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    Temperature sensing arrangement
    21.
    发明授权
    Temperature sensing arrangement 失效
    温度传感装置

    公开(公告)号：US4904090A

    公开(公告)日：1990-02-27

    申请号：US125991

    申请日：1987-11-27

    Applicant: Colin C. Oliver

    Inventor： Colin C. Oliver

    IPC: F25B21/04 ,  G01J5/06 ,  G05D23/27

    CPC classification number: F25B21/04 ,  G01J5/061 ,  G05D23/27 ,  G01J2005/062 ,  G01J2005/067 ,  G01J2005/068

    Abstract: A temperature sensor is incorporated within a housing having a silicon window through which infra-red radiation can enter. Mounted on a support structure is a semiconductor fabrication consisting of a reference junction and a sensing junction, covered with a black absorber. The reference junction is responsive to the temperature of the housing, whereas the sensing junction is responsive to the temperature of the housing and also the temperature of a remote zone from which infra-red radiation can enter the housing via the window. A Peltier heater/cooler controls the temperature of the housing, which temperature is monitored by a sensor to provide a measure of that of the remote zone.

    Abstract translation: 温度传感器结合在具有硅窗口的壳体内，红外辐射可以通过该窗口进入。 安装在支撑结构上的是由参考接头和感测接头组成的半导体制造，覆盖有黑色吸收体。 参考接头响应于壳体的温度，而感测接点响应于壳体的温度以及远红外区域的温度，红外线辐射可以通过窗口进入壳体。 珀尔帖加热器/冷却器控制壳体的温度，该温度由传感器监测以提供远程区域的温度。

    Apparatus and method of detecting temperature and apparatus for processing substrate
    24.
    发明授权
    Apparatus and method of detecting temperature and apparatus for processing substrate 有权
    检测温度的装置和方法以及处理衬底的装置

    公开(公告)号：US09470581B2

    公开(公告)日：2016-10-18

    申请号：US14190084

    申请日：2014-02-25

    Applicant: AP SYSTEMS INC.

    Inventor： Sang Hyun Ji

    IPC: F27D11/00 ,  G01J5/60 ,  G01J5/00 ,  G01J5/06

    CPC classification number: G01J5/602 ,  G01J5/0007 ,  G01J2005/0048 ,  G01J2005/067

    Abstract: Disclosed are an apparatus and method of detecting a temperature through a pyrometer in a non-contact manner, and an apparatus for processing a substrate using the apparatus, and more particularly, an apparatus and method of detecting a temperature, which precisely measures a temperature without any effect by humidity, and an apparatus for processing a substrate using the same. In an exemplary embodiment, an apparatus for detecting a temperature includes a humidity sensor configured to measure a humidity value, a temperature compensation database configured to store a temperature compensation value for each humidity value, and a pyrometer providing a non-contact temperature calculated by adding a temperature compensation value corresponding to a humidity value detected by the humidity sensor to a temperature to be compensated, which is obtained by converting a measured a wavelength intensity of a radiation radiated from an object in a wavelength band to be compensated.

    Abstract translation: 公开了以非接触方式通过高温计检测温度的装置和方法，以及使用该装置处理基板的装置，更具体地，涉及一种检测温度的装置和方法，其精确地测量温度而没有 湿度的任何影响，以及使用其的基板的处理装置。 在一个示例性实施例中，用于检测温度的装置包括被配置为测量湿度值的湿度传感器，配置为存储每个湿度值的温度补偿值的温度补偿数据库，以及提供非接触温度的高温计， 将由湿度传感器检测到的湿度值对应的温度补偿值与要补偿的温度相对应的温度补偿值，该温度补偿值是通过将被测量的被测物体辐射的波长的波长强度转换成待补偿的波段而得到的。

    COMPENSATED OPTICAL DETECTION APPARATUS, SYSTEMS, AND METHODS
    25.
    发明申请
    COMPENSATED OPTICAL DETECTION APPARATUS, SYSTEMS, AND METHODS 有权
    补偿光学检测装置，系统和方法

    公开(公告)号：US20140346324A1

    公开(公告)日：2014-11-27

    申请号：US14454390

    申请日：2014-08-07

    Applicant: Halliburton Energy Services, Inc.

    Inventor： Raj Pai ,  Marian Morys ,  Phap Hung Lien

    IPC: G01J5/12 ,  E21B49/08

    CPC classification number: G01J5/12 ,  E21B47/102 ,  E21B49/08 ,  E21B2049/085 ,  G01J5/14 ,  G01J2005/067

    Abstract: In some embodiments, apparatus and systems, as well as methods, may operate to receive radiation at an active detector of a pair of radiation detectors to provide a first signal proportional to an intensity of the radiation, to receive none of the radiation at a blind detector of the pair of radiation detectors to provide a second signal proportional to the reception of no radiation, and to combine the first signal and the second signal to provide an output signal representing the difference between the first signal and the second signal. The pair of radiation detectors may comprise thermopile detectors. Combination may occur via differential amplification. Additional apparatus, systems, and methods are disclosed.

    Abstract translation: 在一些实施例中，设备和系统以及方法可以操作以在一对辐射检测器的有源检测器处接收辐射，以提供与辐射强度成比例的第一信号，以在盲人处接收辐射 检测器，以提供与无辐射的接收成比例的第二信号，以及组合第一信号和第二信号以提供表示第一信号和第二信号之间的差的输出信号。 该对辐射探测器可以包括热电堆检测器。 可以通过差分放大进行组合。 公开了附加装置，系统和方法。

    Compensated optical detection apparatus, systems, and methods
    26.
    发明授权
    Compensated optical detection apparatus, systems, and methods 有权
    补偿光学检测装置，系统和方法

    公开(公告)号：US08895928B2

    公开(公告)日：2014-11-25

    申请号：US13576318

    申请日：2011-02-03

    Applicant: Raj Pai ,  Marian Morys ,  Phap Hung Lien

    Inventor： Raj Pai ,  Marian Morys ,  Phap Hung Lien

    IPC: G01J5/14 ,  E21B47/10

    CPC classification number: G01J5/12 ,  E21B47/102 ,  E21B49/08 ,  E21B2049/085 ,  G01J5/14 ,  G01J2005/067

    Abstract: In some embodiments, apparatus and systems, as well as methods, may operate to receive radiation at an active detector of a pair of radiation detectors to provide a first signal proportional to an intensity of the radiation, to receive none of the radiation at a blind detector of the pair of radiation detectors to provide a second signal proportional to the reception of no radiation, and to combine the first signal and the second signal to provide an output signal representing the difference between the first signal and the second signal. The pair of radiation detectors may comprise thermopile detectors. Combination may occur via differential amplification. Additional apparatus, systems, and methods are disclosed.

    Abstract translation: 在一些实施例中，设备和系统以及方法可以操作以在一对辐射检测器的有源检测器处接收辐射，以提供与辐射强度成比例的第一信号，以在盲人处接收辐射 检测器，以提供与无辐射的接收成比例的第二信号，以及组合第一信号和第二信号以提供表示第一信号和第二信号之间的差的输出信号。 该对辐射检测器可以包括热电堆检测器。 可以通过差分放大进行组合。 公开了附加装置，系统和方法。

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