公开(公告)号：US09697983B1

公开(公告)日：2017-07-04

申请号：US15056244

申请日：2016-02-29

Applicant: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH

Inventor： Stefan Lanio ,  Aleksandra Kramer ,  John Breuer

IPC: H01J37/073 ,  H01J1/16 ,  H01J19/10 ,  H01J9/02

CPC classification number: H01J37/073 ,  H01J1/16 ,  H01J9/02 ,  H01J9/04 ,  H01J19/10 ,  H01J19/82 ,  H01J37/065 ,  H01J37/3178 ,  H01J2201/19 ,  H01J2237/06308 ,  H01J2237/06341

Abstract: An electron beam device for inspecting a sample with an electron beam is described. The electron beam device includes an electron beam source including a thermal field emitter, which includes an emitter tip having an emission facet configured for electron emission, wherein the emission facet has an emission facet width; and a first side facet and a second side facet, wherein an edge facet is formed between the first side facet and the second side facet, which has an edge facet width. The edge facet width is between 20% and 40% of the emission facet width. The electron beam source further includes an extractor device; and a heating device for heating the thermal field emitter. The electron beam device further includes electron beam optics and a detector device for detecting secondary charged particles generated at an impingement or hitting of the primary electron beam on the sample.

公开(公告)号：US08876570B2

公开(公告)日：2014-11-04

申请号：US13883723

申请日：2011-10-28

Applicant: Wolfgang Seitz

Inventor： Wolfgang Seitz

IPC: H01J9/00 ,  H01J61/073 ,  H01J9/04 ,  H01J1/20

CPC classification number: H01J9/042 ,  H01J1/20 ,  H01J9/04 ,  H01J61/0732 ,  H01J2201/19 ,  H01J2209/02

Abstract: A method for producing an electrode (16) for a high-pressure discharge lamp (10), comprising the following steps: a) scanning at least part of the electrode surface for producing an oxide layer (step 120); b) at least partially sublimating the oxide layer formed in step a) (step 120); and c) reducing the rest of the oxide layer.

Abstract translation: 一种用于制造高压放电灯（10）的电极（16）的方法，包括以下步骤：a）扫描用于制备氧化物层的电极表面的至少一部分（步骤120）; b）至少部分地升华步骤a）中形成的氧化物层（步骤120）; 和c）减少氧化物层的其余部分。

公开(公告)号：US20130221842A1

公开(公告)日：2013-08-29

申请号：US13883723

申请日：2011-10-28

Applicant: Wolfgang Seitz

Inventor： Wolfgang Seitz

IPC: H01J9/04 ,  H01J61/073

CPC classification number: H01J9/042 ,  H01J1/20 ,  H01J9/04 ,  H01J61/0732 ,  H01J2201/19 ,  H01J2209/02

Abstract: A method for producing an electrode (16) for a high-pressure discharge lamp (10), comprising the following steps: a) scanning at least part of the electrode surface for producing an oxide layer (step 120); b) at least partially sublimating the oxide layer formed in step a) (step 120); and c) reducing the rest of the oxide layer.

Abstract translation: 一种用于制造高压放电灯（10）的电极（16）的方法，包括以下步骤：a）扫描用于制备氧化物层的电极表面的至少一部分（步骤120）; b）至少部分地升华步骤a）中形成的氧化物层（步骤120）; 和c）减少氧化物层的其余部分。