公开(公告)号：US20050191828A1

公开(公告)日：2005-09-01

申请号：US11003000

申请日：2004-12-01

Applicant: Amir Al-Bayati ,  Rick Roberts ,  Kenneth Collins ,  Ken MacWilliams ,  Hiroji Hanawa ,  Kartik Ramaswamy ,  Biagio Gallo ,  Andrew Nguyen

Inventor： Amir Al-Bayati ,  Rick Roberts ,  Kenneth Collins ,  Ken MacWilliams ,  Hiroji Hanawa ,  Kartik Ramaswamy ,  Biagio Gallo ,  Andrew Nguyen

IPC: H01J37/32 ,  H01L21/4763

CPC classification number: H01J37/32082 ,  H01J37/321 ,  H01L21/76254

Abstract: An integrated microelectronic circuit has a multi-layer interconnect structure overlying the transistors consisting of stacked metal pattern layers and insulating layers separating adjacent ones of said metal pattern layers. Each of the insulating layers is a dielectric material with plural gas bubbles distributed within the volume of the dielectric material to reduce the dielectric constant of the material, the gas bubbles being formed by ion implantation of a gaseous species into the dielectric material.

Abstract translation: 集成的微电子电路具有覆盖由堆叠的金属图案层和分离相邻的所述金属图案层的绝缘层的晶体管的多层互连结构。 每个绝缘层是具有分布在电介质材料的体积内的多个气泡的介电材料，以降低材料的介电常数，气泡通过将气态物质离子注入电介质材料而形成。

公开(公告)号：US06917755B2

公开(公告)日：2005-07-12

申请号：US10376857

申请日：2003-02-27

Applicant: Andrew Nguyen ,  Gerhard Schneider ,  Akihiro Hosokawa ,  Takayuki Matsumoto

Inventor： Andrew Nguyen ,  Gerhard Schneider ,  Akihiro Hosokawa ,  Takayuki Matsumoto

IPC: H01L21/683 ,  C23C16/458 ,  C23C16/48 ,  G02F1/13 ,  H01L21/673 ,  H01L21/687 ,  F26B3/30

CPC classification number: H01L21/6875 ,  C23C16/4581 ,  C23C16/4583 ,  C23C16/481 ,  H01L21/6734

Abstract: An apparatus for supporting a substrate is described that has a ball adapted to minimize damage between the substrate support and the substrate supported thereon. In one embodiment, an apparatus for supporting a substrate includes ball disposed on an inclined ball support surface. The ball support surface is adapted to bias the ball toward one side of the ball support surface thereby providing space for the ball to roll as the substrate supported thereon changes in length when exposed to thermal influences. In another embodiment, the apparatus further comprises a cage adapted to capture the ball to the ball support surface.

Abstract translation: 描述了一种用于支撑基板的装置，其具有适于最小化基板支撑件和支撑在其上的基板之间的损伤的球。 在一个实施例中，用于支撑衬底的装置包括设置在倾斜的球支撑表面上的球。 球支撑表面适于将球朝向球支撑表面的一侧偏置，从而当被支撑在其上的基板在暴露于热影响时在长度上变化时为球提供空间。 在另一个实施例中，该装置还包括适于将球捕获到球支撑表面的笼。

公开(公告)号：US20050133075A1

公开(公告)日：2005-06-23

申请号：US10743928

申请日：2003-12-22

Applicant: Andrew Nguyen

Inventor： Andrew Nguyen

IPC: H01L21/00 ,  B08B3/00

CPC classification number: H01L21/6715

Abstract: According to one aspect of the invention, a dispense head for a wafer processing apparatus is provided. The dispense head may include an inlet, at least one outlet, a drain, and a passageway therethrough interconnecting the inlet, the outlet, and the drain. The inlet may be a first height above a bottom of the passageway, the outlet may be a second height above the bottom, and the drain may be a third height above the bottom. A first valve may be connected to the inlet, and a second valve may be connected to the drain. When the first valve is opened and the second valve is closed, fluid flows into the inlet and out of the outlet. When the second valve is opened and the first valve is closed, fluid from the passageway flows out of the drain. A pump may be connected to the drain.

Abstract translation: 根据本发明的一个方面，提供了一种用于晶片处理装置的分配头。 分配头可以包括入口，至少一个出口，排水口和通过其互连入口，出口和排水口的通道。 入口可以是通道底部上方的第一高度，出口可以是底部上方的第二高度，并且排水口可以是底部上方的第三高度。 第一阀可以连接到入口，并且第二阀可以连接到排水管。 当第一阀打开并且第二阀关闭时，流体流入入口并离开出口。 当第二阀打开并且第一阀关闭时，来自通道的流体流出排水管。 泵可以连接到排水管。

公开(公告)号：US06308654B1

公开(公告)日：2001-10-30

申请号：US08734015

申请日：1996-10-18

Applicant: Gerhard Schneider ,  Viktor Shel ,  Andrew Nguyen ,  Robert W. Wu ,  Gerald Z. Yin

Inventor： Gerhard Schneider ,  Viktor Shel ,  Andrew Nguyen ,  Robert W. Wu ,  Gerald Z. Yin

IPC: C23C1600

CPC classification number: H01J37/321

Abstract: A plasma reactor appropriate for fabrication, especially etching, of semiconductor integrated circuits and similar processes in which the chamber has a top comprising a truncated conical dome and, preferably, a counter electrode disposed at the top of the conical dome. An RF coil is wrapped around the conical dome to inductively couple RF energy into a plasma within the chamber dome. The dome temperature can be controlled in a number of ways. A heat sink can be attached to the outside rim of the dome. A rigid conical thermal control sheath can be fit to the outside of the dome, and any differential thermal expansion between the two is accommodated by the conical geometry, thus assuring good thermal contact. The rigid thermal control sheath can include resistive heating, fluid cooling, or both. Alternatively, a flexible resistive heater can be wrapped around the dome inside the RF coil. The resistive heater includes a heater wire wound in a serpentine path that has straight portions overlying and perpendicular to the RF coil but has bends located away from the RF coil. The path prevents the heater wire from shorting the azimuthal electric field induced by the RF coil and also acts as a Faraday shield preventing capacitive coupling from the coil into the chamber plasma.

Abstract translation: 适用于半导体集成电路的制造，特别是蚀刻的等离子体反应器和类似的工艺，其中腔室具有顶部，该顶部包括截顶圆锥形圆顶，优选地，设置在锥形圆顶顶部的对置电极。 RF线圈围绕圆锥形圆顶包裹以将射频能量感应耦合到腔室内的等离子体中。 圆顶温度可以以多种方式进行控制。 散热器可以连接到圆顶的外边缘。 刚性圆锥形热控制护套可以配合到圆顶的外部，并且两者之间的任何差别的热膨胀由锥形几何形状适应，从而确保良好的热接触。 刚性热控鞘可以包括电阻加热，流体冷却或两者。 或者，柔性电阻加热器可以缠绕在RF线圈内的圆顶周围。 电阻加热器包括缠绕在蛇形路径中的加热线，其具有覆盖并垂直于RF线圈的直线部分，但具有远离RF线圈的弯曲。 该路径防止加热线短路由RF线圈引起的方位电场，并且还用作防止从线圈到室等离子体的电容耦合的法拉第屏蔽。

公开(公告)号：US10890497B2

公开(公告)日：2021-01-12

申请号：US16045727

申请日：2018-07-25

Applicant: David R. Hall ,  K. Jeffrey Campbell ,  Andrew Nguyen ,  Jared Reynolds ,  Joshua Larsen

Inventor： David R. Hall ,  K. Jeffrey Campbell ,  Andrew Nguyen ,  Jared Reynolds ,  Joshua Larsen

IPC: G01L1/08 ,  G01L1/18 ,  E03D11/00 ,  G01G19/52 ,  A61B5/11 ,  G01G19/44

Abstract: The pressure pad which pressure-sensing fabric which is within a gasket and which measures the distribution of pressure on the gasket. Thus, the gasket protects the pressure-sensing fabric from damage due to water or mechanical trauma. The pressure pad includes multiple piezoresistive depositions of piezoresistive depositions ink or paste which act as individual pressure-sensing points. Conductive tracks between the piezoresistive depositions transmit the pressure measurements in the form of electrical signals. The pressure-sensing fabric is connected to a controller and transmits pressure measurements to the controller. Algorithms stored on the controller create a map of absolute mechanical loading to each pressure-sensing point of the pressure pad. The gasket may be mounted beneath a toilet or between plumbing joints. The pressure pad may detect weaknesses in the gasket, a toilet user's weight, a weight of excrement added to the toilet, or a toilet user's posture.

公开(公告)号：US20180334669A1

公开(公告)日：2018-11-22

申请号：US15597633

申请日：2017-05-17

Applicant: David R. Hall ,  Steven J.M. Butala ,  Dan Allen ,  Andrew Nguyen ,  Conrad Rosenbrock ,  Ben Swenson ,  Daniel Hendricks ,  Joe Fox

Inventor： David R. Hall ,  Steven J.M. Butala ,  Dan Allen ,  Andrew Nguyen ,  Conrad Rosenbrock ,  Ben Swenson ,  Daniel Hendricks ,  Joe Fox

IPC: C12N15/10

CPC classification number: C12N15/1065

Abstract: We disclose a method of tagging a variety of pharmaceutical or nutritional products in which well-studied chemicals may be added to the products in unique ratios. The identities of the chemicals and their relative ratios comprise unique taggants. The taggants may identify which of multiple distinct categories the product falls within. The method includes the step of systematically varying the relative concentrations of the chemicals resulting in multiple ratios of the chemicals. The plurality of ratios of a defined set of chemicals may be collected to form a library of taggants associated with specified items or categories. As the number of chemicals added per product increases, the library supports more categories and the system is less likely to produce a false positive. The method may result in a series of taggants for each item which is single fault tolerant or double fault tolerant.

公开(公告)号：US20180306826A1

公开(公告)日：2018-10-25

申请号：US15496407

申请日：2017-04-25

Applicant: David R. Hall ,  Dan Allen ,  Conrad Rosenbrock ,  Daniel Hendricks ,  Andrew Nguyen ,  Steven J.M. Butala ,  Travis Niederhauser ,  Terrece Pearman ,  Joe Fox

Inventor： David R. Hall ,  Dan Allen ,  Conrad Rosenbrock ,  Daniel Hendricks ,  Andrew Nguyen ,  Steven J.M. Butala ,  Travis Niederhauser ,  Terrece Pearman ,  Joe Fox

IPC: G01N33/94 ,  G01N17/00 ,  G01N33/493 ,  A61B5/15 ,  A61B10/00 ,  A47K17/00

CPC classification number: G01N33/94 ,  A47K17/00 ,  A61B5/15 ,  A61B10/0038 ,  A61B10/0051 ,  A61B10/007 ,  A61B2010/0061 ,  A61B2010/0077 ,  A61B2010/0087 ,  G01N33/15 ,  G01N33/493 ,  G01N2458/00

Abstract: We disclose a method of using taggants to assess how and to what extent a drug in a drug composition that a user has consumed has decayed in response to storage conditions and time. The taggants may decay in response to environmental conditions which cause different drugs to lose their efficacy. These environmental conditions may include light, temperature, oxidation, moisture, and age. The taggants may be detected in biological samples, including urine and feces. By identifying the taggants, the drug composition and other information relating to the drug may be identified. Additionally, quantification of the different taggants may be used to determine whether the drug in the drug composition has been exposed to environmental conditions which may reduce its efficacy.

公开(公告)号：US09970949B1

公开(公告)日：2018-05-15

申请号：US15612071

申请日：2017-06-02

Applicant: David R. Hall ,  Joe Fox ,  Steven J. M. Butala ,  Dan Allen ,  Andrew Nguyen ,  Daniel Hendricks ,  Terrece Pearman

Inventor： David R. Hall ,  Joe Fox ,  Steven J. M. Butala ,  Dan Allen ,  Andrew Nguyen ,  Daniel Hendricks ,  Terrece Pearman

IPC: G01N33/94 ,  G01N33/02 ,  G01N33/15 ,  G01N21/00 ,  G01N33/52

CPC classification number: G01N33/02 ,  G01N33/15 ,  Y10T436/13

Abstract: We disclose a method of tagging pharmaceutical and nutritional products with nanoparticles which include noble metals. The disclosure describes a plurality of nanoparticles each with either a different size and/or shape. The nanoparticles of different sizes and shapes are distinguishable using spectroscopic techniques because each is associated with different optical properties and have a different spectral signature. The different optical properties are at least due to the unique size or shape of the nanoparticles. Each of the plurality of nanoparticles may be associated with a different characteristic of the tagged pharmaceutical or nutritional product. The method includes mixing the nanoparticles with or adhering the nanoparticles to the tagged pharmaceutical or nutritional product. Two or more of the plurality of nanoparticles may be mixed with or adhered to the tagged pharmaceutical or nutritional product in a ratio and the ratio may be associated with a characteristic of the product.

公开(公告)号：US09927448B1

公开(公告)日：2018-03-27

申请号：US15465939

申请日：2017-03-22

Applicant: David R. Hall ,  Steven Butala ,  Dan Allen ,  Daniel Hendricks ,  Andrew Nguyen ,  Terrece Pearman

Inventor： David R. Hall ,  Steven Butala ,  Dan Allen ,  Daniel Hendricks ,  Andrew Nguyen ,  Terrece Pearman

IPC: G01N33/94 ,  G01N33/493 ,  G01N21/25 ,  G01N33/58

CPC classification number: G01N33/94 ,  G01N21/31 ,  G01N33/493 ,  G01N33/583 ,  G01N2021/3196 ,  Y10T436/13

Abstract: We disclose a drug tracking system and method of use which may be used to screen a subject's bodily waste and to identify the drug the subject has consumed. The system includes a drug that is tagged with a food dye that may be detected in the subject's bodily waste using absorption spectroscopic analysis. The subject consumes the tagged drug and a user obtains a sample of the subject's bodily waste. The user may analyze the subject's urine using an absorption spectroscopic technique. The user may enter the emission spectrum obtained from the absorption spectroscopic analysis into a database that includes the signature emission spectra from multiple food dyes that are used as drug tags. The emission spectra may be compared and the identity of the food dye and its associated drug may be determined.

公开(公告)号：US09123762B2

公开(公告)日：2015-09-01

申请号：US12910547

申请日：2010-10-22

Applicant: Xing Lin ,  Douglas A. Buchberger, Jr. ,  Xiaoping Zhou ,  Andrew Nguyen ,  Anchel Sheyner

Inventor： Xing Lin ,  Douglas A. Buchberger, Jr. ,  Xiaoping Zhou ,  Andrew Nguyen ,  Anchel Sheyner

IPC: C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H01L21/683 ,  H01J37/32 ,  H01L21/67

CPC classification number: H01L21/67069 ,  H01J37/32532 ,  H01J37/32577 ,  H01J37/32715 ,  H01J37/32724 ,  H01L21/6831

Abstract: Apparatus for processing a substrate is disclosed herein. In some embodiments, a substrate support may include a substrate support having a support surface for supporting a substrate the substrate support having a central axis; a first electrode disposed within the substrate support to provide RF power to a substrate when disposed on the support surface; an inner conductor coupled to the first electrode about a center of a surface of the first electrode opposing the support surface, wherein the inner conductor is tubular and extends from the first electrode parallel to and about the central axis in a direction away from the support surface of the substrate support; an outer conductor disposed about the inner conductor; and an outer dielectric layer disposed between the inner and outer conductors, the outer dielectric layer electrically isolating the outer conductor from the inner conductor. The outer conductor may be coupled to electrical ground.

Abstract translation: 本文公开了用于处理衬底的装置。 在一些实施例中，衬底支撑件可以包括具有用于支撑衬底的支撑表面的衬底支撑件，衬底支撑件具有中心轴线; 设置在所述基板支撑件内的第一电极，用于当设置在所述支撑表面上时向基板提供RF功率; 内部导体，其围绕第一电极的与支撑表面相对的表面的中心耦合到第一电极，其中内部导体是管状的，并且从第一电极沿着远离支撑表面的方向平行于中心轴并围绕中心轴线延伸 的基板支撑; 设置在内部导体周围的外部导体; 以及设置在所述内部和外部导体之间的外部电介质层，所述外部电介质层将所述外部导体与所述内部导体电隔离。 外部导体可以耦合到电气接地。