公开(公告)号：US11592406B2

公开(公告)日：2023-02-28

申请号：US17711171

申请日：2022-04-01

Applicant: RENSSELAER POLYTECHNIC INSTITUTE

Inventor： Ge Wang ,  Guang Li ,  Wenxiang Cong

IPC: G01N23/201 ,  G01N23/20008 ,  A61B6/00

Abstract: A detection scheme for x-ray small angle scattering is described. An x-ray small angle scattering apparatus may include a first grating and a complementary second grating. The first grating includes a plurality of first grating cells. The complementary second grating includes a plurality of second grating cells. The second grating is positioned relative to the first grating. A configuration of the first grating, a configuration of the second grating and the relative positioning of the gratings are configured to pass one or more small angle scattered photons and to block one or more Compton scattered photons and one or more main x-ray photons.

公开(公告)号：US20220221413A1

公开(公告)日：2022-07-14

申请号：US17711171

申请日：2022-04-01

Applicant: RENSSELAER POLYTECHNIC INSTITUTE

Inventor： Ge Wang ,  Guang Li ,  Wenxiang Cong

IPC: G01N23/20008 ,  G01N23/201 ,  G21K1/02 ,  A61B6/03 ,  G01N23/046

Abstract: A detection scheme for x-ray small angle scattering is described. An x-ray small angle scattering apparatus may include a first grating and a complementary second grating. The first grating includes a plurality of first grating cells. The complementary second grating includes a plurality of second grating cells. The second grating is positioned relative to the first grating. A configuration of the first grating, a configuration of the second grating and the relative positioning of the gratings are configured to pass one or more small angle scattered photons and to block one or more Compton scattered photons and one or more main x-ray photons.

公开(公告)号：US11231379B2

公开(公告)日：2022-01-25

申请号：US16636378

申请日：2018-08-06

Applicant: CORNELL UNIVERSITY

Inventor： Robert Thorne

IPC: G01N23/20025 ,  G01N23/201

Abstract: A system and method of sample cell arrays for performing small-angle X-ray scattering on solutions containing biomolecules and/or other solutes. The sample cell array includes sample cells having a cylindrical cross-section and side walls that are thin compared with their diameter, and preferably made of a compliant material. The cylindrical cells are attached to top and bottom substrates, each with a high transmittance X-ray window, with their axis perpendicular to the respective substrate. The cells are loaded with buffer and buffer+biomolecule solution from an initially open top end. A top substrate (with a sealing cap and the X-ray window) is pushed down onto the cylindrical cells. On cooling to cryogenic temperatures, the thermal contraction of the sample relative to the sample cells does not cause large stresses to develop in the sample once it solidifies and cause sample cracking.

公开(公告)号：US11181489B2

公开(公告)日：2021-11-23

申请号：US16526858

申请日：2019-07-30

Applicant: Lam Research Corporation ,  Government of the USA, as represented by the Secretary of Commerce.

Inventor： William Dean Thompson ,  Regis Joseph Kline ,  Daniel F. Sunday ,  Wenli Wu ,  Osman Sorkhabi ,  Jin Zhang ,  Xiaoshu Chen

IPC: G01N23/201 ,  G01N23/18

Abstract: Provided herein are methods and apparatus for characterizing high aspect ratio (HAR) structures of fabricated or partially fabricated semiconductor devices. The methods involve using small angle X-ray scattering (SAXS) to determine average parameters of an array of HAR structures. In some implementations, SAXS is used to analyze symmetry of HAR structures in a sample and may be referred to as tilted structural symmetry analysis-SAXS (TSSA-SAXS) or TSSA. Analysis of parameters such as tilt, sidewall angle, bowing, and the presence of multiple tilts in HAR structures may be performed.

公开(公告)号：US11169099B2

公开(公告)日：2021-11-09

申请号：US16515052

申请日：2019-07-18

Applicant: BRUKER JV ISRAEL LTD.

Inventor： Alex Krokhmal ,  Alex Dikopoltsev ,  Juri Vinshtein

IPC: G01N23/00 ,  G01N23/201 ,  G01N23/207 ,  H01L21/66

Abstract: A method for X-ray scatterometry includes receiving a first distribution of an X-ray beam scattered from a sample. The first distribution exhibits asymmetry with respect to a reference axis. A correction is applied to the first distribution, so as to produce a second distribution in which a level of the asymmetry is reduced relative to the first distribution. One or more parameters of the sample are estimated based on the second distribution.

公开(公告)号：US11071513B2

公开(公告)日：2021-07-27

申请号：US16599885

申请日：2019-10-11

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Shyh-Shin Ferng ,  Chung-Li Huang ,  Yi-Hung Lin ,  Chungwei Wang

IPC: G01N23/00 ,  A61B6/00 ,  H01L23/544 ,  H01L21/66 ,  G01N23/201 ,  A61B6/08 ,  G01T1/24 ,  H01L27/10 ,  H01L21/00

Abstract: A method includes forming a test key. The formation of the test key includes forming a first plurality of semiconductor strips, and cutting the first plurality of semiconductor strips into an array of a second plurality semiconductor strips, with each row of the array being formed from one strip in the first plurality of semiconductor strips, forming isolation regions in recesses between the second plurality of semiconductor strips, and recessing the isolation regions. The top portions of the second plurality of semiconductor strips protrude higher than the isolation regions form semiconductor fins, which form a fin array. An X-ray beam is projected on the test key. A diffraction pattern is obtained from scattered X-ray beam scattered from the test key.

公开(公告)号：US20210200922A1

公开(公告)日：2021-07-01

申请号：US17132095

申请日：2020-12-23

Applicant: Rigaku Corporation

Inventor： Tomoyuki IWATA ,  Kazuhiko OMOTE ,  Kazuki ITO ,  Tetsuya OZAWA

IPC: G06F30/25 ,  G01N23/201

Abstract: Provided is a scattering measurement analysis method including obtaining a theoretical scattering intensity from a structural model that contains a lot of scatterers, wherein the obtaining of a theoretical scattering intensity includes obtaining a contribution to the theoretical scattering intensity of a pair of a scatterer “m” and a scatterer “n” existing at a distance “r” from the scatterer “m” among a plurality of scatterers by at least one of calculations in accordance with the distance “r”, the calculations including a first calculation of calculating contributions of the scatterer “m” and the scatterer “n” from respective scattering factors fm(q) and fn*(q) and a center-to-center distance rmn between the scatterer “m” and the scatterer “n”, and a second calculation of substituting the scattering factor fn*(q) of the scatterer “n” by a first representative value and substituting a probability density function of the number of scatterers existing at the distance “r” by a constant value.

公开(公告)号：US10900913B2

公开(公告)日：2021-01-26

申请号：US15668746

申请日：2017-08-04

Applicant: Rigaku Corporation

Inventor： Takeshi Osakabe ,  Tetsuya Ozawa

IPC: G01N23/20 ,  G01N23/04 ,  G01N23/20008 ,  G01N23/20025 ,  G01N23/201 ,  G01N23/207

Abstract: An X-ray diffraction apparatus including an X-ray detector that is configured to detect diffracted X-rays diffracted from a sample when a surface of the sample is irradiated with X-rays, a counter arm which rotates around a rotation center axis set within the surface of the sample while the X-ray detector is installed on the counter arm, and a plate-like X-ray shielding member that is installed on the counter arm and rotated together with the X-ray detector.

公开(公告)号：US10900912B2

公开(公告)日：2021-01-26

申请号：US16384199

申请日：2019-04-15

Applicant: Malvern Panalytical B.V.

Inventor： Detlef Beckers ,  Milen Gateshki ,  Jaap Boksem ,  Fabio Masiello

IPC: G01N23/20008 ,  G01N23/207 ,  G01N23/20016 ,  G01N23/201

Abstract: The X-ray analysis apparatus of the present invention comprises a sample stage for supporting a sample, a goniometer having an axis of rotation, and an X-ray detector arranged to be rotatable about the axis of rotation of the goniometer, wherein the X-ray detector is arranged to receive X-rays from the sample directed along an X-ray beam path. The X-ray analysis apparatus further comprises a first collimator, a second collimator and a third collimator each having a first configuration and a second configuration. In its first configuration, the collimator is arranged in the X-ray beam path. In its second configuration the collimator is arranged outside of the X-ray beam path. A first actuator arrangement is configured to move the first collimator and the second collimator between the first configuration and the second configuration by moving the first collimator and the second collimator in a lateral direction that intersects the X-ray beam path. A second actuator arrangement is configured to move the third collimator between its first configuration and its second configuration. A controller is configured to control the first actuator arrangement to move the first collimator between the first configuration and the second configuration.

公开(公告)号：US20200378905A1

公开(公告)日：2020-12-03

申请号：US16426070

申请日：2019-05-30

Applicant: The Boeing Company

Inventor： Morteza Safai

IPC: G01N23/201

Abstract: Non-destructive inspection methods, systems, and apparatuses are disclosed for non-destructively inspecting a bond line, including a bond line present in a composite substrate and in a adhesive material layers in a composite substrate, with the methods, systems, and apparatuses incorporating a small angle X-ray scattering array.