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公开(公告)号:US20020186358A1
公开(公告)日:2002-12-12
申请号:US10207494
申请日:2002-07-29
Applicant: Advanced Micro Devices, Inc.
Inventor: Anthony John Toprac , Richard David Edwards , Curtis Warren Doss
IPC: G03B027/42 , G03B027/74 , G03B027/80 , G03B027/32 , G03F009/00 , H01J040/14 , H01J003/14 , H01J005/16
CPC classification number: G03F7/70558
Abstract: In one illustrative embodiment, a method is provided that comprises energizing a light source to provide light having a preselected intensity. A first photosensor, which is capable of delivering a first signal indicative of the intensity of the light source, is exposed to the light source. A second photosensor, which is also capable of delivering a second signal indicative of the intensity of the light source, is also exposed to the light source. Thereafter, the first and second signals are compared, and an error signal is delivered in response to detecting a significant difference between the first and second signals.
Abstract translation: 在一个说明性实施例中,提供了一种方法,其包括激励光源以提供具有预选强度的光。 能够传送指示光源的强度的第一信号的第一光传感器暴露于光源。 也能够传递指示光源的强度的第二信号的第二光传感器也暴露于光源。 此后,比较第一和第二信号,并响应于检测到第一和第二信号之间的显着差异来递送误差信号。