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公开(公告)号:US20210366917A1
公开(公告)日:2021-11-25
申请号:US16900511
申请日:2020-06-12
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Zhongwang SUN , Rui SU , Zhong ZHANG , Wenxi ZHOU , Zhiliang XIA
IPC: H01L27/1157 , H01L27/11524 , H01L27/11556 , H01L27/11582
Abstract: Memory device includes a bottom-select-gate (BSG) structure including cut slits vertically through the BSG structure, on a substrate. A cell-layers structure is formed on the BSG structure. Gate-line slits are formed vertically through the cell-layers structure and the BSG structure, into the substrate and arranged along a first lateral direction to distinguish finger regions. A first gate-line slit is between first and second finger regions and includes gate-line sub-slits. The first finger region is divided into a first string region and a second string region by a first cut-slit, formed in the first finger region along a second lateral direction and further extended into at least the second finger region along the first lateral direction. At least one BSG defined by the first cut-slit is located in at least the second finger region to connect to cell strings in the first string region through an inter-portion between adjacent gate-line sub-slits.
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公开(公告)号:US20210287991A1
公开(公告)日:2021-09-16
申请号:US16875180
申请日:2020-05-15
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Zhongwang SUN , Zhong ZHANG , Wenxi ZHOU , Lei LIU , Zhiliang XIA
IPC: H01L23/535 , H01L27/11524 , H01L27/11556 , H01L27/1157 , H01L27/11582 , H01L21/321 , H01L21/768
Abstract: Embodiments of 3D memory structures and methods for forming the same are disclosed. The fabrication method includes disposing an alternating dielectric stack on a substrate, wherein the alternating dielectric stack having first and second dielectric layers alternatingly stacked on top of each other. Next, a plurality of contact openings can be formed in the alternating dielectric stack such that a dielectric layer pair can be exposed inside at least one of the plurality of contact openings. The method further includes forming a film stack of alternating conductive and dielectric layers by replacing the second dielectric layer with a conductive layer, and forming a contact structure to contact the conductive layer in the film stack of alternating conductive and dielectric layers.
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公开(公告)号:US20210265377A1
公开(公告)日:2021-08-26
申请号:US17318730
申请日:2021-05-12
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Jun CHEN , Zhiliang XIA , Li Hong XIAO
IPC: H01L27/11573 , H01L27/1157 , H01L27/11582
Abstract: Embodiments of 3D memory devices are disclosed. A disclosed 3D memory device can comprises an array interconnect layer disposed over an alternating conductor/dielectric stack and including a first array interconnect structure. Tbe 3D memory device can further comprises a peripheral interconnect layer disposed over a first peripheral device and including a first peripheral interconnect structure. A pad can be embedded in the peripheral interconnect layer and electrically connected with the first peripheral device through the first peripheral interconnect structure. The array interconnect layer is bonded with the peripheral interconnect layer, such that the first array interconnect structure is in electrical contact with the first peripheral interconnect structure.
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公开(公告)号:US20210265268A1
公开(公告)日:2021-08-26
申请号:US17113519
申请日:2020-12-07
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Rui SU , Zhongwang SUN , Wenxi ZHOU , Zhiliang XIA
IPC: H01L23/528 , H01L27/11519 , H01L27/11556 , H01L27/11565 , H01L27/11582 , H01L23/522 , H01L21/768
Abstract: A semiconductor device is provided. The semiconductor device includes a substrate, a stack of word line layers and insulating layers that are stacked alternatingly over the substrate, and channel structures formed in a first array region and a second array region of the stack. The first array region and the second array region are positioned at opposing sides of the stack. A first staircase is formed in a connection region of the stack over the substrate. The connection region is arranged between the first and second array regions and the first staircase has non-quadrilateral treads. A second staircase is formed in the connection region of the stack over the substrate and the second staircase has non-quadrilateral treads. The connection region in the stack includes a separation region between the first and second staircases.
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公开(公告)号:US20200273875A1
公开(公告)日:2020-08-27
申请号:US16458401
申请日:2019-07-01
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Zhong ZHANG , Wenyu HUA , Zhiliang XIA
IPC: H01L27/11582 , H01L21/033
Abstract: The present disclosure provides a three-dimensional (3D) memory device and a method for forming the same. The 3D memory device can comprise a channel structure region including a plurality of channel structures; a first staircase structure in a first staircase region including a plurality of division block structures arranged along a first direction on a first side of the channel structure, and a second staircase structure in a second staircase region including a plurality of division block structures arranged along the first direction on a second side of the channel structure. A first vertical offset defines a boundary between adjacent division block structures. Each division block structure includes a plurality of staircases arranged along a second direction that is different from the first direction. Each staircase includes a plurality of steps arranged along the first direction.
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公开(公告)号:US20200082886A1
公开(公告)日:2020-03-12
申请号:US16168157
申请日:2018-10-23
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Zongliang HUO , Li Hong XIAO , Zhiliang XIA
IPC: G11C16/08 , G11C16/04 , H01L27/11556 , H01L27/11573 , H01L27/11582 , H01L29/66 , H01L29/423 , H01L29/786 , H01L29/792
Abstract: Embodiments of three-dimensional memory device architectures and fabrication methods therefor are disclosed. In an example, the memory device includes a substrate and one or more peripheral devices on the substrate. The memory device also includes one or more interconnect layers and a semiconductor layer disposed over the one or more interconnect layers. A layer stack having alternating conductor and insulator layers is disposed above the semiconductor layer. A plurality of structures extend vertically through the layer stack. A first set of conductive lines are electrically coupled with a first set of the plurality of structures and a second set of conductive lines are electrically coupled with a second set of the plurality of structures different from the first set. The first and second sets of conductive lines are vertically distanced from opposite ends of the plurality of structures.
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公开(公告)号:US20190067324A1
公开(公告)日:2019-02-28
申请号:US16047178
申请日:2018-07-27
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Kun ZHANG , Fandong LIU , Zhiliang XIA
IPC: H01L27/11582 , H01L27/11556 , H01L27/11521 , H01L27/11568 , H01L21/77
CPC classification number: H01L27/11582 , H01L21/77 , H01L27/11521 , H01L27/11524 , H01L27/11529 , H01L27/11556 , H01L27/11568 , H01L27/1157
Abstract: Embodiments of a method for forming a three-dimensional (3D) memory devices are disclosed. The method can comprise forming a device wafer including: forming a first channel hole penetrating a first alternating layer stack of a device wafer, forming an epitaxial layer on a bottom of the first channel hole, and forming a first channel layer on a sidewall of the first channel hole. The method can further comprise forming at least one connecting wafer, each connecting wafer including a second channel hole penetrating a second alternating layer stack without an epitaxial layer on a bottom of the second channel hole; and bonding the at least one connecting wafer and the device wafer, such that a second channel layer on a sidewall of the second channel hole in each connecting wafer is electrically connected with the first channel layer in the device wafer.
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公开(公告)号:US20250111880A1
公开(公告)日:2025-04-03
申请号:US18977750
申请日:2024-12-11
Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Inventor: Tao YANG , Dongxue ZHAO , Lei LIU , Kun ZHANG , Wenxi ZHOU , Zhiliang XIA , Zongliang HUO
Abstract: A method for data erasing of a non-volatile memory device is disclosed. The memory includes multiple memory cell strings each including a select gate transistor and multiple memory cells that are connected in series. The method comprises applying a step erase voltage to one memory cell string for an erase operation, the step erase voltage having a step-rising shaped voltage waveform. The method further comprises, during a period when the step erase voltage rises from an intermediate level to a peak level, raising a voltage of the select gate transistor from a starting level to a peak level, and raising a voltage of a predetermined region from a starting level to a peak level, such that a gate-induced drain leakage current is generated in the one memory cell string. The predetermined region is adjacent to the at least one select gate transistor and includes at least one memory cell.
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公开(公告)号:US20240215237A1
公开(公告)日:2024-06-27
申请号:US18090049
申请日:2022-12-28
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Yi YANG , Tingting GAO , Xiaoxin LIU , Wei YUAN , Xiaolong DU , Changzhi SUN , Zhihao SONG , Shan LI , Zhiliang XIA , Zongliang HUO
Abstract: A method for fabricating a 3D memory device includes forming a sacrificial layer over a substrate, forming a first dielectric stack over the sacrificial layer, forming a channel hole structure, forming an opening that exposes the sacrificial layer, removing the sacrificial layer to create a cavity and expose a part of the channel hole structure, forming a semiconductor layer to fill the cavity, filling the opening with a filling structure, and forming a second dielectric stack over the filling structure. The opening is made for a gate line slit (GLS) structure.
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公开(公告)号:US20240170393A1
公开(公告)日:2024-05-23
申请号:US17990404
申请日:2022-11-18
Applicant: Yangtze Memory Technologies Co., Ltd.
Inventor: Linchun WU , Wenxi ZHOU , Cuicui KONG , Zhiliang XIA , Zongliang HUO
IPC: H01L23/522 , G11C16/04 , H01L23/00 , H01L23/528
CPC classification number: H01L23/5226 , G11C16/0483 , H01L23/5283 , H01L24/08 , H01L24/80 , H01L27/11565 , H01L27/11573 , H01L27/11582 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/1438
Abstract: A 3D memory device includes a conductor/insulator stack, a channel hole structure extending through the conductor/insulator stack, and a staircase contact (SCT). The conductor/insulator stack includes a first conductive layer and a first dielectric layer alternatingly stacked. The SCT includes a conductive structure, extends through the first dielectric layer, contacts a second dielectric layer, and is electrically connected to the first conductive layer. The second dielectric layer is parallel to the first conductive layer.
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