公开(公告)号：US11581317B2

公开(公告)日：2023-02-14

申请号：US17362790

申请日：2021-06-29

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Srinivas Pulugurtha ,  Richard J. Hill ,  Yunfei Gao ,  Nicholas R. Tapias ,  Litao Yang ,  Haitao Liu

IPC: H01L27/108

Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US20210327883A1

公开(公告)日：2021-10-21

申请号：US17362790

申请日：2021-06-29

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Srinivas Pulugurtha ,  Richard J. Hill ,  Yunfei Gao ,  Nicholas R. Tapias ,  Litao Yang ,  Haitao Liu

IPC: H01L27/108

Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US20250142909A1

公开(公告)日：2025-05-01

申请号：US19008075

申请日：2025-01-02

Applicant: Micron Technology, Inc.

Inventor： Fatma Arzum Simsek-Ege ,  Masihhur R. Laskar ,  Nicholas R. Tapias ,  Darwin Franseda Fan ,  Manuj Nahar

IPC: H10D62/40 ,  H10B12/00 ,  H10B53/30 ,  H10D62/17

Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.

公开(公告)号：US12224310B2

公开(公告)日：2025-02-11

申请号：US18531525

申请日：2023-12-06

Applicant: Micron Technology, Inc.

Inventor： Fatma Arzum Simsek-Ege ,  Masihhur R. Laskar ,  Nicholas R. Tapias ,  Darwin Franseda Fan ,  Manuj Nahar

IPC: H01L29/10 ,  H01L29/04 ,  H10B12/00 ,  H10B53/30

Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.

公开(公告)号：US20240268091A1

公开(公告)日：2024-08-08

申请号：US18432870

申请日：2024-02-05

Applicant: Micron Technology, Inc.

Inventor： Kamal M. Karda ,  Pankaj Sharma ,  Manuj Nahar ,  Nicholas R. Tapias ,  Scott E. Sills

IPC: H10B12/00

CPC classification number: H10B12/00

Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a first conductive region; a second conductive region; a memory cell between the first and second conductive regions and including a first transistor including a first region coupled to the first and second conductive regions, and a charge storage structure separated from the first conduction region, and a second transistor including a second region coupled to the charge storage structure and the second conductive region; and a structure separated from the first region, the charge storage structure, and the second region by a dielectric structure, the structure forming part of a gate of the first transistor and the second transistor, and the structure including a first portion adjacent the dielectric structure, and a second portion adjacent the first portion, wherein the first portion includes a semiconductor material and the second portion includes a conductive material.

公开(公告)号：US11925014B2

公开(公告)日：2024-03-05

申请号：US17643316

申请日：2021-12-08

Applicant: Micron Technology, Inc.

Inventor： Song Guo ,  Sanh D. Tang ,  Shen Hu ,  Yan Li ,  Nicholas R. Tapias

IPC: G11C11/24 ,  G11C11/408 ,  H10B12/00

CPC classification number: H10B12/312 ,  G11C11/4087 ,  H10B12/03 ,  H10B12/482 ,  H10B12/488

Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.

公开(公告)号：US11862668B2

公开(公告)日：2024-01-02

申请号：US17366557

申请日：2021-07-02

Applicant: Micron Technology, Inc.

Inventor： Fatma Arzum Simsek-Ege ,  Masihhur R. Laskar ,  Nicholas R. Tapias ,  Darwin Franseda Fan ,  Manuj Nahar

IPC: H01L29/04 ,  H01L29/10 ,  H10B12/00 ,  H10B53/30

CPC classification number: H01L29/04 ,  H01L29/1033 ,  H10B12/00 ,  H10B53/30

Abstract: Methods, systems, and devices for single-crystal transistors for memory devices are described. In some examples, a cavity may be formed through at least a portion of one or more dielectric materials, which may be deposited above a deck of memory cells. The cavity may include a taper, such as a taper toward a point, or a taper having an included angle that is within a range, or a taper from a cross-sectional area to some fraction of the cross-sectional area, among other examples. A semiconductor material may be deposited in the cavity and above the one or more dielectric materials, and formed in a single crystalline arrangement based on heating and cooling the deposited semiconductor material. One or more portions of a transistor, such as a channel portion of a transistor, may be formed at least in part by doping the single crystalline arrangement of the semiconductor material.

公开(公告)号：US11201154B2

公开(公告)日：2021-12-14

申请号：US16729076

申请日：2019-12-27

Applicant: Micron Technology, Inc.

Inventor： Song Guo ,  Sanh D. Tang ,  Shen Hu ,  Yan Li ,  Nicholas R. Tapias

IPC: G11C11/24 ,  H01L27/108 ,  G11C11/408

Abstract: A method of forming an apparatus comprises forming pillar structures extending from a base material. Upper portions of the pillar structures may exhibit a lateral width that is relatively greater than a lateral width of lower portions of the pillar structures. The method also comprises forming access lines laterally adjacent to the lower portions of the pillar structures and forming digit lines above upper surfaces of the pillar structures. Memory devices and electronic systems are also described.

公开(公告)号：US11069687B2

公开(公告)日：2021-07-20

申请号：US16809924

申请日：2020-03-05

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Srinivas Pulugurtha ,  Richard J. Hill ,  Yunfei Gao ,  Nicholas R. Tapias ,  Litao Yang ,  Haitao Liu

IPC: H01L27/108

Abstract: Some embodiments include an integrated assembly having digit lines which extend along a first direction, and which are spaced from one another by intervening regions. Each of the intervening regions has a first width along a cross-section. Pillars extend upwardly from the digit lines; and the pillars include transistor channel regions extending vertically between upper and lower source/drain regions. Storage elements are coupled with the upper source/drain regions. Wordlines extend along a second direction which crosses the first direction. The wordlines include gate regions adjacent the channel regions. Shield lines are within the intervening regions and extend along the first direction. The shield lines may be coupled with at least one reference voltage node. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US10930499B2

公开(公告)日：2021-02-23

申请号：US16379085

申请日：2019-04-09

Applicant: Micron Technology, Inc.

Inventor： Nicholas R. Tapias ,  Sanjeev Sapra ,  Anish A. Khandekar ,  Shen Hu

IPC: H01L21/02 ,  H01L21/762 ,  H01L21/8238

Abstract: Methods, apparatuses, and systems related to semiconductor structure formation are described. An example method includes forming an opening through silicon (Si) material, formed over a semiconductor substrate, to a first depth to form pillars of Si material. The example method further includes depositing an isolation material within the opening to fill the opening between the Si pillars. The example method further includes removing a portion of the isolation material from between the pillars to a second depth to create a second opening between the pillars and defining inner sidewalls between the pillars. The example method further includes depositing an enhancer material over a top surface of the pillars and along the inner sidewalls of the pillars down to a top portion of the isolation material.