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    CMOS INTEGRATED MICROHEATER FOR A GAS SENSOR DEVICE
    22.
    发明申请
    CMOS INTEGRATED MICROHEATER FOR A GAS SENSOR DEVICE 审中-公开

    公开(公告)号：US20170205368A1

    公开(公告)日：2017-07-20

    申请号：US15000729

    申请日：2016-01-19

    Applicant: INVENSENSE, INC.

    Inventor： Fang Liu ,  Jim Salvia ,  Zhineng Zhu ,  Michael Perrott

    IPC: G01N27/14 ,  H01L23/34

    Abstract: A gas sensor device with temperature uniformity is presented herein. In an implementation, a device includes a complementary metal-oxide semiconductor (CMOS) substrate layer, a dielectric layer and a gas sensing layer. The dielectric layer is deposited on the CMOS substrate layer. Furthermore, the dielectric layer includes a temperature sensor and a heating element coupled to a heat transfer layer associated with a set of metal interconnections. The gas sensing layer is deposited on the dielectric layer.

    Systems and apparatus having top port integrated back cavity micro electro-mechanical system microphones and methods of fabrication of the same
    23.
    发明授权
    Systems and apparatus having top port integrated back cavity micro electro-mechanical system microphones and methods of fabrication of the same 有权

    公开(公告)号：US09621975B2

    公开(公告)日：2017-04-11

    申请号：US14558911

    申请日：2014-12-03

    Applicant: INVENSENSE, INC.

    Inventor： Fang Liu ,  Martin Lim

    IPC: H04R3/00 ,  H04R1/08 ,  H04R19/00

    CPC classification number: H04R1/08 ,  H04R19/005 ,  H04R2201/003

    Abstract: A micro electro-mechanical system (MEMS) device is provided. The MEMS device includes: a first substrate having a first surface and a second surface, and a port disposed through the first substrate, wherein the port is configured to receive acoustic waves and wherein the first surface is exposed to an environment outside the MEMS device; and a diaphragm coupled to and facing the second surface and configured to deflect in response to pressure differential at the diaphragm in response to the received acoustic waves. The MEMS device also includes a second substrate coupled to and facing the diaphragm, and including circuitry, wherein the second substrate includes a recess region forming an integrated back cavity in the MEMS device. The MEMS device also includes an electrical connection electrically coupling the first substrate and the second substrate and configured to transmit an electrical signal indicative of the deflection of the diaphragm.

    MICROELECTROMECHANICAL MICROPHONE WITH DIFFERENTIAL CAPACITIVE SENSING
    24.
    发明申请
    MICROELECTROMECHANICAL MICROPHONE WITH DIFFERENTIAL CAPACITIVE SENSING 审中-公开
    具有差分电容感应的微电子麦克风

    公开(公告)号：US20160360322A1

    公开(公告)日：2016-12-08

    申请号：US14733560

    申请日：2015-06-08

    Applicant: INVENSENSE, INC.

    Inventor： Fang Liu ,  Michael Daneman ,  Thomas Chen

    IPC: H04R19/04 ,  H04R31/00 ,  H04R7/16

    CPC classification number: H04R19/04 ,  H04R19/005 ,  H04R31/00

    Abstract: Microelectromechanical microphones include structures that permit differential capacitive sensing. In certain structures, a movable plate is disposed between a rigid plate and a substrate. A first capacitor is formed between the movable plate and the substrate and a second capacitor is formed between the movable plate and the rigid plate. Respective bias voltages can be applied to the rigid plate and the substrate, and a differential capacitive signal can be probed in response to displacement of the movable plate caused by a pressure wave. The movable plate and the rigid plate are mechanically coupled to first and second portions of the substrate, respectively. A dielectric member mechanically couples the movable plate and the rigid plate, thus providing mechanical stability.

    Abstract translation: 微电子麦克风包括允许差分电容感测的结构。 在某些结构中，可动板设置在刚性板和衬底之间。 在可动板和基板之间形成第一电容器，在可动板和刚性板之间形成第二电容器。 可以对刚性板和衬底施加相应的偏置电压，并且可以响应于由压力波引起的可移动板的位移来探测差分电容信号。 可移动板和刚性板分别机械耦合到基板的第一和第二部分。 电介质构件将可动板与刚性板机械连接，从而提供机械稳定性。

    PIEZOELECTRIC ACOUSTIC RESONATOR BASED SENSOR
    26.
    发明申请
    PIEZOELECTRIC ACOUSTIC RESONATOR BASED SENSOR 有权
    基于压电声学谐振器的传感器

    公开(公告)号：US20160041047A1

    公开(公告)日：2016-02-11

    申请号：US14453326

    申请日：2014-08-06

    Applicant: INVENSENSE, INC.

    Inventor： Fang Liu ,  Julius Ming-Lin Tsai ,  Xiang Li ,  Mike Daneman

    IPC: G01L1/16

    CPC classification number: G01L1/165 ,  G06F3/0436 ,  H03K17/96 ,  H03K17/9643 ,  H03K2217/96003

    Abstract: A piezoelectric acoustic resonator based sensor is presented herein. A device can include an array of piezoelectric transducers and an array of cavities that has been attached to the array of piezoelectric transducers to form an array of resonators. A resonator of the array of resonators can be associated with a first frequency response corresponding to a first determination that the resonator has been touched, and a second frequency response corresponding to a second determination that the resonator has not been touched. The array of piezoelectric transducers can include a piezoelectric material; a first set of electrodes that has been formed a first side of the piezoelectric material; and a second set of electrodes that has been formed on second side of the piezoelectric material.

    Abstract translation: 本文介绍了一种基于压电声谐振器的传感器。 器件可以包括压电换能器的阵列和已经附接到压电换能器阵列以形成谐振器阵列的空腔阵列。 谐振器阵列的谐振器可以与对应于谐振器已被触摸的第一确定的第一频率响应和对应于谐振器未被触摸的第二确定的第二频率响应相关联。 压电换能器阵列可包括压电材料; 已经形成为压电材料的第一侧的第一组电极; 以及已经形成在压电材料的第二侧上的第二组电极。

    Low Frequency Response Microphone Diaphragm Structures And Methods For Producing The Same
    28.
    发明申请
    Low Frequency Response Microphone Diaphragm Structures And Methods For Producing The Same 有权
    低频响应麦克风隔膜结构及其制造方法

    公开(公告)号：US20150125984A1

    公开(公告)日：2015-05-07

    申请号：US14592844

    申请日：2015-01-08

    Applicant: Invensense, Inc.

    Inventor： Fang Liu ,  Kuang L. Yang

    IPC: B81C1/00

    CPC classification number: B81C1/00523 ,  B81B3/0078 ,  B81B2201/0257 ,  B81C1/00158

    Abstract: A microphone system includes a diaphragm suspended by springs and including a sealing layer that seals passageways which, if left open, would degrade the microphone's frequency response by allowing air to pass from one side of the diaphragm to the other when the diaphragm is responding to an incident acoustic signal. In some embodiments, the sealing layer may include an equalization aperture to allow pressure to equalize on both sides of the diaphragm.

    Abstract translation: 麦克风系统包括由弹簧悬挂的隔膜，并且包括密封层，该密封层密封通道，如果保持打开状态，则当隔膜响应于该隔膜时，通过允许空气从隔膜的一侧通过而将降低麦克风的频率响应 入射声信号。 在一些实施例中，密封层可以包括均衡孔，以允许压力在隔膜的两侧均衡。

    Microphone System with Mechanically-Coupled Diaphragms
    29.
    发明申请
    Microphone System with Mechanically-Coupled Diaphragms 有权
    具有机械耦合隔膜的麦克风系统

    公开(公告)号：US20140133685A1

    公开(公告)日：2014-05-15

    申请号：US13673324

    申请日：2012-11-09

    Applicant: Invensense, Inc.

    Inventor： Fang Liu ,  Kuang L. Yang

    IPC: H04R1/04

    CPC classification number: H04R19/04 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2201/0257 ,  H04R1/2807 ,  H04R3/005 ,  H04R7/06 ,  H04R7/20 ,  H04R19/005 ,  H04R31/006

    Abstract: A microphone system has two diaphragms and are mechanically interconnected such that they respond in antiphase to an acoustic signal impinging on one of the diaphragms. The two diaphragms produce two variable capacitances that vary proportionately but inversely to one another. Voltage signals produced by the two variable capacitances are summed to provide an output signal proportional to the acoustic signal, but with greater sensitivity than a single-diaphragm microphone.

    Abstract translation: 麦克风系统具有两个隔膜并且机械互连，使得它们反向响应于撞击在其中一个隔膜上的声学信号。 两个隔膜产生两个可变电容，这些电容彼此成比例地但是相反地变化。 由两个可变电容产生的电压信号被相加以提供与声信号成比例的输出信号，但是具有比单隔膜麦克风更高的灵敏度。

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