公开(公告)号：US20020076575A1

公开(公告)日：2002-06-20

申请号：US09940072

申请日：2001-08-27

Inventor： Hong Yang ,  Pascal Deschatelets ,  George M. Whitesides

IPC: B32B009/00 ,  B32B019/00 ,  B28B001/00 ,  B28B011/24 ,  B28B007/36 ,  B28B007/38 ,  C04B035/64

CPC classification number: B81C99/008 ,  B28B7/342 ,  B28B13/021 ,  B81C99/0085 ,  B81C2201/034 ,  B82Y10/00 ,  B82Y30/00 ,  C04B35/571 ,  C04B35/589 ,  C04B35/622 ,  Y10T428/26

Abstract: The invention provides ceramic molded solid articles and methods for making these articles on the micron scale. Articles are molded from ceramic precursors, optionally using molds including at least one portion that is elastomeric.

Abstract translation: 本发明提供陶瓷模制固体制品和用于制造这些制品的微米级别的方法。 制品由陶瓷前体模制，任选地使用包括弹性体的至少一部分的模具。

公开(公告)号：US20020066978A1

公开(公告)日：2002-06-06

申请号：US10016614

申请日：2001-10-30

Inventor： Enoch Kim ,  Younan Xia ,  Milan Mrksich ,  Rebecca J. Jackman ,  Xiao-Mei Zhao ,  Stephen P. Smith ,  Mara G. Prentiss ,  George M. Whitesides ,  Christian Marzolin

IPC: B29C039/10

CPC classification number: B81C1/00206 ,  A61K47/6957 ,  B01J19/0046 ,  B01J2219/00382 ,  B01J2219/00416 ,  B01J2219/0043 ,  B01J2219/00466 ,  B01J2219/00605 ,  B01J2219/0061 ,  B01J2219/00612 ,  B01J2219/00619 ,  B01J2219/00626 ,  B01J2219/0063 ,  B01J2219/00637 ,  B01J2219/00648 ,  B01J2219/00659 ,  B01J2219/00713 ,  B29C31/04 ,  B29C33/42 ,  B29C37/0053 ,  B29C39/24 ,  B29C43/021 ,  B29C67/246 ,  B29D11/00346 ,  B29D11/00663 ,  B29K2105/0002 ,  B29L2011/0016 ,  B81B2201/0214 ,  B81C1/00031 ,  B81C99/0085 ,  B81C2201/034 ,  B82Y30/00 ,  C40B60/14 ,  G01N21/7703 ,  G01N2021/7776 ,  G02B6/138 ,  H05K3/0079 ,  H05K3/061

Abstract: Chemically or biochemically active agents or other species are patterned on a substrate surface by providing a micromold having a contoured surface and forming, on a substrate surface, a chemically or biochemically active agent or fluid precursor of a structure. A chemically or biochemically active agent or fluid precursor also can be transferred from indentations in an applicator to a substrate surface. The substrate surface can be planar or non-planar. Fluid precursors of polymeric structures, inorganic ceramics and salts, and the like can be used to form patterned polymeric articles, inorganic salts and ceramics, reactive ion etch masks, etc. at the surface. The articles can be formed in a pattern including a portion having a lateral dimension of less than about 1 millimeter or smaller. The indentation pattern of the applicator can be used to transfer separate, distinct chemically or biochemically active agents or fluid precursors to separate, isolated regions of a substrate surface. Waveguide arrays, combinatorial chemical or biochemical libraries, etc. can be made. Differences in refractive index of waveguide and cladding can be created by subjecting the waveguide and cladding, made of identical prepolymeric material, to different polymerization or cross-linking conditions. Interferometers are defined by coupling arrays of waveguides, where coupling can be controlled by altering the difference in refractive index between cladding and waveguide at any desired location of the array. Alteration and refractive index can be created photochemically, chemically, or the like. Sensors also are disclosed, including biochemical sensors.

Abstract translation: 化学或生物化学活性剂或其它物质通过提供具有轮廓表面的微胶体并在基底表面上形成结构的化学或生物化学活性剂或流体前体而在基底表面上图案化。 化学或生物化学活性剂或流体前体也可以从敷料器中的凹陷转移到基底表面。 衬底表面可以是平面的或非平面的。 聚合物结构，无机陶瓷和盐等的流体前体可用于在表面形成图案化聚合物制品，无机盐和陶瓷，反应离子蚀刻掩模等。 制品可以形成为包括横向尺寸小于约1毫米或更小的部分的图案。 涂抹器的压痕图案可以用于将单独的，不同的化学或生物化学活性剂或流体前体转移到基底表面的分离的，分离的区域。 可以制作波导阵列，组合化学或生物化学库等。 可以通过将由相同的预聚物材料制成的波导和包层进行不同的聚合或交联条件来产生波导和包层的折射率差异。 干涉仪通过耦合波导阵列来定义，其中可以通过改变阵列的任何所需位置处的包层和波导之间的折射率差来控制耦合。 改变和折射率可以通过光化学，化学等方式产生。 还公开了传感器，包括生化传感器。

公开(公告)号：US06387713B2

公开(公告)日：2002-05-14

申请号：US09874165

申请日：2001-06-04

Applicant: Masaki Hara

Inventor： Masaki Hara

IPC: H01L2100

CPC classification number: B81C1/0019 ,  B81C2201/034

Abstract: To offer a microstructure fabrication apparatus capable of realizing MEMS and a Rugate Filter excellent in performance characteristics by patterning a thick functional material film in high aspect ratio with a simple and practical manufacturing method. A Si layer is employed for a mask pattern. The advantages of the Si layer are withstood a process conducted at high temperature for forming a PZT layer, which is the functional material layer, patterned in high aspect ratio, and achieves excellent process consistency for the whole manufacturing processes of the microfabrication. A trench or a gap is formed with the mask pattern deeper than the desired PZT layer. The PZT layer, or functional material layer (films) is formed on the whole surface including the bottom of the concave part of the mask pattern. The PZT layer deposited on the mask pattern is removed with the mask pattern itself, and selectively remains the pattern of the PZT layer, thereby obtaining a pattern of the desired functional material layer.

Abstract translation: 为了提供一种能够实现MEMS的微结构制造装置和通过以简单实用的制造方法对具有高纵横比的厚功能材料膜进行图案化的性能特性优异的Rugate滤波器。 Si层用于掩模图案。 Si层的优点是经受在高温下进行的工艺，以形成以高纵横比构图的功能材料层形成PZT层，并且在微细加工的整个制造工艺中获得优异的工艺一致性。 形成沟槽或间隙，掩模图案比期望的PZT层更深。 在包括掩模图案的凹部的底部的整个表面上形成PZT层或功能材料层（膜）。 沉积在掩模图案上的PZT层用掩模图案本身去除，并且选择性地保留PZT层的图案，从而获得所需功能材料层的图案。

公开(公告)号：US5376252A

公开(公告)日：1994-12-27

申请号：US946332

申请日：1992-11-10

Applicant: Bjorn Ekstrom ,  Gunilla Jacobson ,  Ove Ohman ,  Hakan Sjodin

Inventor： Bjorn Ekstrom ,  Gunilla Jacobson ,  Ove Ohman ,  Hakan Sjodin

IPC: B01D57/02 ,  B01L3/00 ,  B29C33/42 ,  B29C35/08 ,  B29C45/00 ,  B29D24/00 ,  B81C1/00 ,  G01N27/447 ,  G01N30/60 ,  G01N37/00 ,  G01N27/26 ,  B01D15/08

CPC classification number: B81C1/00071 ,  B01D57/02 ,  B01L3/502707 ,  B29C33/42 ,  B29D24/002 ,  G01N27/44704 ,  G01N27/44791 ,  G01N30/6052 ,  G01N30/6095 ,  B01L2200/025 ,  B01L2200/0689 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2400/0421 ,  B29C35/08 ,  B29C45/00 ,  B29K2105/24 ,  B81C2201/019 ,  B81C2201/034

Abstract: The microfluidic structure comprises first and second substantially planar form-stable base layers and an intermediate spacing layer of elastic material, said spacing layer being recessed to define a microcavity or channel system with at least one of said first and second base layers. The structure is produced by moulding the spacing layer, optionally applied to or integral with a first base layer, against a planar mould, and the microcavity or channel system is completed by applying a second base layer, and optionally said first base layer, to the spacing layer.

Abstract translation: 微流体结构包括第一和第二基本上平面的形式稳定的基层和弹性材料的中间间隔层，所述间隔层被凹入以限定具有所述第一和第二基层中的至少一个的微腔或通道系统。 该结构通过将间隔层模制成任意地施加于第一基底层或与第一基底层一体的方式制成平面模具，并且通过将第二基底层和任选地所述第一基底层施加到所述第一基底层而完成微腔或通道系统 间隔层。

公开(公告)号：US20240019934A1

公开(公告)日：2024-01-18

申请号：US18193528

申请日：2023-03-30

Applicant: Meta Platforms Technologies, LLC

Inventor： Sean Jason Keller ,  Tristan Thomas Trutna

IPC: G06F3/01 ,  F16K99/00 ,  B81C1/00

CPC classification number: G06F3/016 ,  F16K99/0049 ,  G06F3/014 ,  B81C1/00119 ,  G06F3/011 ,  B81B2201/0264 ,  B81B2201/058 ,  B81B2207/012 ,  B81B2201/032 ,  F16K2099/0082 ,  F16K2099/008 ,  B81C2201/034

Abstract: A method for large scale integration of haptic devices is described. The method comprises forming a first elastomer layer of a large scale integration (LSI) device on a substrate according to a specified manufacturing process, the first elastomer layer having a plurality of fluid based circuits, the first elastomer layer adhering to a plurality of formation specifications. The method further comprises curing the first elastomer layer. Additionally, one or more additional elastomer layers of the LSI device are formed with the first elastomer layer according to the specified manufacturing process, the one or more additional elastomer layers having a plurality of fluid based circuits, the one or more additional elastomer layers adhering to the plurality of formation specifications.

公开(公告)号：US09616171B2

公开(公告)日：2017-04-11

申请号：US15015627

申请日：2016-02-04

Applicant: Cam Med LLC

Inventor： Yanzhe Qin ,  Zhifei Ge

IPC: A61M31/00 ,  A61M5/168 ,  A61M5/145 ,  F04B43/04 ,  A61M5/142 ,  B81C1/00 ,  A61M39/24 ,  F04B53/10 ,  F16K99/00

CPC classification number: A61M5/14248 ,  A61M5/14586 ,  A61M5/16881 ,  A61M39/24 ,  A61M2005/14252 ,  A61M2205/3334 ,  A61M2205/35 ,  A61M2205/581 ,  A61M2205/582 ,  A61M2207/00 ,  B32B37/12 ,  B32B2535/00 ,  B81B2201/036 ,  B81C1/00158 ,  B81C2201/034 ,  F04B43/043 ,  F04B53/10 ,  F16K2099/008 ,  F16K2099/0094

Abstract: A flexible patch pump for controllable accurate subcutaneous delivery of one or more medicaments to a patient includes a laminated layered structure. The pump may have a rigid reservoir layer including a number of rigid reservoirs disposed in a flexible material; a flexible microfluidic layer including a compliant membrane for sealing the rigid reservoirs, a network of microfluidic channels connecting the rigid reservoirs, and a number of inlet and/or outlet valves corresponding to the rigid reservoirs; and a flexible-rigid electronic circuit layer including a number of individually-addressable actuators. In operation, the rigid reservoirs may contain medicament that is dispensed in precise volumes at appropriate times due, for example, to a pressure change in an addressed reservoir caused by displacement of the compliant membrane or other actuation element.

公开(公告)号：US20160236929A1

公开(公告)日：2016-08-18

申请号：US15033069

申请日：2013-11-19

Applicant: INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANG UNIVERSITY

Inventor： Jung Chul Lee ,  Il Lee

IPC: B81C1/00 ,  B81B3/00 ,  G01D11/30 ,  B81C99/00

CPC classification number: B81C1/0015 ,  B29C35/0805 ,  B29C64/135 ,  B29C2035/0827 ,  B29K2071/02 ,  B29K2105/0061 ,  B29K2995/0027 ,  B29L2031/756 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y80/00 ,  B81B3/0021 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/0025 ,  B81C2201/0188 ,  B81C2201/034 ,  B81C2203/038 ,  G01D11/30 ,  G01Q70/14 ,  G01Q70/16

Abstract: Disclosed is a method for manufacturing a microcantilever having a predetermined thickness that includes forming a liquid synthetic resin for cantilevers to a thickness corresponding to the thickness of the microcantilever on an upper surface of a base block having an adhesive base and a non-adhesive base, and curing the liquid synthetic resin for cantilevers via a boundary between the adhesive base and the non-adhesive base, wherein the adhesive base has stronger adhesivity to the cured synthetic resin for cantilevers than the non-adhesive base.

Abstract translation: 公开了一种具有预定厚度的微悬臂梁的制造方法，其包括在具有粘合剂基底和非粘性基底的基座的上表面上形成用于悬臂的液体合成树脂至与微悬臂梁的厚度相对应的厚度， 并且通过粘合剂基部和非粘合剂基部之间的边界固化用于悬臂的液体合成树脂，其中粘合剂基底与用于悬臂的固化合成树脂的粘合性比非粘合剂基部具有更强的粘附性。

公开(公告)号：US09214590B2

公开(公告)日：2015-12-15

申请号：US13787134

申请日：2013-03-06

Applicant: The University of North Carolina at Chapel Hill

Inventor： Joseph M. DeSimone ,  Ginger Denison Rothrock ,  Zhilian Zhou ,  Edward T. Samulski ,  Meredith Earl ,  Stuart Williams

IPC: B29C37/00 ,  B29C39/36 ,  H01L31/18 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00 ,  G03F7/00 ,  H01L31/0352 ,  H01L51/00 ,  H01L51/42 ,  B81C99/00 ,  B81C1/00

CPC classification number: H01L31/18 ,  B29C37/0003 ,  B29C39/36 ,  B81C1/00031 ,  B81C1/00214 ,  B81C99/0085 ,  B81C2201/034 ,  B82Y10/00 ,  B82Y20/00 ,  B82Y30/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L31/0352 ,  H01L51/0004 ,  H01L51/0036 ,  H01L51/0047 ,  H01L51/422 ,  H01L51/4253 ,  Y02E10/549

Abstract: A photovoltaic device includes an electron accepting material and an electron donating material. One of the electron accepting or donating materials is configured and dimensioned as a first component of a bulk heterojunction with a predetermined array of first structures, each first structure is substantially equivalent in three dimensional shape, has a substantially equivalent cross-sectional dimension, and where each first structure of the array of first structures has a substantially equivalent orientation with respect to adjacent first structures of the predetermined array forming a substantially uniform array.

Abstract translation: 光电器件包括电子接收材料和给电子材料。 电子接受或捐赠材料之一被配置和定尺寸为具有预定阵列的第一结构的本体异质结的第一部件，每个第一结构基本上相当于三维形状，具有基本相当的横截面尺寸，并且其中 第一结构阵列的每个第一结构相对于预定阵列的相邻第一结构具有基本上等同的取向，形成基本均匀的阵列。

公开(公告)号：US09139914B2

公开(公告)日：2015-09-22

申请号：US14259628

申请日：2014-04-23

Applicant: Ajou University Industry-Academic Cooperation Foundation

Inventor： Chang-Koo Kim ,  Sung-Woon Cho

IPC: H01L21/00 ,  C23F1/12 ,  B22F1/00 ,  C23C18/16 ,  C23C18/18 ,  C23C18/40 ,  H01L21/288 ,  C23F4/00

CPC classification number: C23F1/12 ,  B22F1/0018 ,  B22F1/0044 ,  B22F9/02 ,  B22F2001/0037 ,  B22F2304/05 ,  B81C1/00492 ,  B81C2201/0187 ,  B81C2201/034 ,  C23C18/1605 ,  C23C18/1657 ,  C23C18/1893 ,  C23C18/405 ,  C23F4/00 ,  H01J2237/0203 ,  H01J2237/3341 ,  H01L21/288 ,  Y10T29/49982

Abstract: This invention relates to a method of fabricating a three-dimensional copper nanostructure, including manufacturing a specimen configured to include a SiO2 mask; performing multi-directional slanted plasma etching to form a three-dimensional etching structure layer on the specimen; performing plating so that a multi-directional slanted plasma etched portion of the specimen is filled with a metal; removing an over-plated portion and the SiO2 mask from the metal layer; and removing a portion of a surface of the specimen other than the metal which is the three-dimensional etching structure layer. In this invention, a uniform copper nanostructure array can be obtained by subjecting a large-area specimen disposed in a Faraday cage to multi-directional slanted plasma etching using high-density plasma, forming a copper film on the etched portion of the specimen, and removing an over-plated copper film and the SiO2 mask, and the diameter of the copper nanostructure can be arbitrarily adjusted, thus attaining high applicability.

Abstract translation: 本发明涉及一种制造三维铜纳米结构的方法，包括制造被配置为包括SiO 2掩模的试样; 执行多方向倾斜等离子体蚀刻以在样本上形成三维蚀刻结构层; 进行电镀，使得样品的多方向倾斜等离子体蚀刻部分被金属填充; 从金属层去除过镀层部分和SiO 2掩模; 除去除了作为三维蚀刻结构层的金属以外的试样的表面的一部分。 在本发明中，通过对设在法拉第笼中的大面积试样进行多层倾斜等离子体蚀刻，使用高密度等离子体，在试样的蚀刻部分上形成铜膜，可以得到均匀的铜纳米结构体， 去除过镀铜膜和SiO 2掩模，并且可以任意调整铜纳米结构的直径，从而获得高适用性。

公开(公告)号：US20140183044A1

公开(公告)日：2014-07-03

申请号：US14138514

申请日：2013-12-23

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT

Inventor： Raphael RENAUDOT ,  Vincent AGACHE ,  Yves FOUILLET

IPC: C25D1/12

CPC classification number: C25D1/12 ,  B81C99/009 ,  B81C2201/034

Abstract: The invention relates to a method of forming a microfluidic array comprising at least one channel of semi-circular section, comprising the following steps: bringing into contact a first liquid (7) with an array of electrodes (3) of a microfluidic chip (1) comprising at least one pair of substantially parallel and coplanar electrodes (3a, 3b) arranged on a substrate (4), activating said array of electrodes so as to actuate by liquid dielectrophoresis LDEP said first liquid to form a fluidic structure (9) comprising at least one fluidic finger (9a), and using said fluidic structure as a mould to form said microfluidic array by solidification or hardening of a second liquid (11) deposited on the microfluidic chip and hugging the shape of said fluidic structure.

Abstract translation: 本发明涉及一种形成包括至少一个半圆形截面通道的微流体阵列的方法，包括以下步骤：使第一液体（7）与微流体芯片（1）的电极阵列（3）接触 ）包括布置在基板（4）上的至少一对基本上平行和共面的电极（3a，3b），激活所述电极阵列以便通过液体介电电泳LDEP所述第一液体致动以形成流体结构（9），所述流体结构（9）包括 至少一个流体指（9a），并且使用所述流体结构作为模具以通过凝固或固化沉积在所述微流体芯片上的第二液体（11）形成所述微流体阵列并且拥抱所述流体结构的形状。