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公开(公告)号：US2727175A
公开(公告)日：1955-12-13
申请号：US16466450
申请日：1950-05-27
Applicant: HANOVIA CHEMICAL & MFG CO
Inventor： ANDERSON JR WILLIAM T
CPC classification number: H01J61/72 , A61L2/10 , H01J61/00 , H01J2893/0063
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公开(公告)号：US2184386A
公开(公告)日：1939-12-26
申请号：US18150537
申请日：1937-12-24
Applicant: RCA CORP
Inventor： HANSELL CLARENCE W
CPC classification number: H01J13/20 , H01J61/00 , H01J2893/0063 , H01J2893/0092
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公开(公告)号：US20240304435A1
公开(公告)日：2024-09-12
申请号：US18591686
申请日：2024-02-29
Applicant: KLA Corporation
Inventor： Ilya Bezel , Amir Torkaman
CPC classification number: H01J61/025 , H01J61/12 , H01J2893/0063
Abstract: A LSP broadband light source is disclosed. The light source may include a gas containment structure for containing a gas. The light source may include a laser pump source configured to generate an optical pump to sustain a plasma within the gas containment structure for generation of broadband light. The light source may include a tapered window configured to transmit broadband light through an aperture within a wall of the gas containment structure, the tapered window including a tapered section including a tapered surface, wherein the tapered surface is configured to deflect light impinging on a peripheral portion of the tapered window away from a portion of the gas containment structure to protect the portion of the gas containment structure.
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公开(公告)号：US20230162968A1
公开(公告)日：2023-05-25
申请号：US17968444
申请日：2022-10-18
Applicant: Roland Gesche , Sundarajan Mutialu , Joachim Scherer
Inventor： Roland Gesche , Sundarajan Mutialu , Joachim Scherer
CPC classification number: H01J65/044 , H01J61/322 , H01J2893/0063
Abstract: A plasma light with at least one non-rotating light bulb is disclosed. The light includes a conducting cavity structure with a radiation source input port and a light bulb. The geometry of the cavity is designed to generate electrical fields with time-dependent geometrical designed orientation within parts of the light bulb, while the direction of the radiation fields from the radiation source port caused by a microwave generator to the input port fields is stationary.
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公开(公告)号：US10008378B2
公开(公告)日：2018-06-26
申请号：US15069242
申请日：2016-03-14
Applicant: Excelitas Technologies Corp.
Inventor： Rudi Blondia
IPC: G01J5/02 , G01N21/05 , H01J61/54 , H01J61/10 , H01J65/04 , H01J9/24 , H01J61/073 , H01J61/16 , H01J61/30 , H01J61/40 , H01J61/28
CPC classification number: H01J61/54 , H01J9/247 , H01J61/073 , H01J61/10 , H01J61/16 , H01J61/28 , H01J61/302 , H01J61/40 , H01J65/04 , H01J2893/0063
Abstract: A sealed high intensity illumination device configured to receive a laser beam from a laser light source and method for making the same are disclosed. The device includes a sealed cylindrical chamber configured to contain an ionizable medium. The chamber has a cylindrical wall, with an ingress and an egress window disposed opposite the ingress window. A tube insert is disposed within the chamber formed of an insulating material. The insert is configured to receive the laser beam within the insert inner diameter.
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Patent Agency Ranking
公开(公告)号：US09642233B2
公开(公告)日：2017-05-02
申请号：US14123791
申请日：2012-06-08
Applicant: Soriba Franciszek (François) Sylla , Victor Armand Malka , Alessandro Federico Flacco , Mina Ivanova Veltcheva , Subhendu Kahaly
Inventor： Soriba Franciszek (François) Sylla , Victor Armand Malka , Alessandro Federico Flacco , Mina Ivanova Veltcheva , Subhendu Kahaly
CPC classification number: H05G2/006 , A61B6/40 , H01J37/32009 , H01J37/32669 , H01J2237/152 , H01J2893/0063 , H05G2/00 , H05G2/001 , H05G2/003 , H05G2/008 , H05H1/22 , H05H1/54 , H05H2277/10 , H05H2277/11 , H05H2277/113
Abstract: A method and apparatus for generating a pulsed jet of fluid, and transforming the jet into a plasma. The method includes using a high-pressure rapid solenoid valve, and a pipe mounted on an outlet opening of the solenoid valve to produce a pulsed fluid jet which is sub-millimetric in size, and the atomic density of which is more than 1020 cm−3.
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27.发明授权公开(公告)号：US06989629B1
公开(公告)日：2006-01-24
申请号：US11040627
申请日：2005-01-21
Applicant: Leonard E. Klebanoff , Daniel J. Rader , William T. Silfvast
Inventor： Leonard E. Klebanoff , Daniel J. Rader , William T. Silfvast
CPC classification number: H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916 , H01J2893/0063
Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.
Abstract translation: 用于通过热电泳和静电沉积减轻由放电源产生和分散的碎片的运输的方法和装置。 一个构件位于与放电源的前电极相邻并用于建立其与前电极之间的温度差。 通过在构件和前电极之间流动气体，建立温度梯度，该温度梯度可用于根据热梯度的方向将颗粒碎片热沉沉在构件或前电极上。 在构件和前电极之间建立电场可以通过静电沉积来帮助颗粒沉积。
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28.发明授权公开(公告)号：US06888297B2
公开(公告)日：2005-05-03
申请号：US10325997
申请日：2002-12-19
Applicant: Leonard E. Klebanoff , William T. Silfvast , Daniel J. Rader
Inventor： Leonard E. Klebanoff , William T. Silfvast , Daniel J. Rader
CPC classification number: H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70916 , H01J2893/0063
Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.
Abstract translation: 用于通过热电泳和静电沉积减轻由放电源产生和分散的碎片的运输的方法和装置。 一个构件位于与放电源的前电极相邻并用于建立其与前电极之间的温度差。 通过在构件和前电极之间流动气体，建立温度梯度，该温度梯度可用于根据热梯度的方向将颗粒碎片热沉沉在构件或前电极上。 在构件和前电极之间建立电场可以通过静电沉积来帮助颗粒沉积。
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29.发明授权Compact, high intensity arc lamp with internal magnetic field producing means 失效紧凑型高强度弧光灯，具有内部磁场产生装置
公开(公告)号：US3881132A
公开(公告)日：1975-04-29
申请号：US38505973
申请日：1973-08-02
Applicant: CALIFORNIA INST OF TECHN
Inventor： MILLER CHARLES G
CPC classification number: H01J61/98 , H01J61/00 , H01J61/0732 , H01J61/106 , H01J61/526 , H01J2893/0063
Abstract: A significant increase in brightness of the arc and a more focusable light-emitting region are provided in compact arc lamps by causing magnetic lines of force to diverge from the cathode tip from magnetic field producing means disposed within the cathode structure.
Abstract translation: 通过使磁力线从阴极尖端偏离设置在阴极结构内的磁场产生装置，在紧凑型电弧灯中提供了电弧亮度和可聚焦的发光区域的显着增加。
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公开(公告)号：US3582252A
公开(公告)日：1971-06-01
申请号：US3582252D
申请日：1969-10-20
Applicant: INST OF GAS TECHNOLOGY THE
Inventor： REID JACK M , WEIL SANFORD A , STAATS WILLIAM R
CPC classification number: H01K13/00 , F21K2/00 , H01J61/00 , H01J2893/0063
Abstract: A light source which includes, generally, an evacuated lighttransmitting envelope, the interior surface of which is coated with phosphors of the type which are excited by ''''active'''' (dissociated) gases to produce visible light. The envelope further includes a gas-fired high temperature energy source of radiant energy, and a gas which dissociated in the presence of this energy source of radiant energy.
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