SYSTEM AND METHODS FOR ACTUATION USING ELECTRO-OSMOSIS
    27.
    发明申请
    SYSTEM AND METHODS FOR ACTUATION USING ELECTRO-OSMOSIS 有权
    使用电致病毒作用的系统和方法

    公开(公告)号:US20150210534A1

    公开(公告)日:2015-07-30

    申请号:US14422654

    申请日:2013-08-20

    Abstract: The invention exploits a widely used device in micro-fluidics, the electro-osmotic pump (EOP), to create very low energy micro-scale and macro-scale mechanical actuators. The EOP uses electrical fields to move naturally occurring charged particles (ions) through a fluid medium. As the ions move in response to the applied field, they drag the (non-charged) fluid along, establishing bulk flow. When confined to a narrow chamber, a pressure gradient can be established. The combination of pressure gradient and flow performs mechanical work. With the use of electro-osmotic pumps, the invention enables actuators to be constructed in a variety of embodiments, including for example, a sheet structure, a piston structure, and a cellular structure to name a few.

    Abstract translation: 本发明利用了广泛使用的微流体学设备,即电渗泵(EOP),以创建极低能量的微尺度和宏观尺度的机械致动器。 EOP使用电场来移动天然存在的带电粒子(离子)通过流体介质。 当离子响应于所施加的场移动时,它们沿着沿着(非带电)的流体拖动,建立大量流动。 当限制在狭窄的室中时,可以建立压力梯度。 压力梯度和流量的组合执行机械作业。 通过使用电渗透泵,本发明使致动器能够以各种实施例构造,例如,薄片结构,活塞结构和细胞结构等等。

    Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same
    28.
    发明授权
    Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same 有权
    包含在微机械装置中的流体线的功能化方法,包括功能化线的微机械装置及其制造方法

    公开(公告)号:US08968673B2

    公开(公告)日:2015-03-03

    申请号:US13805491

    申请日:2011-06-29

    Abstract: The present invention relates to a method for functionalizing fluid lines (1b) in a micromechanical device, the walls of which include an opaque layer. For this purpose, the invention provides a method for functionalizing a micromechanical device provided with a fluid line including a peripheral wall (5) having a surface (2) outside the line and an inner surface (3) defining a space (1b) in which a fluid can circulate, the peripheral wall at least partially including a silicon layer (5a). The method includes the following steps: a) providing a device, the peripheral wall (5) of which at least partially includes a silicon layer (5a) having, at least locally, a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm; c) silanizing at least the inner surface of the fluid line; d) the localized, selective photo-deprotection on at least the inner surface of the silanized device by exposing the peripheral wall (5) at the point at which said wall has a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm.

    Abstract translation: 本发明涉及一种在微机械装置中功能化流体管线(1b)的方法,该方法的壁包括不透明层。 为此,本发明提供了一种功能化微机械装置的方法,该微机械装置具有流体管线,该流体管线包括在管线外部具有表面(2)的周壁(5)和限定空间(1b)的内表面(3) 流体可以循环,周壁至少部分地包括硅层(5a)。 该方法包括以下步骤:a)提供一种器件,其外围壁(5)至少部分地包括硅层(5a),该硅层至少局部地具有大于100nm的厚度(e)并且小于 200nm,有利地为160〜180nm; c)至少使流体管线的内表面硅烷化; d)通过在所述壁的厚度(e)大于100nm且小于200nm的点处暴露外围壁(5),至少在硅烷化装置的内表面上进行局部选择性光 - 去保护 ,有利地为160至180nm。

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