公开(公告)号：US2843083A

公开(公告)日：1958-07-15

申请号：US62004956

申请日：1956-11-02

Applicant: EPLING ARNOLD J

Inventor： EPLING ARNOLD J

IPC: B05C3/18 ,  B05C9/08

CPC classification number: B05C9/08 ,  B05C3/18

公开(公告)号：US20240017284A1

公开(公告)日：2024-01-18

申请号：US18138038

申请日：2023-04-22

Applicant: SEMES CO., LTD.

Inventor： Dae Sung KIM ,  Jae Hyun LIM ,  Kyo Sang YOON ,  Ho Jin JANG ,  A Rah CHO

IPC: B05C9/08

CPC classification number: B05C9/08

Abstract: An apparatus for processing a substrate includes a processing vessel disposed in a process chamber and including a processing space in which a substrate is accommodated; a liquid supply line configured to process the substrate by supplying processing liquid to the substrate in the processing space; an exhaust line connected to the processing vessel and configured to exhaust gas in the processing space; a spraying portion disposed on the exhaust line and configured to spray cleaning liquid to remove contaminants accumulated in the exhaust line; and a washing liquid discharge line branched from the exhaust line and including a suction portion therein to suction cleaning liquid waste including contaminants removed from the exhaust line by the cleaning liquid and to discharge the cleaning liquid waste to the outside.

公开(公告)号：US11664225B2

公开(公告)日：2023-05-30

申请号：US16245124

申请日：2019-01-10

Applicant: CANON KABUSHIKI KAISHA

Inventor： Jun Ota

IPC: B05C11/10 ,  H01L21/027 ,  B81C1/00 ,  G03F7/00 ,  B05C9/08 ,  B29C59/02

CPC classification number: H01L21/027 ,  B05C9/08 ,  B05C11/1021 ,  B29C59/02 ,  B81C1/00 ,  G03F7/0002

Abstract: An imprint apparatus forms imprint material using a mold on a substrate. The imprint apparatus includes a movable stage configured to hold the substrate, a supply portion configured to discharge the imprint material, and a control unit configured to cause the supply portion to discharge the imprint material while moving the stage so that the imprint material is supplied onto the substrate. The control unit controls discharge of the imprint material from the supply portion so that a target amount of the imprint material is arranged at a target position on the substrate, based on property information indicating a relation between a discharge amount of imprint material from the supply portion and a position on a target object where the imprint material is to be arranged.

公开(公告)号：US20180345310A1

公开(公告)日：2018-12-06

申请号：US15555252

申请日：2016-02-24

Applicant: TORAY ENGINEERING CO., LTD.

Inventor： Atsushi WATANABE ,  Kazushige NAKASHIMA

IPC: B05C5/02 ,  H01M4/04

CPC classification number: B05C5/02 ,  B05C9/04 ,  B05C9/08 ,  H01M4/04

Abstract: A coating device includes a sheet conveyor, a coating nozzle, and a gap adjuster. The sheet conveyor conveys an electrode sheet. The coating nozzle discharges an electrode material and an insulating material toward the electrode sheet being conveyed. The gap adjuster adjusts a spacing between the coating nozzle and the electrode sheet being conveyed. The coating nozzle has an electrode material discharge component that discharges an electrode material and an insulating material discharge component that discharges an insulating material. The electrode material discharge component and the insulating material discharge component are disposed side by side in a direction intersecting a conveyance direction of the electrode sheet. The gap adjuster simultaneously adjusts a spacing between the electrode sheet being conveyed and the electrode material discharge component, and a spacing between this electrode sheet and the insulating material discharge component.

公开(公告)号：US20180161804A1

公开(公告)日：2018-06-14

申请号：US15841746

申请日：2017-12-14

Applicant: SIKA TECHNOLOGY AG

Inventor： Bruce BAKER

IPC: B05C11/02 ,  B05C3/08 ,  H01B13/32 ,  B05C11/10 ,  B05C9/08 ,  B05C3/12 ,  E04D15/06 ,  B05C9/04

CPC classification number: B05C11/025 ,  B05C3/08 ,  B05C3/125 ,  B05C9/04 ,  B05C9/08 ,  B05C11/1047 ,  E04D15/04 ,  E04D15/06 ,  E04D2015/042 ,  H01B13/32

Abstract: A device for coating material with resin and subsequently laying the material saturated with the resin onto a surface, the device comprising a vessel for retaining the resin, the vessel having a slot sized and configured so that the material is passable through the slot after being coated with resin retained in the vessel, and a first and a second roller being arranged on either side of the slot or behind the slot.

公开(公告)号：US20180036960A1

公开(公告)日：2018-02-08

申请号：US15785323

申请日：2017-10-16

Applicant: Elum Inc.

Inventor： Svatoboj Otruba ,  Ranbir S. Claire

IPC: B29C65/52

CPC classification number: B29C65/525 ,  B05C5/022 ,  B05C5/0254 ,  B05C5/0279 ,  B05C9/06 ,  B05C9/08 ,  B05C13/00 ,  B29L2009/00 ,  B65C9/2213

Abstract: A glue delivery system and method for providing precise application of glue on a substrate. A bead of glue is extruded from a first glue chamber to a leading edge of the substrate. A trailing edge of the substrate is blown off and over to the nozzle to receive a smear of glue from a second glue chamber. A gear pump is controlled by a servo drive that is connected to a servomotor utilizing a gear reducer. The pump regulates the extrusion of the glue onto the substrate that is programmed with empirical data of gear reducer ratio at which the glue flows within a constant speed, torque, current, speed and position of the glue. The empirical data is provided to a programmable logic circuit to achieve a precise pressure related to volume of a glue deposition and speed of the substrate onto which the glue is applied.

公开(公告)号：US20170128976A1

公开(公告)日：2017-05-11

申请号：US15414664

申请日：2017-01-25

Applicant: NORDSON CORPORATION

Inventor： Stephen R. des Jardins ,  Alan R. Lewis ,  Yuriy Suhinin

IPC: B05C5/02 ,  B05B12/08 ,  G01K13/02 ,  B05C11/10 ,  G05D7/06 ,  G01F1/76 ,  B05B12/00 ,  B05C9/08

CPC classification number: B05C5/0225 ,  B05B12/006 ,  B05B12/087 ,  B05C5/02 ,  B05C9/08 ,  B05C11/02 ,  B05C11/1002 ,  B05C11/101 ,  B05C11/1013 ,  B05C11/1034 ,  G01F1/76 ,  G01K13/02 ,  G01K2013/024 ,  G05D7/0676

Abstract: Systems and methods related to dispensing fluid and controlling a dispensing operation. The system includes a fluid dispenser including an inlet and an outlet, the dispenser being operable to start and stop the flow of the fluid from the outlet onto a substrate. The system also includes a fluid supply reservoir adapted to hold the fluid, and having an outlet coupled in fluid communication with the inlet of the fluid dispenser to establish a flow path for the fluid between the fluid supply reservoir and the outlet of the fluid dispenser. The fluid supply reservoir further includes a pneumatic input coupled to an air flow path adapted to receive pressurized air for forcing the fluid from the outlet of the reservoir. An electronic air flow meter device is operatively coupled to the air flow path to produce electrical output signals.

公开(公告)号：US09610602B2

公开(公告)日：2017-04-04

申请号：US14376955

申请日：2013-02-06

Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO

Inventor： Ike Gerke De Vries ,  Hieronymus Antonius Josephus Maria Andriessen ,  Arjan Langen

IPC: B05B13/02 ,  H01L21/67 ,  B05C9/08 ,  B05C9/14 ,  B05D1/38 ,  B05D3/02

CPC classification number: B05B13/0221 ,  B05B13/0207 ,  B05C9/08 ,  B05C9/14 ,  B05D1/38 ,  B05D3/0254 ,  H01L21/67173 ,  H01L21/6719

Abstract: A manufacturing facility is provided for manufacturing a product on a foil (FO). The manufacturing facility comprises a deposition zone (10) formed by a clean room wherein at least a first and a second deposition facility (21, 22) are arranged for depositing a layer of a material on the foil. The manufacturing facility further comprises at least one processing facility (31) for processing the deposited layer, said processing facility being arranged outside said deposition zone and comprising a processing trajectory with a first path (31a) away from said deposition zone, towards a turning facility (41) and with a second path (31b) from said turning facility back towards said deposition zone.

公开(公告)号：US09579678B2

公开(公告)日：2017-02-28

申请号：US14591300

申请日：2015-01-07

Applicant: Nordson Corporation

Inventor： Stephen R. des Jardins ,  Alan R. Lewis ,  Yuriy Suhinin

IPC: B05B12/00 ,  B05C11/10 ,  B05C9/08 ,  G01F1/76 ,  G01K13/02 ,  B05B12/08 ,  G05D7/06 ,  B05C5/02 ,  B05C11/02

CPC classification number: B05C5/0225 ,  B05B12/006 ,  B05B12/087 ,  B05C5/02 ,  B05C9/08 ,  B05C11/02 ,  B05C11/1002 ,  B05C11/101 ,  B05C11/1013 ,  B05C11/1034 ,  G01F1/76 ,  G01K13/02 ,  G01K2013/024 ,  G05D7/0676

Abstract: Systems and methods related to dispensing fluid and controlling a dispensing operation. The system includes a fluid dispenser including an inlet and an outlet, the dispenser being operable to start and stop the flow of the fluid from the outlet onto a substrate. A fluid supply reservoir adapted to hold the fluid, and having an outlet coupled in fluid communication with the inlet of the fluid dispenser to establish a flow path for the fluid between the fluid supply reservoir and the outlet of the fluid dispenser. The fluid supply reservoir further includes a pneumatic input coupled to an air flow path adapted to receive pressurized air for forcing the fluid from the outlet of the reservoir. An electronic air mass flow meter device is operatively coupled to the air flow path to produce electrical output signals proportional to the mass flow rate of the air flowing through the pneumatic input. Components and methods are provided to accurately determine the volume of the fluid in the reservoir, and to set the stroke length of a valve used in the system.

Abstract translation: 与分配流体相关的系统和方法以及控制分配操作。 该系统包括流体分配器，其包括入口和出口，分配器可操作以启动和停止流体从出口流到基底上。 流体供应储存器，其适于保持流体，并且具有与流体分配器的入口流体连通的出口，以建立用于流体供应储存器和流体分配器的出口之间的流体的流动路径。 流体供应储存器还包括联接到适于接收加压空气的气流路径的气动输入，用于迫使来自储存器的出口的流体。 电子空气质量流量计装置可操作地耦合到空气流动路径以产生与流过气动输入的空气的质量流量成比例的电输出信号。 提供组件和方法以准确地确定储存器中的流体的体积，并设定系统中使用的阀的行程长度。

公开(公告)号：US20160193619A1

公开(公告)日：2016-07-07

申请号：US14591300

申请日：2015-01-07

Applicant: Nordson Corporation

Inventor： Stephen R. des Jardins ,  Alan R. Lewis ,  Yuriy Suhinin

IPC: B05B12/00 ,  B05C11/10 ,  B05C9/08 ,  G01F1/76 ,  G01K13/02

CPC classification number: B05C5/0225 ,  B05B12/006 ,  B05B12/087 ,  B05C5/02 ,  B05C9/08 ,  B05C11/02 ,  B05C11/1002 ,  B05C11/101 ,  B05C11/1013 ,  B05C11/1034 ,  G01F1/76 ,  G01K13/02 ,  G01K2013/024 ,  G05D7/0676

Abstract: Systems and methods related to dispensing fluid and controlling a dispensing operation. The system includes a fluid dispenser including an inlet and an outlet, the dispenser being operable to start and stop the flow of the fluid from the outlet onto a substrate. A fluid supply reservoir adapted to hold the fluid, and having an outlet coupled in fluid communication with the inlet of the fluid dispenser to establish a flow path for the fluid between the fluid supply reservoir and the outlet of the fluid dispenser. The fluid supply reservoir further includes a pneumatic input coupled to an air flow path adapted to receive pressurized air for forcing the fluid from the outlet of the reservoir. An electronic air mass flow meter device is operatively coupled to the air flow path to produce electrical output signals proportional to the mass flow rate of the air flowing through the pneumatic input. Components and methods are provided to accurately determine the volume of the fluid in the reservoir, and to set the stroke length of a valve used in the system.

Abstract translation: 与分配流体相关的系统和方法以及控制分配操作。 该系统包括流体分配器，其包括入口和出口，分配器可操作以启动和停止流体从出口流到基底上。 流体供应储存器，其适于保持流体，并且具有与流体分配器的入口流体连通的出口，以建立用于流体供应储存器和流体分配器的出口之间的流体的流动路径。 流体供应储存器还包括联接到适于接收加压空气的气流路径的气动输入件，用于迫使来自储存器出口的流体。 电子空气质量流量计装置可操作地耦合到空气流动路径以产生与流过气动输入的空气的质量流量成比例的电输出信号。 提供组件和方法以准确地确定储存器中的流体的体积，并设定系统中使用的阀的行程长度。