公开(公告)号：US08317245B2

公开(公告)日：2012-11-27

申请号：US12305468

申请日：2007-06-21

Applicant: Yu Sun ,  Keekyoung Kim

Inventor： Yu Sun ,  Keekyoung Kim

IPC: B25J7/00

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

公开(公告)号：US08315793B2

公开(公告)日：2012-11-20

申请号：US12477667

申请日：2009-06-03

Applicant: Lakshman Withanawasam

Inventor： Lakshman Withanawasam

IPC: G01P15/00 ,  G01C9/00 ,  G01C21/10

CPC classification number: B81B7/02 ,  B81B2201/0242 ,  B81B2201/0292

Abstract: An integrated sensor device is provided. The integrated sensor device comprises a first substrate including a surface portion and a second substrate coupled to the surface portion of the first substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate. The integrated sensor device also comprises one or more micro-electro-mechanical systems (MEMS) sensors located at least partially in the first substrate, wherein the MEMS sensor communicates with the cavity. The integrated sensor device further comprises one or more additional sensors.

Abstract translation: 提供集成的传感器装置。 集成传感器装置包括第一衬底，第一衬底包括表面部分和第二衬底，第二衬底以堆叠构型耦合到第一衬底的表面部分，其中在第一衬底和第二衬底之间限定空腔。 集成传感器装置还包括至少部分地位于第一衬底中的一个或多个微电机械系统（MEMS）传感器，其中MEMS传感器与空腔连通。 集成传感器装置还包括一个或多个附加传感器。

公开(公告)号：US20120274921A1

公开(公告)日：2012-11-01

申请号：US13176757

申请日：2011-07-06

Applicant: CHIH-CHEN LAI

Inventor： CHIH-CHEN LAI

IPC: G01C3/08

CPC classification number: G01C3/08 ,  B81B7/04 ,  B81B2201/0292 ,  B81B2201/047 ,  B81B2203/0154 ,  B81B2207/053 ,  G01S7/4814 ,  G01S7/4817 ,  G01S17/42

Abstract: A laser rangefinder includes a laser emitter for emitting parallel laser beams, a micro electro mechanical system reflector including a plurality of micro reflecting units and configured for reflecting the parallel laser beams toward different points on an object, a micro electro mechanical system photoreceiver configured for receiving the laser beams reflected by and from the different points on the object, a time interval counter configured for recording the time intervals between a first time when the laser emitter emitting the parallel laser beams and second times when the laser beams are received by the micro electro mechanical system photoreceiver, and a processor configured for calculating the distances to the different points of the object based on the time intervals.

Abstract translation: 激光测距仪包括用于发射平行激光束的激光发射器，包括多个微反射单元并构造成用于将平行激光束反射到物体上的不同点的微机电系统反射器，微机电系统光接收器，被配置为接收 由物体上的不同点反射的激光束，被配置为记录发射平行激光束的激光发射器的第一次之间的时间间隔的时间间隔计数器，以及激光束被微电子接收时的第二次的时间间隔计数器 机械系统光接收器和被配置为基于时间间隔计算到对象的不同点的距离的处理器。

公开(公告)号：US20120193733A1

公开(公告)日：2012-08-02

申请号：US13359490

申请日：2012-01-26

Applicant: Goro NAKATANI

Inventor： Goro NAKATANI

IPC: H01L29/84

CPC classification number: H01L29/84 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/0292 ,  B81B2203/0109 ,  B81B2203/04 ,  B81B2203/051 ,  H04R19/005

Abstract: A capacitance type MEMS sensor has a first electrode portion and a second electrode portion facing each other. The sensor includes a semiconductor substrate having a recess dug in a thickness direction of the semiconductor substrate, the recess having sidewalls, one of which serves as the first electrode portion. The sensor further includes a diaphragm serving as the second electrode portion, the diaphragm arranged within the recess to face the first electrode portion in a posture extending along a depth direction of the recess, the diaphragm having a lower edge spaced apart from the bottom surface of the recess, and is made of the same material as the semiconductor substrate. The sensor further includes an insulating film arranged to join the diaphragm to the semiconductor substrate.

Abstract translation: 电容型MEMS传感器具有彼此面对的第一电极部分和第二电极部分。 传感器包括在半导体衬底的厚度方向上具有凹陷的半导体衬底，该凹部具有侧壁，其中一个侧壁用作第一电极部分。 传感器还包括用作第二电极部分的隔膜，隔膜布置在凹槽内，以沿凹槽深度方向延伸的姿势面对第一电极部分，该隔膜具有与底部表面间隔开的下边缘 并且由与半导体衬底相同的材料制成。 传感器还包括布置成将隔膜连接到半导体衬底的绝缘膜。

公开(公告)号：US20120104520A1

公开(公告)日：2012-05-03

申请号：US13347483

申请日：2012-01-10

Applicant: Yoshitaka UTO ,  Kiyoshi KOBAYASHI ,  Toshihiro KOBAYASHI ,  Toru TAKAHASHI ,  Jun SUZUKI ,  Katsuya KIKUIRI

Inventor： Yoshitaka UTO ,  Kiyoshi KOBAYASHI ,  Toshihiro KOBAYASHI ,  Toru TAKAHASHI ,  Jun SUZUKI ,  Katsuya KIKUIRI

IPC: H01L29/84

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B3/0056 ,  B81B2201/0292 ,  G01C19/56 ,  G01C25/005 ,  G01P15/0802 ,  G01P2015/0837 ,  G01P2015/0845 ,  G01P2015/0877

Abstract: An MEMS sensor includes: a functional layer having a sensor section; a wiring substrate disposed facing the functional layer and having a conduction pathway for the sensor section; a first metal layer provided on the surface of the sensor section which faces the wiring substrate; and a second metal layer provided on the surface of the wiring substrate which faces the sensor section, wherein the first and second metal layers are joined to each other, a space is formed between a movable portion of the sensor section and the wiring substrate, and a stopper which is composed of a third metal layer being the same film as the first metal layer formed on the functional layer side and a contact portion formed on the wiring substrate side which come into contact with each other is formed between the functional layer and the wiring substrate.

Abstract translation: MEMS传感器包括：具有传感器部分的功能层; 配置在所述功能层上的配线基板，具有所述传感器部的导通路径; 设置在传感器部分的面对布线基板的表面上的第一金属层; 以及设置在所述布线基板的面对所述传感器部的表面的第二金属层，其中，所述第一和第二金属层彼此接合，在所述传感器部的可动部和所述布线基板之间形成空间，以及 由功能层和第一金属层构成的第三金属层与形成在功能层侧的第一金属层相同的第三金属层和形成在布线基板一侧的接触部分形成的塞子形成在功能层和第二金属层之间， 布线基板。

公开(公告)号：US20110223412A1

公开(公告)日：2011-09-15

申请号：US12933254

申请日：2009-03-12

Applicant: Thomas Cornelius ,  Wolfgang Ensinger ,  Reinhard Neumann ,  Markus Rauber

Inventor： Thomas Cornelius ,  Wolfgang Ensinger ,  Reinhard Neumann ,  Markus Rauber

IPC: B32B5/16 ,  H01R43/00 ,  G01N33/00 ,  B01J19/00 ,  B01J8/02 ,  B82Y99/00 ,  B82Y40/00

CPC classification number: C25D1/006 ,  B01J19/0093 ,  B01J23/42 ,  B01J23/72 ,  B01J35/0006 ,  B01J2219/00783 ,  B01J2219/00835 ,  B01J2219/00846 ,  B01J2219/00853 ,  B01J2219/0086 ,  B01J2219/00873 ,  B22F1/0025 ,  B22F3/002 ,  B81B2201/0292 ,  B81B2201/051 ,  B81C99/0085 ,  B82Y15/00 ,  B82Y30/00 ,  B82Y40/00 ,  C25D1/00 ,  C25D1/003 ,  C25D1/04 ,  C25D1/08 ,  C25D5/18 ,  G01F1/688 ,  G01N25/00 ,  Y10S977/762 ,  Y10T29/49117 ,  Y10T428/12201 ,  Y10T428/12389 ,  Y10T428/24562 ,  Y10T428/24893 ,  Y10T428/25

Abstract: The invention concerns a nanowire structural element which is suited for implementation in, for example, a microreactor system or microcatalyzer system.For the production of the nanowire structural element, a template based process is used wherein the electrochemical deposition of the nanowires in nanopores is ideally carried out at least until caps are formed and said caps ideally are at least partially merged together. After reinforcing the two cover layers the structured hollow chamber between the two cover layers is cleared by dissolving the template foil and removing the dissolved template material, wherein the two cover layers remain intact. In this manner, a stable sandwich-like nanostructure is constructed with a two-dimensional hollow chamber-like structure in the plane parallel to the cover layers contained on both sides by the cover layers and permeated in a column-like manner with nanowires.

Abstract translation: 本发明涉及一种纳米线结构元件，其适用于例如微反应器系统或微型催化剂系统。 为了生产纳米线结构元件，使用基于模板的方法，其中纳米线中的纳米线的电化学沉积理想地至少直到形成帽并且所述帽理想地至少部分地并入在一起。 在加强两个覆盖层之后，通过溶解模板箔并除去溶解的模板材料来清除两个覆盖层之间的结构化中空室，其中两个覆盖层保持完整。 以这种方式，在与覆盖层两侧包含的覆盖层平行的平面中，通过二维中空室状结构构造稳定的夹层状纳米结构，并以纳米线的柱状渗透。

公开(公告)号：US20110210411A1

公开(公告)日：2011-09-01

申请号：US12763289

申请日：2010-04-20

Applicant: Sukhminder S. Binapal ,  David A. Roy

Inventor： Sukhminder S. Binapal ,  David A. Roy

IPC: H01L29/82 ,  H01L21/50

CPC classification number: H01L21/563 ,  B81B2201/0214 ,  B81B2201/0292 ,  B81C1/00238 ,  B81C2203/035 ,  H01L24/16 ,  H01L24/81 ,  H01L2224/1134 ,  H01L2224/131 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/26175 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/81193 ,  H01L2224/814 ,  H01L2224/81815 ,  H01L2224/94 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/014 ,  H01L2924/01014 ,  H01L2924/00014 ,  H01L2224/11 ,  H01L2924/00

Abstract: An integrated circuit that senses a phenomenon, such as a magnetic field, may be mounted upside down on a carrier substrate so that the electrical connections to the integrated sensor circuit may be made on the side facing the carrier. This eliminates the need for wirebonds on the side of the sensor integrated circuit that faces the phenomenon being sensed, thereby substantially eliminating any uneven topography on that side. The sensor integrated circuit is able to sense the phenomenon by sensing it through the body of the sensor integrated circuit. The body of the sensor integrated circuit may have a thickness within a vicinity of fifty microns.

Abstract translation: 可以将检测诸如磁场的现象的集成电路倒置在载体基板上，使得可以在面向载体的一侧上形成与集成传感器电路的电连接。 这消除了在面对感测现象的传感器集成电路侧面上的引线的需要，从而基本上消除了该侧的任何不均匀的形貌。 传感器集成电路能够通过传感器集成电路的主体感测这种现象。 传感器集成电路的主体可以具有在50微米附近的厚度。

公开(公告)号：US20110185458A1

公开(公告)日：2011-07-28

申请号：US13057701

申请日：2009-08-06

Applicant: Jeffrey William Kysar ,  James C. Hone ,  Changgu Lee ,  Xiaoding Wei

Inventor： Jeffrey William Kysar ,  James C. Hone ,  Changgu Lee ,  Xiaoding Wei

IPC: G01Q80/00 ,  G01L25/00 ,  G01Q40/00 ,  G01L1/04

CPC classification number: B81C99/003 ,  B81B2201/0292

Abstract: Force, pressure, or stiffness measurement or calibration can be provided, such as by using a graphene or other sheet membrane, which can provide a specified number of monolayers suspended over a substantially circular well. In an example, the apparatus can include a substrate, including a substantially circular well. A deformable sheet membrane can be suspended over the well. The membrane can be configured to include a specified integer number of one or more monolayers. A storage medium can comprise accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure.

Abstract translation: 可以提供力，压力或刚度测量或校准，例如通过使用石墨烯或其它片膜，其可以提供悬浮在基本圆形孔上的指定数量的单层。 在一个示例中，该装置可以包括基底，包括基本圆形的孔。 可变形的薄膜可以悬挂在井上。 膜可以被配置为包括指定整数的一个或多个单层。 存储介质可以包括关于悬浮的膜或基底的附带信息，其中悬浮膜的偏转位移响应到施加的力或压力，提供所施加的力或压力的测量。

公开(公告)号：US07911010B2

公开(公告)日：2011-03-22

申请号：US11879462

申请日：2007-07-17

Applicant: Joseph R. Stetter

Inventor： Joseph R. Stetter

IPC: H01L29/82

CPC classification number: B81B3/0059 ,  B81B2201/0214 ,  B81B2201/0278 ,  B81B2201/0292 ,  B81B2203/0118

Abstract: A universal microelectromechanical MEMS nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables.

Abstract translation: 一种通用微机电MEMS纳米传感器平台，其具有在表面上以图案沉积的衬底和导电层，以同时制造多个器件，图案化绝缘层，其中绝缘层被配置为暴露导电的一个或多个部分 层和沉积在导电层的暴露部分上的一个或多个官能化层。 功能化层适于提供从由以下组成的组中选择的一个或多个换能器传感器类：用于化学和物理变量的辐射，电化学，电子，机械，磁性和热传感器。

公开(公告)号：US07874219B2

公开(公告)日：2011-01-25

申请号：US12306012

申请日：2007-06-15

Applicant: Roman Frahnow ,  Arno Steckenborn

Inventor： Roman Frahnow ,  Arno Steckenborn

IPC: G01F1/84

CPC classification number: G01F1/8495 ,  B81B3/0032 ,  B81B2201/0292 ,  B81B2201/058 ,  G01F1/8445 ,  G01F1/8477

Abstract: In a micromechanical sensor (11) for measuring a mass flow rate in accordance with the Coriolis principle, two line sections (13) are mounted in a suspension means (24) such that they can oscillate, as a result of which they can be caused to oscillate in phase opposition (essential for the measuring principle). A spacer layer (18) is provided between the layers (12a, 12b) forming the line sections (13), the spacer layer ensuring that there is a space between the line sections (13) in the quiescent state. Oscillation of the line sections in phase opposition only becomes possible at all as a result of this since this prevents collision of the line sections (13) as they approach one another.

Abstract translation: 在用于根据科里奥利原理测量质量流量的微机械传感器（11）中，两个线段（13）安装在悬挂装置（24）中，使得它们可以振荡，结果可能导致它们 以相反的方式振荡（对测量原理至关重要）。 间隔层（18）设置在形成线路段（13）的层（12a，12b）之间，间隔层确保在静止状态下的线段（13）之间存在空间。 因此，由于这样可以防止线路部分（13）在彼此接近时发生碰撞，所以相位相反的线路部分的振荡完全是可能的。