公开(公告)号：US5369953A

公开(公告)日：1994-12-06

申请号：US247611

申请日：1994-05-23

Applicant: John R. Brophy

Inventor： John R. Brophy

IPC: B64G1/40 ,  F03H1/00 ,  H01J27/08 ,  H05H1/24 ,  H05H1/00

CPC classification number: F03H1/0043 ,  B64G1/405 ,  H01J27/08 ,  H05H1/24

Abstract: Apparatus for an ion engine comprises a three-grid accelerator system with the decelerator grid biased negative of the beam plasma. This arrangement substantially reduces the charge-exchange ion current reaching the accelerator grid at high tank pressures, which minimizes erosion of the accelerator grid due to charge-exchange ion sputtering, known to be the major accelerator grid wear mechanism. An improved method for life testing ion engines is also provided using the disclosed apparatus. In addition, the invention can also be applied in materials processing.

Abstract translation: 用于离子发动机的装置包括三栅加速器系统，其中减速器网格偏置为等离子体束的负值。 这种布置大大降低了在高罐压力下到达加速器网格的电荷交换离子电流，这使已知是主加速器网格磨损机制的电荷交换离子溅射对加速器网格的侵蚀最小化。 使用所公开的装置也提供了改进的寿命测试离子发动机的方法。 另外，本发明也可以应用于材料加工。

公开(公告)号：US5296714A

公开(公告)日：1994-03-22

申请号：US905350

申请日：1992-06-29

Applicant: James R. Treglio

Inventor： James R. Treglio

IPC: H01J27/08 ,  H01J27/22 ,  H01J49/42

CPC classification number: H01J27/08 ,  H01J27/22

Abstract: A method and apparatus for modifying the inner surface of a tube by ion surface modification techniques, such as ion implantation, ion mixing and ion beam assisted coating. The apparatus includes a plasma source, preferably a vacuum arc, a first magnet for guiding the plasma into a drift tube. A second magnet is spaced from the first magnet and has a current running opposite to the first magnet. A radial extractor surrounds the area between the magnets, which form a cusp therebetween. The plasma follows the field lines, exiting the drift tube to the extractor, where the ions are removed and accelerated outwardly in a radial direction. With the entire apparatus placed in a tube, the ions will impact the inner wall of the tube. The resulting ion implantation advantageously modifies the surface, typically increasing wear and erosion resistance, improving corrosion resistance, increasing fatigue life, etc. The apparatus may be used to coat the tube interior with the cathode material by operating the extractor at a lower voltage or omitting the extractor. The apparatus may be inserted in tubes and moved along the tube to treat the walls of very long tubes.

Abstract translation: 一种用于通过离子表面改性技术（例如离子注入，离子混合和离子束辅助涂覆）来改变管的内表面的方法和装置。 该装置包括等离子体源，优选为真空电弧，用于将等离子体引导到漂移管中的第一磁体。 第二磁体与第一磁体间隔开并且具有与第一磁体相反的电流。 径向提取器围绕磁体之间的区域，在它们之间形成一个尖点。 等离子体遵循场线，离开漂移管到提取器，其中离子被移除并沿径向向外加速。 当整个设备放置在管中时，离子将冲击管的内壁。 所得的离子注入有利地改变表面，通常增加耐磨性和耐冲蚀性，改善耐腐蚀性，增加疲劳寿命等。该装置可用于通过以较低的电压或省略操作提取器将管内部涂覆于阴极材料 提取器。 该装置可以插入管中并沿管移动以处理非常长的管的壁。

公开(公告)号：US5152956A

公开(公告)日：1992-10-06

申请号：US416890

申请日：1989-10-04

Applicant: Henri Bernardet ,  Xavier L. M. Godechot ,  Claude A. Lejeune

Inventor： Henri Bernardet ,  Xavier L. M. Godechot ,  Claude A. Lejeune

IPC: G21G4/02 ,  H01J27/08 ,  H05H3/06

CPC classification number: H01J27/08 ,  H05H3/06

Abstract: A sealed neutron tube is set forth, containing a low-pressure gaseous deuterium-tritium mixture wherefrom an ion source (13) forms an ion beam which traverses an acceleration electrode (17) and is projected with high energy onto a target (16) in order to produce therein a fusion reaction which causes an emission of neutrons. In accordance with the invention, the ion source comprises a cold cathode with strictly electrostatic confinement of ionizing electrons; this is achieved by using an anode which is connected to a positive potential and which has a weakly collective surface facing the repulsive surface of the cathode cavity; the anode is arranged along the axis of the cavity in which it is arranged; said cavity constitutes the internal part of the cathode (15) in which the electrons (e.sub.2) which oscillate along very long paths in comparison with the dimensions of the cathode cavity ionize the gas and form an ionized gas wherefrom the ion beam (22) is extracted for standard ion optical device (17).

Abstract translation: 提出了一种密封的中子管，其包含低压气态氘 - 氚混合物，其中离子源（13）形成穿过加速电极（17）并且以高能量投射到靶（16）上的离子束 为了在其中产生引起中子发射的聚变反应。 根据本发明，离子源包括严格静电限制电离电子的冷阴极; 这通过使用连接到正电位并且具有面向阴极腔的排斥表面的弱集体表面的阳极来实现; 阳极沿其布置的腔的轴线布置; 所述腔构成阴极（15）的内部部分，其中与阴极腔的尺寸相比，沿着非常长的路径振荡的电子（e2）将电离气体并形成电离气体，离子束（22） 提取用于标准离子光学器件（17）。

公开(公告)号：US5083061A

公开(公告)日：1992-01-21

申请号：US614600

申请日：1990-11-15

Applicant: Akira Koshiishi ,  Kohei Kawamura

Inventor： Akira Koshiishi ,  Kohei Kawamura

IPC: H01J27/08 ,  H01J27/20 ,  H01J37/08 ,  H01L21/265

CPC classification number: H01J27/08 ,  H01J2237/08 ,  H01J2237/31701

Abstract: An ion source according to the present invention includes a first chamber, including a main chamber having an electron generating arrangement therein, and a sub-chamber communicating with the main chamber through a nozzle, for producing a first plasma by a discharge. A supply is also provided for supplying a first gas for a discharge into the main chamber, as well as an electron extracting arrangement for extracting electrons from the first plasma. Also included are a second chamber for producing a second plasma by discharge excitation of the extracted electrons and ionizing a second gas as a source gas, a further supply for supplying the second gas into the second chamber, and a magnetic field generator for generating a magnetic field for guiding the extracted electrons toward the second chamber. The electron extracting arrangement includes an electrode between the sub-chamber and the second chamber. The electrode has a first hole, formed at a position opposite to the opening of the nozzle, for allowing the extracted electrons to pass therethrough and to move into the second chamber, and second holes, arranged around the first hole, for allowing part of the first gas injected from the nozzle to pass therethrough and to move into the second chamber. Part of the first gas is drawn into the second chamber through the second holes of the electrode, and the density of the first gas passing through the first hole is decreased.

Abstract translation: 根据本发明的离子源包括：第一室，包括其中具有电子产生装置的主室，以及通过喷嘴与主室连通的子室，用于通过排放产生第一等离子体。 还提供一种用于将第一气体供应到主室中的电源，以及用于从第一等离子体中提取电子的电子提取装置。 还包括第二室，用于通过所提取的电子的放电激发产生第二等离子体，并将作为源气体的第二气体电离，用于将第二气体供应到第二室中的另外的供应源，以及用于产生磁场的磁场发生器 用于将提取的电子引导到第二室。 电子提取装置包括在子室和第二室之间的电极。 电极具有形成在与喷嘴的开口相对的位置处的第一孔，用于允许所提取的电子通过并移动到第二室中，以及设置在第一孔周围的第二孔，用于允许部分 从喷嘴喷射的第一气体通过并移动到第二室中。 第一气体的一部分通过电极的第二孔被吸入第二室，并且通过第一孔的第一气体的密度降低。

公开(公告)号：US5023425A

公开(公告)日：1991-06-11

申请号：US466205

申请日：1990-01-17

Applicant: Wayne S. Severance, Jr.

Inventor： Wayne S. Severance, Jr.

IPC: H01J27/08 ,  B23K9/167 ,  B23K10/00 ,  B23K35/02 ,  H05H1/34

CPC classification number: H05H1/34 ,  H05H2001/3436 ,  H05H2001/3442 ,  H05H2001/3452

Abstract: An electrode for a plasma arc torch and a method of fabricating the same are disclosed, and wherein the electrode includes a copper holder having a lower end which mounts an emissive insert which acts as the cathode terminal for the arc during operation. Where the torch is used in an oxidizing atmosphere, the copper holder tends to oxidize, and the arc tends to attach to the oxidized copper rather than the insert, which results in the rapid destruction of the holder. To prevent this destruction, the present invention incorporates a sleeve of silver or other metal having a relatively high work function, and which is positioned to surround the insert and form an annular ring on the lower end surface of the holder and thus to surround the exposed end face of the emissive insert. The annular ring serves to prevent arcing from the copper holder, and so that the arc is maintained on the insert.

公开(公告)号：US5008585A

公开(公告)日：1991-04-16

申请号：US223465

申请日：1988-07-21

Applicant: Henri Bernardet ,  Jean-Claude Pauwels

Inventor： Henri Bernardet ,  Jean-Claude Pauwels

IPC: H01J37/08 ,  H01J27/08 ,  H01J27/22

CPC classification number: H01J27/22 ,  H01J27/08

Abstract: A vacuum arc source of ions of metals utilizing the principle of forming anode spots, whose anode surface (8) is fed with liquid metal (7) originating from a reservoir (6) through a connection member (9). The connection member is preferably constituted by a material chosen so that it has with respect to the liquid metal a great difference in the temperatures required to obtain the same vapor tension. The mode of feeding through the connection member is in embodiments of the invention obtained by means of a porous material (13) or contiguous slots (14). The liquid metals can be liquid at the ambient temperature (gallium, caesium) or be liquified by heating (tin, indium).

Abstract translation: 利用形成阳极点的原理的金属离子的真空电弧源，其阳极表面（8）通过连接构件（9）供给源自储存器（6）的液态金属（7）。 连接构件优选地由选择的材料构成，使得其相对于液态金属具有获得相同蒸气张力所需的温度的很大差异。 在通过多孔材料（13）或连续槽（14）获得的本发明的实施例中，通过连接构件进给的方式。 液态金属可以在环境温度下为液体（镓，铯）或通过加热（锡，铟）液化。

公开(公告)号：US4924138A

公开(公告)日：1990-05-08

申请号：US179610

申请日：1988-04-11

Applicant: Henri Bernardet

Inventor： Henri Bernardet

IPC: H05H1/00 ,  H01J27/02 ,  H01J27/08 ,  H01J37/08

CPC classification number: H01J27/022 ,  H01J27/08

Abstract: A vacuum arc ion device having a plasma-emissive cathode and an anode, each being energized with suitable potentials, and having the further structure for eliminating micro drops of molten material which micro drops are emitted for certain materials during plasma formation.

Abstract translation: 一种具有等离子体发射阴极和阳极的真空电弧离子装置，每个都具有合适的电势，并且具有用于消除在等离子体形成期间为特定材料发射微滴的熔融材料的微滴的另外的结构。

公开(公告)号：US4883969A

公开(公告)日：1989-11-28

申请号：US314330

申请日：1989-02-21

Applicant: Yoshihiro Ishida ,  Akira Yoshida ,  Hideo Kobayashi

Inventor： Yoshihiro Ishida ,  Akira Yoshida ,  Hideo Kobayashi

IPC: H01J27/08 ,  H01J37/08

CPC classification number: H01J27/08

Abstract: Method of ionizing a gas within a chamber having a cathode disposed therein, wherein the sputtering effect upon the cathode is substantially reduced to prolong the life of the cathode. The cathode within the chamber is initially activated to emit thermal electrons by applying a voltage thereto. The gas to be ionized is then introduced into the chamber along with an active gas. Ionization of the gas to be ionized is then achieved by subjecting the gas to be ionized to the thermal electrodes emitted by the cathode. The voltage applied to the cathode and the voltage between the cathode and the wall of the chamber are regulated so as to maintain a substantially constant electric arc current flowing from the wall of the chamber to the cathode. A predetermined mixture ratio is maintained as between the active gas and the gas to be ionized within the chamber so as to induce growth in the volume of the cathode at least partially offsetting the removal of atoms from the cathode caused by sputtering, the predetermined mixture ratio being maintained by controlling the introduction of the active gas into the chamber.

Abstract translation: 在其内具有阴极的室内离子化气体的方法，其中对阴极的溅射效应被显着减少以延长阴极的寿命。 初始激活室内的阴极，通过向其施加电压来发射热电子。 然后将待离子化的气体与活性气体一起引入室中。 然后通过将气体离子化到由阴极发射的热电极来实现待离子化的气体的离子化。 调节施加到阴极的电压以及阴极和室壁之间的电压，以便保持从室的壁流向阴极的基本上恒定的电弧电流。 将活性气体和待室内气体之间的预定混合比维持在阴极内，以使阴极体积增长至少部分抵消由溅射引起的阴极去除原子，预定的混合比例 通过控制将活性气体引入室中来维持。

公开(公告)号：US4713585A

公开(公告)日：1987-12-15

申请号：US911790

申请日：1986-09-26

Applicant: Yasunori Ohno ,  Tomoe Kurosawa ,  Tadashi Sato ,  Yukio Kurosawa ,  Yoshimi Hakamata

Inventor： Yasunori Ohno ,  Tomoe Kurosawa ,  Tadashi Sato ,  Yukio Kurosawa ,  Yoshimi Hakamata

IPC: H01J27/08 ,  H01J27/14 ,  H01J27/18 ,  H01J37/08 ,  H01J7/24

CPC classification number: H01J27/14 ,  H01J27/18 ,  H01J37/08

Abstract: An ion source for producing an ion beam utilized for fabrication and processing of semiconductors, thin films or the like includes a plasma producing chamber equipped with first magnetic means for limiting a plasma region and a plasma expansion chamber provided in combination with the plasma producing chamber on the side where a beam extracting electrode is disposed. The plasma expansion chamber is provided with second magnet array for confining and holding a plasma region therein which is of a larger area than that of the plasma region formed in the plasma producing chamber.

Abstract translation: 用于制造用于半导体，薄膜等的制造和加工的离子束的离子源包括：等离子体产生室，其配备有用于限制等离子体区域的第一磁性装置和与等离子体产生室组合设置的等离子体膨胀室 设置光束提取电极的一侧。 等离子体膨胀室设置有第二磁体阵列，用于限制和保持其中等离子体区域的面积大于等离子体产生室中形成的等离子体区域的面积。

公开(公告)号：US4691109A

公开(公告)日：1987-09-01

申请号：US823258

申请日：1986-01-28

Applicant: Charles W. Magee ,  Lori R. Hewitt

Inventor： Charles W. Magee ,  Lori R. Hewitt

IPC: H01J27/02 ,  H01J27/08 ,  H01J27/00

CPC classification number: H01J27/022 ,  H01J27/08

Abstract: A source of a beam of ions includes in a housing a cathode filament, an anode spaced from the cathode and housing an ion emission opening therethrough and an intermediate electrode between the cathode and anode and having an opening therethrough in alignment with the opening in the anode. An inlet opening extends through the housing into the space between the anode and the intermediate electrode to admit a flow of starting gas and the gas to be ionized into the housing. An outlet opening is through the housing adjacent the cathode and a pump is connected to the outlet opening. In the operation of the ion source a flow of the starting gas is provided through the housing and over the cathode to initiate the discharge. Then the gas to be ionized is admitted into the housing. Some of the gas is ionized to generate the desired ions and the rest of the gas is drawn out of the housing to remove impurities generated at the cathode and thereby increase the lifetime of the cathode. Once the ionizing gas is admitted into the housing, the flow of the starting gas is stopped.

Abstract translation: 离子束源包括阴极细丝，阳极与阴极间隔开并且容纳离子发射开口，阴极和阳极之间具有中间电极，并具有与阳极中的开口对准的开口 。 入口开口延伸穿过壳体进入阳极和中间电极之间的空间，以允许起始气体流和待离子化的气体进入壳体。 出口开口通过与阴极相邻的壳体，并且泵连接到出口开口。 在离子源的操作中，起始气体的流动通过壳体和阴极提供，以开始排出。 然后将要离子化的气体进入壳体。 一些气体被离子化以产生所需的离子，其余的气体从外壳中拉出以除去在阴极处产生的杂质，从而增加阴极的寿命。 一旦电离气体进入壳体，停止起始气体的流动。