公开(公告)号：US20190121121A1

公开(公告)日：2019-04-25

申请号：US15793819

申请日：2017-10-25

Applicant: Microsoft Technology Licensing, LLC

Inventor： Martin Francis GALINSKI, III ,  Wei SHEN

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0833 ,  B81B3/0021 ,  B81B3/0083 ,  B81B2201/042 ,  G02B26/0825 ,  G02B26/0858 ,  H01L41/042 ,  H01L41/0933 ,  H02N2/0075 ,  H02N2/10

Abstract: A piezo MEMS mirror system that includes a drive system that drives a piezo MEMS mirror that generates an image on a portable device display. The drive system includes a DC-AC converter that operates to convert the DC power provided by the battery to AC power. The DC-AC converter may generate the AC power having a peak voltage that is at an intermediate level—being between the DC voltage of the battery, and the peak AC voltage generated by the drive system. The drive system also includes an output filter that uses a series-coupled inductance system (perhaps inductively coupled inductors in a differential mode circuit) in conjunction with a capacitance of the piezo MEMS mirror (and perhaps tuning capacitors to account for mirror fabrication deviations) to amplify the AC voltage of the AC power at a mechanical resonant frequency of the piezo MEMS mirror.

公开(公告)号：US20180259713A1

公开(公告)日：2018-09-13

申请号：US15865692

申请日：2018-01-09

Applicant: Santec Corporation

Inventor： Yasuki Sakurai

IPC: G02B6/26 ,  G02B6/35 ,  G02B26/08 ,  G02B6/02 ,  B81B7/00

CPC classification number: G02B6/266 ,  B81B7/0077 ,  B81B2201/042 ,  G02B6/02042 ,  G02B6/3512 ,  G02B6/3594 ,  G02B26/0841

Abstract: An optical power attenuator includes: a MEMS package storing a MEMS element that can control a reflection angle of light by a mirror; a capillary member provided to one end of a two-core optical fiber that transmits the light and that has an end surface on a side that inputs/outputs the light to the two-core optical fiber tilted at a predetermined angle relative to an optical axis of the two-core optical fiber; and a lens that causes a light emitted from one of the optical fibers of the two-core optical fiber to become incident on the MEMS element via the capillary member and guides the reflected light reflected by the mirror of the MEMS element to the other optical fiber of the two-core optical fiber.

公开(公告)号：US20180210190A1

公开(公告)日：2018-07-26

申请号：US15748049

申请日：2016-07-21

Applicant: KYOCERA Corporation

Inventor： Hiroki OKADA

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0858 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0181 ,  B81B2203/058

Abstract: A mirror device includes a fixing section, mirror section, first connecting section, first beam section, second connecting section, and second beam section. The mirror section includes a major surface and a light reflecting surface. The first connecting section includes a first end connected to the mirror section and extends in a first direction from the first end. The first beam section connects the fixing section and the first connecting section and extends intersecting the first direction. The first beam section can be deformed by applying voltage. The second connecting section includes a second end connected to the first beam section and extends in the first direction from the second end on a virtual straight line extending in the first direction from the first end. The second beam section connects the fixing section and the second connecting section and extends intersecting the first direction, and can be deformed by applying voltage.

公开(公告)号：US20180194616A1

公开(公告)日：2018-07-12

申请号：US15743326

申请日：2016-05-24

Applicant: Robert Bosch GmbH

Inventor： Joerg Muchow ,  Rainer Straub ,  Stefan Pinter

IPC: B81C1/00 ,  B81B7/00

CPC classification number: B81C1/00103 ,  B81B7/0058 ,  B81B2201/042 ,  B81B2203/0384 ,  B81C1/00317 ,  B81C2201/0133 ,  B81C2201/0143 ,  B81C2201/0154 ,  B81C2203/0136 ,  G02B1/14 ,  G02B26/0833

Abstract: A manufacturing method for a micromechanical window structure including the steps: providing a substrate, the substrate having a front side and a rear side; forming a first recess on the front side; forming a coating on the front side and on the first recess; and forming a second recess on the rear side, so that the coating is at least partially exposed, whereby a window is formed by the exposed area of the coatings.

公开(公告)号：US20180129036A1

公开(公告)日：2018-05-10

申请号：US15348087

申请日：2016-11-10

Applicant: STMicroelectronics Ltd

Inventor： Elik Haran ,  Gilad Adler

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00 ,  G01R31/28

CPC classification number: G02B26/085 ,  B81B3/0059 ,  B81B2201/042 ,  G01R31/2829 ,  G01R31/44 ,  G02B26/105

Abstract: Disclosed herein is a circuit for determining failure of a movable MEMS mirror. The circuit includes a mirror position sensor associated with the movable MEMS mirror and that generates an analog output as a function of angular position of the movable MEMS mirror. An analog to digital converter converts the analog output from the mirror position sensor to a digital mirror sense signal. Failure detection circuitry calculates a difference between the digital mirror sense signal at a first instant in time and the digital mirror sense signal at a second instant in time, determines whether the difference exceeds a threshold, and indicates failure of the movable MEMS mirror as a function of the difference failing to exceed the threshold.

公开(公告)号：US09921405B2

公开(公告)日：2018-03-20

申请号：US15401681

申请日：2017-01-09

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics International N.V.

Inventor： Benedetto Vigna ,  Marco Ferrera ,  Sonia Costantini ,  Marco Salina

IPC: G02B26/08 ,  H04N9/31 ,  H02N1/00 ,  B81B3/00 ,  B81C1/00 ,  G02B27/10

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0154 ,  B81C1/00198 ,  G02B27/1006 ,  H02N1/002 ,  H02N1/006 ,  H04N9/3129 ,  H04N9/3135 ,  Y10T29/49002

Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

公开(公告)号：US09906869B2

公开(公告)日：2018-02-27

申请号：US15411575

申请日：2017-01-20

Applicant: The Research Foundation for The State University of New York

Inventor： Ronald N. Miles ,  Weili Cui

IPC: B81B3/00 ,  H04R19/04

CPC classification number: H04R19/04 ,  B81B3/0027 ,  B81B3/007 ,  B81B2201/0257 ,  B81B2201/042 ,  B81B2203/0127 ,  B81B2207/053 ,  B81C1/00595 ,  H04R2201/003 ,  H04R2307/025

Abstract: A method of forming a micromechanical structure comprising, forming a sacrificial layer on a surface and walls of a trench in a substrate; depositing a structural layer over the sacrificial layer, extending into the trench, selectively etching the structural layer to define a pattern having a boundary, at least a portion of the structural layer overlying a respective portion of the trench being removed and at least a portion of the structural layer extending into the trench being preserved at the boundary; and removing at least a portion of the sacrificial layer from underneath the structural layer, prior to removal of at least a portion of the sacrificial layer extending into the trench at the structural boundary. A micromechanical structure formed by the method is also provided.

公开(公告)号：US09864189B2

公开(公告)日：2018-01-09

申请号：US14330452

申请日：2014-07-14

Applicant: FUJIFILM Corporation

Inventor： Takayuki Naono

IPC: G02B26/08 ,  H01L41/187 ,  B81B7/00 ,  G02B26/10 ,  B81B7/02 ,  B81B3/00 ,  H01L41/09

CPC classification number: G02B26/0858 ,  B81B3/0043 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/04 ,  G02B26/105 ,  H01L41/0933 ,  H01L41/1876

Abstract: In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement.

公开(公告)号：US20170351088A1

公开(公告)日：2017-12-07

申请号：US13899077

申请日：2013-05-21

Applicant: Isao AOYAGI ,  Kanae MURATA ,  Takashi OZAKI ,  Norio FUJITSUKA ,  Yutaka NONOMURA ,  Teruhisa AKASHI

Inventor： Isao AOYAGI ,  Kanae MURATA ,  Takashi OZAKI ,  Norio FUJITSUKA ,  Yutaka NONOMURA ,  Teruhisa AKASHI

IPC: G02B26/08 ,  G02B26/10 ,  G02B6/35 ,  B81B5/00 ,  H04N1/113 ,  G02B7/182

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B5/00 ,  B81B2201/042 ,  G02B6/3512 ,  G02B6/3572 ,  G02B7/1821 ,  G02B26/085 ,  G02B26/10 ,  H04N1/113

Abstract: The present application discloses a deflector including a substrate portion, a movable portion, a reflective portion, a support portion, and a moving mechanism. The movable portion is supported by a first end of the support portion. A second end of the support portion is supported by the substrate portion. An end of the movable portion is capable of coming into contact with the substrate portion. The reflective portion is formed on the movable portion. The moving mechanism is capable of driving the movable portion so as to bring the movable portion into at least any one of a first state, a second state, a third state, and a fourth state.

公开(公告)号：US09810258B2

公开(公告)日：2017-11-07

申请号：US15379512

申请日：2016-12-15

Applicant: Raviv Erlich ,  Yuval Gerson

Inventor： Raviv Erlich ,  Yuval Gerson

IPC: F16C11/12 ,  F16F1/48 ,  B81C1/00 ,  B81B3/00 ,  G01P15/093 ,  G01P15/125 ,  G01P15/09 ,  G01C19/02 ,  G02B26/08 ,  G02B26/10

CPC classification number: F16C11/12 ,  B81B3/0043 ,  B81B2201/0235 ,  B81B2201/034 ,  B81B2201/042 ,  B81B2203/0118 ,  B81B2203/0163 ,  B81C1/0015 ,  B81C1/00198 ,  B81C1/00523 ,  B81C2201/013 ,  E05D1/02 ,  E05D7/00 ,  E05D11/0081 ,  F16F1/48 ,  F16F2224/025 ,  F16F2226/00 ,  F16F2226/042 ,  G01C19/02 ,  G01P15/09 ,  G01P15/093 ,  G01P15/125 ,  G02B26/0833 ,  G02B26/105 ,  Y10T16/522 ,  Y10T16/525 ,  Y10T29/24 ,  Y10T29/25

Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.