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    MEMS-based micro and nano grippers with two-axis force sensors
    42.
    发明授权
    MEMS-based micro and nano grippers with two-axis force sensors 有权
    具有双轴力传感器的基于MEMS的微型和纳米夹具

    公开(公告)号：US08317245B2

    公开(公告)日：2012-11-27

    申请号：US12305468

    申请日：2007-06-21

    Applicant: Yu Sun ,  Keekyoung Kim

    Inventor： Yu Sun ,  Keekyoung Kim

    IPC: B25J7/00

    CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

    Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

    Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

    Micro rotary machine and methods for using same
    43.
    发明授权
    Micro rotary machine and methods for using same 有权
    微型旋转机及其使用方法

    公开(公告)号：US08159107B2

    公开(公告)日：2012-04-17

    申请号：US11757331

    申请日：2007-06-01

    Applicant: Harold L. Stalford

    Inventor： Harold L. Stalford

    IPC: H01L41/08

    CPC classification number: H02N10/00 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/034 ,  B81B2201/037 ,  B81B2201/051 ,  H02K7/00 ,  H02N1/002 ,  H02N11/006

    Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.

    Abstract translation: 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。

    MEMS device with bi-directional element
    44.
    发明授权
    MEMS device with bi-directional element 有权
    具有双向元件的MEMS器件

    公开(公告)号：US07760065B2

    公开(公告)日：2010-07-20

    申请号：US11772039

    申请日：2007-06-29

    Applicant: Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    Inventor： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

    IPC: H01H71/18 ,  H01H61/00

    CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

    Abstract: The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

    Abstract translation: 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

    Integrated electromechanical switch and tunable capacitor and method of making the same
    46.
    发明授权
    Integrated electromechanical switch and tunable capacitor and method of making the same 有权
    集成机电开关和可调谐电容器及其制造方法

    公开(公告)号：US06800912B2

    公开(公告)日：2004-10-05

    申请号：US10147300

    申请日：2002-05-17

    Applicant: Mehmet Ozgur

    Inventor： Mehmet Ozgur

    IPC: H01L2984

    CPC classification number: H01H1/0036 ,  B81B2201/014 ,  B81B2201/031 ,  B81C1/00246 ,  B81C2203/0735 ,  H01H61/00 ,  H01H2061/006

    Abstract: A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

    Abstract translation: 描述了能够处理从DC到毫米波频率的信号的单片集成的机电微波开关，以及集成的机电可调电容器。 两个机电装置都包括通过热机械或静电力而致动的可移动梁。 这些器件直接在成品硅基集成电路晶片上制造，例如CMOS，BiCMOS或双极晶片。 可移动光束通过选择性地去除在基于硅的集成电路技术中可获得的薄膜下面的支撑硅而形成，该技术包括至少一个多晶硅层和两个金属化层。 使用空腔和厚的低损耗金属化在可动梁的上方形成电极。 在空腔所在的区域上形成厚的机械支撑层，或者衬底被体微加工，即蚀刻。

    Method of making an integrated electromechanical switch and tunable capacitor
    47.
    发明申请
    Method of making an integrated electromechanical switch and tunable capacitor 有权
    制造集成的机电开关和可调电容器的方法

    公开(公告)号：US20040097066A1

    公开(公告)日：2004-05-20

    申请号：US10663983

    申请日：2003-09-17

    Applicant: Corporation for National Research Initiatives

    Inventor： Mehmet Ozgur

    IPC: H01L021/4763

    CPC classification number: H01H1/0036 ,  B81B2201/014 ,  B81B2201/031 ,  B81C1/00246 ,  B81C2203/0735 ,  H01H61/00 ,  H01H2061/006

    Abstract: A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

    Abstract translation: 描述了能够处理从DC到毫米波频率的信号的单片集成的机电微波开关，以及集成的机电可调电容器。 两个机电装置都包括通过热机械或静电力而致动的可移动梁。 这些器件直接在成品硅基集成电路晶片上制造，例如CMOS，BiCMOS或双极晶片。 可移动光束通过选择性地去除在基于硅的集成电路技术中可获得的薄膜下面的支撑硅而形成，该技术包括至少一个多晶硅层和两个金属化层。 使用空腔和厚的低损耗金属化在可动梁的上方形成电极。 在空腔所在的区域上形成厚的机械支撑层，或者衬底被体微加工，即蚀刻。

    System and method for providing an improved electrothermal actuator for a micro-electro-mechanical device
    48.
    发明授权
    System and method for providing an improved electrothermal actuator for a micro-electro-mechanical device 失效
    用于为微机电装置提供改进的电热致动器的系统和方法

    公开(公告)号：US06691513B1

    公开(公告)日：2004-02-17

    申请号：US10222124

    申请日：2002-08-16

    Applicant: Edward S. Kolesar

    Inventor： Edward S. Kolesar

    IPC: F01B2910

    CPC classification number: B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H1/0036 ,  H01H2061/006 ,  H01H2061/008

    Abstract: A system and method for providing an improved micro-electro-mechanical (MEMS) electrothermal actuator is disclosed. In prior art electrothermal actuators an electric current passes through a narrow arm and returns through a wide arm. The larger current density in the narrow arm heats the narrow arm so that it expands more than the wide arm. The differential expansion of the hot narrow arm and the cold wide arm deflects the end of the cold wide arm. The present invention provides an additional hot arm to provide a return path for the electric current so that the cold arm does not conduct electric current. The present invention optimizes power consumption, tip deflection and generated force. A bidirectional thermal beam actuator is also disclosed.

    Abstract translation: 公开了一种用于提供改进的微电机械（MEMS）电热致动器的系统和方法。 在现有技术的电热致动器中，电流通过窄臂并通过宽臂返回。 窄臂中较大的电流密度加热了窄臂，使其比宽臂扩张。 热的窄臂和冷的宽臂的差动膨胀使冷宽臂的端部偏转。 本发明提供了一种额外的热臂，以提供电流的返回路径，使得冷臂不传导电流。 本发明优化了功耗，尖端偏转和产生的力。 还公开了双向热束致动器。

    Thermal buckle-beam actuator
    49.
    发明授权
    Thermal buckle-beam actuator 有权
    热扣式光束执行器

    公开(公告)号：US06675578B1

    公开(公告)日：2004-01-13

    申请号：US09575436

    申请日：2000-05-22

    Applicant: Michael J. Sinclair

    Inventor： Michael J. Sinclair

    IPC: F01B2910

    CPC classification number: F03G7/06 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2203/051 ,  H01H1/0036 ,  H01H61/00 ,  H01H2061/006

    Abstract: An in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating center beam positioned between the first and second anchors and movable relative to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between opposite sides of the floating center beam and the respective first and second anchors. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. In one implementation, the half-beams are configured at a bias angle to give the floating beam an affinity for in-plane motion. An actuator of the present invention with such bias angles can give the actuator an overall chevron configuration.

    Abstract translation: 例如，在半导体材料的平面基板上形成有平面内的热扣梁微电机械致动器。 致动器包括固定到基板的第一和第二锚固件以及位于第一和第二锚固件之间并可相对于基板移动的浮动中心梁。 对称的第一和第二组细长的热半光束被固定在浮动中心光束的相对侧和相应的第一和第二锚定器之间。 半波束由诸如多晶硅的半导体材料形成。 电流源通过锚定器引导电流通过热半束，以赋予热半光束的热膨胀，并因此使浮动中心光束与基底平行的线性运动。 在一个实施方案中，半波束被配置为偏置角，以使浮动波束对于平面内运动具有亲和力。 具有这种偏置角度的本发明的致动器可以使致动器具有整体人字形配置。

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