公开(公告)号：US5859424A

公开(公告)日：1999-01-12

申请号：US835533

申请日：1997-04-08

Applicant: Adam E. Norton ,  Kenneth C. Johnson ,  Joseph R. Carter

Inventor： Adam E. Norton ,  Kenneth C. Johnson ,  Joseph R. Carter

IPC: G01J4/04 ,  G01N21/21 ,  G01N21/27 ,  G02B27/58 ,  G03F7/20 ,  G01J3/50

CPC classification number: G03F7/70616 ,  G02B27/58

Abstract: Because of diffraction effects caused by slits or apertures in optical measurement systems, the radiation energy which is directed towards a particular region on a sample will be spread over a larger area than desirable. By employing an apodizing filter in the radiation path in such system, diffraction tails of the system will be reduced. The apodizing filter preferably has a pattern of alternating high transmittance areas and substantially opaque areas where the locally averaged transmittance function is an apodizing function. In the preferred embodiment, the locally averaged transmittance function varies smoothly and monotonically from the periphery to the center of the filter.

Abstract translation: 由于在光学测量系统中由狭缝或孔径引起的衍射效应，被引导到样品上的特定区域的辐射能量将扩展到比所需的更大的面积上。 通过在这种系统中的辐射路径中采用变迹滤波器，系统的衍射尾部将被减小。 变迹滤波器优选地具有交替的高透射率区域和基本上不透明区域的图案，其中局部平均透射率函数是变迹函数。 在优选实施例中，局部平均透射率函数从滤光器的周边到中心平滑且单调地变化。

公开(公告)号：US5519493A

公开(公告)日：1996-05-21

申请号：US219964

申请日：1994-03-30

Applicant: Daniel J. Reiley

Inventor： Daniel J. Reiley

IPC: G01J4/04 ,  G01N21/21

CPC classification number: G01J4/04

Abstract: A polarimeter with a polarization state generator and a polarization state analyzer mounted together on a single rotary mount. This novel structure allows built-in alignment and synchronization of the polarization state analyzer and the polarization state generator. Because of this built-in alignment and synchronization, polarization properties of samples can be measured quickly, accurately, inexpensively, and reliably. The instrument can measure polarization properties of remote samples, without placing the sample inside the instrument. The surrounding lenses and mirrors are designed in such a way that light leaving the instrument will pass through the polarization state generator and light returning into the instrument will pass through the polarization state analyzer and onto a photodetector. Samples can be measured directly in reflection or in small-angle backscatter; or they can be measured in double-pass transmission with the addition of a mirror or retroreflector.

Abstract translation: 具有极化状态发生器和偏振状态分析仪的偏振计安装在单个旋转底座上。 这种新颖的结构允许偏振状态分析仪和偏振状态发生器的内置对准和同步。 由于这种内置的对准和同步，可以快速，准确，低成本，可靠地测量样品的极化特性。 仪器可以测量远程样品的极化特性，而不会将样品置于仪器内部。 周围的镜头和镜子被设计成使得离开仪器的光将通过偏振状态发生器，并且返回到仪器中的光将通过偏振状态分析器并到达光电检测器。 样品可以直接在反射或小角度后向散射中测量; 或者可以通过添加反射镜或后向反射器在双通传输中测量。

公开(公告)号：US5412473A

公开(公告)日：1995-05-02

申请号：US93178

申请日：1993-07-16

Applicant: Allan Rosencwaig ,  David L. Willenborg

Inventor： Allan Rosencwaig ,  David L. Willenborg

IPC: G01B11/06 ,  G01J4/04 ,  G01N21/21 ,  G01N21/27 ,  H01L21/66 ,  G01B9/02

CPC classification number: G01B11/0641 ,  G01N21/211

Abstract: An optical measurement device is disclosed for evaluating the parameters of a sample. The device includes a polychromatic source for generating a probe beam. The probe beam is focused on the sample surface. Individual rays within the reflected probe beam are simultaneously analyzed as a function of the position within the beam to provide information at multiple wavelengths. A filter, dispersion element and a two-dimensional photodetector array may be used so that the beam may be simultaneously analyzed at multiple angles of incidence and at multiple wavelengths. A variable image filter is also disclosed which allows a selection to be made as to the size of the area of the sample to be evaluated.

Abstract translation: 公开了一种用于评估样品参数的光学测量装置。 该装置包括用于产生探针光束的多色源。 探针光束聚焦在样品表面上。 反射探测光束内的单个光线作为光束内的位置的函数被同时分析，以提供多个波长的信息。 可以使用滤光器，色散元件和二维光电检测器阵列，使得可以以多个入射角和多个波长同时分析光束。 还公开了可变图像滤波器，其允许对要评估的样本的面积的大小进行选择。

公开(公告)号：US5105415A

公开(公告)日：1992-04-14

申请号：US448450

申请日：1989-12-11

Applicant: Morovat Tayefeh

Inventor： Morovat Tayefeh

IPC: G01J4/04 ,  G01J1/44 ,  G11B7/005 ,  G11B11/10 ,  G11B11/105

CPC classification number: G11B11/10543 ,  G11B7/005

Abstract: A magnetooptic player reads magnetooptically recorded signals on a disk by using a differential detector. Intermediate areas on a storage member used to store the magnetooptically record signals are sector marks and ID fields formed by undulations in the surface of the disk. Such sector marks and ID fields are read by detecting the intensity modulation in a reading light beam; for detecting such embossed marks and D-ROM disks, one-half of the differential detector is disabled for facilitating such detection in a differentially arranged detector.

公开(公告)号：US4834539A

公开(公告)日：1989-05-30

申请号：US108404

申请日：1987-10-14

Applicant: Jean Le Bris ,  Marko Erman

Inventor： Jean Le Bris ,  Marko Erman

IPC: G01J4/04 ,  G01J4/00 ,  G01N21/03 ,  G01N21/21

CPC classification number: G01N21/211 ,  G01N21/03 ,  G01N2021/0339 ,  G01N2021/1785

Abstract: A spectroscopic ellipsometer comprises an illumination device having a focal point (F'.sub.2) for illuminating a surface of a sample (E) in accordance with a given angle of incidence and a device for analyzing the light reflected from the surface of the sample. The sample support comprises three translation plates (20,30,40) in accordance with three respective directions (T.sub.2, T.sub.3, T.sub.1). The translations in accordance with the first (T.sub.1) and second (T.sub.2) directions make it possible to realise cartographic representations of the sample (E) and the translation in accordance with the third direction (T.sub.3) makes it possible to cause a point on the surface of the same (E) to coincide with the focal point (F'.sub.2). Two plates (PT.sub.2, 12) rotating about the axes O.sub.1 and O.sub.2, respectively, parallel to the first (T.sub.1) and second (T.sub.2) directions and intersecting each other at the focal point (F'.sub.2) provide the possibility of orienting the sample (E) by means of rotation in two orthogonal planes about the focal point (F'.sub. 2).

Abstract translation: 分光椭偏仪包括具有根据给定入射角照射样品（E）的表面的焦点（F'2）的照明装置和用于分析从样品表面反射的光的装置。 样品支架包括根据三个相应方向（T2，T3，T1）的三个平移板（20,30,40）。 根据第一（T1）和第二（T2）方向的平移使得可以实现样本（E）的制图表示，并且根据第三方向（T3）的平移可以使得 相同（E）的表面与焦点（F'2）重合。 平行于第一（T1）和第二（T2）方向分别绕轴线O1和O2旋转并在焦点（F'2）彼此相交的两个板（PT2,12）提供了使样品定向的可能性 （E）通过围绕焦点（F'2）的两个正交平面中的旋转。

公开(公告)号：US4832492A

公开(公告)日：1989-05-23

申请号：US81485

申请日：1987-08-04

Applicant: Riccardo Calvani ,  Renato Caponi ,  Francesco Cisternino

Inventor： Riccardo Calvani ,  Renato Caponi ,  Francesco Cisternino

IPC: G01J4/00 ,  G01J4/04 ,  G01J9/02 ,  G01J9/04 ,  G01N21/21 ,  H04B10/08

CPC classification number: H04B10/07 ,  G01J4/00 ,  G01J9/04 ,  G01N21/211

Abstract: The interferometer makes use of an acousto-optic device to perform a frequency shift of the beam sent along one of the interferometer branches, so as to allow the determination of the state of polarization by heterodyne radiofrequency detection. The acousto-optic device can be inserted downstream of the device for splitting the beam emitted by the source into the two beams sent along the two interferometer branches, or it can also act as the beam splitter.

Abstract translation: 干涉仪使用声光装置来执行沿着干涉仪分支之一发送的光束的频移，从而允许通过外差射频检测来确定偏振状态。 声光器件可以插入器件的下游，用于将由源发射的光束分成沿着两个干涉仪分支发送的两个光束，或者也可以用作分束器。

公开(公告)号：US4762414A

公开(公告)日：1988-08-09

申请号：US850493

申请日：1986-04-10

Applicant: Giorgio Grego

Inventor： Giorgio Grego

IPC: G01J4/04 ,  G01N21/21 ,  G01B9/02

CPC classification number: G01N21/211

Abstract: A static interferometric ellipsometer, wherein a source (3) generates a coherent light-beam with two monochromatic radiations at slightly different frequencies. A first photodetector (6) generates a first beat between the two radiations, to be used as reference. A second photodetector (9) generates a second beat between the two radiations, after they have been polarized in perpendicular planes and separated so that one of them is reflected onto the photodetector (9) by the sample under test (1,2). A measuring and computing system (11) determines the optical properties of said sample starting from the intensity of the second beat and from the relative phase between the two beats.

Abstract translation: 一种静态干涉式椭偏仪，其中源（3）以稍微不同的频率产生具有两个单色辐射的相干光束。 第一光电检测器（6）在两个辐射之间产生第一拍，用作参考。 第二光电检测器（9）在它们已经在垂直平面中被极化并分离之后，在两个辐射之间产生第二拍，使得它们中的一个被被测样品（1,2）反射到光电检测器（9）上。 测量和计算系统（11）从第二节拍的强度和两拍之间的相对相位确定所述样本的光学特性。

公开(公告)号：US4265543A

公开(公告)日：1981-05-05

申请号：US936417

申请日：1978-08-24

Applicant: Donald J. Barclay ,  Christopher T. Prowting

Inventor： Donald J. Barclay ,  Christopher T. Prowting

IPC: G01R33/032 ,  G01J4/04 ,  G02F1/05

CPC classification number: G01R33/0325

Abstract: A miniature Kerr effect probe is described which may be used to examine surfaces of magnetic material during electroplating or vacuum deposition, without requiring a specially shaped bath or chamber.The probe consists of a U-shaped core with adjacent pole tips of soft magnetic material wound with a coil to provide a magnetic field across the ends of the arms of the core which constitute probe tips. In use, these probe tips are placed adjacent to a surface being examined. Optic fibers are used to direct light to and from the surface.The polarizer and analyzer required for Kerr work may be at the probe tips or remote from the probe tips due to the availability of optic fibers which will transmit polarized light without distortion. The light beam at the probe tips may be collimated or focussed by the optic fiber.

Abstract translation: 描述了一种微型克尔效应探针，其可用于在电镀或真空沉积期间检查磁性材料的表面，而不需要特殊形状的浴室。 该探针由具有与线圈卷绕的软磁材料的相邻极尖的U形芯组成，以在构成探针尖端的芯的臂的端部提供磁场。 在使用中，这些探针尖端被放置在被检查的表面附近。 光纤用于将光引导到表面。 克尔工作所需的偏振器和分析仪可能在探针尖端或远离探针尖端，因为光纤的可用性将会透射偏振光而不会发生变形。 探针尖端处的光束可以被光纤准直或聚焦。

公开(公告)号：US4165937A

公开(公告)日：1979-08-28

申请号：US746831

申请日：1976-12-02

Applicant: Seiichi Murayama ,  Masaru Ito ,  Manabu Yamamoto ,  Kunifusa Kayama ,  Kounosuke Oishi

Inventor： Seiichi Murayama ,  Masaru Ito ,  Manabu Yamamoto ,  Kunifusa Kayama ,  Kounosuke Oishi

IPC: G01J4/04 ,  G01N21/21 ,  G01N21/31 ,  G01J3/42

CPC classification number: G01N21/3103 ,  G01N21/21

Abstract: A magneto-optic spectrophotometer for detection or identification of atoms or molecules contained in the sample by utilizing phenomena of birefringence or rotation of polarization caused by the atoms or the molecules in a magnetic field is constructed as follows. Linearly polarized lights are incident on a space where atoms or molecules to be detected exist in a magnetic field. The lights having passed through said space are separated into two beams of lights of polarization components perpendicular and parallel to the polarization of the incident lights. The perpendicular components are used as the signal lights, and the parallel components the reference lights. The signal lights and the reference lights are spectrally analyzed by a wavelength selector in which a signal light and a reference light of a wavelength to be selected are incident on an identical dispersive element. The signal lights and the reference lights are detected by respective detectors. Then, the ratios of the outputs of the signal light detectors to the outputs of the reference light detectors are obtained. By this construction the intensities of the scattered lights by atoms or molecules to be detected can precisely be measured.

Abstract translation: 用于通过利用由磁场中的原子或分子引起的双折射或偏振旋转的现象来检测或鉴定样品中包含的原子或分子的磁光分光光度计如下。 线偏振光入射到要检测的原子或分子存在于磁场中的空间。 已经穿过所述空间的光被分离成垂直并平行于入射光的偏振的两束偏振分量的光束。 垂直分量用作信号灯，并联组件参考灯。 通过波长选择器对信号灯和参考光进行光谱分析，其中信号光和要选择的波长的参考光入射到相同的色散元件上。 信号灯和参考灯由相应的检测器检测。 然后，获得信号光检测器的输出与参考光检测器的输出的比率。 通过这种结构，可以精确地测量被检测的原子或分子的散射光的强度。

公开(公告)号：US4015127A

公开(公告)日：1977-03-29

申请号：US627248

申请日：1975-10-30

Applicant: Allen J. Sharkins

Inventor： Allen J. Sharkins

IPC: G01B11/06 ,  G01N21/21 ,  G01N21/84 ,  G01J4/04

CPC classification number: G01N21/21 ,  G01B11/0641 ,  G01N2021/8427

Abstract: A method and apparatus are disclosed for monitoring parameters of a film or coating by directing a beam of optical radiation at a film supported on a metal substrate at an angle to the film so as to plane polarize any radiation transmitted through the film, reflecting a portion of the radiation from the interface between the film and substrate, transmitting the radiation through a polarizing medium before and/or after it has been transmitted through the film to block any component of radiation other than that which is or will be transmitted through the film, and transducing the radiation reflected from the interface to provide an output signal which is a function of a parameter of the film.

Abstract translation: 公开了一种用于监测胶片或涂层的参数的方法和装置，该方法和装置通过将支撑在金属基板上的薄膜以一定角度引导光学辐射束，使其平面偏振透过薄膜的任何辐射， 来自膜和衬底之间的界面的辐射，在辐射通过薄膜之前和/或之后透射通过偏振介质以阻挡辐射之外的任何分量，而不是透过膜的透射分量， 并且转换从界面反射的辐射，以提供作为胶片参数的函数的输出信号。