公开(公告)号：US20160240320A1

公开(公告)日：2016-08-18

申请号：US15024931

申请日：2014-09-24

Applicant: CAVENDISH KINETICS, INC.

Inventor： Mickael RENAULT ,  Vikram JOSHI ,  Robertus Petrus VAN KAMPEN ,  Thomas L. MAGUIRE ,  Richard L. KNIPE

IPC: H01G5/16 ,  B81B3/00 ,  B81C1/00 ,  H01G5/011

CPC classification number: H01G5/16 ,  B81B3/0086 ,  B81B2201/0221 ,  B81B2203/04 ,  B81C1/00166 ,  B81C2201/0104 ,  B81C2201/0109 ,  H01G5/011 ,  H01H59/0009

Abstract: The present invention generally relates to a MEMS device and a method of manufacture thereof. The RF electrode, and hence, the dielectric layer thereover, has a curved upper surface that substantially matches the contact area of the bottom surface as of the movable plate. As such, the movable plate is able to have good contact with the dielectric layer and thus, good capacitance is achieved.

Abstract translation: 本发明一般涉及一种MEMS器件及其制造方法。 RF电极，因此其上的电介质层具有基本上与可动板的底面的接触面积匹配的弯曲的上表面。 因此，可移动板能够与电介质层良好的接触，从而实现良好的电容。

公开(公告)号：US20160115013A1

公开(公告)日：2016-04-28

申请号：US14988842

申请日：2016-01-06

Applicant: Robert Bosch GmbH

Inventor： Ando Feyh ,  Po-Jui Chen ,  Markus Ulm

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0021 ,  B81B2201/0221 ,  B81B2201/0228 ,  B81C1/00134 ,  B81C1/00246 ,  B81C2203/0771

Abstract: A method of fabricating a semiconductor device comprises forming a dielectric layer above a substrate, the dielectric layer including a fixed dielectric portion and a proof mass portion, forming a source region and a drain region in the substrate, forming a gate electrode in the proof mass portion, and releasing the proof mass portion, such that the proof mass portion is movable with respect to the fixed dielectric portion and the gate electrode is movable with the proof mass portion relative to the source region and the drain region.

Abstract translation: 一种制造半导体器件的方法包括在衬底上形成电介质层，所述电介质层包括固定电介质部分和校准质量部分，在衬底中形成源极区域和漏极区域，在校准质量块中形成栅极电极 部分，并且释放证明质量部分，使得证明质量部分相对于固定电介质部分可移动，并且栅极电极可相对于源极区域和漏极区域与校准质量部分一起移动。

公开(公告)号：US20160101975A1

公开(公告)日：2016-04-14

申请号：US14972237

申请日：2015-12-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hidekazu Ono ,  Tsuyoshi OKAMI ,  Nobuaki TSUJI ,  Yuki UEYA

IPC: B81B3/00 ,  G01C19/5712

CPC classification number: B81B3/0045 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/0127 ,  B81B2203/0163 ,  B81B2203/019 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2203/053 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/5733

Abstract: A resonance frequency adjustment module is disclosed forming a MEMS sensor for detecting an angular velocity. The resonance frequency adjustment module includes a movable electrode; a fixed electrode facing the movable electrode to form a capacitor; and an elastic body supporting the movable electrode so as to be displaceable in one direction. The movable electrode and the fixed electrode have surfaces facing each other to form a capacitor, and the surface can be inclined to a displacement direction. A region sandwiched between the movable electrode and the fixed electrode has a volume fixed region where the volume is not decreased by movement of the movable electrode.

Abstract translation: 公开了一种形成用于检测角速度的MEMS传感器的共振频率调节模块。 共振频率调节模块包括可动电极; 面向可动电极的固定电极以形成电容器; 以及弹性体，其支撑所述可动电极，以便能够在一个方向上移位。 可动电极和固定电极具有彼此面对以形成电容器的表面，并且该表面可以沿位移方向倾斜。 夹在可动电极和固定电极之间的区域具有通过可移动电极的移动而不减小体积的体积固定区域。

公开(公告)号：US09269497B2

公开(公告)日：2016-02-23

申请号：US14292598

申请日：2014-05-30

Applicant: Raytheon Company

Inventor： Francis J. Morris

IPC: H01G5/16 ,  H01H59/00 ,  H01L29/92 ,  H01L49/02 ,  H01L29/66

CPC classification number: H01G5/16 ,  B81B2201/01 ,  B81B2201/0221 ,  H01G5/18 ,  H01H59/0009 ,  H01L28/40 ,  H01L29/66181 ,  H01L29/92

Abstract: A switchable capacitor including a first electrode, a dielectric layer on the first electrode, a second electrode configured to be suspended in an undeflected position over the dielectric layer in a de-activated state, and to deflect toward the first electrode in an activated state in response to a voltage difference between the two electrodes, a gap between the second electrode and the dielectric layer in the activated state being less than a corresponding gap in the de-activated state, and a capacitor having a first and second end, coupled to one of the electrodes at the first end, and configured to reduce the voltage difference between the electrodes as the second electrode deflects toward the first electrode in the activated state, wherein the voltage difference between the electrodes corresponds to a bias voltage applied across the second end of the capacitor and an other one of the first and second electrodes.

Abstract translation: 一种可切换电容器，包括第一电极，第一电极上的电介质层，第二电极，被配置为悬浮在处于去激活状态的电介质层上的未偏转位置，并且以激活状态朝向第一电极偏转 响应于两个电极之间的电压差，在激活状态下第二电极和电介质层之间的间隙小于去激活状态下的对应间隙，以及具有第一和第二端耦合到一个的电容器 并且被配置为当激活状态下第二电极朝着第一电极偏转时，减小电极之间的电压差，其中电极之间的电压差对应于跨过第二端施加的偏置电压 电容器和第一和第二电极中的另一个。

公开(公告)号：US09087929B2

公开(公告)日：2015-07-21

申请号：US14249890

申请日：2014-04-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshihiro Konaka ,  Toshiya Kawate

IPC: H01L29/93 ,  H01L21/00 ,  H01G5/16 ,  H01L49/02 ,  B81C1/00 ,  H01L23/64

CPC classification number: H01L29/93 ,  B81B2201/0221 ,  B81C1/00976 ,  H01G5/16 ,  H01L23/642 ,  H01L28/60 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A variable capacitance device includes a fixed substrate, a movable portion, driving electrodes, an RF capacitance electrode and an insulating film. The movable portion faces the fixed substrate and can change a gap between the movable portion and the fixed substrate. The driving electrodes are formed on the fixed substrate so as to face the movable portion. The RF capacitance electrode is formed on the fixed substrate so as to face the movable portion and be spaced apart from the driving electrodes. The insulating film is formed between the movable portion and the driving electrodes. The level of a voltage applied to the driving electrodes and the level of a voltage applied to the movable portion are periodically switched and the level of a voltage applied to the RF capacitance electrode and the level of a voltage applied to the movable portion are always the same.

Abstract translation: 可变电容器件包括固定衬底，可动部分，驱动电极，RF电容电极和绝缘膜。 可移动部分面向固定基板并且可以改变可移动部分和固定基板之间的间隙。 驱动电极形成在固定基板上以面对可动部分。 RF电容电极形成在固定基板上，以面对可动部分并与驱动电极间隔开。 绝缘膜形成在可动部和驱动电极之间。 施加到驱动电极的电压的电平和施加到可动部分的电压的电平被周期性地切换，并且施加到RF电容电极的电压的电平和施加到可动部分的电压的电平总是 相同。

公开(公告)号：US20150156591A1

公开(公告)日：2015-06-04

申请号：US14558993

申请日：2014-12-03

Applicant: Robert Bosch GmbH

Inventor： Christoph SCHELLING ,  Rolf SCHEBEN ,  Ricardo EHRENPFORDT

IPC: H04R23/00

CPC classification number: H04R19/005 ,  B81B3/0018 ,  B81B3/0021 ,  B81B2201/0221 ,  B81B2201/0257 ,  B81B2201/0285 ,  H04R19/04 ,  H04R29/004

Abstract: A capacitive MEMS microphone element is described which may be used optionally for detecting acoustic signals (microphone mode) or for detecting ultrasound signals in a defined frequency range (ultrasound mode). In the layered structure of the MEMS microphone element, at least two carrier elements for the two electrode sides of a capacitor system are formed one above the other and at a distance from one another for signal detection. At least one of the two carrier elements is sound pressure-sensitive and at least one of the two electrode sides includes at least two electrode segments which are electrically contactable independent of one another, which together with the at least one electrode of the other electrode side form partial capacitances which are independent of one another.

Abstract translation: 描述了可以可选地用于检测声信号（麦克风模式）或用于在限定的频率范围（超声模式）中检测超声信号的电容式MEMS麦克风元件。 在MEMS麦克风元件的分层结构中，用于电容器系统的两个电极侧的至少两个载体元件彼此之间并且彼此间隔一定距离地形成用于信号检测。 两个载体元件中的至少一个是声压敏的，并且两个电极侧中的至少一个包括彼此独立地电接触的至少两个电极段，这两个电极段与另一个电极侧的至少一个电极 形成彼此独立的部分电容。

公开(公告)号：US09040854B2

公开(公告)日：2015-05-26

申请号：US13614936

申请日：2012-09-13

Applicant: Arun K. Gupta ,  William C. McDonald

Inventor： Arun K. Gupta ,  William C. McDonald

IPC: H01H57/00 ,  B81B3/00

CPC classification number: H02N2/12 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0013 ,  B81B7/02 ,  B81B2201/016 ,  B81B2201/0221 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/053 ,  B81B2203/058 ,  B81B2203/06

Abstract: A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.

Abstract translation: MEMS静电致动器包括固定到基板的底板和悬挂在底板上方的顶板。 顶板具有平行板中心部分和两个电连接到中心部分的旋转部件。 每个旋转构件安装在旋转构件的中心，用于围绕旋转轴线旋转到一组锚柱。 附件包括沿着每个轴线附接的至少一对扭转弹簧，每个弹簧包括矩形金属正方形，随着旋转构件的旋转，该正方形扭曲。 静电下拉电极位于每个旋转构件的下方。

公开(公告)号：US20150076626A1

公开(公告)日：2015-03-19

申请号：US14210218

申请日：2014-03-13

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Naofumi NAKAMURA

IPC: B81C1/00 ,  H01G5/16 ,  B81B3/00

CPC classification number: B81C1/00793 ,  B81B3/0021 ,  B81B3/0089 ,  B81B2201/0221 ,  B81B2203/0118 ,  B81B2203/053 ,  B81C1/00293 ,  B81C2201/053 ,  B81C2203/0145 ,  H01G5/16 ,  H01G5/18

Abstract: According to one embodiment, an electronic device includes a substrate, a first electrode provided stationary above the substrate and used for a variable capacitor, a second electrode provided movable above or below the first electrode and used for the variable capacitor, a first protective insulation film provided on a first surface of the first electrode, the first surface facing the second electrode, and a second protective insulation film provided on a second surface of the second electrode, the second surface facing the first electrode.

Abstract translation: 根据一个实施例，电子设备包括基板，设置在基板上方并用于可变电容器的第一电极，设置在第一电极上方或下方并可用于可变电容器的第二电极，第一保护绝缘膜 设置在所述第一电极的第一表面上，所述第一表面面向所述第二电极，以及设置在所述第二电极的第二表面上的第二保护绝缘膜，所述第二表面面向所述第一电极。

公开(公告)号：US20150054096A1

公开(公告)日：2015-02-26

申请号：US14529824

申请日：2014-10-31

Applicant: RUBEN B. MONTEZ ,  Robert F. Steimle

Inventor： RUBEN B. MONTEZ ,  Robert F. Steimle

IPC: B81B3/00

CPC classification number: B81B3/0005 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2203/0181 ,  B81B2203/06 ,  B81C1/0038 ,  B81C1/00952 ,  B81C2201/0169 ,  B81C2201/112 ,  G01P15/0802 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: A mechanism for reducing stiction in a MEMS device by decreasing an amount of carbon from TEOS-based silicon oxide films that can accumulate on polysilicon surfaces during fabrication is provided. A carbon barrier material film is deposited between one or more polysilicon layer in a MEMS device and the TEOS-based silicon oxide layer. This barrier material blocks diffusion of carbon into the polysilicon, thereby reducing accumulation of carbon on the polysilicon surfaces. By reducing the accumulation of carbon, the opportunity for stiction due to the presence of the carbon is similarly reduced.

Abstract translation: 提供了一种用于通过减少在制造期间可能积聚在多晶硅表面上的基于TEOS的氧化硅膜的碳来减少MEMS器件中的静电的机制。 在MEMS器件中的一个或多个多晶硅层和基于TEOS的氧化硅层之间沉积碳阻挡材料膜。 该阻挡材料阻止碳扩散到多晶硅中，从而减少碳在多晶硅表面上的积累。 通过减少碳的积累，由于碳的存在而导致的静电机会同样地减少。

公开(公告)号：US20140291780A1

公开(公告)日：2014-10-02

申请号：US14024178

申请日：2013-09-11

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Tomohiro SAITO

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0086 ,  B81B2201/0221 ,  H01G5/18

Abstract: According to one embodiment, a MEMS device including a first electrode provided on a support substrate, a second electrode opposed to the first electrode, having at least one end part overlapping the first electrode, and able to move in a direction it is opposed to the first electrode, and beam parts provided on the support substrate and supporting the second electrode. The surface of that part of the first electrode, which opposes the end part of the second electrode, is set at a lower level than the surface of that part of the second electrode, which opposes a center part of the second electrode.

Abstract translation: 根据一个实施例，一种MEMS器件，包括设置在支撑衬底上的第一电极，与第一电极相对的第二电极，具有与第一电极重叠的至少一个端部，并且能够沿着与第一电极相反的方向移动 第一电极和设置在支撑基板上并支撑第二电极的光束部分。 第一电极的与第二电极的端部相对的部分的表面设置在比第二电极的与第二电极的中心部分相对的部分的表面更低的水平处。