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    Micro-Electron Column Having An Electron Emitter Improving The Density Of An Electron Beam Emitted From A Nano Structure Tip
    3.
    发明申请
    Micro-Electron Column Having An Electron Emitter Improving The Density Of An Electron Beam Emitted From A Nano Structure Tip 有权
    具有电子发射体的微电子柱改善了纳米结构尖端发射的电子束的密度

    公开(公告)号：US20160247658A1

    公开(公告)日：2016-08-25

    申请号：US15048650

    申请日：2016-02-19

    Applicant: Industry-University Cooperation Foundation Sunmoon

    Inventor： Ho Seob KIM ,  Tae Sik OH ,  Dae Wook KIM ,  Hyung Woo KIM ,  Seung Jun AHN

    IPC: H01J37/141 ,  H01J37/065

    CPC classification number: H01J37/065 ,  H01J37/073 ,  H01J2237/04924 ,  H01J2237/063 ,  H01J2237/06341 ,  H01J2237/0635 ,  H01J2237/083 ,  H01J2237/1205

    Abstract: Disclosed is a micro-electron column including nanostructure tips each of which has a tubular, columnar, or blocky structure ranging in size from several nanometers to dozens of nanometers. In the micro-electron column, the nanostructure tips can easily emit electrons because a high electric field is generated at the end of the nanostructure tips when a voltage is applied to the nanostructure tips, and an induction electrode is disposed between the electron emitter and a source lens so as to help electrons emitted from the electron emitter to enter an aperture of a first lens electrode layer of the source lens, thereby realizing improved performance of the micro-electron column. In the micro-electron column, the size of the nanostructure tips may be larger than that of the aperture of a source lens.

    Abstract translation: 公开了一种包括纳米结构尖端的微电子柱，每个微结构尖端具有尺寸从几纳米到几十纳米的管状，柱状或块状结构。 在微电子柱中，纳米结构尖端容易发射电子，因为当纳米结构尖端施加电压时，在纳米结构尖端的末端产生高电场，并且感应电极设置在电子发射体和 源透镜，以帮助从电子发射器发射的电子进入源透镜的第一透镜电极层的孔径，从而实现微电子柱的改进的性能。 在微电子柱中，纳米结构尖端的尺寸可以大于源透镜的孔径。

    Device and method for electron emission and device including such an electron emission system
    5.
    发明授权
    Device and method for electron emission and device including such an electron emission system 有权
    用于电子发射的装置和方法以及包括这种电子发射系统的装置

    公开(公告)号：US09263229B2

    公开(公告)日：2016-02-16

    申请号：US14378386

    申请日：2013-02-15

    Applicant: Arnaud Arbouet ,  Florent Houdellier

    Inventor： Arnaud Arbouet ,  Florent Houdellier

    IPC: G21K5/04 ,  H01J37/073 ,  H01J37/26 ,  H01J37/285

    CPC classification number: H01J37/073 ,  H01J37/26 ,  H01J37/285 ,  H01J2237/022 ,  H01J2237/0432 ,  H01J2237/049 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/21 ,  H01J2237/2614 ,  H01J2237/2626 ,  H01J2237/2802

    Abstract: A device and method for emitting electrons by a field effect. The device (10) includes a vacuum chamber (12) including a tip (14) having an end (18) and forming a cold cathode, an extracting anode (16), components adapted for generating a potential difference between the tip (14) and the anode (16); an electromagnetic wave source (22) outside the chamber (12); a system (24) for forwarding the electromagnetic wave emitted by the electromagnetic wave source from the outside to the inside of the chamber as far as the vicinity of the tip (14); a system (26) for focusing the electromagnetic wave, laid out inside the chamber (12); and a system (28) for aligning the electromagnetic wave outside the chamber and adapted for allowing alignment of the electromagnetic wave focused by the focusing system on the end of the tip.

    Abstract translation: 一种通过场效应发射电子的装置和方法。 装置（10）包括一个真空室（12），该真空室包括具有端部（18）并形成冷阴极的尖端（14），提取阳极（16），适于产生尖端（14） 和阳极（16）; 在室（12）外部的电磁波源（22）; 一个系统（24），用于将电磁波源发射的电磁波从外部传送到腔室的内部，直到尖端（14）附近; 用于聚焦放置在腔室（12）内的电磁波的系统（26）; 以及用于将所述电磁波对准所述室外并适于允许由所述聚焦系统聚焦的所述电磁波对准所述尖端的端部的系统（28）。

    Electron gun used in particle beam device
    7.
    发明授权
    Electron gun used in particle beam device 有权
    电子枪用于粒子束装置

    公开(公告)号：US08890444B2

    公开(公告)日：2014-11-18

    申请号：US12653549

    申请日：2009-12-15

    Applicant: Armin Heinz Hayn ,  Mohamed El-Gomati

    Inventor： Armin Heinz Hayn ,  Mohamed El-Gomati

    IPC: H01J29/51 ,  H01J37/063

    CPC classification number: H01J37/063 ,  H01J2237/06308 ,  H01J2237/06341 ,  H01J2237/06375

    Abstract: An electron gun used in a particle beam device, for example in an electron microscope, has a relatively good brightness and may be operated under vacuum conditions which can be easily achieved (i.e., for example, at a residual pressure of about 10−6 or 10−7 mbar). The electron gun comprises an electron source having an electron emission surface. Furthermore, the electron gun comprises a first electrode configured to control a path of electrons emitted from the electron emission surface, a second electrode which is configured to suppress emissions of electrons from a side surface of the electron source and a third electrode configured to accelerate electrons emitted from the electron source to a final energy. A first voltage, a second voltage and a third voltage are adjusted to avoid any crossover of electrons emitted from the electron emission surface.

    Abstract translation: 用于粒子束装置的电子枪例如在电子显微镜中具有相对较好的亮度，并且可以在容易实现的真空条件下操作（例如，在约10-6的残留压力或 10-7毫巴）。 电子枪包括具有电子发射表面的电子源。 此外，电子枪包括被配置为控制从电子发射表面发射的电子的路径的第一电极，被配置为抑制来自电子源的侧表面的电子的发射的第二电极和被构造成加速电子的第三电极 从电子源发射到最终能量。 调整第一电压，第二电压和第三电压以避免从电子发射表面发射的电子的任何交叉。

    Electron Microscope and Method of Operating the Same
    8.
    发明申请
    Electron Microscope and Method of Operating the Same 有权
    电子显微镜及其操作方法

    公开(公告)号：US20130332116A1

    公开(公告)日：2013-12-12

    申请号：US13915652

    申请日：2013-06-12

    Applicant: JEOL Ltd.

    Inventor： Takashi Suzuki

    IPC: G06F17/18 ,  H01J37/285

    CPC classification number: G06F17/18 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/06341 ,  H01J2237/24495 ,  H01J2237/24507

    Abstract: An electron microscope and method of operating an electron microscope (1) has an electron beam source (11) for producing an electron beam, a noise canceling aperture (12) for detecting a part of the beam, an amplifier (42), an effective value calculating circuit (44) for extracting DC components of the output signal from the amplifier (42), a detector (15) for detecting a signal obtained in response to impingement of the beam on a sample (A), a preamplifier circuit (20), an amplifier circuit (30), a dividing circuit (54) for performing a division based on the output signal from the amplifier circuit (30) and on the output signal from the amplifier (42), and a multiplier circuit (58) for performing multiplication of the output signal from the dividing circuit (54) and the output from the effective value calculating circuit (44).

    Abstract translation: 电子显微镜和操作电子显微镜（1）的方法具有用于产生电子束的电子束源（11），用于检测光束的一部分的噪声消除孔（12），放大器（42），有效 用于从放大器（42）提取输出信号的DC分量的检测器（15），用于检测响应于样品（A）上的束的撞击而获得的信号的检测器（15），前置放大器电路 ），放大器电路（30），分频电路（54），用于根据来自放大器电路（30）的输出信号和来自放大器（42）的输出信号进行分频;以及乘法器电路（58） 用于执行来自分频电路（54）的输出信号和来自有效值计算电路（44）的输出的乘法运算。

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