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公开(公告)号：US2605431A
公开(公告)日：1952-07-29
申请号：US15291550
申请日：1950-03-30
Applicant: WESTINGHOUSE ELECTRIC CORP
Inventor： BAYARD ROBERT T
IPC: H01J41/04
CPC classification number: H01J41/04
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公开(公告)号：US2573005A
公开(公告)日：1951-10-30
申请号：US3696748
申请日：1948-07-03
Applicant: GLYPTIS NICHOLAS D
Inventor： GLYPTIS NICHOLAS D
IPC: H01J41/04
CPC classification number: H01J41/04
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公开(公告)号：US2535032A
公开(公告)日：1950-12-26
申请号：US4516348
申请日：1948-08-19
Applicant: BENNETT WILLARD H
Inventor： BENNETT WILLARD H
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Patent Agency Ranking
公开(公告)号：US1226067A
公开(公告)日：1917-05-15
申请号：US12703916
申请日：1916-10-21
Applicant: WESTINGHOUSE ELECTRIC & MFG CO
Inventor： EBY EARL E
CPC classification number: H01J41/04 , Y10T137/1827
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公开(公告)号：US09593996B2
公开(公告)日：2017-03-14
申请号：US14377449
申请日：2013-02-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker
Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.
Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。
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公开(公告)号：US09316555B2
公开(公告)日：2016-04-19
申请号：US14260545
申请日：2014-04-24
Applicant: CANON ANELVA CORPORATION
Inventor： Itaru Enomoto , Hideo Mano
Abstract: A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.
Abstract translation: 一种冷阴极电离真空计，包括：两个电极，其设置成使得一个电极被另一个电极包围，从而在它们之间形成放电空间; 以及电极保护部件，其设置在所述放电空间中并且被配置为保护所述另一电极的内壁表面，其中所述电极保护部件具有导电性并且沿着所述内壁表面的形状弹性变形以与其他电极电连接 电极。
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29.发明授权Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments 有权在恶劣环境中保持热阴极的排放能力的方法和装置公开(公告)号：US07429863B2
公开(公告)日：2008-09-30
申请号：US11488457
申请日：2006-07-18
Applicant: Larry K. Carmichael , Michael D. Borenstein , Paul C. Arnold , Stephen C. Blouch , Richard A. Knott
Inventor： Larry K. Carmichael , Michael D. Borenstein , Paul C. Arnold , Stephen C. Blouch , Richard A. Knott
CPC classification number: H01J41/04
Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.
Abstract translation: 提供了用于操作多热阴极电离计的方法和装置，以增加气态过程环境中电离计的使用寿命。 在示例实施例中，通过将备用阴极加热到不足以发射电子的温度来延长备用阴极的寿命，但足以减少沉积在其表面上的材料的量或被优化以降低其间的化学相互作用 处理气体和所述至少一个备用阴极的材料。 备用阴极可以不断地或周期性地加热。 在其他实施例中，在工艺压力通过给定压力阈值之后，可以将多个阴极加热到非发光温度，多个阴极可以被加热到较低的发光温度，或者可以将发射阴极加热到降低 电子发射电流。
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公开(公告)号：US07030619B2
公开(公告)日：2006-04-18
申请号：US10799446
申请日：2004-03-12
Applicant: Paul C. Arnold , Paul M. Rutt
Inventor： Paul C. Arnold , Paul M. Rutt
Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.
Abstract translation: 用于从气体分子中分离电子源的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的冲击形成的离子的集电极，以及将电子源与气体分子隔离的电子窗口。 电离计可以具有限定阳极体积并将电子保持在阳极区域中的阳极。 电离计可以具有多个电子源和/或集电极。 集电极可以位于阳极体积内或阳极体积外。 电离计可以具有用于基于质荷比分离离子的质量过滤器。 电离计可以是衡量压力的Bayard-Alpert型，也可以是确定气体类型的残留气体分析仪。
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