公开(公告)号：US20070109547A1

公开(公告)日：2007-05-17

申请号：US11164228

申请日：2005-11-15

Applicant: Douglas Jungwirth

Inventor： Douglas Jungwirth

IPC: G01B9/02

CPC classification number: G01J1/4257 ,  G01J1/02 ,  G01J1/0266 ,  G01J9/0246 ,  G01J2009/0261

Abstract: A scanning, self-referencing interferometer may include a scanning mechanism to scan a path length of a test beam portion of a laser beam. The scanning, self-referencing interferometer may also include a beam adjustment mechanism to control positioning of a centroid of a reference beam portion of the laser beam in the interferometer.

Abstract translation: 扫描自参考干涉仪可以包括扫描机构来扫描激光束的测试光束部分的路径长度。 扫描自参考干涉仪还可以包括光束调节机构，用于控制激光束的参考光束部分在干涉仪中的质心的定位。

公开(公告)号：US20060274321A1

公开(公告)日：2006-12-07

申请号：US11501413

申请日：2006-08-09

Applicant: William Cottrell

Inventor： William Cottrell

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0223 ,  G01J2009/0261 ,  G01M11/005 ,  G01M11/331 ,  G01M11/333

Abstract: A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.

公开(公告)号：US20060039005A1

公开(公告)日：2006-02-23

申请号：US10900529

申请日：2004-07-28

Applicant: Kevin Fine ,  Greg Felix ,  John Bockman ,  Douglas Woolverton

Inventor： Kevin Fine ,  Greg Felix ,  John Bockman ,  Douglas Woolverton

IPC: G01B9/02

CPC classification number: G01J9/0215 ,  G01B9/02003 ,  G01B9/02018 ,  G01B9/02051 ,  G01B2290/70 ,  G01J2009/0261

Abstract: An interferometer system includes a rhomboid assembly having a first optical stack and a second optical stack mounted on the first stack. The first stack includes a first prism having an angled face mounted to an angled face of a second prism. The interface between these angled faces includes a first polarizing beam-splitter. The second stack includes a third prism having an angled face mounted to an angled face of the fourth prism. The interface between these angled faces includes a second polarizing beam-splitter. First, second, third, and fourth wave plate elements are located in beam paths between the rhomboid assembly and at least one of a measurement optic and a reference optic. A redirecting optic is located at least adjacent to the vertical faces of the first and the third prisms.

Abstract translation: 干涉仪系统包括具有安装在第一堆叠上的第一光学堆叠和第二光学堆叠的菱形组件。 第一堆叠包括具有安装到第二棱镜的倾斜面的倾斜面的第一棱镜。 这些倾斜面之间的界面包括第一偏振分束器。 第二堆叠包括具有安装到第四棱镜的倾斜面的成角度的第三棱镜。 这些倾斜面之间的界面包括第二偏振分束器。 第一，第二，第三和第四波片元件位于菱形组件与测量光学元件和参考光学元件中的至少一个之间的光束路径中。 重定向光学器件至少邻近第一和第三棱镜的垂直面定位。

公开(公告)号：US20050264822A1

公开(公告)日：2005-12-01

申请号：US10857053

申请日：2004-05-28

Applicant: John Bockman ,  Ludmila Golyanskaya ,  Kenneth Wayne ,  Miao Zhu

Inventor： John Bockman ,  Ludmila Golyanskaya ,  Kenneth Wayne ,  Miao Zhu

IPC: G01B9/02 ,  G01J9/02 ,  G02B7/00

CPC classification number: G01B9/02057 ,  G01B9/02003 ,  G01B9/02007 ,  G01B9/02049 ,  G01B9/02072 ,  G01B2290/70 ,  G01J2009/0261 ,  G02B7/006

Abstract: An interferometer system includes a plane mirror interferometer, a turning mirror, a retardation plate assembly having a retardation plate that can be adjusted and then fixed, and a retroreflector. A light beam travels in a path comprising the plane mirror interferometer, the turning mirror, the retardation plate assembly, and the retroreflector. The retardation plate assembly may include a plurality of bearings, a ring riding on the bearings, the retardation plate mounted to the ring, and a plunger pushing the ring against the bearings. The retardation plate may be fixed by adhesive after determining an orientation that produces little polarization leakage in the system.

Abstract translation: 干涉仪系统包括平面镜干涉仪，转向镜，具有能够被调整然后固定的延迟板的相位差板组件和后向反射器。 光束在包括平面镜干涉仪，转向镜，延迟板组件和后向反射器的路径中行进。 延迟板组件可以包括多个轴承，骑在轴承上的环，安装到环上的相位差板和将环推到轴承上的柱塞。 在确定在系统中几乎不产生极化泄漏的取向之后，可以通过粘合剂固定延迟板。

公开(公告)号：US20050099633A1

公开(公告)日：2005-05-12

申请号：US10796320

申请日：2004-03-10

Applicant: Michael Failes

Inventor： Michael Failes

IPC: G01B9/02 ,  G01J9/02 ,  G01N21/47

CPC classification number: G01B9/02091 ,  G01B2290/70 ,  G01J2009/0261 ,  G01N21/4795

Abstract: A fiber optic scanning interferometer in a Michelson arrangement using a polarization splitting coupler is disclosed. The splitting of s and p polarization modes into the fast and slow axes of a birefringent fiber allows the temporal separation of interference phenomena from multiple reflections such that signal recovery is simplified.

Abstract translation: 公开了一种使用偏振分束耦合器的迈克尔逊布置的光纤扫描干涉仪。 将s和p偏振模式分离成双折射光纤的快轴和慢轴允许干扰现象与多次反射的时间分离，从而简化信号恢复。

公开(公告)号：US5852507A

公开(公告)日：1998-12-22

申请号：US644881

申请日：1996-05-10

Applicant: David B. Hall

Inventor： David B. Hall

IPC: G02B6/00 ,  G01J9/02 ,  H04B10/04 ,  H04B10/06 ,  H04B10/142 ,  H04B10/148 ,  H04B10/152 ,  H04B10/158

CPC classification number: H04B10/61 ,  H04B10/614 ,  H04B10/64 ,  G01J2009/0261

Abstract: A polarization diversity receiver system for yielding multiple heterodyne optical output signals from an incident optical beam having a p-polarized component and an s-polarized component comprises first and second sequentially-arrayed polarizing beamsplitters, and three photodetectors, each of which receives a heterodyne optical signal. The polarization diversity receiver system tracks the largest of these three signals, and uses only this largest one for subsequent signal processing. There is a minimum for this largest signal that is dependent on the input polarizations of the two optical fields whose beat note is the heterodyne signal. Thus, the object is to maximize the minimum of this largest of the three heterodyne signals. The first polarizing beamsplitter ideally splits the incident beam into a transmitted beam portion including approximately 100% of the p-polarized component and approximately 33% of the s-polarized component, and a reflected beam portion including approximately 0% of the p-polarized component and approximately 67% of the s-polarized component. The reflected beam portion exits from the first polarizing beamsplitter as a first heterodyne optical output signal, and impinges on a first photodetector. The transmitted beam portion exits from the first beamsplitter, and then undergoes an effective 45.degree. rotation of its polarization eigenstates around its axis of propagation, either prior to or during its passage through the second polarizing beamsplitter. The second beamsplitter splits the rotated transmitted beam portion into second and third heterodyne optical output signals, which respectively impinge upon second and third photodetectors.

Abstract translation: 用于从具有p偏振分量和s偏振分量的入射光束产生多个外差光输出信号的偏振分集接收器系统包括第一和第二顺序排列的偏振分束器，以及三个光电检测器，每个光电检测器接收外差光 信号。 极化分集接收机系统跟踪这三个信号中最大的信号，仅使用最大的信号进行后续的信号处理。 这个最大信号的最小值取决于两个光场的输入偏振，其中拍音是外差信号。 因此，目的是使三个外差信号中最大的最大值最大化。 第一偏振分束器理想地将入射光束分成包括大约100％的p偏振分量和大约33％的s偏振分量的透射光束部分，反射光束部分包括大约0％的p偏振分量 和大约67％的s偏振分量。 反射光束部分从第一偏振分束器离开，作为第一外差光输出信号，并且照射在第一光电检测器上。 发射光束部分从第一分束器出射，然后在其通过第二偏振分束器之前或期间，在其传播轴线周围经历其偏振本征态的有效45°旋转。 第二分束器将旋转的透射光束部分分裂成分别照射到第二和第三光电探测器上的第二和第三外差光输出信号。

公开(公告)号：US5253183A

公开(公告)日：1993-10-12

申请号：US803894

申请日：1991-12-09

Applicant: Masaru Inoue ,  Shigeru Matsui

Inventor： Masaru Inoue ,  Shigeru Matsui

IPC: G01J3/453 ,  G01J9/02

CPC classification number: G01J3/4537 ,  G01J2009/0261

Abstract: A device according to the present invention includes an interferometer which produces interference fringes from light received from a light source. The interference fringes are imaged onto a photo-diode array which transforms the imaged interference fringes into a single set of electric signals. The single set of electric signals is digitized and stored as a group of consecutive data points which represent an interferogram signal containing a DC component. The data points are processed to obtain moving average values representing the DC component of the interferogram signal. The moving average values are subtracted from the data points to obtain a clean interferogram signal which is Fourier-transformed to obtain a spectrogram of the light source.

Abstract translation: 根据本发明的装置包括干涉仪，其从光源接收的光产生干涉​​条纹。 干涉条纹被成像到光电二极管阵列，其将成像的干涉条纹变换成单组电信号。 单组电信号被数字化并存储为表示包含DC分量的干涉图信号的一组连续数据点。 处理数据点以获得表示干涉图信号的DC分量的移动平均值。 从数据点中减去移动平均值，以获得干涉干涉图信号，该信号被傅里叶变换以获得光源的光谱图。

公开(公告)号：US4844593A

公开(公告)日：1989-07-04

申请号：US194630

申请日：1988-05-16

Applicant: David R. Parker ,  John H. Gliever

Inventor： David R. Parker ,  John H. Gliever

IPC: G01B9/02 ,  G01J9/02 ,  G02B27/28

CPC classification number: G01J9/02 ,  G02B27/28 ,  G01J2009/0261

Abstract: Method and apparatus for isolating optical feedback in a laser interferometer having a laser light source from which a linear polarized outgoing laser beam of certain polarization orientation is derived. The interferometer also redirects the outgoing laser beam to form a return laser beam directed to a receiver. The outgoing laser beam and the return laser beam are physically close and are substantially parallel. The linearly polarized outgoing laser beam is converted to circular polarization. A portion of the circularly polarized return laser beam directed toward the laser light source is converted back to linear polarization with polarization orientation orthogonal to the polarization orientation of the outgoing laser beam. A portion of the circularly polarized return laser beam directed toward the receiver is converted back to linear polarization with polarization orientation being substantially the same as the polarization orientation of the outgoing laser beam. The portion of the return laser beam with polarization orientation orthogonal to the polarization orientation of the outgoing laser beam is directed away from the laser light source, and the portion of the return laser beam with polarization orientation substantially the same as the polarization orientation of the outgoing laser beam is directed toward the receiver.

公开(公告)号：US4575247A

公开(公告)日：1986-03-11

申请号：US627363

申请日：1984-07-02

Applicant: Richard J. Tansey

Inventor： Richard J. Tansey

IPC: G01J1/42 ,  G01J9/02 ,  G01J9/04 ,  G01B9/02

CPC classification number: G01J9/04 ,  G01J1/4257 ,  G01J2009/0223 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: A heterodyne phase-determining interferometer comprising a Smartt point diffraction interferometer (PDI) 10 in which the pinhole plate 22 is replaced by a half-wave, partially transmitting plate 22' with a pinhole 20 therein. The output beams 26 and 24 from the pinhole 20 are propagated through a frequency shifter 12 which includes a quarter-wave plate 28 whose axis is at 45.degree. to the polarization axes of the two beams 26 and 24 coming from the PDI 10, a half-wave plate 30 rotating at an angular frequency of .omega., and a linear polarizer which orients the polarization vectors of the two beams in the same direction along the propagation axis. The output of the frequency shifter 12 is a moving interference pattern consisting of alternate light and dark lines. This pattern is projected upon a phase-measuring means 14 comprising an array of photodetectors 34, 36 connected to a plurality of phase-to-voltage converters 38. There is one reference photodetector 34, the rest being test photodetectors. The reference photodetector 34 is connected to all phase-to-voltage converters 38, but each test photodetector 36 is connected to a different phase-to-voltage converter 38. The output of each converter 38 is the phase difference between the light at the point viewed by its associated test photodetector 36 and the light at the point viewed by the reference photodetector 34.

Abstract translation: 一种外差相位确定干涉仪，其包括Smartt点衍射干涉仪（PDI）10，其中针孔板22被其中具有针孔20的半波部分透射板22'代替。 来自针孔20的输出光束26和24通过一个变频器12传播，该变频器12包括一个四分之一波长的板28，该四分之一波片28的轴线相对于来自PDI 10的两个光束26和24的偏振轴为45度， 波片30以ω的角度频率旋转，以及线性偏振器，其沿着传播轴线沿相同方向定向两个光束的偏振矢量。 移频器12的输出是由交替的亮线和暗线组成的移动干涉图案。 该图案被投影在包括连接到多个相电压转换器38的光电检测器34,36的阵列的相位测量装置14上。存在一个参考光电检测器34，其余的是测试光电探测器。 参考光电检测器34连接到所有相电压转换器38，但是每个测试光电检测器36连接到不同的相电压转换器38.每个转换器38的输出是点处的光之间的相位差 通过其相关联的测试光电检测器36观察，以及由参考光电检测器34观察的点处的光。

公开(公告)号：US20140285813A1

公开(公告)日：2014-09-25

申请号：US14224353

申请日：2014-03-25

Applicant: UNIVERSITY OF ROCHESTER

Inventor： Zhimin Shi ,  Robert W. Boyd ,  Mohammad Mirhosseini ,  Mehul Malik

IPC: G01J4/00

CPC classification number: G01J9/02 ,  G01J4/04 ,  G01J2009/0261

Abstract: A wavefront sensing technique using Polarization Rotation INTerferometry (PRINT) provides a self-referencing, high-resolution, direct measurement of the spatially dependent phase profile of a given optical beam. A self-referencing technique is used to create a reference beam in the orthogonal polarization and a polarization measurement to measure the spatial-dependent polarization parameters to directly determine the absolute phase profile of the beam under test. A high-resolution direct measurement of the spatially-resolved phase profile of one or more optical beams is realized.

Abstract translation: 使用极化旋转INTerferometry（PRINT）的波前感测技术提供给定光束的空间依赖相位曲线的自参考，高分辨率直接测量。 使用自参考技术在正交极化中产生参考光束，并使用偏振测量来测量空间相关的极化参数，以直接确定被测光束的绝对相位分布。 实现了一个或多个光束的空间分辨相位轮廓的高分辨率直接测量。