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公开(公告)号：US20250130172A1
公开(公告)日：2025-04-24
申请号：US18936790
申请日：2024-11-04
Applicant: NOVA LTD.
Inventor： Elad Schleifer , Yonatan Oren , Amir Shayari , Eyal Hollander , Valery Deich , Shimon YALOV , Gilad Barak
Abstract: An optical measurement system, which include an illumination path that is configured to illuminate an illuminated area of a sample; a collection path configured to collect illumination emitted from the illuminated area as a result of the illumination of the illuminated area; a spatial filter that is tunable; a Raman detector; and wherein the spatial filter is positioned upstream to the Raman detector, and is configured to spatially filter the illumination emitted from the illuminated area to provide spatially filtered illumination. The Raman detector is configured to receive the spatially filtered illumination and to generate one or more Raman spectra.
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公开(公告)号：US11860104B2
公开(公告)日：2024-01-02
申请号：US17816713
申请日：2022-08-01
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad Barak , Elad Schleifer , Yonatan Oren , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/0636 , G01N2201/06113
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.
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Patent Agency Ranking
公开(公告)号：US11275027B2
公开(公告)日：2022-03-15
申请号：US16792937
申请日：2020-02-18
Applicant: NOVA LTD
Inventor： Gilad Barak , Yanir Hainick , Yonatan Oren , Vladimir Machavariani
Abstract: A method for use in measuring one or more characteristics of patterned structures, the method including providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the one or more characteristics to be measured, processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme, and analyzing the distribution of Raman-contribution efficiency and determining the one or more characteristics of the structure.
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公开(公告)号：US12152993B2
公开(公告)日：2024-11-26
申请号：US18245161
申请日：2021-09-14
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad Barak , Elad Schleifer , Yonatan Oren , Amir Shayari
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.
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公开(公告)号：US11906434B2
公开(公告)日：2024-02-20
申请号：US17714035
申请日：2022-04-05
Applicant: NOVA LTD
Inventor： Yonatan Oren
CPC classification number: G01N21/65 , G01N21/9501 , G03F7/70616 , G01N2201/0231 , G01N2201/06113
Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.
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公开(公告)号：US11543294B2
公开(公告)日：2023-01-03
申请号：US17263147
申请日：2019-07-25
Applicant: NOVA LTD.
Inventor： Gilad Barak , Yonatan Oren
Abstract: A polarized Raman Spectrometric system for defining parameters of a polycrystaline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spots at multiple locations on a sample or from an elongated line-shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.
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公开(公告)号：US11293871B2
公开(公告)日：2022-04-05
申请号：US16613448
申请日：2018-05-15
Applicant: NOVA LTD
Inventor： Yonatan Oren
Abstract: A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.
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