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    SMALL SCALE ACTUATORS AND METHODS FOR THEIR FORMATION AND USE
    21.
    发明申请
    SMALL SCALE ACTUATORS AND METHODS FOR THEIR FORMATION AND USE 失效
    小规模执行机构及其形成和使用方法

    公开(公告)号：US20040124381A1

    公开(公告)日：2004-07-01

    申请号：US10737573

    申请日：2003-12-16

    Inventor： Jerome M. Eldridge

    IPC: F16K031/00

    CPC classification number: F16K99/0001 ,  B81B2201/054 ,  F03G7/06 ,  F16K13/10 ,  F16K99/0011 ,  F16K99/0017 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0318 ,  Y10T137/0497 ,  Y10T137/1797 ,  Y10T137/1812 ,  Y10T137/1827 ,  Y10T137/6606 ,  Y10T137/87764

    Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

    Abstract translation: 一种用于制造和使用致动器组件的致动器组件和方法。 在一个实施例中，组件包括致动器主体，其具有带有第一区域和第二区域的致动器通道。 致动器设置在致动器通道中并且当处于第一位置和第二位置之间的可流动状态时可移动。 加热器位于致动器通道附近，以将致动器从固态加热到可流动状态。 气体源或其它推进剂的位置靠近致动器通道定位，以将致动器从第一位置驱动到第二位置。 当与通道的第二区域接合时，致动器具有比与第一区域接合时更高的表面张力。 因此，由于致动器和通道的第二区域之间的表面张力增大，致动器可能在到达通道的第二区域时停止。

    Thermal arched beam microelectromechanical actuators
    29.
    发明授权
    Thermal arched beam microelectromechanical actuators 失效
    热拱形梁微机电执行机构

    公开(公告)号：US5909078A

    公开(公告)日：1999-06-01

    申请号：US767192

    申请日：1996-12-16

    Applicant: Robert L. Wood ,  Vijayakumar R. Dhuler

    Inventor： Robert L. Wood ,  Vijayakumar R. Dhuler

    IPC: B81B3/00 ,  F03G7/06 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H02N11/00 ,  F01L1/00 ,  H01G7/00

    CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H9/14

    Abstract: Microelectromechanical actuators include at least one arched beam which extends between spaced apart supports on a microelectronic substrate. The arched beams are arched in a predetermined direction and expand upon application of heat thereto. A coupler mechanically couples the plurality of arched beams between the spaced apart supports. Heat is applied to at least one of the arched beams to cause further arching as a result of thermal expansion thereof, and thereby cause displacement of the coupler along the predetermined direction. Internal heating of the arched beams by passing current through the arched beams may be used. External heating sources may also be used. The coupler may be attached to a capacitor plate to provide capacitive sensors such as flow sensors. The coupler may also be attached to a valve plate to provide microvalves. Compensating arched beams may be used to provide ambient temperature insensitivity.

    Abstract translation: 微机电致动器包括至少一个拱形梁，其在微电子衬底上的间隔开的支撑件之间延伸。 拱形梁在预定方向上拱形并且在施加热量时膨胀。 耦合器在间隔开的支撑件之间机械耦合多个拱形梁。 对至少一个拱形梁施加热量，由于其热膨胀而导致进一步的拱起，从而引起联接器沿着预定方向的位移。 可以使用通过拱形梁使电流通过拱形梁的内部加热。 也可以使用外部加热源。 耦合器可以附接到电容器板以提供诸如流量传感器的电容式传感器。 联接器还可以附接到阀板以提供微型阀。 补偿拱形梁可用于提供环境温度不敏感性。

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