Method for damascene formation using plug materials having varied etching rates

    公开(公告)号:US20060099787A1

    公开(公告)日:2006-05-11

    申请号:US10983681

    申请日:2004-11-09

    CPC classification number: H01L21/76808

    Abstract: Methods for forming openings in damascene structures, such as dual damascene structures are provided, using plug materials having varied etching rates. In one embodiment, a semiconductor substrate is provided with a low-k material layer formed thereabove, the low-k material layer having an upper surface and at least one via opening formed therethrough. A first plug material layer is formed over the low-k material layer and filled in the via opening, the first plug material layer having a first etching rate. The first plug material layer is etched back to form a first plug partially filling the via opening. A second plug material layer is formed over the low-k material layer and the first plug. The second plug material layer is etched back to form a second plug partially below the upper surface of the low-k material layer, the second plug material layer having a second etching rate higher than the first etching rate.

    Metal oxide metal capacitor with slot vias
    24.
    发明授权
    Metal oxide metal capacitor with slot vias 有权
    带通孔的金属氧化物金属电容器

    公开(公告)号:US08379365B2

    公开(公告)日:2013-02-19

    申请号:US12768001

    申请日:2010-04-27

    Abstract: A capacitor includes the first electrode including the first conductive lines and vias. The first conductive lines on the same layer are parallel to each other and connected to a first periphery conductive line. The first conductor lines are aligned in adjacent layers and are coupled to each other by the vias. The capacitor further includes a second electrode aligned opposite to the first electrode including second conductive lines and vias. The second conductive lines on the same layer are parallel to each other and connected to a second periphery conductive line. The second conductor lines are aligned in adjacent layers and are coupled to each other by the vias. The capacitor further includes oxide layers formed between the first electrode and the second electrode. The vias have rectangular (slot) shapes on a layout. In one embodiment, the conductive lines and vias are metal, e.g. copper, aluminum, or tungsten.

    Abstract translation: 电容器包括包括第一导电线和通孔的第一电极。 同一层上的第一导电线彼此平行并且连接到第一周边导电线。 第一导体线在相邻层中对准并且通过通孔彼此耦合。 电容器还包括与包括第二导电线和通孔的第一电极对准的第二电极。 相同层上的第二导电线彼此平行并连接到第二外围导电线。 第二导体线在相邻层中对准并且通过通孔彼此耦合。 电容器还包括形成在第一电极和第二电极之间的氧化物层。 通孔在布局上具有矩形(槽)形状。 在一个实施例中,导电线和通孔是金属,例如。 铜,铝或钨。

    TOUCH PANEL AND METHOD OF REDUCING NOISE COUPLED BY A COMMON VOLTAGE OF A TOUCH PANEL
    25.
    发明申请
    TOUCH PANEL AND METHOD OF REDUCING NOISE COUPLED BY A COMMON VOLTAGE OF A TOUCH PANEL 有权
    触控面板和降低由触控面板共通电压耦合的噪音的方法

    公开(公告)号:US20120146920A1

    公开(公告)日:2012-06-14

    申请号:US13072803

    申请日:2011-03-28

    CPC classification number: G06F3/041 G02F1/13338 G06F3/0412 G06F3/0418

    Abstract: A touch panel includes a touch sensor, a liquid crystal panel, and a reverse circuit. The reverse circuit receives common voltage ripples of the liquid crystal panel, and outputs reversed common voltage ripples after reversing the common voltage ripples. After the touch sensor receives the reversed common voltage ripples, the touch sensor outputs a sensing signal according to the reversed common voltage ripples.

    Abstract translation: 触摸面板包括触摸传感器,液晶面板和反向电路。 反向电路接收液晶面板的公共电压波纹,并在反转公共电压纹波之后输出反向的公共电压纹波。 在触摸传感器接收到反向的公共电压波纹之后,触摸传感器根据反向的公共电压纹波输出感测信号。

    Seal ring structures with reduced moisture-induced reliability degradation
    26.
    发明授权
    Seal ring structures with reduced moisture-induced reliability degradation 有权
    密封环结构具有减少的水分诱导的可靠性降低

    公开(公告)号:US07893459B2

    公开(公告)日:2011-02-22

    申请号:US11786076

    申请日:2007-04-10

    CPC classification number: H01L23/585 H01L2924/0002 H01L2924/00

    Abstract: A semiconductor chip includes a seal ring adjacent to edges of the semiconductor chip; an opening extending from a top surface to a bottom surface of the seal ring, wherein the opening has a first end on an outer side of the seal ring and a second end on an inner side of the seal ring; and a moisture barrier having a sidewall parallel to a nearest side of the seal ring, wherein the moisture barrier is adjacent the seal ring and has a portion facing the opening.

    Abstract translation: 半导体芯片包括与半导体芯片的边缘相邻的密封环; 从所述密封环的顶表面延伸到底表面的开口,其中所述开口具有在所述密封环的外侧上的第一端和所述密封环的内侧上的第二端; 以及具有平行于所述密封环的最近侧的侧壁的防潮屏障,其中所述防潮层邻近所述密封环并且具有面向所述开口的部分。

    DISPLAY DEVICE HAVING BI-DIRECTIONAL SCAN MECHANISM AND GATE SIGNAL SCANNING METHOD THEREOF
    27.
    发明申请
    DISPLAY DEVICE HAVING BI-DIRECTIONAL SCAN MECHANISM AND GATE SIGNAL SCANNING METHOD THEREOF 审中-公开
    具有双向扫描机制的显示装置及其门信号扫描方法

    公开(公告)号:US20110025590A1

    公开(公告)日:2011-02-03

    申请号:US12630852

    申请日:2009-12-04

    CPC classification number: G09G3/3677 G09G2310/0283 G09G2310/0286 G11C19/28

    Abstract: A display device having bi-directional scan mechanism includes a plurality of gate lines, a first shift register circuit and a second shift register circuit. The first shift register circuit includes a plurality of forward shift register stages. The second shift register circuit includes a plurality of backward shift register stages. Each of the gate lines is electrically connected to both a corresponding forward shift register stage and a corresponding backward shift register stage. When the first shift register circuit is enabled, the forward shift register stages are employed to provide plural forward gate signals sequentially enabled for scanning the gate lines based on a first sequence. When the second shift register circuit is enabled, the backward shift register stages are employed to provide plural backward gate signals sequentially enabled for scanning the gate lines based on a second sequence opposite to the first sequence.

    Abstract translation: 具有双向扫描机构的显示装置包括多条栅极线,第一移位寄存器电路和第二移位寄存器电路。 第一移位寄存器电路包括多个正向移位寄存器级。 第二移位寄存器电路包括多个反向移位寄存器级。 每个栅极线电连接到相应的正移位寄存器级和相应的反向移位寄存器级。 当第一移位寄存器电路被使能时,采用正向移位寄存器级以提供依次使能的多个正向栅极信号,以便基于第一序列扫描栅极线。 当第二移位寄存器电路被使能时,采用反向移位寄存器级来提供多个反向栅极信号,该反向栅极信号基于与第一序列相反的第二序列而能够扫描栅极线。

    Process for improving the reliability of interconnect structures and resulting structure
    28.
    发明申请
    Process for improving the reliability of interconnect structures and resulting structure 有权
    提高互连结构和结构结构可靠性的方法

    公开(公告)号:US20080014741A1

    公开(公告)日:2008-01-17

    申请号:US11487741

    申请日:2006-07-17

    Abstract: An interconnect structure of an integrated circuit having improved reliability and a method for forming the same are provided. The method includes providing a substrate, forming a dielectric layer overlying the substrate, performing a first shrinking process, wherein the dielectric layer shrinks and has a first shrinkage rate, forming a conductive feature in the dielectric layer after the step of performing the first shrinking process, and performing a second shrinking process after the step of forming the conductive feature, wherein the dielectric layer substantially shrinks and has a second shrinkage rate.

    Abstract translation: 提供了具有改善的可靠性的集成电路的互连结构及其形成方法。 该方法包括提供衬底,形成覆盖在衬底上的电介质层,执行第一收缩过程,其中电介质层收缩并具有第一收缩率,在执行第一收缩过程的步骤之后在介电层中形成导电特征 并且在形成导电特征的步骤之后执行第二收缩过程,其中介电层基本上收缩并且具有第二收缩率。

    Method and apparatus for enhanced CMP planarization using surrounded dummy design
    29.
    发明授权
    Method and apparatus for enhanced CMP planarization using surrounded dummy design 有权
    使用包围的虚拟设计来增强CMP平坦化的方法和装置

    公开(公告)号:US07235424B2

    公开(公告)日:2007-06-26

    申请号:US11181433

    申请日:2005-07-14

    CPC classification number: H01L21/3212 H01L21/31053

    Abstract: In one embodiment, the disclosure relates to a method and apparatus for inserting dummy patterns in sparsely populated portions of a metal layer. The dummy pattern counters the effects of variations of pattern density in a semiconductor layout which can cause uneven post-polish film thickness. An algorithm according to one embodiment of the disclosure determines the size and location of the dummy patterns based on the patterns in the metal layer by first surrounding the metal structure with small dummy pattern and then filling any remaining voids with large dummy patterns.

    Abstract translation: 在一个实施例中,本发明涉及一种用于在金属层的稀疏填充部分中插入虚拟图案的方法和装置。 虚拟图案反映了可能导致不均匀的后抛光膜厚度的半导体布局中的图案密度变化的影响。 根据本公开的一个实施例的算法基于金属层中的图案来确定虚拟图案的尺寸和位置,首先以小的虚拟图案围绕金属结构,然后用大的虚拟图案填充任何剩余的空隙。

    Metal oxide metal capacitor with slot vias
    30.
    发明授权
    Metal oxide metal capacitor with slot vias 有权
    带通孔的金属氧化物金属电容器

    公开(公告)号:US09425330B2

    公开(公告)日:2016-08-23

    申请号:US13745238

    申请日:2013-01-18

    Abstract: A capacitor includes a first electrode including a plurality of first conductive lines, at least one first via, and at least one second via. The first conductive lines are parallel and connected to a first periphery conductive line. The first conductor lines in adjacent layers are coupled by the at least one first and second via. The at least one first via has a first length, and the at least one second via has a second length. The capacitor includes a second electrode opposite to the first electrode. The second electrode includes a plurality of second conductive lines and at least one third via. The second conductive lines are parallel and connected to a second periphery conductive line. The second conductor lines in adjacent layers are coupled by the at least one third via. The capacitor includes at least one oxide layer between the first electrode and the second electrode.

    Abstract translation: 电容器包括包括多个第一导电线,至少一个第一通孔和至少一个第二通孔的第一电极。 第一导线平行并连接到第一外围导电线。 相邻层中的第一导体线通过至少一个第一和第二通孔耦合。 所述至少一个第一通孔具有第一长度,并且所述至少一个第二通孔具有第二长度。 电容器包括与第一电极相对的第二电极。 第二电极包括多个第二导电线和至少一个第三通孔。 第二导线平行并连接到第二周边导线。 相邻层中的第二导体线通过至少一个第三通孔耦合。 电容器包括在第一电极和第二电极之间的至少一个氧化物层。

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