公开(公告)号：US11675208B1

公开(公告)日：2023-06-13

申请号：US17300091

申请日：2021-03-05

Applicant: J.A. WOOLLAM CO., INC

Inventor： Stefan Schoeche ,  Martin M. Liphardt ,  Ping He ,  Jeremy A Van Derslice ,  Craig M. Herzinger ,  Jeffrey S. Hale ,  Brian D. Guenther ,  Duane E. Meyer ,  John A Woollam ,  James D. Welch

IPC: G02B27/48 ,  G01B9/02 ,  G01B11/24

CPC classification number: G02B27/48 ,  G01B9/02084 ,  G01B11/24

Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.

公开(公告)号：US11035729B1

公开(公告)日：2021-06-15

申请号：US16602088

申请日：2019-08-05

Applicant: J.A. WOOLLAM CO., INC

Inventor： Jeremy A. Van Derslice ,  Martin M. Liphardt

IPC: G01J3/447 ,  G01B9/02 ,  G01N21/21 ,  G01J3/14

Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.

公开(公告)号：US10061068B1

公开(公告)日：2018-08-28

申请号：US15530779

申请日：2017-02-27

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Craig M. Herzinger ,  Ping He ,  Jeffrey S. Hale

IPC: G02B5/30 ,  G02B7/00 ,  G02B17/00

CPC classification number: G02B27/286 ,  G02B5/04 ,  G02B5/3083 ,  G02B17/006

Abstract: A substantially achromatic multiple element compensator system for use in a wide spectral range, (for example 190-1700 nm), rotating compensator spectroscopic ellipsometer or polarimeter or the like system, which does not require external surface coatings at locations whereat total internal reflections occur. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation. Berek-type retarders on both input and output sides of the multiple elements are oriented to minimize changes in the net retardance vs. wavelength via adjustment of Berek-type retarders. Berek-type retarders.

公开(公告)号：US09851294B1

公开(公告)日：2017-12-26

申请号：US14545816

申请日：2015-06-24

Applicant: J.A. WOOLLAM CO., INC. ,  BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA

Inventor： Tino Hofmann ,  Mathias M. Schubert ,  Stefan Schoeche ,  Sean Knight ,  Craig M. Herzinger ,  John A. Woollam ,  Greg K. Pribil ,  Thomas E. Tiwald

IPC: G01N21/3586 ,  G01N21/21 ,  G01N27/72 ,  G01J4/04

CPC classification number: G01N21/211 ,  G01J4/04 ,  G01N21/3586 ,  G01N27/72 ,  G01N2021/213

Abstract: System Stage, and Optical Hall Effect (OHE) system method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.

公开(公告)号：US20160356998A1

公开(公告)日：2016-12-08

申请号：US15330106

申请日：2016-08-08

Applicant: J.A. WOOLLAM CO., INC

Inventor： MARTIN M. LIPHARDT ,  JEFFREY S. HALE ,  PING HE ,  GALEN L. PFEIFFER

IPC: G02B17/06 ,  G01J4/04 ,  G02B27/00

CPC classification number: G02B17/0621 ,  G01J1/0411 ,  G01J1/0414 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21 ,  G02B19/0023 ,  G02B19/0076 ,  G02B27/0012 ,  G02B27/286

Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.

Abstract translation: 一种校准反射聚焦光学器件的方法，以提供使偏振状态反射光学系统中的多个光束反射的影响最小化的系统，其优选地需要存在具有光束反射表面的凸面和凹面镜，其应用实现 将电磁辐射束聚焦到样品上（其可以沿着与输入光束不同的轨迹），对输入光束偏振态的极化状态的影响最小化，基于调整的入射角和来自 各种镜子涉及。

公开(公告)号：US09442016B2

公开(公告)日：2016-09-13

申请号：US14121915

申请日：2014-11-04

Applicant: J.A. WOOLLAM CO., INC

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer

IPC: G01J4/00 ,  G01J4/04 ,  G02B19/00 ,  G01J1/04 ,  G01N21/21

CPC classification number: G02B17/0621 ,  G01J1/0411 ,  G01J1/0414 ,  G01J4/00 ,  G01J4/04 ,  G01N21/21 ,  G02B19/0023 ,  G02B19/0076 ,  G02B27/0012 ,  G02B27/286

Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.

公开(公告)号：US09360369B1

公开(公告)日：2016-06-07

申请号：US14545786

申请日：2015-06-20

Applicant: J.A. WOOLLAM CO., INC

Inventor： Galen L. Pfeiffer ,  Martin M. Liphardt

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01N21/211 ,  G01N21/8422

Abstract: A system for easily determining average ellipsometric parameters based on data obtained from two different locations on a planar or non-planar shaped object, along with its method of use.

Abstract translation: 一种用于根据从平面或非平面形状物体上的两个不同位置获得的数据以及其使用方法容易地确定平均椭偏参数的系统。

公开(公告)号：US20230184671A1

公开(公告)日：2023-06-15

申请号：US17803029

申请日：2022-01-18

Applicant: J.A. WOOLLAM CO., INC.

Inventor： STEFAN SCHOECHE ,  CRAIG M. HERZINGER ,  STEVEN E. GREEN ,  MARTIN M. LIPHARDT ,  JAMES D. WELCH

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N2201/06113 ,  G01N2201/12 ,  G01N2021/213 ,  G01N2201/021

Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.

公开(公告)号：US20220244169A1

公开(公告)日：2022-08-04

申请号：US17300660

申请日：2021-09-16

Applicant: J.A. WOOLLAM CO., INC.

Inventor： Ping He ,  Martin M. Liphardt ,  Jeremy A. Van Derslice ,  Craig M. Herzinger ,  Jeffrey S. Hale ,  Brian D. Guenther ,  Duane E. Meyer ,  Stefan Schoeche ,  James D. Welch

IPC: G01N21/21 ,  G02B27/42

Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.

公开(公告)号：US10989601B1

公开(公告)日：2021-04-27

申请号：US16873540

申请日：2020-05-01

Applicant: J.A. WOOLLAM CO., INC

Inventor： Martin M. Liphardt ,  Jeffrey S. Hale ,  Ping He ,  Galen L. Pfeiffer ,  Craig M. Herzinger

IPC: G01J4/00 ,  G01N21/21

Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.