公开(公告)号：US20080203070A1

公开(公告)日：2008-08-28

申请号：US11677786

申请日：2007-02-22

Applicant: Milan Ilic ,  Vladislav V. Shilo ,  Robert Brian Huff

Inventor： Milan Ilic ,  Vladislav V. Shilo ,  Robert Brian Huff

IPC: B23K9/00

CPC classification number: H05H1/46 ,  H01J37/32174 ,  H01J37/32623

Abstract: A system and method for over-voltage protection is described. In one embodiment of the invention, an apparatus includes an output port configured to deliver power to a plasma chamber to ignite a plasma. The apparatus also includes a shunt switch in parallel with the output port and a processor configured to receive an indicator of an arc in the plasma. The processor is configured to close the shunt switch for a period of time to divert current away from the arc. The processor is also configured to trigger a pulse of the shunt switch to limit a voltage of an increasing voltage condition associated with the arc.

Abstract translation: 描述了一种用于过电压保护的系统和方法。 在本发明的一个实施例中，一种装置包括输出端口，该输出端口被配置为向等离子体室输送功率以点燃等离子体。 该装置还包括与输出端口并联的分流开关和被配置为接收等离子体中的电弧指示器的处理器。 处理器被配置为将分流开关关闭一段时间以将电流转移离开电弧。 处理器还被配置为触发分流开关的脉冲以限制与电弧相关联的增加的电压状态的电压。

公开(公告)号：US09263971B2

公开(公告)日：2016-02-16

申请号：US13715655

申请日：2012-12-14

Applicant: Milan Ilic ,  Mika Nuotio

Inventor： Milan Ilic ,  Mika Nuotio

IPC: H02M7/5387 ,  H02J3/38 ,  H02M7/48 ,  H02M1/00

CPC classification number: H02M7/5387 ,  H02J3/381 ,  H02J3/383 ,  H02J3/387 ,  H02M7/48 ,  H02M7/53873 ,  H02M2001/007 ,  H02M2001/0077 ,  Y02E10/563 ,  Y02E60/60

Abstract: Systems and methods are disclosed with multiple direct current (DC) voltage source inverters to supply power to an alternating current (AC) power system. The system includes a plurality of full bridge inverter stages, each having a primary node and a secondary node, each of said full bridge inverter stages having positive and negative node, each of said full bridge inverter stages having a voltage supporting device electrically connected in a parallel relationship between said positive node and said negative node and a direct current (DC) source connected between the positive and negative nodes; at least one stacked inverter phase, each stacked inverter phase having a plurality of said full bridge inverter stages, each of said full bridge inverter stages in each stacked inverter phase interconnected in a series relationship with said secondary node of one of said full bridge inverter stages connected to said primary node of another full bridge inverter, said series interconnection defining a first full bridge inverter stage and a last full bridge inverter stage, each phase having an input node at said primary node of said first full bridge inverter stage and an output node at said secondary node of said last full bridge inverter stage; a local controller coupled to each full bridge inverter stage providing the control signals to each full bridge inverter stage to output an approximate nearly sinusoidal voltage waveform; and a system controller which communicating with each local controller; the system controller generating system control signals for configuration, synchronization, activation, deactivation and operating mode selection of said local controller.

Abstract translation: 公开了具有多个直流（DC）电压源逆变器以向交流（AC）电力系统供电的系统和方法。 该系统包括多个全桥逆变器级，每个具有主节点和次节点，每个所述全桥逆变器级具有正节点和负节点，每个所述全桥逆变器级具有电连接在 所述正节点和所述负节点之间的并联关系和连接在所述正节点和所述负节点之间的直流（DC）源; 至少一个堆叠的逆变器相位，每个堆叠的逆变器相位具有多个所述全桥逆变器级，每个堆叠逆变器相中的每个所述全桥逆变器级与所述全桥逆变器级之一的所述次级节点串联连接 连接到另一全桥逆变器的所述主节点，所述串联互连定义第一全桥逆变器级和最后的全桥逆变器级，每相具有在所述第一全桥逆变器级的所述主节点处的输入节点和输出节点 在所述最后一个全桥逆变器级的所述次级节点处; 耦合到每个全桥逆变器级的本地控制器，向每个全桥逆变器级提供控制信号，以输出近似近似正弦的电压波形; 以及与每个本地控制器通信的系统控制器; 所述系统控制器产生用于所述本地控制器的配置，同步，激活，停用和操作模式选择的系统控制信号。

公开(公告)号：US08395078B2

公开(公告)日：2013-03-12

申请号：US12631735

申请日：2009-12-04

Applicant: Milan Ilic

Inventor： Milan Ilic

IPC: B23K9/06

CPC classification number: B23K10/006 ,  H01J37/32045 ,  H05H1/46

Abstract: A system and method for managing power delivered to a processing chamber is described. In one embodiment current is drawn away from the plasma processing chamber while initiating an application of power to the plasma processing chamber during an initial period of time, the amount of current being drawn away decreasing during the initial period of time so as to increase the amount of power applied to the plasma processing chamber during the initial period of time.

Abstract translation: 描述了用于管理传送到处理室的功率的系统和方法。 在一个实施例中，电流从等离子体处理室被拉出，同时在初始时间段期间开始向等离子体处理室施加电力，在初始时间段内电流的量被减少，从而增加量 在初始时间期间施加到等离子体处理室的功率。

公开(公告)号：US20070211507A1

公开(公告)日：2007-09-13

申请号：US11367905

申请日：2006-03-03

Applicant: Milan Ilic

Inventor： Milan Ilic

IPC: H02M7/5387

CPC classification number: H02M3/1584 ,  H02M7/493 ,  H02M2003/1586 ,  H03F3/217

Abstract: An interleaved soft switching bridge power converter comprises switching poles operated in an interleaved manner so as to substantially reduce turn-on switching losses and diode reverse-recovery losses in the switching pole elements. Switching poles are arranged into bridge circuits that are operated so as to provide a desired voltage, current and/or power waveform to a load. By reducing switching turn on and diode reverse recovery losses, soft switching power converters of the invention may operate efficiently at higher switching frequencies. Soft switching power converters of the invention are well suited to high power and high voltage applications such as plasma processing, active rectifiers, distributed generation, motor drive inverters and class D power amplifiers.

Abstract translation: 交错式软开关桥式电源转换器包括以交错方式操作的开关极，以便大大减少开关极元件中的导通开关损耗和二极管反向恢复损耗。 开关极被布置成桥式电路，其被操作以向负载提供期望的电压，电流和/或功率波形。 通过减少开关导通和二极管反向恢复损耗，本发明的软开关功率转换器可以在更高的开关频率下有效地工作。 本发明的软开关电源转换器非常适用于诸如等离子处理，有源整流器，分布式发电，电机驱动逆变器和D类功率放大器之类的高功率和高电压应用。

公开(公告)号：US10998833B2

公开(公告)日：2021-05-04

申请号：US16412625

申请日：2019-05-15

Applicant: Milan Ilic ,  Mika Nuotio

Inventor： Milan Ilic ,  Mika Nuotio

IPC: H02M7/5387 ,  H02J3/38 ,  H02M7/48 ,  H02M1/00

Abstract: Systems and methods are disclosed with multiple direct current (DC) voltage source inverters to supply power to an alternating current (AC) power system. The system includes a plurality of full bridge inverter stages, each having a primary node and a secondary node, each of said full bridge inverter stages having positive and negative node, each of said full bridge inverter stages having a voltage supporting device electrically connected in a parallel relationship between said positive node and said negative node and a direct current (DC) source connected between the positive and negative nodes; at least one stacked inverter phase, each stacked inverter phase having a plurality of said full bridge inverter stages, each of said full bridge inverter stages in each stacked inverter phase interconnected in a series relationship with said secondary node of one of said full bridge inverter stages connected to said primary node of another full bridge inverter, said series interconnection defining a first full bridge inverter stage and a last full bridge inverter stage, each phase having an input node at said primary node of said first full bridge inverter stage and an output node at said secondary node of said last full bridge inverter stage; a local controller coupled to each full bridge inverter stage providing the control signals to each full bridge inverter stage to output an approximate nearly sinusoidal voltage waveform; and a system controller which communicating with each local controller; the system controller generating system control signals for configuration, synchronization, activation, deactivation and operating mode selection of said local controller.

公开(公告)号：US08815329B2

公开(公告)日：2014-08-26

申请号：US12328831

申请日：2008-12-05

Applicant: Milan Ilic ,  Darren File

Inventor： Milan Ilic ,  Darren File

IPC: G05F1/10 ,  C23C16/52 ,  H01J37/32

CPC classification number: H01J37/3299 ,  H01J37/32064 ,  H01J37/32935 ,  H01J37/32944

Abstract: An apparatus and method for controlling an application of power to power a plasma chamber. A detector detects actual power out from the power stage to the plasma chamber during a sampling interval. A compare module compares the actual power out during the sampling interval to a present power setting during the sampling interval and generates a compensation value. An adjust module updates the present power setting for the power stage with the compensation value to provide a new power setting for the power stage to control the power out from power stage to the plasma chamber during the deposition process whereby power losses occurring during the deposition process are compensated during the deposition process. If there is a fixed time period for the deposition process, the compensation method and apparatus may be used to compensate the deposition process for energy losses without extending the duration of the deposition process.

Abstract translation: 一种用于控制对等离子体室供电的电力的应用的装置和方法。 在采样间隔期间，检测器检测从功率级到等离子体室的实际功率。 比较模块将采样间隔期间的实际功率输出与采样间隔期间的当前功率设置进行比较，并生成补偿值。 调整模块利用补偿值更新功率级的当前功率设置，以提供功率级的新功率设置，以在沉积过程中控制从功率级到等离子体室的功率，由此在沉积过程中发生功率损耗 在沉积过程中得到补偿。 如果沉积过程具有固定的时间段，则可以使用补偿方法和装置来补偿沉积过程中的能量损失，而不会延长沉积过程的持续时间。

公开(公告)号：US20140169053A1

公开(公告)日：2014-06-19

申请号：US13715655

申请日：2012-12-14

Applicant: Milan Ilic ,  Mika Nuotio

Inventor： Milan Ilic ,  Mika Nuotio

IPC: H02M7/5387

CPC classification number: H02M7/5387 ,  H02J3/381 ,  H02J3/383 ,  H02J3/387 ,  H02M7/48 ,  H02M7/53873 ,  H02M2001/007 ,  H02M2001/0077 ,  Y02E10/563 ,  Y02E60/60

Abstract: Systems and methods are disclosed with multiple direct current (DC) voltage source inverters to supply power to an alternating current (AC) power system. The system includes a plurality of full bridge inverter stages, each having a primary node and a secondary node, each of said full bridge inverter stages having positive and negative node, each of said full bridge inverter stages having a voltage supporting device electrically connected in a parallel relationship between said positive node and said negative node and a direct current (DC) source connected between the positive and negative nodes; at least one stacked inverter phase, each stacked inverter phase having a plurality of said full bridge inverter stages, each of said full bridge inverter stages in each stacked inverter phase interconnected in a series relationship with said secondary node of one of said full bridge inverter stages connected to said primary node of another full bridge inverter, said series interconnection defining a first full bridge inverter stage and a last full bridge inverter stage, each phase having an input node at said primary node of said first full bridge inverter stage and an output node at said secondary node of said last full bridge inverter stage; a local controller coupled to each full bridge inverter stage providing the control signals to each full bridge inverter stage to output an approximate nearly sinusoidal voltage waveform; and a system controller which communicating with each local controller; the system controller generating system control signals for configuration, synchronization, activation, deactivation and operating mode selection of said local controller.

Abstract translation: 公开了具有多个直流（DC）电压源逆变器以向交流（AC）电力系统供电的系统和方法。 该系统包括多个全桥逆变器级，每个具有主节点和次节点，每个所述全桥逆变器级具有正节点和负节点，每个所述全桥逆变器级具有电连接在 所述正节点和所述负节点之间的并联关系和连接在所述正节点和所述负节点之间的直流（DC）源; 至少一个堆叠的逆变器相位，每个堆叠的逆变器相位具有多个所述全桥逆变器级，每个堆叠逆变器相中的每个所述全桥逆变器级与所述全桥逆变器级之一的所述次级节点串联连接 连接到另一全桥逆变器的所述主节点，所述串联互连定义第一全桥逆变器级和最后的全桥逆变器级，每相具有在所述第一全桥逆变器级的所述主节点处的输入节点和输出节点 在所述最后一个全桥逆变器级的所述次级节点处; 耦合到每个全桥逆变器级的本地控制器，向每个全桥逆变器级提供控制信号，以输出近似近似正弦的电压波形; 以及与每个本地控制器通信的系统控制器; 所述系统控制器产生用于所述本地控制器的配置，同步，激活，停用和操作模式选择的系统控制信号。

公开(公告)号：US20140101462A1

公开(公告)日：2014-04-10

申请号：US13885525

申请日：2011-11-15

Applicant: Milan Ilic

Inventor： Jeff Rose ,  Milan Ilic

IPC: G06F1/26

CPC classification number: G06F1/263 ,  G06F1/305 ,  H02J1/10 ,  H02J3/382 ,  H02J3/383 ,  H02J3/386 ,  H02J7/345 ,  H02J9/061 ,  Y02B10/72 ,  Y02E10/563 ,  Y02E10/566 ,  Y02E10/763

Abstract: A power distribution system for data center systems (and corresponding method) feeds DC power directly to a first AC-DC power supply of a computer system in the data center system and feeds AC power to a second AC-DC power supply of the computer system to efficiently and reliably provide an uninterruptible supply of power to the computer system. The power distribution system includes an energy storage unit for supplying the DC power, a charger for charging the energy storage unit, and an inverter through which the energy storage unit provides energy to an electrical substation of an electrical grid. The charger is configured to receive energy from a renewable energy source and the electrical substation. The inverter may also be configured to receive renewable energy from the renewable energy source and supply that energy to the electrical substation. An uninterruptible power supply may be coupled between the electrical substation and the AC power feed. The power distribution system further includes a monitor for monitoring the flow of current to and/or from the electrical substation, a communications interface for receiving messages or requests from a utility company associated with the electrical substation, and a controller for controlling the components of the power distribution system based on requests from the utility company and the information gathered by the monitor.

Abstract translation: 用于数据中心系统的配电系统（及相应的方法）将DC电力直接馈送到数据中心系统中的计算机系统的第一AC-DC电源，并将AC电力馈送到计算机系统的第二AC-DC电源 以有效且可靠地向计算机系统提供不间断的电力供应。 配电系统包括用于提供DC电力的能量存储单元，用于对能量存储单元进行充电的充电器，以及能量存储单元通过该逆变器向电网的变电站提供能量。 充电器被配置为从可再生能源和变电站接收能量。 逆变器还可以被配置为从可再生能源接收可再生能源并将该能量提供给变电站。 不间断电源可以耦合在变电站和AC供电之间。 配电系统还包括监视器，用于监视到和/或来自变电站的电流流动，用于接收来自与变电站相关联的公用事业公司的消息或请求的通信接口，以及控制器， 配电系统根据公用事业公司的要求和监测仪收集的信息。

公开(公告)号：US08217299B2

公开(公告)日：2012-07-10

申请号：US11677786

申请日：2007-02-22

Applicant: Milan Ilic ,  Vladislav V. Shilo ,  Robert Brian Huff

Inventor： Milan Ilic ,  Vladislav V. Shilo ,  Robert Brian Huff

IPC: B23K9/02 ,  G01R31/08 ,  H01J7/24 ,  H01J17/26

CPC classification number: H05H1/46 ,  H01J37/32174 ,  H01J37/32623

Abstract: A system and method for over-voltage protection is described. In one embodiment of the invention, an apparatus includes an output port configured to deliver power to a plasma chamber to ignite a plasma. The apparatus also includes a shunt switch in parallel with the output port and a processor configured to receive an indicator of an arc in the plasma. The processor is configured to close the shunt switch for a period of time to divert current away from the arc. The processor is also configured to trigger a pulse of the shunt switch to limit a voltage of an increasing voltage condition associated with the arc.

Abstract translation: 描述了一种用于过电压保护的系统和方法。 在本发明的一个实施例中，一种装置包括输出端口，该输出端口被配置为向等离子体室输送功率以点燃等离子体。 该装置还包括与输出端口并联的分流开关和被配置为接收等离子体中的电弧指示器的处理器。 处理器被配置为将分流开关关闭一段时间以将电流转移离开电弧。 处理器还被配置为触发分流开关的脉冲以限制与电弧相关联的增加的电压状态的电压。

公开(公告)号：US20100141224A1

公开(公告)日：2010-06-10

申请号：US12426698

申请日：2009-04-20

Applicant: Milan Ilic ,  Vladislav V. Shilo

Inventor： Milan Ilic ,  Vladislav V. Shilo

IPC: G05F1/10

CPC classification number: H02M3/157 ,  H02M2001/0019

Abstract: Disclosed herein are an apparatus and method for charge-mode control. An embodiment of a charge mode controller may include an analog/digital converter configured to monitor the current through a duty cycle switch and convert the current to a switch current value; an accumulator module configured to integrate the switch current value during the switching cycle and output an accumulated charge value; and a comparator module responsive to the accumulated charge value and a charge set point configured to generate a gate drive signal for the duty cycle switch that turns the duty cycle switch ON when the accumulated charge value is less than the charge set point and turns the duty cycle switch OFF when the accumulated charge value reaches the charge set point and thereby controls the duty cycle of the converter and the power supplied by the power stage.

Abstract translation: 这里公开了一种用于充电模式控制的装置和方法。 充电模式控制器的实施例可以包括模拟/数字转换器，其被配置为监视通过占空比开关的电流并将电流转换为开关电流值; 累加器模块，被配置为在开关周期期间积分开关电流值，并输出累积电荷值; 以及响应于所述累积电荷值的比较器模块和被配置为产生所述占空比开关的栅极驱动信号的充电设定点，所述占空比开关在所述累积电荷值小于所述充电设定点时将所述占空比开关导通，并且使所述占空比 当累积的电荷值达到充电设定点时，循环开关OFF，从而控制转换器的占空比和由功率级提供的电力。