0621 , G02B19/0023 , G02B27/0012 , G02B27/0983
Abstract: A reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved. This invention is also a combination of a focusing element and a filtering element that provides an optimum electromagnetic beam cross-sectional area based on optimizing the beam cross-sectional area in view of conflicting effects of aberration and diffraction inherent in said focusing element, which, for each wavelength, vary oppositely to one another with electromagnetic beam cross-sectional area.
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