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公开(公告)号：US07366388B2
公开(公告)日：2008-04-29
申请号：US11061892
申请日：2005-02-22
Applicant: John Roberts , Hendrik Sabert , Brian Joseph Mangan , Lance Farr
Inventor： John Roberts , Hendrik Sabert , Brian Joseph Mangan , Lance Farr
CPC classification number: G02B6/02328 , C03B37/0122 , C03B37/01231 , C03B37/01274 , C03B37/01288 , C03B37/01446 , C03B37/016 , C03B37/02781 , C03B2201/32 , C03B2201/54 , C03B2203/14 , C03B2203/16 , C03B2203/42 , G02B6/02338 , G02B6/02347 , Y02P40/57
Abstract: An optical fiber having a cladding region surrounding a core region having an elongate core hole, the inner or outer surface of the core hole having a surface roughness with a spatial period equal to or less than 5 μm by a spectral power below 0.0017 nm2 μm−1. A method of making an optical fiber including a cladding region having an arrangement of elongate cladding holes in a matrix material, surrounding an elongate core region having an elongate core hole, the method including the step of increasing the surface tension of the matrix material prior to or during the step of heating and drawing the fiber.
Abstract translation: 一种具有围绕具有细长芯孔的芯区域的包层区域的光纤，芯孔的内表面或外表面具有等于或小于5μm的空间周期的表面粗糙度，光谱功率低于0.0017nm 2 mum -1 。 一种制造光纤的方法，所述光纤包括具有在基体材料中具有细长包层孔布置的包层区域，所述包层区域围绕具有细长芯孔的细长芯区域，所述方法包括以下步骤：在所述基体材料之前增加所述基体材料的表面张力 或在加热和拉伸纤维的步骤期间。
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12.发明申请Holder Made From Quartz Glass for the Processing of Semiconductor Wafers and Method for Production of the Holder 有权由石英玻璃制成的用于半导体晶片加工的支架及其制造方法公开(公告)号：US20080066497A1
公开(公告)日：2008-03-20
申请号：US11630405
申请日：2006-03-30
Applicant: Juergen Weber , Tobias Pogge , Martin Trommer , Bodo Kuehn , Ulrich Kirst , Waltraud Werdecker
Inventor： Juergen Weber , Tobias Pogge , Martin Trommer , Bodo Kuehn , Ulrich Kirst , Waltraud Werdecker
CPC classification number: C03C3/06 , C03B19/06 , C03B19/09 , C03B32/00 , C03B2201/07 , C03B2201/075 , C03B2201/24 , C03B2201/32 , C03C15/00 , C03C19/00 , C03C23/0025 , C03C23/006 , C03C2201/11 , C03C2201/12 , C03C2201/23 , C03C2201/24 , C03C2201/32 , C03C2201/50 , C03C2203/54 , C30B25/12 , C30B31/14 , C30B35/00 , Y02P40/57
Abstract: An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.
Abstract translation: 用于具有蚀刻效果的环境中的晶片夹具的理想石英玻璃的特征在于高纯度和高耐干蚀刻性。 为了表明基本满足这些要求的石英玻璃，根据本发明提出，石英玻璃至少在近表面积中掺杂氮，其平均含量小于30重量ppm， 其假想温度低于1250℃，在1200℃的温度下其粘度至少为10-13Pa。制备这种石英玻璃的经济方法包括以下方法步骤 ：将SiO 2原料熔化，得到石英玻璃坯料，将SiO 2原料或石英玻璃坯料进行脱水处理，加热SiO 2 原料或石英玻璃坯料，在含氨气氛中在1050℃至1850℃的范围内的氮化温度，使用石英玻璃的石英玻璃 将玻璃坯料设定为1250℃以下的假想温度，进行表面处理 石英玻璃夹具形成石英玻璃夹具。
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公开(公告)号：US20080050075A1
公开(公告)日：2008-02-28
申请号：US11511174
申请日：2006-08-28
Applicant: James William Fleming , George Edward Oulundsen
Inventor： James William Fleming , George Edward Oulundsen
IPC: G02B6/02
CPC classification number: G02B6/03627 , C03B2201/12 , C03B2201/28 , C03B2201/31 , C03B2201/32 , C03B2203/26 , C03C13/046 , G02B6/0288
Abstract: A silicate optical fiber comprises a graded index silicate core co-doped with aluminum oxide, phosphorus oxide, germanium oxide and fluorine in unique compositions that we have discovered allow multimode, multi-wavelength operation without significant intermodal dispersion. Illustratively, the core comprises a multiplicity of compositions whose refractive indices are graded from a maximum at or near the center of the core to a minimum at the interface with the cladding. Each core composition resides within a sub-volume of a 5 dimensional phase space in which an optimum core profile shape is essentially constant over the wavelength range of operation of the fiber. For operation in the wavelength range of about 0.78 μm to 1.55 μm, each composition preferably comprises no more than approximately 6 mole % Al2O3, 9 mole % P2O5, 6 mole % GeO2, 6 mole % F, and 90-100 mole % SiO2.
Abstract translation: 硅酸盐光纤包括与氧化铝，氧化磷，氧化锗和氟共掺杂的分级指数硅酸盐芯，其独特的组成，我们发现允许多模多波长操作，而没有显着的联合分散。 说明性地，芯包括多个组合物，其折射率从芯的中心处或附近的最大值到与包层的界面处最小。 每个核心组合物位于5维相位空间的子体积中，其中最佳核心轮廓形状在光纤的操作的波长范围上基本上是恒定的。 为了在约0.78μm至1.55μm的波长范围内操作，每个组合物优选包含不超过约6摩尔％的Al 2 O 3 N 3，9摩尔％P
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公开(公告)号：US07190875B2
公开(公告)日：2007-03-13
申请号：US11152393
申请日：2005-06-14
Applicant: Emilia Anderson , Wesley A. King , Yoel Fink , Lori Pressman
Inventor： Emilia Anderson , Wesley A. King , Yoel Fink , Lori Pressman
CPC classification number: G02B6/021 , B29D11/00721 , C03B37/027 , C03B37/02718 , C03B37/029 , C03B37/0756 , C03B2201/10 , C03B2201/28 , C03B2201/30 , C03B2201/32 , C03B2201/34 , C03B2201/50 , C03B2201/54 , C03B2201/60 , C03B2201/82 , C03B2201/86 , C03B2203/14 , C03B2203/16 , C03B2203/18 , C03B2203/223 , C03B2203/225 , C03B2203/42 , C03B2205/08 , C03B2205/09 , C03B2205/10 , C03B2205/40 , C03B2205/72 , C03C3/064 , C03C3/07 , C03C3/072 , C03C3/102 , C03C3/122 , C03C3/142 , C03C3/16 , C03C3/321 , C03C3/326 , C03C13/008 , C03C13/041 , C03C13/042 , C03C13/043 , C03C13/044 , C03C13/046 , C03C13/048 , C03C25/105 , C03C25/1061 , G02B6/02 , G02B6/02052 , G02B6/02066 , G02B6/02123 , G02B6/02261 , G02B6/023 , G02B6/02304 , G02B6/03694 , G02B6/126 , G02B6/29319 , G02B6/29356 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4206 , G02B2006/12116 , G02B2006/12195 , G02F1/0115 , G02F1/365 , H01S3/06729
Abstract: In general, in one aspect, the disclosure features a fiber waveguide having a waveguide axis, including a core extending along the waveguide axis and a confinement region extending along the waveguide axis surrounding the core. The confinement region includes a periodic structure along a radial direction extending from the waveguide axis and each period in the periodic structure includes a layer of a chalcogenide glass and a layer of a polymer.
Abstract translation: 通常，在一个方面，本发明的特征在于具有波导轴线的光纤波导，其包括沿着波导轴延伸的芯和沿着围绕芯的波导轴延伸的约束区域。 限制区域包括沿着从波导轴线延伸的径向方向的周期性结构，并且周期性结构中的每个周期包括硫族化物玻璃层和聚合物层。
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公开(公告)号：US07058269B2
公开(公告)日：2006-06-06
申请号：US10041529
申请日：2001-10-24
Applicant: Serge Caron
Inventor： Serge Caron
CPC classification number: C03B37/01262 , C03B37/01205 , C03B37/01211 , C03B2201/10 , C03B2201/32 , C03B2201/34 , C03B2201/36 , C03B2201/40 , C03B2201/50 , C03B2201/54
Abstract: The present invention concerns a preform for an optical fiber, an optical fiber so obtained and methods for making the same. The fiber is characterized in that porous glass doped with at least one dopant is used. Resulting fibers can be used to make high attenuation fibers.
Abstract translation: 本发明涉及一种用于光纤的预成型件，如此获得的光纤及其制造方法。 纤维的特征在于使用掺杂有至少一种掺杂剂的多孔玻璃。 所得纤维可用于制造高衰减纤维。
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Patent Agency Ranking
公开(公告)号：US20050135759A1
公开(公告)日：2005-06-23
申请号：US10744543
申请日：2003-12-22
Applicant: Xingwu Wang , Samuel DiVita , Howard Greenwald
Inventor： Xingwu Wang , Samuel DiVita , Howard Greenwald
IPC: C03B37/012 , C03B37/014 , C03C13/04 , C03C14/00 , G02B6/02 , G02F1/01 , G02F1/025 , G02F1/095 , G02F1/125
CPC classification number: G02B6/02328 , B82Y15/00 , B82Y20/00 , B82Y25/00 , C03B37/01282 , C03B37/01413 , C03B2201/32 , C03B2201/42 , C03B2201/58 , C03B2203/42 , C03C13/04 , C03C14/006 , G02B6/0229 , G02B6/02338 , G02B6/02357 , G02B6/02361 , G02F1/0115 , G02F1/025 , G02F1/095 , G02F1/125 , G02F2202/36
Abstract: A fiber assembly comprised of nanoparticles, wherein said nanoparticles are a mixture of nanomagnetic particles and nanooptical particles.
Abstract translation: 由纳米颗粒组成的纤维组合物，其中所述纳米颗粒是纳米磁性颗粒和纳米光学颗粒的混合物。
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公开(公告)号：US06788864B2
公开(公告)日：2004-09-07
申请号：US10121961
申请日：2002-04-12
Applicant: Rokan U. Ahmad , Marin Soljacic , Mihai Ibanescu , Torkel Engeness , Maksim Skorobogatly , Steven G. Johnson , Ori Weisberg , Yoel Fink , Lori Pressman , Wesley A. King , Emilia Anderson , John D. Joannopoulos
Inventor： Rokan U. Ahmad , Marin Soljacic , Mihai Ibanescu , Torkel Engeness , Maksim Skorobogatly , Steven G. Johnson , Ori Weisberg , Yoel Fink , Lori Pressman , Wesley A. King , Emilia Anderson , John D. Joannopoulos
IPC: G02B602
CPC classification number: G02B6/021 , B29D11/00721 , C03B37/027 , C03B37/02718 , C03B37/029 , C03B37/0756 , C03B2201/10 , C03B2201/28 , C03B2201/30 , C03B2201/32 , C03B2201/34 , C03B2201/50 , C03B2201/54 , C03B2201/60 , C03B2201/82 , C03B2201/86 , C03B2203/14 , C03B2203/16 , C03B2203/18 , C03B2203/223 , C03B2203/225 , C03B2203/42 , C03B2205/08 , C03B2205/09 , C03B2205/10 , C03B2205/40 , C03B2205/72 , C03C3/064 , C03C3/07 , C03C3/072 , C03C3/102 , C03C3/122 , C03C3/142 , C03C3/16 , C03C3/321 , C03C3/326 , C03C13/008 , C03C13/041 , C03C13/042 , C03C13/043 , C03C13/044 , C03C13/046 , C03C13/048 , C03C25/105 , C03C25/1061 , G02B6/02 , G02B6/02052 , G02B6/02066 , G02B6/02123 , G02B6/02261 , G02B6/023 , G02B6/02304 , G02B6/03694 , G02B6/126 , G02B6/29319 , G02B6/29356 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4206 , G02B2006/12116 , G02B2006/12195 , G02F1/0115 , G02F1/365 , H01S3/06729
Abstract: High index-contrast fiber waveguides, materials for forming high index-contrast fiber waveguides, and applications of high index-contrast fiber waveguides are disclosed.
Abstract translation: 公开了高折射率对比度光纤波导，用于形成高折射率 - 对比度光纤波导的材料，以及高折射率 - 对比度光纤波导的应用。
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18.发明授权Optical fiber and planar waveguide for achieving a substantially uniform optical attenuation 有权用于实现基本均匀的光衰减的光纤和平面波导公开(公告)号：US06757473B2
公开(公告)日：2004-06-29
申请号：US10060270
申请日：2002-01-30
Applicant: Won-Taek Han , Jin-Haing Kim
Inventor： Won-Taek Han , Jin-Haing Kim
IPC: G02B600
CPC classification number: G02B6/266 , C03B19/1438 , C03B37/01838 , C03B2201/10 , C03B2201/28 , C03B2201/31 , C03B2201/32 , C03B2201/40 , G02B6/122
Abstract: The present invention relates to an optical fiber and a planar waveguide for achieving a uniform optical attenuation, which comprises a core co-doped with a first metal ions having an optical absorption coefficient of a negative slope in a particular wavelength band and a second metal ions having an optical absorption coefficient of a positive slope in a predetermined wavelength band.
Abstract translation: 本发明涉及一种用于实现均匀光衰减的光纤和平面波导，其包括与特定波长带中的具有负斜率的光吸收系数和第二金属离子共掺杂的第一金属离子的芯 具有预定波长带中的正斜率的光吸收系数。
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公开(公告)号：US20040025542A1
公开(公告)日：2004-02-12
申请号：US10456318
申请日：2003-06-05
Inventor： Laura J. Ball , Sylvain Rakotoarison
IPC: C03B019/06 , C03B037/018
CPC classification number: C03B19/143 , C03B19/01 , C03B2201/10 , C03B2201/12 , C03B2201/20 , C03B2201/28 , C03B2201/30 , C03B2201/31 , C03B2201/32 , C03B2201/34 , C03B2201/42
Abstract: A method for making extreme ultraviolet lithography tool glass substrates includes generating a plasma, delivering reactants comprising a silica precursor and a titania precursor into the plasma to produce titania and silica particles, and depositing the titania and silica particles on a deposition surface to form a homogeneous titania-doped silica. The invention provides for homogeneous glass substrates that are free of striae variations and provides for beneficial extreme ultraviolet lithography reflective optics.
Abstract translation: 用于制造极紫外光刻工具玻璃基板的方法包括产生等离子体，将包含二氧化硅前体和二氧化钛前体的反应物输送到等离子体中以产生二氧化钛和二氧化硅颗粒，并将二氧化钛和二氧化硅颗粒沉积在沉积表面上以形成均匀的 二氧化钛掺杂二氧化硅。 本发明提供了不含条纹变化的均匀玻璃基底，并提供有益的极紫外光刻反射光学器件。
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公开(公告)号：US20030044159A1
公开(公告)日：2003-03-06
申请号：US10123072
申请日：2002-04-12
Inventor： Emilia Anderson , Wesley A. King , Yoel Fink , Lori Pressman
IPC: G02B006/16 , G02B006/20 , G02B006/22
CPC classification number: G02B6/021 , B29D11/00721 , C03B37/027 , C03B37/02718 , C03B37/029 , C03B37/0756 , C03B2201/10 , C03B2201/28 , C03B2201/30 , C03B2201/32 , C03B2201/34 , C03B2201/50 , C03B2201/54 , C03B2201/60 , C03B2201/82 , C03B2201/86 , C03B2203/14 , C03B2203/16 , C03B2203/18 , C03B2203/223 , C03B2203/225 , C03B2203/42 , C03B2205/08 , C03B2205/09 , C03B2205/10 , C03B2205/40 , C03B2205/72 , C03C3/064 , C03C3/07 , C03C3/072 , C03C3/102 , C03C3/122 , C03C3/142 , C03C3/16 , C03C3/321 , C03C3/326 , C03C13/008 , C03C13/041 , C03C13/042 , C03C13/043 , C03C13/044 , C03C13/046 , C03C13/048 , C03C25/105 , C03C25/1061 , G02B6/02 , G02B6/02052 , G02B6/02066 , G02B6/02123 , G02B6/02261 , G02B6/023 , G02B6/02304 , G02B6/03694 , G02B6/126 , G02B6/29319 , G02B6/29356 , G02B6/30 , G02B6/305 , G02B6/42 , G02B6/4206 , G02B2006/12116 , G02B2006/12195 , G02F1/0115 , G02F1/365 , H01S3/06729
Abstract: High index-contrast fiber waveguides, materials for forming high index-contrast fiber waveguides, and applications of high index-contrast fiber waveguides are disclosed.
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