公开(公告)号：US11735401B2

公开(公告)日：2023-08-22

申请号：US17466912

申请日：2021-09-03

Applicant: Applied Materials, Inc.

Inventor： Chuang-Chia Lin ,  Upendra Ummethala ,  Steven E. Babayan ,  Lei Lian

IPC: G01J3/443 ,  G01J3/02 ,  H01J37/32 ,  H01J37/22

CPC classification number: H01J37/32917 ,  G01J3/0218 ,  G01J3/443 ,  H01J37/22 ,  H01J2237/24585

Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.

公开(公告)号：US11437261B2

公开(公告)日：2022-09-06

申请号：US16217036

申请日：2018-12-11

Applicant: Applied Materials, Inc.

Inventor： Yogananda Sarode Vishwanath ,  Steven E. Babayan ,  Stephen Donald Prouty ,  Álvaro García De Gorordo ,  Andreas Schmid ,  Andrew Antoine Noujaim

IPC: H05B3/68 ,  H01L21/683 ,  H01L21/67

Abstract: Embodiments described herein relate to a substrate support assembly which enables a cryogenic temperature operation of an electrostatic chuck (ESC) so that a substrate disposed thereon is maintained at a cryogenic processing temperature suitable for processing while other surfaces of a processing chamber are maintained at a different temperature. The substrate support assembly includes an electrostatic chuck (ESC), an ESC base assembly coupled to the ESC having a refrigerant channel disposed therein, and a facility plate having a coolant channel disposed therein. The facility plate includes a plate portion and a flange portion. The plate portion is coupled to the ESC base assembly and the flange portion coupled to the ESC with a seal assembly. A vacuum region is defined by the ESC, the ESC base assembly, the plate portion of the facility plate, the flange portion of the facility plate, and the seal assembly.

公开(公告)号：US20210398785A1

公开(公告)日：2021-12-23

申请号：US17466912

申请日：2021-09-03

Applicant: Applied Materials, Inc.

Inventor： Chuang-Chia Lin ,  Upendra Ummethala ,  Steven E. Babayan ,  Lei Lian

IPC: H01J37/32 ,  H01J37/22 ,  G01J3/443 ,  G01J3/02

Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.

公开(公告)号：US20210351063A1

公开(公告)日：2021-11-11

申请号：US17365612

申请日：2021-07-01

Applicant: Applied Materials, Inc.

Inventor： Yogananda Sarode Vishwanath ,  Steven E. Babayan ,  Stephen Prouty ,  Andreas Schmid

IPC: H01L21/687 ,  C23C16/458 ,  H01J37/32 ,  H01L21/677 ,  H01L21/683

Abstract: Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.

公开(公告)号：US11114286B2

公开(公告)日：2021-09-07

申请号：US16378271

申请日：2019-04-08

Applicant: Applied Materials, Inc.

Inventor： Chuang-Chia Lin ,  Upendra Ummethala ,  Steven E. Babayan ,  Lei Lian

IPC: H01J37/32 ,  H01J37/22 ,  G01J3/443 ,  G01J3/02 ,  G01J3/28

Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.

公开(公告)号：US20200321201A1

公开(公告)日：2020-10-08

申请号：US16378271

申请日：2019-04-08

Applicant: Applied Materials, Inc.

Inventor： Chuang-Chia Lin ,  Upendra Ummethala ,  Steven E. Babayan ,  Lei Lian

IPC: H01J37/32 ,  H01J37/22 ,  G01J3/02 ,  G01J3/443

Abstract: Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.

公开(公告)号：US10535544B2

公开(公告)日：2020-01-14

申请号：US15212946

申请日：2016-07-18

Applicant: Applied Materials, Inc.

Inventor： Vijay D. Parkhe ,  Steven E. Babayan ,  Konstantin Makhratchev ,  Zhiqiang Guo ,  Phillip R. Sommer ,  Dan A. Marohl

IPC: H01L21/683 ,  H01L21/67 ,  H05B1/02 ,  H05B3/02

Abstract: Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters.

公开(公告)号：US10409295B2

公开(公告)日：2019-09-10

申请号：US15396619

申请日：2016-12-31

Applicant: Applied Materials, Inc.

Inventor： Ming Xu ,  Sushant S. Koshti ,  Michael R. Rice ,  Steven E. Babayan ,  Jennifer Y. Sun

IPC: G05D7/06 ,  G01F1/684 ,  G01F1/696 ,  G01F15/14 ,  G01F15/18 ,  C23C14/54 ,  C23C16/52

Abstract: An electronic device manufacturing system includes a mass flow controller (MFC) that has a thermal flow sensor. The thermal flow sensor may measure a mass flow rate and may include a sensor tube having an inner surface coated with a material to form an inner barrier layer. The inner barrier layer may prevent or substantially reduce the likelihood of a corrosive reaction from occurring on the inner surface, which may prevent or reduce the likelihood of the MFC drifting beyond the MFC's mass flow rate accuracy specifications. This may improve the repeatability of flow detection by the MFC. Methods of measuring and controlling a mass flow rate in an electronic device manufacturing system are also provided, as are other aspects.