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公开(公告)号：US20170309856A1
公开(公告)日：2017-10-26
申请号：US15520647
申请日：2015-10-20
Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventor： Shunpei YAMAZAKI , Takayuki IKEDA , Yoshiyuki KUROKAWA
CPC classification number: H01L51/5012 , B81B7/008 , B81B2201/042 , B81C1/00246 , B81C2203/0735 , C09K11/06 , C09K11/59 , G02B26/02 , G02B26/085 , H01L29/786 , H01L51/0051 , H01L51/0508 , H01L51/4226
Abstract: A highly reliable micromachine, display element, or the like is provided. As a micromachine or a transistor including the micromachine, a transistor including an oxide semiconductor in a semiconductor layer where a channel is formed is used. For example, a transistor including an oxide semiconductor is used as at least one transistor in one or a plurality of transistors driving a micromachine.
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公开(公告)号：US09778549B2
公开(公告)日：2017-10-03
申请号：US15237247
申请日：2016-08-15
Inventor： Toshiaki Horie , Soichiro Hiraoka , Shinsuke Nakazono , Kazuki Komaki
CPC classification number: G03B21/008 , B81B3/00 , B81B3/0043 , B81B7/0067 , B81B2201/042 , G02B26/0858 , G02B26/105 , H04N9/3129
Abstract: An optical reflecting device includes a mirror part, a pair of joints, a pair of vibration parts, a plurality of driving parts, and a fixed part. Each of the joints has a first end connected to respective one the facing positions to each other on the mirror part and a second end opposite to the first end, and extends along a first axis. Each of the vibration parts has a central portion connected to the second end of respective one of the joints. A plurality of driving parts is disposed in each of the pair of vibration parts, and rotates the mirror part. Both ends of each of the pair of vibration parts are connected to the fixed part. The beam width defined as the length of each of the joints in a direction orthogonal to the first axis is greater than the beam width of each of the pair of vibration parts.
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公开(公告)号：US20170276930A1
公开(公告)日：2017-09-28
申请号：US15621389
申请日：2017-06-13
Applicant: SEIKO EPSON CORPORATION
Inventor： Suguru UCHIYAMA , Terunao HANAOKA
CPC classification number: G02B26/0841 , B81B2201/042 , B81C1/00317 , B81C2203/0118 , G02B26/0833
Abstract: In an electro-optical device, a mirror and the like which is formed on an element substrate is sealed using a sealing member. The sealing member is provided with a frame section and a cover section. In addition, the sealing member is provided on one face of the element substrate so that the mirror is surrounded by the element substrate and the sealing member and such that the mirror is positioned between a portion of the cover section and the element substrate. The sealing member is formed of a light-transmitting member having a frame section and a cover section which are integrally formed, and there is no interface between the frame section and the cover section.
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公开(公告)号：US09764945B2
公开(公告)日：2017-09-19
申请号：US14471436
申请日：2014-08-28
Applicant: Robert Bosch GmbH
Inventor： Sebastian Reiss , Simon Armbruster , Helmut Grutzeck , Joerg Muchow , Frederic Njikam Njimonzie , Johannes Baader , Rainer Straub , Wolfgang Heinzelmann
CPC classification number: B81B7/0019 , B81B2201/042 , B81C99/005
Abstract: A micromechanical component and a corresponding test method for a micromechanical component are described. The micromechanical component includes at least one first region, which is elastically connected to a second region via a spring device, a resistor element, which is situated in and/or on the spring device and is at least partially interruptible in the event of damage to the spring device, and a detection device, which is electrically connected to the resistor element, for detecting an interruption in the resistor element and for generating a corresponding detection signal.
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45.发明申请公开(公告)号：US20170235128A1
公开(公告)日：2017-08-17
申请号：US15264446
申请日：2016-09-13
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Roberto BRIOSCHI
CPC classification number: G02B26/101 , B81B7/008 , B81B2201/042 , B81C2203/07 , G02B26/0833 , G02B26/0841
Abstract: The mirror group is formed by a monolithic frame bent along a bending line and including a first and a second supporting portions carrying, respectively, a first and a second chips forming two micromirrors made using MEMS technology. The first and second supporting portions are arranged on opposite sides of the bending line of the frame, angularly inclined with respect to each other. The mirror group is obtained by separating a shaped metal tape carrying a plurality of frames, having flexible electric connection elements. After attaching the chips, the frames are precut, bent along the bending line, and separated.
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Patent Agency Ranking
公开(公告)号：US20170233244A1
公开(公告)日：2017-08-17
申请号：US15503192
申请日：2015-05-11
Applicant: Wuxi Wio Technology Co., Ltd.
Inventor： Qiao Chen , Huikai Xie
CPC classification number: B81B3/0037 , B81B2201/0235 , B81B2201/0242 , B81B2201/042 , B81B2203/0118 , B81B2203/0136 , B81C1/00 , B81C1/0015 , B81C2201/013 , H01G5/16
Abstract: A MEMS self-aligned high-and-low comb tooth and manufacturing method thereof, the comb tooth having a lifting structure, the lifting structure generating a displacement in the vertical direction to drive the movement of a movable comb tooth or a fixed comb tooth attached thereto. The manufacturing method thereof adopts a silicon wafer, the lifting structure and the comb tooth are sequentially formed on a mechanical structure layer, the fixed comb tooth and the movable comb tooth are formed with the same etching process, and the stress in the lifting structure displaces the fixed comb tooth and the movable comb tooth in the vertical direction, thus forming the self-aligned high-and-low comb tooth.
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公开(公告)号：US20170153443A1
公开(公告)日：2017-06-01
申请号：US15162885
申请日：2016-05-24
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati
CPC classification number: G02B26/0833 , B81B3/0083 , B81B2201/042 , G02B26/101 , G02B26/105 , G03B21/008
Abstract: A reflector micromechanical structure includes a frame with a window. The frame is elastically connected to an anchorage structure by first elastic elements. An actuation structure operatively coupled to the frame is configured to generate a first actuation movement of the frame about a first actuation axis. A mobile mass is positioned within the window and elastically coupled to the frame by second elastic elements. A mass distribution is associated to the mobile mass such as to generate, by an inertial effect in response to the first actuation movement, a second actuation movement of rotation of the mobile mass about a second actuation axis.
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公开(公告)号：US20170152887A1
公开(公告)日：2017-06-01
申请号：US15379512
申请日：2016-12-15
Applicant: Raviv Erlich , Yuval Gerson
Inventor： Raviv Erlich , Yuval Gerson
IPC: F16C11/12 , B81C1/00 , B81B3/00 , G02B26/10 , G01P15/125 , G01P15/09 , G01C19/02 , G02B26/08 , F16F1/48 , G01P15/093
CPC classification number: F16C11/12 , B81B3/0043 , B81B2201/0235 , B81B2201/034 , B81B2201/042 , B81B2203/0118 , B81B2203/0163 , B81C1/0015 , B81C1/00198 , B81C1/00523 , B81C2201/013 , E05D1/02 , E05D7/00 , E05D11/0081 , F16F1/48 , F16F2224/025 , F16F2226/00 , F16F2226/042 , G01C19/02 , G01P15/09 , G01P15/093 , G01P15/125 , G02B26/0833 , G02B26/105 , Y10T16/522 , Y10T16/525 , Y10T29/24 , Y10T29/25
Abstract: A mechanical device includes a long, narrow element made of a rigid, elastic material. A rigid frame is configured to anchor at least one end of the element, which is attached to the frame, and to define a gap running longitudinally along the element between the beam and the frame, so that the element is free to move within the gap. A solid filler material, different from the rigid, elastic material, fills at least a part of the gap between the element and the frame so as to permit a first mode of movement of the element within the gap while inhibiting a different, second mode of movement.
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49.发明申请公开(公告)号：US20170123202A1
公开(公告)日：2017-05-04
申请号：US15401681
申请日：2017-01-09
Inventor： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
CPC classification number: G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , B81C1/00198 , G02B27/1006 , H02N1/002 , H02N1/006 , H04N9/3129 , H04N9/3135 , Y10T29/49002
Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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公开(公告)号：US20170113928A1
公开(公告)日：2017-04-27
申请号：US15400665
申请日：2017-01-06
Inventor： Andreas GOEHLICH , Andreas JUPE , Holger VOGT
CPC classification number: B81C1/00619 , B81B7/0003 , B81B2201/0207 , B81B2201/0214 , B81B2201/042 , B81C1/0019 , B81C2201/0187 , H01L23/4821 , H01L23/5256
Abstract: What is described is a method for producing a device having providing a substrate having an electrode which is exposed at a main side of the substrate. In addition, the method has forming a micro or nanostructure which has a spacer which is based on the electrode, wherein forming has the steps of: depositing a sacrificial layer on the main side, wherein the sacrificial layer has amorphous silicon or silicon dioxide; patterning a hole and/or trench into the sacrificial layer by means of a DRIE process; coating the sacrificial layer by means of ALD or MOCVD so that material of the nano or microstructure forms at the hole and/or trench, and removing the sacrificial layer.
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