公开(公告)号：US07860219B2

公开(公告)日：2010-12-28

申请号：US12239541

申请日：2008-09-26

Applicant: Scott M. Clark ,  Gregory C. Andrews

Inventor： Scott M. Clark ,  Gregory C. Andrews

IPC: H01J35/30

CPC classification number: H01J3/12 ,  H01J3/027 ,  H01J35/06 ,  H01J2235/068

Abstract: A cathode shield can comprise a shield body, a pair of tabs for defining a focal spot length, and a lip for concentrically aligning the cathode shield relative to a mounting element and/or an electron source of a cathode assembly. The tabs may be integral with the shield body and spaced a distance apart from each other. The distance may at least partially define the focal spot length of the electron source associated with the cathode assembly. The lip may also be integral with the shield body and extend from the shield body around at least a portion of a perimeter of the shield body so as to define a recess that is configured to receive the mounting element of the cathode assembly.

Abstract translation: 阴极屏蔽件可以包括屏蔽体，用于限定焦点长度的一对凸片，以及用于使阴极屏蔽件相对于阴极组件的安装元件和/或电子源同心对准的唇缘。 翼片可以与屏蔽体一体并且彼此隔开一段距离。 该距离可以至少部分地限定与阴极组件相关联的电子源的焦点长度。 唇缘还可以与屏蔽体成一体，并且从屏蔽体周围围绕屏蔽体的周边的至少一部分延伸，以便限定被配置为容纳阴极组件的安装元件的凹部。

公开(公告)号：US20090230317A1

公开(公告)日：2009-09-17

申请号：US12379442

申请日：2009-02-23

Applicant: Yoichi Hirayama ,  Takaho Yoshida

Inventor： Yoichi Hirayama ,  Takaho Yoshida

IPC: H01J3/14

CPC classification number: H01J3/12 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/28

Abstract: To provide an aberration correction configuration that can realize both an aberration correction function for a long focus and an aberration correction function for a short focus. While having a conventional aberration correction apparatus configuration that has two rotationally symmetric lenses arranged between two multiple lenses, three rotationally symmetric lenses are disposed between an objective lens and a multiple lens instead of the conventional arrangement in which two rotationally symmetric lenses are disposed therebetween. When using the objective lens with a long focal length, aberrations are corrected using two rotationally symmetric lenses among three rotationally symmetric lenses disposed between the objective lens and the multiple lens. When using the objective lens with a short focal length, e.g. for high resolution observation, aberrations are corrected using two rotationally symmetric lenses of a different combination to those used for a long focus, among the three rotationally symmetric lenses disposed between the objective lens and the multiple lens.

Abstract translation: 提供能够实现长焦点的像差校正功能和短焦点的像差校正功能的像差校正配置。 虽然具有布置在两个多个透镜之间的两个旋转对称透镜的常规像差校正装置配置，但是在物镜和多个透镜之间设置三个旋转对称透镜，而不是其中设置两个旋转对称透镜的传统布置。 当使用具有长焦距的物镜时，在设置在物镜和多透镜之间的三个旋转对称透镜之中使用两个旋转对称透镜校正像差。 当使用具有短焦距的物镜时，例如， 对于高分辨率观察，在物镜和多透镜之间设置的三个旋转对称透镜之中，使用与用于长焦距的不同组合的两个旋转对称透镜来校正像差。

公开(公告)号：US20080191144A1

公开(公告)日：2008-08-14

申请号：US11968833

申请日：2008-01-03

Applicant: Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

Inventor： Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

IPC: H01J1/50 ,  H05H7/00

CPC classification number: H01J27/02 ,  G21K1/093 ,  H01J3/02 ,  H01J3/12 ,  H01J3/20 ,  H01J29/64

Abstract: The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.

Abstract translation: 带电粒子束系统包括非轴对称二极管形成具有椭圆截面的非轴对称束。 聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道近似匹配。

公开(公告)号：US07381967B2

公开(公告)日：2008-06-03

申请号：US11145804

申请日：2005-06-06

Applicant: Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

Inventor： Ronak J. Bhatt ,  Chiping Chen ,  Jing Zhou

IPC: B01D59/44 ,  H01J49/00

CPC classification number: H01J27/02 ,  G21K1/093 ,  H01J3/02 ,  H01J3/12 ,  H01J3/20 ,  H01J29/64

Abstract: The charged-particle beam system includes a non-axisymmetric diode forms a non-axisymmetric beam having an elliptic cross-section. A focusing element utilizes a magnetic field for focusing and transporting the non-axisymmetric beam, wherein the non-axisymmetric beam is approximately matched with the channel of the focusing element.

Abstract translation: 带电粒子束系统包括非轴对称二极管形成具有椭圆截面的非轴对称束。 聚焦元件利用磁场来聚焦和传送非轴对称光束，其中非轴对称光束与聚焦元件的通道近似匹配。

公开(公告)号：US06855945B1

公开(公告)日：2005-02-15

申请号：US10350705

申请日：2003-01-27

Applicant: Stephen H. Silder

Inventor： Stephen H. Silder

IPC: G21K7/00 ,  H01J3/12 ,  H01J37/09 ,  G21K1/00 ,  H01J29/48

CPC classification number: H01J37/09 ,  G21K1/02 ,  H01J3/12 ,  H01J2237/28

Abstract: A thin flat disc with an orifice or orifices to size and control electron and other charged particulate beams. The disc is made of electrically conductive chemical vapor deposition (CVD) diamond. In addition the disc contains one or more high precision fine to ultra-fine orifices.

Abstract translation: 一个具有孔口或孔口的薄平盘，用于调整和控制电子和其他带电粒子束。 该盘由导电化学气相沉积（CVD）金刚石制成。 此外，光盘还包含一个或多个高精度的超细微孔。

公开(公告)号：US4823003A

公开(公告)日：1989-04-18

申请号：US73754

申请日：1987-07-13

Applicant: George C. King ,  Frank H. Read

Inventor： George C. King ,  Frank H. Read

IPC: H01J37/153 ,  H01J3/12 ,  H01J49/06 ,  H01J49/20 ,  H01J49/22 ,  H01J49/48 ,  H01J40/00 ,  H01J47/00

CPC classification number: H01J49/22 ,  H01J3/12 ,  H01J49/06 ,  H01J49/20 ,  H01J49/48

Abstract: A charged particle optical system, e.g. an energy or mass analyzer or a lens system, has a plurality of corrector electrodes (20 to 23) spaced apart across a particle beam passing from a monoenergetic source (4) to a focus (6) and dividing the beam into individual portions with central trajectories (30,31,32) the connector electrodes being electrically biassed to deflect the particles of the beam so as to reduce the aberration caused by portions with central trajectories intersecting the optical axis at different distances from the desired focus.

公开(公告)号：US4303864A

公开(公告)日：1981-12-01

申请号：US88224

申请日：1979-10-25

Applicant: Albert V. Crewe ,  David A. Kopf

Inventor： Albert V. Crewe ,  David A. Kopf

IPC: H01J3/12 ,  H01J37/153 ,  G21K1/08 ,  H01J3/14 ,  H01J3/26

CPC classification number: B82Y15/00 ,  H01J3/12 ,  H01J37/153

Abstract: A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.

Abstract translation: 提供了用于补偿带电粒子束装置中的球面像差的装置。 该装置包括位于两个聚焦透镜之间的六极。