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公开(公告)号：US20240085333A1
公开(公告)日：2024-03-14
申请号：US18452494
申请日：2023-08-18
Applicant: NOVA LTD.
Inventor： Elad Schleifer , Yonatan Oren , Amir Shayari , Eyal Hollander , Valery Deich , Shimon YALOV , Gilad BARAK
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/06113 , G01N2201/0636
Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.
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公开(公告)号：US12163892B2
公开(公告)日：2024-12-10
申请号：US18452494
申请日：2023-08-18
Applicant: NOVA LTD.
Inventor： Elad Schleifer , Yonatan Oren , Amir Shayari , Eyal Hollander , Valery Deich , Shimon Yalov , Gilad Barak
Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.
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公开(公告)号：US20240210322A1
公开(公告)日：2024-06-27
申请号：US18402708
申请日：2024-01-02
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad BARAK , Elad Schleifer , Yonatan OREN , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/06113 , G01N2201/0636
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up
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公开(公告)号：US20240019375A1
公开(公告)日：2024-01-18
申请号：US18245161
申请日：2021-09-14
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad BARAK , Elad Schleifer , Yonatan OREN , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/0636 , G01N2201/06113
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.
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公开(公告)号：US20250130172A1
公开(公告)日：2025-04-24
申请号：US18936790
申请日：2024-11-04
Applicant: NOVA LTD.
Inventor： Elad Schleifer , Yonatan Oren , Amir Shayari , Eyal Hollander , Valery Deich , Shimon YALOV , Gilad Barak
Abstract: An optical measurement system, which include an illumination path that is configured to illuminate an illuminated area of a sample; a collection path configured to collect illumination emitted from the illuminated area as a result of the illumination of the illuminated area; a spatial filter that is tunable; a Raman detector; and wherein the spatial filter is positioned upstream to the Raman detector, and is configured to spatially filter the illumination emitted from the illuminated area to provide spatially filtered illumination. The Raman detector is configured to receive the spatially filtered illumination and to generate one or more Raman spectra.
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Patent Agency Ranking
公开(公告)号：US11860104B2
公开(公告)日：2024-01-02
申请号：US17816713
申请日：2022-08-01
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad Barak , Elad Schleifer , Yonatan Oren , Amir Shayari
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/0636 , G01N2201/06113
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up.
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公开(公告)号：US11740183B2
公开(公告)日：2023-08-29
申请号：US17759031
申请日：2020-11-24
Applicant: NOVA LTD.
Inventor： Elad Schleifer , Yonatan Oren , Amir Shayari , Eyal Hollander , Valery Deich , Shimon Yalov , Gilad Barak
CPC classification number: G01N21/65 , G01J3/0205 , G01J3/027 , G01J3/4412 , G01N2201/0636 , G01N2201/06113
Abstract: A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.
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公开(公告)号：US11415519B2
公开(公告)日：2022-08-16
申请号：US17020587
申请日：2020-09-14
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad Barak , Elad Schleifer , Yonatan Oren , Amir Shayari
Abstract: A method, a system, and a non-transitory computer readable medium for Raman spectroscopy. The method may include determining first acquisition parameters of a Raman spectroscope to provide a first acquisition set-up, the determining is based on at least one expected radiation pattern to be detected by a sensor of the Raman spectroscope as a result of an illumination of a first area of a sample, the first area comprises a first nano-scale structure, wherein at least a part of the at least one expected radiation pattern is indicative of at least one property of interest of the first nano-scale structure of the sample; wherein the first acquisition parameters belong to a group of acquisition parameters; setting the Raman spectroscope according to the first acquisition set-up; and acquiring at least one first Raman spectrum of the first nano-scale structure of the sample, while being set according to the first acquisition set-up
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公开(公告)号：US20250116605A1
公开(公告)日：2025-04-10
申请号：US18920791
申请日：2024-10-18
Applicant: NOVA LTD.
Inventor： Eyal Hollander , Gilad Barak , Elad Schleifer , Yonatan OREN , Amir Shayari
Abstract: An optical measurement system, the optical measurement system comprises optics, wherein the optics include a collection path and an illumination path and an objective lens. The optics is configured to acquire Raman spectrums of one or more structural elements located at a measurement site of the sample while being set-up to apply one or more optics parameters that comprise an illumination angle out of a set of multiple illumination angles that correspond to a numerical aperture of the objective lens. Each of the one or more structural elements has a dimension that ranges between one tenth of nanometer to one hundred microns; an optical spectrometer; a Raman detector that is downstream to the optical spectrometer; and a control unit that is configured to determine an expected radiation pattern to be detected by the Raman detector when the optics are set-up to apply the one or more optics parameters.
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公开(公告)号：US20250067683A1
公开(公告)日：2025-02-27
申请号：US18845415
申请日：2023-03-09
Applicant: NOVA LTD.
Inventor： Amir Shayari , Gilad Barak
IPC: G01N21/956 , G01N21/17 , G01N21/45 , G01N21/95
Abstract: A control system and method are presented for use in optical measurements on patterned samples. The control system comprises a computer system configured for data communication with a measured data provider and comprising a data processor configured and operable to receive and process raw measured data of first and second types concurrently collected from the patterned sample being measured. said first and second types of the measured data comprising, respectively. scatterometry measured data. characterized by first relatively high signal-to-noise and predetermined first relatively low spatial resolution, and interferometric measured data characterized by second relatively low signal-to-noise and predetermined second relatively high spatial resolution, said data processor being configured to process the measured data to determine pattern parameters along said patterned sample characterized by said first signal to-noise and said second spatial resolution.
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