公开(公告)号：US08860450B2

公开(公告)日：2014-10-14

申请号：US13409488

申请日：2012-03-01

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/00 ,  G01R1/04 ,  G01R31/28

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

公开(公告)号：US20140225636A1

公开(公告)日：2014-08-14

申请号：US14131080

申请日：2012-07-06

Applicant: Bryan J. Root ,  William A. Funk ,  John L. Dunklee

Inventor： Bryan J. Root ,  William A. Funk ,  John L. Dunklee

IPC: G01R1/04

CPC classification number: G01R1/07364 ,  G01R1/0466 ,  G01R1/073 ,  G01R31/26 ,  G01R31/2889

Abstract: A probe apparatus has probe wires with a contact pattern on one side. The contact pattern is for contacting a respective contact pattern on another test equipment or component, such as a circuit board. The probe wires have tips that probe a device desired for testing. Signals are transmitted through the probe wires from the probe card, for example, through a circuit board to other diagnostic equipment. The contact of the probe card with the circuit board allows signals to be transferred through the probe wires to the other diagnostic equipment. On another side of the probe card is a connector structure. The connector structure includes a retainer that can allow the probe card to be replaced from a test system, such as allowing it to be connected and disconnected from a holder.

Abstract translation: 探针装置具有在一侧具有接触图案的探针线。 接触图案用于接触另一测试设备或组件（例如电路板）上的相应接触图案。 探针线具有探测需要测试的设备的尖端。 信号通过探针线从探针卡传输，例如通过电路板传输到其他诊断设备。 探针卡与电路板的接触允许通过探针线将信号传输到另一个诊断设备。 在探针卡的另一侧是连接器结构。 连接器结构包括保持器，其可以允许探针卡从测试系统更换，例如允许探针卡与支架连接和断开。

公开(公告)号：US08354856B2

公开(公告)日：2013-01-15

申请号：US12539208

申请日：2009-08-11

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/00

CPC classification number: G01R31/2889 ,  G01R1/07364 ,  G01R31/2886

Abstract: A probe apparatus for probing a device on a semiconductor wafer to be tested by a testing equipment is provided. The probe apparatus includes a replaceable probe tile removably mounted in a probing location on a base plate. The probe tile is configured into a self-contained assembly which includes a chassis body containing a plurality of probes for probing devices on a wafer, a dielectric block for supporting the probes, and a wireguide for guiding a plurality of cables from the testing equipment into the chassis body. A wafer station having replaceable base plates and replaceable probe tiles are also provided.

公开(公告)号：USD654033S1

公开(公告)日：2012-02-14

申请号：US29354193

申请日：2010-01-20

Applicant: Bryan J. Root ,  William A. Funk

Designer： Bryan J. Root ,  William A. Funk

公开(公告)号：US20090295416A1

公开(公告)日：2009-12-03

申请号：US12539208

申请日：2009-08-11

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R1/06

CPC classification number: G01R31/2889 ,  G01R1/07364 ,  G01R31/2886

Abstract: A probe apparatus for probing a device on a semiconductor wafer to be tested by a testing equipment is provided. The probe apparatus includes a replaceable probe tile removably mounted in a probing location on a base plate. The probe tile is configured into a self-contained assembly which includes a chassis body containing a plurality of probes for probing devices on a wafer, a dielectric block for supporting the probes, and a wireguide for guiding a plurality of cables from the testing equipment into the chassis body. A wafer station having replaceable base plates and replaceable probe tiles are also provided.

Abstract translation: 提供一种用于探测要由测试设备测试的半导体晶片上的器件的探针装置。 探针装置包括可拆卸地安装在基板上的探测位置的可更换的探针瓦。 探针瓦被配置成一个独立的组件，该组件包括一个底盘主体，该主体包含用于探测晶片上的装置的多个探针，用于支撑探针的介质块，以及用于将多条电缆从测试设备引导到 底盘主体。 还提供了具有可替换的基板和可更换的探针瓦的晶圆台。

公开(公告)号：US20140210501A1

公开(公告)日：2014-07-31

申请号：US14131072

申请日：2012-07-06

Applicant: Bryan J. Root ,  William A. Funk ,  John L. Dunklee

Inventor： Bryan J. Root ,  William A. Funk ,  John L. Dunklee

IPC: G01R1/073

CPC classification number: G01R1/07307 ,  G01R1/07364 ,  G01R31/2601 ,  G01R31/2889

Abstract: A probe apparatus has probe wires with a contact pattern on one side. The contact pattern is for contacting a respective contact pattern on another test equipment or component, such as a circuit board. The probe wires have tips that probe a device desired for testing. Signals are transmitted through the probe wires from the probe card, for example, through a circuit board to other diagnostic equipment. The contact of the probe card with the circuit board allows signals to be transferred through the probe wires to the other diagnostic equipment. On another side of the probe card is a connector structure. The connector structure includes a retainer that can allow the probe card to be replaced from a test system, such as allowing it to be connected and disconnected from a holder.

Abstract translation: 探针装置具有在一侧具有接触图案的探针线。 接触图案用于接触另一测试设备或组件（例如电路板）上的相应接触图案。 探针线具有探测需要测试的设备的尖端。 信号通过探针线从探针卡传输，例如通过电路板传输到其他诊断设备。 探针卡与电路板的接触允许通过探针线将信号传输到另一个诊断设备。 在探针卡的另一侧是连接器结构。 连接器结构包括保持器，其可以允许探针卡从测试系统更换，例如允许探针卡与支架连接和断开。

公开(公告)号：US08149009B2

公开(公告)日：2012-04-03

申请号：US12820640

申请日：2010-06-22

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/00

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。

公开(公告)号：US20110204912A1

公开(公告)日：2011-08-25

申请号：US13010234

申请日：2011-01-20

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/20 ,  H05K3/36

CPC classification number: G01R31/2889 ,  G01R1/07378 ,  G01R3/00 ,  G01R31/2886 ,  H05K1/117 ,  H05K3/325 ,  H05K2201/09027 ,  H05K2201/09063 ,  H05K2201/09227 ,  H05K2203/167 ,  Y10T29/49126 ,  Y10T29/49128

Abstract: A probe core includes a frame, a wire guide connected to the frame, a probe tile, and a plurality of probe wires supported by the wire guide and probe tile. Each probe wire includes an end configured to probe a device, such as a semiconductor wafer. Each probe wire includes a signal transmitting portion and a guard portion. The probe core further includes a lock mechanism supported by the frame. The lock mechanism is configured to allow the probe core to be connected and disconnected to another test equipment or component, such as a circuit board. As one example, the probe core is configured to connect and disconnect from the test equipment or component in a rotatable lock and unlock operation or twist lock/unlock operation, where the frame is rotated relative to remainder of the core to lock/unlock the probe core.

Abstract translation: 探针芯包括框架，连接到框架的导线引导件，探针瓦片和由导线器和探针瓦片支撑的多个探针线。 每个探针线包括构造成探测诸如半导体晶片的器件的端部。 每个探针线包括信号传输部分和防护部分。 探针芯还包括由框架支撑的锁定机构。 锁定机构被配置为允许探针芯与诸如电路板的另一个测试设备或部件连接和断开。 作为一个示例，探针芯被配置为在可旋转的锁定和解锁操作或扭转锁定/解锁操作中连接和断开测试设备或组件，其中框架相对于芯的其余部分旋转以锁定/解锁探针 核心。

公开(公告)号：USD639755S1

公开(公告)日：2011-06-14

申请号：US29354190

申请日：2010-01-20

Applicant: Bryan J. Root ,  William A. Funk

Designer： Bryan J. Root ,  William A. Funk

公开(公告)号：US20100259288A1

公开(公告)日：2010-10-14

申请号：US12820640

申请日：2010-06-22

Applicant: Bryan J. Root ,  William A. Funk

Inventor： Bryan J. Root ,  William A. Funk

IPC: G01R31/02

CPC classification number: G01R1/0416 ,  G01R1/04 ,  G01R1/067 ,  G01R31/26 ,  G01R31/2601 ,  G01R31/2831

Abstract: A probe apparatus and method of terminating a probe that probes a semiconductor device with a signal cable from a tester side by side at a proximal end of the probe and a distal end of the signal cable. In one embodiment, the probe apparatus includes: a chassis; a dielectric block mounted in the chassis for retaining the probe, the probe extending on the chassis from a proximal end of the probe to the dielectric block, extending through the dielectric block, and projecting from the dielectric block towards the semiconductor device at a distal end of the probe; and a terminating apparatus, mounted in the chassis, for terminating the proximal end of the probe with a distal end of the signal cable side by side.

Abstract translation: 一种探针装置和方法，用于在探头的近端和信号电缆的远端处端接一个探测器，用探测器将信号电缆从测试仪并排测量。 在一个实施例中，探针装置包括：底盘; 安装在底盘中的用于保持探针的介质块，探针从探针的近端延伸到介质块的底架上延伸穿过介质块，并且在远端从介质块朝向半导体器件突出 的探针; 以及安装在底盘中的端接装置，用于以信号电缆的远端并排端接探头的近端。