公开(公告)号：US20220032258A1

公开(公告)日：2022-02-03

申请号：US17073111

申请日：2020-10-16

Applicant: Applied Materials, Inc

Inventor： Govindraj Desai ,  Sekar Krishnasamy ,  Sumedh Acharya ,  Dakshalkumar Patel ,  Jonathan Frankel ,  Quoc Truong ,  Mario Cambron ,  Ravindra Patil

IPC: B01J19/00 ,  B05D1/00 ,  B05C19/02 ,  B05C19/00 ,  B01J8/00

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.

公开(公告)号：US11180851B2

公开(公告)日：2021-11-23

申请号：US16438382

申请日：2019-06-11

Applicant: Applied Materials, Inc.

Inventor： Colin C. Neikirk ,  Pravin K. Narwankar ,  Kaushal Gangakhedkar ,  Visweswaren Sivaramakrishnan ,  Jonathan Frankel ,  David Masayuki Ishikawa ,  Quoc Truong ,  Joseph Yudovsky

IPC: C23C16/455 ,  C23C16/44 ,  C23C16/442

Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated and coupled to the motors, a controller configured to cause the motors to rotate the chamber in a first direction about an axial axis at a rotation speed sufficient to force the particles to be centrifuged against an inner diameter of the chamber, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.

公开(公告)号：US11174552B2

公开(公告)日：2021-11-16

申请号：US16438371

申请日：2019-06-11

Applicant: Applied Materials, Inc.

Inventor： Colin C. Neikirk ,  Pravin K. Narwankar ,  Kaushal Gangakhedkar ,  Visweswaren Sivaramakrishnan ,  Jonathan Frankel ,  David Masayuki Ishikawa ,  Quoc Truong ,  Joseph Yudovsky

IPC: C23C16/455 ,  C23C16/44 ,  C23C16/442

Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.

公开(公告)号：US20150090299A1

公开(公告)日：2015-04-02

申请号：US14040571

申请日：2013-09-27

Applicant: Applied Materials, Inc.

Inventor： Brian J. Brown ,  Ekaterina Mikhaylichenko ,  Jonathan Frankel

IPC: H01L21/02

CPC classification number: H01L21/67057 ,  H01L21/67028

Abstract: In some embodiments, a module is provided that is configured to clean, rinse and dry a substrate. The module includes (1) a tank having an upper tank region positioned above a lower tank region, the upper tank region having (a) an opening through which a substrate is removed from the tank; (b) a first fluid supply configured to supply a first fluid to a surface of a substrate being removed from the tank; and (c) a first suction mechanism, positioned below the first fluid supply, wherein the first suction mechanism is configured to suction fluid supplied from the first fluid supply so as to deter the suctioned fluid from reaching the lower tank region; and (2) a drying vapor supply positioned above the first fluid supply and configured to supply a drying vapor to a surface of a substrate being removed from the tank. Numerous other aspects are provided.

Abstract translation: 在一些实施例中，提供了被配置为清洁，漂洗和干燥基底的模块。 模块包括（1）具有位于下罐区域上方的上罐区域的罐，上罐区域具有（a）开口，基板通过该开口从罐中移除; （b）构造成将第一流体供应到从罐中取出的基板的表面的第一流体供应; （c）位于第一流体供给部下方的第一吸引机构，其特征在于，所述第一吸引机构构成为吸入从所述第一流体供给源供给的流体，以阻止所述被吸引的流体到达所述下部箱体区域; 和（2）位于第一流体供应器上方的干燥蒸气供应器，其构造成将干燥蒸气供应到从罐中取出的基板的表面。 提供了许多其他方面。

公开(公告)号：US12134091B2

公开(公告)日：2024-11-05

申请号：US18212599

申请日：2023-06-21

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC: C23C16/44 ,  B01F27/112 ,  B01F27/70 ,  B01J8/10 ,  B05D1/00 ,  B01F101/22

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

公开(公告)号：US11717800B2

公开(公告)日：2023-08-08

申请号：US16855860

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC: B01J8/10 ,  C23C16/44 ,  B05D1/00 ,  B01F27/70 ,  B01F27/112 ,  B01F101/22

CPC classification number: B01J8/10 ,  B01F27/112 ,  B01F27/70 ,  B05D1/60 ,  C23C16/4417 ,  B01F2101/22 ,  B01J2208/00867

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

公开(公告)号：US11692265B2

公开(公告)日：2023-07-04

申请号：US17697845

申请日：2022-03-17

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

CPC classification number: C23C16/4417 ,  B01F27/051 ,  B01F27/074 ,  B01F27/0726 ,  B01F27/112 ,  B01F27/70 ,  B01J19/0066 ,  B01J19/18 ,  C23C16/45555

Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.

公开(公告)号：US11311491B2

公开(公告)日：2022-04-26

申请号：US16249885

申请日：2019-01-16

Applicant: Applied Materials, Inc.

Inventor： Colin C. Neikirk ,  Jonathan Frankel

IPC: A61K9/50 ,  A61K47/58 ,  A61K31/506 ,  A61K31/519 ,  A61K31/43 ,  A61K31/405 ,  C07K16/32 ,  C07K16/22 ,  C07K16/28 ,  A61J3/07 ,  C23C16/40 ,  C23C16/455 ,  A61K31/7048 ,  A61K31/424 ,  C23C16/44 ,  C23C16/458

Abstract: A method of preparing a pharmaceutical composition having a drug-containing core enclosed by one or more metal oxide materials is provided. The method includes the sequential steps of (a) loading the particles comprising the drug into a reactor, (b) applying a vaporous or gaseous metal precursor to the particles in the reactor, (c) performing one or more pump-purge cycles of the reactor using inert gas, (d) applying a vaporous or gaseous oxidant to the particles in the reactor, and (e) performing one or more pump-purge cycles of the reactor using inert gas. The temperature of the particles does not exceed 35° C. This produces a pharmaceutical composition comprising a drug containing core enclosed by one or more metal oxide materials.

公开(公告)号：US11299806B2

公开(公告)日：2022-04-12

申请号：US16855887

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.

公开(公告)号：US11242599B2

公开(公告)日：2022-02-08

申请号：US16515875

申请日：2019-07-18

Applicant: Applied Materials, Inc.

Inventor： Kaushal Gangakhedkar ,  Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar

IPC: C23C16/44 ,  C23C16/455 ,  A61K9/16

Abstract: A reactor for coating particles includes a vacuum chamber configured to hold particles to be coated, a vacuum port to exhaust gas from the vacuum chamber via the outlet of the vacuum chamber, a chemical delivery system configured to flow a process gas into the particles via a gas inlet on the vacuum chamber, one or more vibrational actuators located on a first mounting surface of the vacuum chamber, and a controller configured to cause the one or more vibrational actuators to generate a vibrational motion in the vacuum chamber sufficient to induce a vibrational motion in the particles held within the vacuum chamber.