公开(公告)号：US09207119B2

公开(公告)日：2015-12-08

申请号：US13830466

申请日：2013-03-14

Applicant: Cymer, LLC

Inventor： Rostislav Rokitski ,  Nakgeuon Seong ,  Kevin O'Brien

IPC: G01J3/46 ,  G01J3/28 ,  G03F7/20 ,  G01J3/18 ,  G01J11/00 ,  G01J3/02 ,  G01J1/42 ,  G01J9/00

CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/1809 ,  G01J11/00 ,  G01J2001/4238 ,  G01J2009/006 ,  G03F7/70091 ,  G03F7/70575 ,  G03F7/7085

Abstract: A spectral feature of a pulsed light beam produced by an optical source is estimated by modifying the wavelength of the pulsed light beam based on a predefined repeating pattern having a pattern period including a plurality of steps, the modification including shifting the wavelength of the pulsed light beam by a wavelength offset from a baseline wavelength for each step in the pattern period; measuring the wavelength of the light beam for each step in the pattern period as the wavelength is modified across the pattern; and estimating a spectral feature of the pulsed light beam over an evaluation window that includes all of the steps within the pattern period based at least in part on the measured wavelength of the light beam for each step in the pattern period.

Abstract translation: 由光源产生的脉冲光束的光谱特征通过基于具有包括多个步骤的图案周期的预定重复图案修改脉冲光束的波长来估计，该修改包括移动脉冲光的波长 在图案周期中对于每个步骤的基线波长的波长偏移; 在图案周期中测量每个步骤的光束的波长，当波长跨越图案被修改时; 以及至少部分地基于所述模式周期中的每个步骤的所述光束的波长来估计包括所述模式周期内的所有步骤的评估窗口上的所述脉冲光束的光谱特征。

公开(公告)号：US20150253198A1

公开(公告)日：2015-09-10

申请号：US14423973

申请日：2013-08-26

Applicant: Robert Bosch GmbH

Inventor： Lothar Bergen ,  Paul Ruhnau

IPC: G01J11/00 ,  H04N5/232 ,  G01J1/42

CPC classification number: G01J11/00 ,  G01J1/42 ,  G01J2001/4238 ,  G06K9/00825 ,  H04N5/23216 ,  H04N5/23219 ,  H04N5/35581

Abstract: For detecting at least one pulsed light source, light emitted by the pulsed light source being detected by a detector unit, a method includes detecting a first image parameter of the light of the light source using a first exposure time; detecting at least a second image parameter of the light of the light source using an at least second exposure time, the first exposure time and the at least second exposure time being different, and the detector unit being set to a predetermined value between the detection of the first image parameter and the detection of the at least second image parameter, the first image parameter and the at least second image parameter chronologically consecutively representing the same spatial location; and evaluating the at least second image parameter to detect a pulsed light source when at least the at least second image parameter meets a predetermined criterion.

Abstract translation: 为了检测至少一个脉冲光源，由检测器单元检测由脉冲光源发射的光，该方法包括使用第一曝光时间检测光源的光的第一图像参数; 使用至少第二曝光时间来检测所述光源的光的至少第二图像参数，所述第一曝光时间和所述至少第二曝光时间不同，并且所述检测器单元被设置为在 所述第一图像参数和所述至少第二图像参数的检测，所述第一图像参数和所述至少第二图像参数按时间顺序连续地表示相同的空间位置; 以及当至少所述至少第二图像参数满足预定标准时，评估所述至少第二图像参数以检测脉冲光源。

公开(公告)号：US09106841B2

公开(公告)日：2015-08-11

申请号：US14304566

申请日：2014-06-13

Applicant: Ramesh Raskar ,  Christopher Barsi

Inventor： Ramesh Raskar ,  Christopher Barsi

IPC: H04N5/222 ,  H04N5/243 ,  H04N5/235 ,  H04N5/30 ,  H01J31/50 ,  G01J11/00

CPC classification number: H04N5/243 ,  G01J11/00 ,  H01J31/50 ,  H04N5/2354 ,  H04N5/30

Abstract: In exemplary implementations of this invention, a light source illuminates a scene and a light sensor captures data about light that scatters from the scene. The light source emits multiple modulation frequencies, either in a temporal sequence or as a superposition of modulation frequencies. Reference signals that differ in phase are applied to respective subregions of each respective pixel. The number of subregions per pixel, and the number of reference signals per pixel, is preferably greater than four. One or more processors calculate a full cross-correlation function for each respective pixel, by fitting light intensity measurements to a curve, the light intensity measurements being taken, respectively, by respective subregions of the respective pixel. The light sensor comprises M subregions. A lenslet is placed over each subregion, so that each subregion images the entire scene. At least one temporal sequence of frames is taken, one frame per subregion.

Abstract translation: 在本发明的示例性实施方案中，光源照亮场景，光传感器捕获关于从场景散射的光的数据。 光源以时间序列或调制频率的叠加发射多个调制频率。 不同相位的参考信号被施加到每个相应像素的相应子区域。 每像素的子区域的数量和每像素的参考信号的数量优选大于4。 一个或多个处理器通过将光强度测量结合到曲线上，分别由相应像素的相应子区域分别进行光强测量，来计算每个相应像素的完全互相关函数。 光传感器包括M个子区域。 每个子区域都放置一个小透镜，以便每个子区域对整个场景进行成像。 采取帧的至少一个时间序列，每个子区域一个帧。

公开(公告)号：US20150131685A1

公开(公告)日：2015-05-14

申请号：US14395570

申请日：2012-04-20

Applicant: Agustin Schiffrin ,  Ralph Ernstorfer ,  Ferenc Krausz ,  Tim Paasch-Colberg

Inventor： Agustin Schiffrin ,  Ralph Ernstorfer ,  Ferenc Krausz ,  Tim Paasch-Colberg

IPC: H01S3/10 ,  G01J11/00

CPC classification number: H01S3/10 ,  G01J11/00 ,  H01L31/03044 ,  H01L31/0328 ,  H01L31/09 ,  Y02E10/544

Abstract: An opto-electronic device (100) for processing optical and electric pulses includes a photoconductor device (10) with a sensor section (11) which is made of a band gap material and which has electrical sensor contacts (12, 13), and a signal processing device (20) which is connected with the sensor contacts (12, 13), wherein the photoconductor device (10) is adapted to create a photocurrent between the sensor contacts (12, 13) in response to an irradiation with ultra-short driving laser pulses (1) having a photon energy smaller than the energy band gap of the band gap material, having a non-zero electric field component (3) oriented parallel with a line (4) between the electrical sensor contacts (12, 13), and causing a charge carrier displacement in the band gap material, and wherein the signal processing device (20) is configured for an output of an electric signal being characteristic for at least one of carrier-envelope phase (CE phase), intensity, temporal properties, spectral intensity and spectral phase of the driving laser pulses (1). Furthermore, a laser source device including the opto-electronic device and pulse processing method for processing optical and electric pulses are described.

Abstract translation: 一种用于处理光和电脉冲的光电器件（100）包括具有传感器部分（11）的光电导体装置（10），传感器部分（11）由带隙材料制成，并具有电传感器触点（12,13） 信号处理装置（20），其与所述传感器触点（12,13）连接，其中所述光电导体装置（10）适于响应于超短的辐射而在所述传感器触点（12,13）之间产生光电流 驱动具有小于带隙材料的能带隙的光子能量的激光脉冲（1），具有与电传感器触头（12,13）之间的线（4）平行定向的非零电场分量（3） ），并且引起带隙材料中的载流子位移，并且其中信号处理装置（20）被配置为用于输出电信号，其特征在于载波包络相位（CE相位），强度， 时间性质，光谱强度 驱动激光脉冲的精度和光谱相位（1）。 此外，描述了包括用于处理光和电脉冲的光电装置和脉冲处理方法的激光源装置。

公开(公告)号：US09013705B2

公开(公告)日：2015-04-21

申请号：US13284015

申请日：2011-10-28

Applicant: Corey Vincent Bennett

Inventor： Corey Vincent Bennett

IPC: G01J9/04 ,  G01J11/00

CPC classification number: G01J9/04 ,  G01J11/00

Abstract: A new technique for capturing both the amplitude and phase of an optical waveform is presented. This technique can capture signals with many THz of bandwidths in a single shot (e.g., temporal resolution of about 44 fs), or be operated repetitively at a high rate. That is, each temporal window (or frame) is captured single shot, in real time, but the process may be run repeatedly or single-shot. By also including a variety of possible demultiplexing techniques, this process is scalable to recoding continuous signals.

Abstract translation: 提出了一种用于捕获光波形的幅度和相位的新技术。 该技术可以在单次拍摄（例如，约44fs的时间分辨率）中捕获具有许多THz带宽的信号，或者以高速重复操作。 也就是说，实时捕获每个时间窗口（或帧），但该过程可以重复运行或单次运行。 通过还包括各种可能的解复用技术，该过程是可扩展的以重新编码连续信号。

公开(公告)号：US09012844B2

公开(公告)日：2015-04-21

申请号：US13372505

申请日：2012-02-14

Applicant: Liejia Qian ,  Jingui Ma ,  Peng Yuan ,  Yongzhi Wang ,  Dongfang Zhang ,  Heyuan Zhu

Inventor： Liejia Qian ,  Jingui Ma ,  Peng Yuan ,  Yongzhi Wang ,  Dongfang Zhang ,  Heyuan Zhu

IPC: G01J5/08 ,  G01J11/00

CPC classification number: G01J11/00

Abstract: A single-shot pulse contrast measuring device based on non-harmonic long-wavelength sampling pulse includes a long-wavelength sampling light generation unit, a large-angle non-collinear sum-frequency cross-correlation unit and a high sensitivity signal receiving unit. The long-wavelength sampling light sum-frequency cross-correlator can allow that the beams are interacted with each other at the large non-collinear angle in the quasi-phase matching crystal, match the measuring window of the high sensitivity signal receiving system, and is in favor of eliminating the scattered light noise, thereby achieving the single measurement of the pulse contrast with large temporal window and high dynamic range. The single-shot pulse contrast measuring device of the present invention has good extensibility at the temporal window and dynamic range, and is adapted for measuring the contrast of the high-power laser with various wavelengths.

Abstract translation: 基于非谐波长波长采样脉冲的单次脉冲对比度测量装置包括长波长采样光产生单元，大角度非共线和频和频率互相关单元和高灵敏度信号接收单元。 长波采样光和频互相关器可以允许光束在准相位匹配晶体中的大非共线角度彼此相互作用，与高灵敏度信号接收系统的测量窗口匹配， 有利于消除散射光噪声，从而实现了具有大的时间窗口和高动态范围的脉冲对比度的单次测量。 本发明的单次脉冲对比度测量装置在时间窗口和动态范围上具有良好的延展性，适用于测量各种波长的大功率激光器的对比度。

公开(公告)号：US08953166B2

公开(公告)日：2015-02-10

申请号：US13205766

申请日：2011-08-09

Applicant: Pamela Bowlan ,  Rick Trebino

Inventor： Pamela Bowlan ,  Rick Trebino

IPC: G01B9/02 ,  G01J11/00

CPC classification number: G01J11/00

Abstract: Various methods and systems are provided for generation of a laser pulse with massive pulse-front tilt (PFT) and its use for measurement of laser pulses. In one embodiment, a method includes directing a laser pulse into an etalon and propagating the laser pulse through the etalon to form a tilted pulse. Another embodiment involves directing pulses into an etalon and propagating the pulses through the etalon in opposite directions to form a pair of massively tilted pulses that are tilted in opposite directions. In another embodiment, a system includes a Fresnel biprism configured to produce a pair of pulses from an input pulse and a lens configured to direct each pulse through an opening (or openings) in an input surface of an etalon, where the etalon is configured yield a pair of pulses tilted in opposite directions, each pulse having a massive PFT.

Abstract translation: 提供各种方法和系统用于产生具有大量脉冲前倾（PFT）的激光脉冲及其用于测量激光脉冲的用途。 在一个实施例中，一种方法包括将激光脉冲引入标准具并将激光脉冲传播通过标准具以形成倾斜脉冲。 另一个实施例涉及将脉冲引导到标准具中并沿相反方向传播脉冲通过标准具，以形成一对在相反方向上倾斜的大量倾斜的脉冲。 在另一个实施例中，系统包括菲涅尔双棱镜，菲涅尔双棱镜被配置为从输入脉冲产生一对脉冲，并配置成将每个脉冲引导通过标准具的输入表面中的开口（或开口），其中标准具被配置为屈服 一对脉冲以相反的方向倾斜，每个脉冲具有大量PFT。

公开(公告)号：US20150015890A1

公开(公告)日：2015-01-15

申请号：US14475434

申请日：2014-09-02

Applicant: BEIHANG UNIVERSITY

Inventor： Zheng Zheng ,  Xin Zhao ,  Lei Liu ,  Jiansheng Liu

IPC: G01J1/10

CPC classification number: G01J11/00 ,  G01J1/10 ,  G01J3/0224 ,  G01J3/0245 ,  G01J3/10 ,  G01J3/108 ,  G01J3/42 ,  G01J3/433 ,  G01J3/447 ,  G02F1/353 ,  G02F1/365 ,  G02F1/37 ,  G02F2203/13 ,  H01S3/0092 ,  H01S3/06791 ,  H01S3/0809 ,  H01S3/1106 ,  H01S3/1112 ,  H01S3/2391

Abstract: A method and a system for measuring an optical asynchronous sample signal. The system for measuring an optical asynchronous sampling signal comprises a pulsed optical source capable of emitting two optical pulse sequences with different repetition frequencies, a signal optical path, a reference optical path, and a detection device. Since the optical asynchronous sampling signal can be measured by merely using one pulsed optical source, the complexity and cost of the system are reduced. A multi-frequency optical comb system using the pulsed optical source and a method for implementing the multi-frequency optical comb are further disclosed.

Abstract translation: 一种用于测量光学异步采样信号的方法和系统。 用于测量光学异步采样信号的系统包括能够发射具有不同重复频率的两个光脉冲序列的脉冲光源，信号光路，参考光路和检测装置。 由于可以通过仅使用一个脉冲光源来测量光学异步采样信号，所以系统的复杂性和成本降低。 进一步公开了使用脉冲光源的多频光梳系统和实现多频光梳的方法。

公开(公告)号：US08916813B2

公开(公告)日：2014-12-23

申请号：US13613257

申请日：2012-09-13

Applicant: Amir Hossein Nejadmalayeri ,  Franz X. Kaertner

Inventor： Amir Hossein Nejadmalayeri ,  Franz X. Kaertner

IPC: G01J1/04 ,  G01J1/42 ,  G01J5/08 ,  G01J11/00

CPC classification number: G01J1/0425 ,  G01J11/00

Abstract: A balanced optical cross correlator includes an optical waveguide, a first photodiode including a first n-type semiconductor and a first p-type semiconductor positioned about the optical waveguide on a first side of the optical waveguide's point of symmetry, and a second photodiode including a second n-type semiconductor and a second p-type semiconductor positioned about the optical waveguide on a second side of the optical waveguide's point of symmetry. A balanced receiver including first and second inputs is configured to produce an output current or voltage that reflects a difference in currents or voltages, originating from the first and the second photodiodes of the balanced cross correlator and fed to the first input and to the second input of the balanced receiver.

Abstract translation: 平衡光交叉相关器包括光波导，包括第一n型半导体的第一光电二极管和位于光波导对称点的第一侧周围的光波导的第一p型半导体，以及第二光电二极管， 第二n型半导体和位于光波导对称点的第二侧上的光波导周围的第二p型半导体。 包括第一和第二输入的平衡接收器被配置为产生反映来自平衡互相关器的第一和第二光电二极管的电流或电压差的输出电流或电压，并被馈送到第一输入端和第二输入端 的平衡接收器。

公开(公告)号：US20140361145A1

公开(公告)日：2014-12-11

申请号：US14369824

申请日：2012-11-14

Applicant: WAVELIGHT GMBH

Inventor： Klaus Vogler ,  Olaf Kittelmann ,  Matthias Foesel ,  Christof Donitzky

IPC: H01S3/00

CPC classification number: H01S3/0057 ,  A61F9/008 ,  A61F9/0084 ,  G01J11/00 ,  H01S3/106

Abstract: In certain embodiments, a system (10) comprises a laser source (20), one or more optical elements (24), a monitoring device (28), and a control computer (30). The laser source (20) emits one or more laser pulses. The optical elements (24) change a pulse length of the laser pulses, and the monitoring device (28) measures the pulse length of the laser pulses to detect the change in the pulse length. The control computer (30) receives the measured pulse length from the monitoring device (28), determines one or more laser parameters that compensate for the change in the pulse length, and controls the laser source (20) according to the laser parameters.

Abstract translation: 在某些实施例中，系统（10）包括激光源（20），一个或多个光学元件（24），监视设备（28）和控制计算机（30）。 激光源（20）发射一个或多个激光脉冲。 光学元件（24）改变激光脉冲的脉冲长度，并且监视装置（28）测量激光脉冲的脉冲长度以检测脉冲长度的变化。 控制计算机（30）从监视装置（28）接收测量的脉冲长度，确定补偿脉冲长度变化的一个或多个激光参数，并根据激光参数控制激光源（20）。