公开(公告)号：US06625874B2

公开(公告)日：2003-09-30

申请号：US09942548

申请日：2001-08-31

Applicant: Kia Silverbrook

Inventor： Kia Silverbrook

IPC: H05B300

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A method of forming a thermal bend actuator (6) is provided with upper arms (23, 25, 26) and lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26, 27, 28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material.

Abstract translation: 形成热弯曲致动器（6）的方法设置有不平坦的上臂（23,25,26）和下臂（27,28），因此增加了臂的刚度。 臂（23,25,26,27,28）可以彼此横向地间隔开，并且在平面图中不会彼此过大，从而能够通过沉积单层臂形成材料来形成所有臂。

公开(公告)号：US20030140627A1

公开(公告)日：2003-07-31

申请号：US10258518

申请日：2002-10-25

Inventor： Kia Silverbrook

IPC: F02G001/04 ,  F01B029/10

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator (6) is provided with upper arms (23, 25, 26) and lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26,27,28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material.

Abstract translation: 热弯曲致动器（6）设置有不平坦的上臂（23,25,26）和下臂（27,28），因此增加了臂的刚度。 臂（23,25,26,27,28）可以彼此横向地间隔开，并且在平面图中不会彼此过多，因此能够通过沉积单层形成臂的材料来形成所有的臂。

公开(公告)号：US06531947B1

公开(公告)日：2003-03-11

申请号：US09659798

申请日：2000-09-12

Applicant: Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

Inventor： Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

IPC: H01H6104

CPC classification number: B81B3/0024 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/058 ,  B82Y15/00 ,  H01H2061/006 ,  H01H2061/008

Abstract: A micrometer sized, single-stage, vertical thermal actuator with controlled bending capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. The cold arm is adapted to provide controlled bending near the first end thereof. A member mechanically and electrically couples the free ends of the hot and cold arms such that the actuator bends generally at the flexure so that the member moves away from the substrate when current is applied to at least the hot arm.

公开(公告)号：US20030002133A1

公开(公告)日：2003-01-02

申请号：US09892616

申请日：2001-06-28

Applicant: SOUTH WEST RESEARCH INSTITUTE

Inventor： Heather Shannon Hanson ,  Joseph Nathan Mitchell

IPC: G02B026/00

CPC classification number: B81B3/0024 ,  B81B2201/031 ,  B81B2201/11 ,  B81B2203/055 ,  H01H2061/008

Abstract: A thermal actuator includes a first arm having a proximal end and a distal end, a second arm, parallel to the first arm, having a proximal end and a distal end, and a third arm arranged between and parallel to the first and second arms, the third arm having a proximal end and a distal end. The third arm has at least one portion at the distal end of the third arm having a width that is substantially larger than a width of the first arm and a width of the second arm. The distal ends of the first, second and third arms are coupled together to form a distal end of the thermal actuator, and the first, second and third arms preferably are made of a single material. When the proximal end of the third arm is coupled to ground and current is applied to the proximal end of the first arm, the distal end of the thermal actuator moves and applies force in a first direction, and when the proximal end of the third arm is coupled to ground and current is applied to the proximal end of the second arm, the distal end of the thermal actuator moves and applies force in a direction opposite to the first direction. A number of thermal actuators can be arranged in an array. The thermal actuator or array of thermal actuators can be coupled to an applicator.

Abstract translation: 热致动器包括具有近端和远端的第一臂，平行于第一臂的第二臂，具有近端和远端，以及布置在第一臂和第二臂之间并平行于第一臂的第三臂， 第三臂具有近端和远端。 第三臂具有在第三臂的远端处的至少一个部分，其宽度基本上大于第一臂的宽度和第二臂的宽度。 第一，第二和第三臂的远端联接在一起以形成热致动器的远端，并且第一，第二和第三臂优选地由单一材料制成。 当第三臂的近端联接到地面并且电流被施加到第一臂的近端时，热致动器的远端在第一方向上移动并施加力，并且当第三臂的近端 耦合到地面，并且电流施加到第二臂的近端，热致动器的远端移动并沿与第一方向相反的方向施加力。 许多热致动器可以排列成阵列。 热致动器或热致动器阵列可以耦合到施加器。

公开(公告)号：US06324748B1

公开(公告)日：2001-12-04

申请号：US09232941

申请日：1999-01-19

Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

IPC: H01H1100

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B3/0054 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0034 ,  F16K99/0044 ,  F16K2099/0071 ,  F16K2099/0074 ,  F16K2099/008 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H67/26 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  Y10T29/49105

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

Abstract translation: 提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。 为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。 因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。 还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。 此外，还提供了一种制造MEMS致动器的方法。

公开(公告)号：US06114794A

公开(公告)日：2000-09-05

申请号：US232939

申请日：1999-01-19

Applicant: Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

Inventor： Vijayakumar R. Dhuler ,  Robert L. Wood ,  Ramaswamy Mahadevan

IPC: B81B3/00 ,  B81C1/00 ,  F03G7/06 ,  F15C5/00 ,  F16K99/00 ,  G02B6/38 ,  G02B6/42 ,  H01H1/00 ,  H01H9/14 ,  H01H61/00 ,  H01H61/02 ,  H01H65/00 ,  H01H67/26 ,  H04Q1/16 ,  H01L37/00 ,  H02N10/00

CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B3/0054 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0044 ,  H01H1/0036 ,  H01H61/02 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  F16K2099/0071 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K99/0034 ,  G02B6/3803 ,  G02B6/4226 ,  H01H2001/0042 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H61/00 ,  H01H67/26 ,  H01H9/14 ,  Y10T29/49105

Abstract: A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.

Abstract translation: 提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。 为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。 因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。 还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。 此外，还提供了一种制造MEMS致动器的方法。

公开(公告)号：US20180201497A1

公开(公告)日：2018-07-19

申请号：US15744575

申请日：2016-07-13

Applicant: INTREPID VISIONS INC.

Inventor： Carlo MENON ,  Mojtaba KOMEILI

IPC: B81B3/00 ,  B81B7/02 ,  F03G7/06

CPC classification number: B81B3/0024 ,  B81B7/02 ,  B81B2201/031 ,  B81B2203/053 ,  F03G7/065 ,  G02B26/103 ,  H01H2061/006

Abstract: A system and methods for base excitation of moderately high vibration of micro-cantilevers are disclosed. A micro-cantilever may be coupled to one or more actuators adjacent its base. The actuators may comprise bulk materials, bridges, or formed wires that expand and contract by application of electric currents, due to, for example, the effect of electro-thermal heating or piezoelectric effects. Single actuators or an array of actuators may be placed around the micro-cantilever to oscillate it and apply actuation pulses. The system and methods, and adjustments of the geometrical parameters, may be performed to yield a nominal natural frequency in the system. The excitation of actuators with signals corresponding to the natural frequency may induce resonance in the system and may result in high amplitude vibrations and displacement of the cantilever tip of the micro-cantilever. Various architectures of the actuators may be implemented to stimulate different frequencies of the beam and induce displacement in different direction and amplitudes.

公开(公告)号：US20170117825A1

公开(公告)日：2017-04-27

申请号：US15297243

申请日：2016-10-19

Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives ,  SAFRAN ELECTRONICS & DEFENSE

Inventor： Guillaume JOURDAN ,  Guillaume LEHEE

IPC: H02N10/00 ,  B81B3/00

CPC classification number: H02N10/00 ,  B81B3/0024 ,  B81B2201/031

Abstract: A microelectromechanical structure with electrothermal actuation including a fixed part, a moveable part, a first electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part and a second electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part, the beams being mechanically connected to the moveable part enabling a displacement of the moveable part by electrothermal actuation, an electrically conductive connecting element connecting the moveable part to the fixed part, a first connector for connecting the first actuating beam to a first polarisation source and a second connector for connecting the second actuating beam to a second polarisation source, such that the first and the second can be polarised differently and separately.

公开(公告)号：US20140295365A1

公开(公告)日：2014-10-02

申请号：US14362285

申请日：2012-11-29

Applicant: Commissariat à I'énergie atomique et aux énergies alternatives

Inventor： Fabrice Casset

IPC: F24J3/00

CPC classification number: F24V99/00 ,  B81B3/0024 ,  B81B3/0081 ,  B81B2201/0271 ,  B81B2201/031 ,  B81B2201/032 ,  F03G7/06 ,  H01L41/1136 ,  H02N2/18

Abstract: A device for generating a second temperature variation ΔT2 from a first use temperature variation ΔT1, includes an elastocaloric material layer, having an internal temperature which is able to vary by ΔT2 in response to a given mechanical stress variation Δσ applied to the elastocaloric material layer. The variation Δσ being induced by the first use temperature variation ΔT1 There is a suspended element in mechanical contact with the elastocaloric material layer so as to apply to this layer a mechanical stress that varies in response to the use temperature variation ΔT1. The suspended element is arranged so as to make the mechanical stress applied to the elastocaloric material layer vary by Δσ in response to the temperature variation ΔT1 to generate the second temperature variation ΔT2.

Abstract translation: 用于从第一使用温度变化＆Dgr; T1产生第二温度变化＆gt; T2的装置包括弹性体材料层，其具有响应于给定的机械应力变化＆Dgr能够变化为＆Dgr; T2的内部温度; ＆sgr 应用于弹性材料层。 变化与变化 由第一使用温度变化引起的; Dgr; T1具有与弹性体材料层机械接触的悬浮元件，以便向该层施加响应于使用温度变化＆Dgr; T1变化的机械应力。 悬挂元件布置成使得施加到弹性材料层的机械应力变化为＆Dgr; 响应于温度变化＆Dgr; T1以产生第二温度变化＆Dgr; T2。

公开(公告)号：US20130037512A1

公开(公告)日：2013-02-14

申请号：US13652851

申请日：2012-10-16

Applicant: Yu SUN ,  Keekyoung KIM

Inventor： Yu SUN ,  Keekyoung KIM

IPC: H05K13/00

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sixes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，该方法能够抓住六点和二轴力感测能力的大范围的微纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。