公开(公告)号：US06308631B1

公开(公告)日：2001-10-30

申请号：US09620128

申请日：2000-07-20

Applicant: Gabriel L. Smith ,  Lawrence Fan

Inventor： Gabriel L. Smith ,  Lawrence Fan

IPC: F42L1534

CPC classification number: B81B3/0051 ,  B81B2201/037 ,  B81B2201/038 ,  B81B2203/051

Abstract: A micromechanical device that takes a vertical force to a micro substrate that results into a vertical motion and translates that vertical motion into horizontal motion. A pit is etched onto a micro substrate where the walls of the pit meet the floor of the pit at less than a 90° angle. A vertical force is applied to a structure to push it along the angled wall of the pit and as the structure reaches the bottom of the pit the vertical motion is translated into horizontal motion. By attaching a spring or similar mechanism to the structure, one can store the horizontal momentum for later use by latching the structure in some way before the spring can pull the structure back into its original position.

Abstract translation: 微机械装置对微型基板施加垂直的力，导致垂直运动并将该垂直运动转换成水平运动。 将凹坑蚀刻到微基板上，其中凹坑的壁以小于90°的角度与凹坑的地板相遇。 一个垂直的力被施加到一个结构上，以推动它沿坑的角度的壁，当结构到达坑的底部，垂直运动被转换成水平运动。 通过将弹簧或类似的机构附接到结构，可以在弹簧能够将结构拉回到其初始位置之前以某种方式通过闩锁结构来存储水平动量用于以后的使用。

公开(公告)号：US20240351860A1

公开(公告)日：2024-10-24

申请号：US18631659

申请日：2024-04-10

Applicant: Atomic Machines, Inc.

Inventor： William A. Boettcher ,  Jeffrey A. Holden ,  Klaus R. Zietlow

IPC: B81B3/00 ,  B81C1/00 ,  H01F7/16

CPC classification number: B81B3/0091 ,  B81C1/00706 ,  H01F7/1615 ,  B81B2201/038 ,  B81B2203/019 ,  B81B2203/053 ,  H01F7/16 ,  H01F2007/1669 ,  H01F2007/1692

Abstract: Introduced here is an electromechanical actuator that includes a stator assembly with a chamber partially defined therethrough along a central longitudinal axis and a plunger assembly that is situated in the chamber and, in operation, moves along the central longitudinal axis between different positions. The stator assembly can include a pair of contacts that have an opening therebetween and a trinity of ferromagnetic layers with coils situated therebetween. The plunger assembly can include a magnet. When current is applied to the coils, the trinity of ferromagnetic layers become magnetically polarized, thereby dictating the motion of the plunger assembly by magnetically attracting or repelling the magnet included in the plunger assembly. The plunger assembly may be stabilized by a flexure flexibly connecting the stator assembly and plunger assembly.

公开(公告)号：US20230271825A1

公开(公告)日：2023-08-31

申请号：US17923648

申请日：2020-06-28

Applicant: RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN ,  TSINGHUA UNIVERSITY

Inventor： Quanshui ZHENG ,  Xiaojian XIANG

IPC: B81C1/00 ,  B81B7/02

CPC classification number: B81C1/00357 ,  B81B7/02 ,  B81B2201/038 ,  B81B2203/04 ,  B81C2201/0102 ,  B81C2201/0132 ,  B81C2201/014 ,  B81C2203/032 ,  B81C2203/0136 ,  B81C2201/0181

Abstract: Provided is an atomic-smooth device with a microstructure. The device includes, from the bottom to top, a substrate, a bonding material, a second dielectric layer on the substrate, the microstructure, and a first dielectric layer, where a surface of the first dielectric layer is an atomic-smooth surface. Further provided is a method for preparing an atomic-smooth device with a microstructure to effectively avoid pits or burrs generated when the existing microstructure is machined.

公开(公告)号：US11725749B2

公开(公告)日：2023-08-15

申请号：US17515792

申请日：2021-11-01

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： Michael Wehner ,  Keng-Yu Lin ,  Natalie King

IPC: F16K99/00

CPC classification number: F16K99/0015 ,  F16K99/0057 ,  B81B2201/038 ,  B81B2201/054 ,  F16K99/0025 ,  F16K2099/0069 ,  F16K2099/0082

Abstract: A passive microfluidic valve includes a first manifold portion having a first chamber; a first inlet fluidly coupled to the first chamber; and a second inlet. The valve also includes a second manifold portion in fluid communication with the first chamber via a channel. The second manifold portion includes a second chamber fluidly coupled to the first chamber and the second inlet. The valve further includes a flexible membrane disposed between the first manifold portion and the second manifold portion and separating the first chamber and the second chamber, the flexible membrane configured to modulate a flow rate of a media flowing between the first inlet and the second inlet in either direction in response to pressure of the media flow.

公开(公告)号：US20180257927A1

公开(公告)日：2018-09-13

申请号：US15453846

申请日：2017-03-08

Applicant: Butterfly Network, Inc.

Inventor： Jonathan M. Rothberg ,  Susan A. Alie ,  Keith G. Fife ,  Nevada J. Sanchez ,  Tyler S. Ralston ,  Jaime Scott Zahorian

IPC: B81C1/00 ,  B81B7/00 ,  B06B1/06 ,  B06B1/02

CPC classification number: B81C1/00238 ,  B06B1/0292 ,  B06B1/0622 ,  B81B7/008 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2207/012 ,  B81B2207/07 ,  B81C2201/013 ,  B81C2203/0118 ,  B81C2203/0792

Abstract: Micromachined ultrasonic transducers integrated with complementary metal oxide semiconductor (CMOS) substrates are described, as well as methods of fabricating such devices. Fabrication may involve two separate wafer bonding steps. Wafer bonding may be used to fabricate sealed cavities in a substrate. Wafer bonding may also be used to bond the substrate to another substrate, such as a CMOS wafer. At least the second wafer bonding may be performed at a low temperature.

公开(公告)号：US09945399B2

公开(公告)日：2018-04-17

申请号：US14764824

申请日：2014-09-26

Applicant: INSTITUTE OF METAL RESEARCH CHINESE ACADEMY OF SCIENCES

Inventor： Xinglong Ye ,  Lingzhi Liu ,  Haijun Jin

IPC: B81B3/00 ,  F15B15/08

CPC classification number: F15B15/08 ,  B81B3/0032 ,  B81B2201/038 ,  Y10T29/49828

Abstract: The present invention discloses a liquid-driven nano-porous actuator and the application thereof, and belongs to the field of nano material actuators. According to the present invention, by changing the content of the liquid in the nano-porous material, the interface between the surface liquid of the nano-porous material and air is exchanged between flat and curved states, so as to change the compressive stress acting on the nano-porous material from the surface tension of the liquid and change the elastic deformation of the nano-porous material, thus driving the nano-porous material to contract and expand in a reversible manner and further realizing driving performance. The actuator features simple and easy implementation and environmental-friendly effect without the need of external physical excitation signals (light, magnetic field, electricity or heat), complicated external excitation process, conversion of electric, magnetic, and light energy, chemical or electrochemical process, or toxic, harmful or corrosive chemical substances, and it is especially suitable for bio-robot, medical and aerospace fields.

公开(公告)号：US09895902B2

公开(公告)日：2018-02-20

申请号：US15279083

申请日：2016-09-28

Applicant: Apple Inc.

Inventor： Andreas Bibl ,  John A. Higginson ,  Hsin-Hua Hu

IPC: G01P15/125 ,  B41J2/385 ,  H01L25/075 ,  B25J15/00 ,  H01L21/683 ,  B81C99/00 ,  B41J2/39 ,  H01L21/67 ,  H01L33/00 ,  H01L23/00

CPC classification number: B41J2/385 ,  B25J15/0052 ,  B25J15/0085 ,  B41J2/39 ,  B81B2201/038 ,  B81C99/002 ,  H01L21/67144 ,  H01L21/6835 ,  H01L24/75 ,  H01L24/83 ,  H01L24/97 ,  H01L25/0753 ,  H01L33/0079 ,  H01L2221/68322 ,  H01L2221/68354 ,  H01L2221/68363 ,  H01L2221/68381 ,  H01L2224/29036 ,  H01L2224/29101 ,  H01L2224/2919 ,  H01L2224/7565 ,  H01L2224/7598 ,  H01L2224/83815 ,  H01L2224/83855 ,  H01L2224/97 ,  H01L2924/12041 ,  H01L2924/00 ,  H01L2224/83 ,  H01L2924/00014

Abstract: A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.

公开(公告)号：US20170250625A1

公开(公告)日：2017-08-31

申请号：US15509782

申请日：2015-09-09

Applicant: BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM

Inventor： Donglei Fan ,  Kwanoh Kim ,  Jianhe Guo

IPC: H02N1/00 ,  C23C14/16 ,  C23C14/58 ,  H01F41/02 ,  C23C14/30 ,  H01F7/02 ,  H01F1/01 ,  C23C14/04 ,  C23C14/02

CPC classification number: H02N1/006 ,  B81B2201/034 ,  B81B2201/038 ,  B81B2203/0118 ,  B81B2203/0181 ,  B81B2203/04 ,  B81C3/004 ,  C23C14/00 ,  C23C14/022 ,  C23C14/025 ,  C23C14/027 ,  C23C14/042 ,  C23C14/16 ,  C23C14/30 ,  C23C14/5873 ,  H01F1/01 ,  H01F7/02 ,  H01F41/0253

Abstract: The invention includes miniature dots, miniature disks or miniature cylinders and methods of making the same by dispersing a particle in or on a dissolvable, meltable or etchable layer on a substrate, a portion of the particle exposed above a surface of the dissolvable, meltable or etchable layer; depositing a mask on the particles and the dissolvable substrate; removing the particles from the layer; etching an array of nanoholes in the substrate; depositing one or more metallic layers into the nanoholes to form an array of dots, disks or cylinders; and dissolving the dissolvable layer with a solvent to expose the dots, disks or cylinders. The dots, disks or cylinders can be included with two sets of microelectrodes for ultrahigh speed rotation of miniature motors, and/or can be designed with a magnetic configuration into miniature motors for uniform rotation speeds and prescribed angular displacement. The invention also includes modified diatom frustules, and miniature motors containing modified diatom frustules.

公开(公告)号：US20160244320A1

公开(公告)日：2016-08-25

申请号：US15025691

申请日：2014-09-08

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Yoshihisa WARASHINA

IPC: B81B3/00 ,  G02B26/00

CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/0163 ,  G01J3/26 ,  G02B6/29395 ,  G02B26/001 ,  G02B26/0841 ,  H02N1/008

Abstract: An optical module includes a semiconductor substrate, an electrostatic actuator including a fixed portion fixed to the semiconductor substrate and a movable portion moved with respect to the fixed portion by an electrostatic force generated between the movable portion and the fixed portion, a first spring portion connected to the movable portion and having a first spring constant K1, a second spring portion connected between the first spring portion and the semiconductor substrate and having a second spring constant K2 greater than the first spring constant K1, and a movable mirror which is an optical component connected to a connection portion between the first spring portion and the second spring portion.

Abstract translation: 光学模块包括半导体衬底，静电致动器，其包括固定在半导体衬底上的固定部分和通过在可动部分和固定部分之间产生的静电力相对于固定部分移动的可移动部分;第一弹簧部分连接 并且具有第一弹簧常数K1，第二弹簧部分，连接在第一弹簧部分和半导体基板之间，并且具有大于第一弹簧常数K1的第二弹簧常数K2，以及作为光学部件的可移动镜 连接到第一弹簧部分和第二弹簧部分之间的连接部分。

公开(公告)号：US20160158933A1

公开(公告)日：2016-06-09

申请号：US14216063

申请日：2014-03-17

Applicant: Infinite Corridor Technology, LLC ,  The Board of Trustees of the Leland Stanford Junior University

Inventor： Rebecca Elizabeth Taylor ,  Beth L. Pruitt ,  Mary C. Boyce ,  Christopher M. Boyce

IPC: B25J7/00

CPC classification number: B81B3/0048 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2201/06 ,  B81B2203/058 ,  B81B2203/06 ,  G02B26/0825 ,  G02B26/0833

Abstract: A micromechanical device capable of providing out-of-plane motion and force generation in response to an in-plane strain applied to the device is provided. Embodiments of the present invention comprise one or more islands that are operatively coupled with one or more hinges. The hinges are operative for inducing rotation of the islands when a lateral strain is applied to the structure. In some embodiments, the hinges are also electrically conductive such that they enable electrical communication between the one or more islands and devices external to the structure. Some embodiments of the present invention are particularly well suited for use in biological applications. Some devices in accordance with the present invention are fabricated using conventional planar processes, such as flex-circuit fabrication techniques.

Abstract translation: 提供了一种能够响应于施加到设备的平面内应变来提供面外运动和力产生的微机械装置。 本发明的实施例包括与一个或多个铰链可操作地联接的一个或多个岛。 当向结构施加横向应变时，铰链用于引起岛的旋转。 在一些实施例中，铰链也是导电的，使得它们使得能够在结构外部的一个或多个岛和装置之间进行电连通。 本发明的一些实施方案特别适用于生物应用。 根据本发明的一些装置使用诸如柔性电路制造技术的常规平面工艺制造。