公开(公告)号：US20030123119A1

公开(公告)日：2003-07-03

申请号：US10313350

申请日：2002-12-06

Applicant: JDS Uniphase Corporation

Inventor： Valentine N. Morozov ,  Tokuyuki Honda ,  Long Yang

IPC: G02B026/08 ,  H01J003/14 ,  H01J005/16 ,  H01J040/14

CPC classification number: G02B6/29358 ,  G02B6/2937 ,  G02B6/29385 ,  G02B6/4206 ,  G02B6/4215 ,  H04B10/077 ,  H04B10/07955 ,  H04J14/0227

Abstract: Optical performance monitoring device for monitoring and analyzing an optical signal has a periodically movable reflective mirror to receive an input optical beam and to cyclically nullscannull (deflect) the beam in a one-dimensional direction. The deflected beam at a varying deflection angle is directed to a linear variable filter (LVF) that passes a selected wavelength channel of the deflected beam in dependence upon the deflection angle. The selected channel is then passed to a photodetector via a focusing lens, typically a cylindrical lens. The device is durable, tunable, offers low loss, good wavelength registrability and spectral resolution.

Abstract translation: 用于监测和分析光信号的光学性能监视装置具有周期性可移动的反射镜，以接收输入光束并且沿一维方向周期地“扫描”（偏转）光束。 以变​​化的偏转角度的偏转光束被引导到线性可变滤波器（LVF），该线性可变滤波器（LVF）根据偏转角度使偏转光束的选定波长通道通过。 所选择的通道然后经由聚焦透镜（通常为柱面透镜）传递到光电检测器。 该器件经久耐用，可调谐，具有低损耗，良好的波长可注册性和光谱分辨率。

公开(公告)号：US20030098410A1

公开(公告)日：2003-05-29

申请号：US10293539

申请日：2002-11-12

Applicant: Matsushita Electric Industrial Co., Ltd

Inventor： Keisuke Koga ,  Toru Kawase ,  Masahide Yamauchi ,  Koji Fujii ,  Takashi Itoh

IPC: H01J005/16

CPC classification number: H01J3/021 ,  H01J3/029 ,  H01J29/46 ,  H01J29/481 ,  H01J29/488

Abstract: A field emission electron source includes: a field emission array portion composed of an insulation layer with a plurality of apertures, which is formed on a substrate, an extraction electrode formed on the insulation layer, and a plurality of cathodes formed respectively on the substrate in the plurality of apertures; a cathode base for fixing the field emission array portion; and an electron lens portion composed of a plurality of electrode members having a function of accelerating and converging an electron beam emitted from the field emission array portion. An emission axis of the electron beam emitted from the field emission array portion has a predetermined angle with respect to an optical axis of the electron lens portion. Thus, the field emission array portion can be protected from impact caused by ions generated in the electron lens portion, thereby improving the life of a field emission electron source.

Abstract translation: 场发射电子源包括：场致发射阵列部分，其由具有多个孔的绝缘层组成，形成在衬底上，形成在绝缘层上的引出电极和分别形成在衬底上的多个阴极 多个孔; 用于固定场致发射阵列部分的阴极基座; 以及电子透镜部分，其由具有加速和会聚从场发射阵列部分发射的电子束的功能的多个电极部件组成。 从场发射阵列部分发射的电子束的发射轴相对于电子透镜部分的光轴具有预定的角度。 因此，可以防止场发射阵列部分免受在电子透镜部分中产生的离子的影响，从而提高场发射电子源的寿命。

公开(公告)号：US20030057365A1

公开(公告)日：2003-03-27

申请号：US09960508

申请日：2001-09-24

Inventor： Ralph W. Bennett ,  Rober W. Mayer ,  Harold F. Qualls ,  Steven F. Bellenot

IPC: H01J003/14 ,  H01J005/16

CPC classification number: G01B11/2518

Abstract: A scanning device for measuring the distance between the scanning device and a plurality of surface points on a target object. The scanning device sweeps a laser beam and a line scan camera in synchronization up and down the surface of the target object. The line scan camera monitors the impact point of the laser beam upon the target object within its field of view. By knowing the position of the impact point within the camera's field of view, trigonometric principles can be applied to accurately calculate the distance to the impact point.

Abstract translation: 一种扫描装置，用于测量扫描装置与目标物体上的多个表面点之间的距离。 扫描装置在目标对象的表面上上下扫描激光束和线扫描相机。 线扫描摄像机在其视场内监视激光束对目标物体的影响点。 通过知道摄像机视野内的撞击点的位置，可以应用三角学原理来准确计算到撞击点的距离。

公开(公告)号：US20030006368A1

公开(公告)日：2003-01-09

申请号：US10188622

申请日：2002-07-03

Applicant: Leica Microsystems Heidelberg GmbH

Inventor： Johann Engelhardt ,  Werner Knebel

IPC: H01J003/14 ,  H01J005/16 ,  G02B007/04

CPC classification number: G02B21/0064

Abstract: A scanning microscope for examination of a sample (31), having at least one optical component (89) that exhibits a wavelength-dependent characteristic and having an apparatus for wavelength-dependent detection that acquires measured values in at least two wavelength regions each characterized by a spectral width and a spectral position, is disclosed. The scanning microscope is characterized in that the wavelength-dependent characteristic of the at least one optical component (89) can be ascertained, can be at least temporarily stored in the form of a data set in a memory (49, 81), and can be considered upon acquisition and/or upon utilization of the measured values.

Abstract translation: 一种用于检查样品（31）的扫描显微镜，其具有至少一个具有波长相关特性的光学部件（89），并具有用于波长相关检测的装置，其获取至少两个波长区域中的测量值，每个特征在于 光谱宽度和光谱位置。 扫描显微镜的特征在于，可以确定至少一个光学部件（89）的波长相关特性，至少可以以数据集的形式临时存储在存储器（49,81）中，并且可以 在获得和/或利用测量值时考虑。

公开(公告)号：US20020195553A1

公开(公告)日：2002-12-26

申请号：US10165503

申请日：2002-06-07

Inventor： Tilman Schaffer ,  Paul K. Hansma

IPC: H01J003/14 ,  H01J005/16

CPC classification number: G01Q20/02 ,  G01Q70/06 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/87

Abstract: A high sensitivity beam deflection sensing optical device, such as an atomic force microscope, including one or more of the following: specified means in the path of the incident beam for adjusting the size and/or power of the incident beam spot, means for moving the incident beam spot with movement of the object whereby to maintain the position of the spot on the object, and means for increasing the signal to noise ratio of the optical detector in which adjusted gains are applied to different segments of the optical detector.

公开(公告)号：US20020186358A1

公开(公告)日：2002-12-12

申请号：US10207494

申请日：2002-07-29

Applicant: Advanced Micro Devices, Inc.

Inventor： Anthony John Toprac ,  Richard David Edwards ,  Curtis Warren Doss

IPC: G03B027/42 ,  G03B027/74 ,  G03B027/80 ,  G03B027/32 ,  G03F009/00 ,  H01J040/14 ,  H01J003/14 ,  H01J005/16

CPC classification number: G03F7/70558

Abstract: In one illustrative embodiment, a method is provided that comprises energizing a light source to provide light having a preselected intensity. A first photosensor, which is capable of delivering a first signal indicative of the intensity of the light source, is exposed to the light source. A second photosensor, which is also capable of delivering a second signal indicative of the intensity of the light source, is also exposed to the light source. Thereafter, the first and second signals are compared, and an error signal is delivered in response to detecting a significant difference between the first and second signals.

Abstract translation: 在一个说明性实施例中，提供了一种方法，其包括激励光源以提供具有预选强度的光。 能够传送指示光源的强度的第一信号的第一光传感器暴露于光源。 也能够传递指示光源的强度的第二信号的第二光传感器也暴露于光源。 此后，比较第一和第二信号，并响应于检测到第一和第二信号之间的显着差异来递送误差信号。

公开(公告)号：US20020180325A1

公开(公告)日：2002-12-05

申请号：US09873198

申请日：2001-06-05

Inventor： Sen-Yung Lee

IPC: H01J005/16

CPC classification number: F21V11/04 ,  F21S41/43

Abstract: A head light includes a curve refection base and a filament is connected to a close end of the reflection base, and a transparent casing is connected to an open end of the reflection base. A light beam guiding device is connected to an inside of the casing and includes a plurality of plates. Each plate has an absorbing layer coated on an upper surface thereof, and a reflection layer coated on a bottom surface of each of the plates. The light beam is not reflected upward and is reflected downward.

Abstract translation: 头灯包括曲线反射基座，灯丝连接到反射底座的近端，并且透明壳体连接到反射底座的开口端。 光束引导装置连接到壳体的内部并且包括多个板。 每个板具有涂覆在其上表面上的吸收层和涂覆在每个板的底表面上的反射层。 光束不向上反射并向下反射。

公开(公告)号：US20020179828A1

公开(公告)日：2002-12-05

申请号：US10157561

申请日：2002-05-29

Applicant: Leica Microsystems Heidelberg GmbH

Inventor： Johann Engelhardt ,  Bernd Widzgowski

IPC: H01J003/14 ,  H01J005/16

CPC classification number: G02B21/16 ,  G02B21/004 ,  G02B21/0048 ,  G02B21/008 ,  G02B21/0084

Abstract: A method and an apparatus for point-by-point scanning of a specimen (15) are disclosed. The method is characterized by the steps of generation (45) of a nominal signal (10) for each scan point and transfer (47) of the nominal signal to a scanning device (7). In further steps, determination (49) of an actual signal (25) for each scan point from the setting of the scanning device (7), detection (51) of at least one detection signal (21) for each scan point, calculation (53) of a display signal (27) and an image point position (29) from the actual signal (25) and/or the nominal signal (10) and the detection signal (21), and assignment (55) of the display signal (27) to the image point position (29), are performed.

Abstract translation: 公开了一种用于样本（15）的逐点扫描的方法和装置。 该方法的特征在于为每个扫描点产生（45）标称信号（10）并将标称信号（47）传送（47）到扫描装置（7）的步骤。 在其他步骤中，根据扫描装置（7）的设定对每个扫描点的实际信号（25）的确定（49），对于每个扫描点的至少一个检测信号（21）的检测（51），计算（ 53）和来自实际信号（25）和/或标称信号（10）和检测信号（21）的显示信号（27）和图像点位置（29）以及显示信号的分配（55） （27）到图像点位置（29）。

公开(公告)号：US20020166957A1

公开(公告)日：2002-11-14

申请号：US10124355

申请日：2002-04-16

Inventor： Manabu Oumi ,  Nobuyuki Kasama ,  Hidetaka Maeda ,  Kenji Kato ,  Yoko Shinohara ,  Takashi Niwa ,  Yasuyuki Mitsuoka

IPC: H01J003/14 ,  H01J005/16

CPC classification number: G01Q60/22 ,  G01Q80/00 ,  G11B7/122 ,  G11B7/1387

Abstract: The invention relates to structure and arrangement for causing incident light polarization to enter a minute aperture while controlling or preserving the incident light polarization. They are characterized in that one location of the contour of the minute aperture is substantially perpendicular to the direction of polarization of incident light. It can realize near-field optical-generating element, near-field optical recording device, and near-field optical microscope of the minute aperture type capable of improving both the intensity of near-field light and the resolution.

Abstract translation: 本发明涉及使入射光偏振进入微小孔径同时控制或保持入射光偏振的结构和装置。 它们的特征在于，微小孔径的轮廓的一个位置基本上垂直于入射光的偏振方向。 可以实现近场光学发光元件，近场光学记录装置以及能够提高近场光强度和分辨率的微孔型的近场光学显微镜。

公开(公告)号：US20020109079A1

公开(公告)日：2002-08-15

申请号：US09783220

申请日：2001-02-15

Applicant: LEICA MICROSYSTEMS HEIDELBERG GmbH

Inventor： Johann Engelhardt ,  William C. Hay ,  Juergen Hoffmann

IPC: G01J003/50 ,  H01J005/16 ,  H01J040/14

CPC classification number: G02B21/0064 ,  G01J3/32

Abstract: An apparatus for selecting and detecting at least one spectral region of a spectrally spread light beam, preferably in the beam path of a confocal scanning microscope, the spread light beam being focussable in a focal line, is characterized, for non-overlapping detection of the spectrally spread light beam of the selected spectral regions in the context of an increased number of detectors and an error-tolerant arrangement, in that there is arranged in the spread light beam an optical component which reflects and/or refracts the light beam to a detector and whose optically effective region becomes smaller or larger along the surface, so that by orientation of the component with respect to the focal line and the resulting superposition of the focal line and surface, the spectral region arriving at the detector is definable.