公开(公告)号：US20160209269A1

公开(公告)日：2016-07-21

申请号：US15003152

申请日：2016-01-21

Applicant: Tornado Spectral Systems Inc.

Inventor： Brandon Joseph Desroches ,  Bradford Bartholomew Behr ,  Jeffrey Thomas Meade ,  Yusuf Bismilla ,  Andrew T. Cenko

IPC: G01J3/02 ,  G02B17/00 ,  G02B27/30 ,  G02B13/00

CPC classification number: G01J3/024 ,  G01J3/0208 ,  G01J3/021 ,  G02B27/30

Abstract: A hybrid image-pupil optical reformatter and method for optional use with a spectrometer is disclosed, which performs beam slicing in pupil space and stacks replicas of the input source generated from the pupil beam slices in image space. The optical reformatter comprises a collimator which receives an input light and produces a collimated beam; a first optical element which receives the collimated beam, redirects portions of the collimated beam back toward the collimator as reimaged beams and permits portions of the collimated beam to pass; a second optical element which receives the reimaging beams and redirects the reimaging beams back toward the collimator and the first optical element; to form an output beam comprising the portions of the collimated beams that are not redirected toward the collimator by the first optical element. Also disclosed is the use of the reformatter for reformatting the input light of a spectrometer system, and the use of the reformatter as part of a spectrometer device.

Abstract translation: 公开了一种用于光谱仪可选用的混合图像 - 光瞳光学重新格式化方法和方法，其在瞳孔空间中进行光束切片并且堆叠从图像空间中的瞳孔束切片产生的输入源的副本。 光学重构器包括准直器，其接收输入光并产生准直光束; 接收准直光束的第一光学元件将准直光束的部分重新定向成准直仪，作为再成像光束并允许准直光束的部分通过; 第二光学元件，其接收所述成像光束并将所述再成像光束重新定向回所述准直器和所述第一光学元件; 以形成包括未被第一光学元件重新定向到准直器的准直光束的部分的输出光束。 还公开了使用重新格式化器重新格式化分光计系统的输入光，以及使用重新格式化器作为光谱仪装置的一部分。

公开(公告)号：US20160041341A1

公开(公告)日：2016-02-11

申请号：US14455235

申请日：2014-08-08

Applicant: Kaiser Optical Systems Inc.

Inventor： James M. Tedesco

IPC: G02B6/32 ,  G02B3/02 ,  G01N21/65 ,  G02B3/00

CPC classification number: G02B6/32 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/44 ,  G02B3/0087 ,  G02B3/02 ,  G02B6/322 ,  G02B6/3624 ,  G02B6/3869 ,  G02B6/4201

Abstract: A monolithic optical element and system is used for collimating or focusing laser light from or to optical fibers. The optical fiber terminates in a tip that directly abuts against the first surface of the optical element. The optical element may provide a collimation or focusing function depending upon whether the abutting fiber delivers light for collimation or receives focused light from a collimated beam. The optical element may be a standard or modified barrel or drum lens, with the first and second surfaces being convex curved surfaces having the same or different radii of curvature. The end of the optical element to which the fiber abuts may have a diameter to match the inner diameter of a ferrule for positioning the fiber. A pair of the elements may be used for collimation and focusing in a Raman probehead or other optical detection system.

Abstract translation: 单片光学元件和系统用于对来自光纤或来自光纤的激光进行准直或聚焦。 光纤终止于直接抵靠光学元件的第一表面的尖端。 光学元件可以根据邻接光纤是否提供准直光或从准直光束接收聚焦光来提供准直或聚焦功能。 光学元件可以是标准或改进的镜筒或镜筒，其中第一和第二表面是具有相同或不同曲率半径的凸曲面。 纤维邻接的光学元件的端部可以具有与用于定位光纤的套圈的内径相匹配的直径。 一对元件可用于拉曼探头或其他光学检测系统中的准直和聚焦。

公开(公告)号：US09239265B2

公开(公告)日：2016-01-19

申请号：US12830810

申请日：2010-07-06

Applicant: Charles A. Taylor, II ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

Inventor： Charles A. Taylor, II ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

IPC: G01J3/00 ,  G01J3/40 ,  G01J3/42 ,  G01J5/00 ,  G01J5/58 ,  C23C16/46 ,  C23C16/52 ,  G01J3/10 ,  G01J5/60 ,  G01J3/02 ,  G01J5/08

CPC classification number: G01J5/0003 ,  C23C16/46 ,  C23C16/52 ,  G01J3/024 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/10 ,  G01J5/0007 ,  G01J5/0821 ,  G01J5/60

Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.

Abstract translation: 本发明是用于在薄膜生长和晶片处理期间实时测量半导体衬底的温度的光学方法和装置。 利用带间光吸收边缘对温度的近似线性依赖性，本方法和装置实时地实现了对扩散反射和透射几何形状的吸收边的高度精确测量，具有足够的精度和灵敏度以实现闭环温度控制 的薄膜生长和加工中的晶片。 该装置在涵盖普通半导体衬底的所有范围的宽范围的温度范围内工作。

公开(公告)号：US08730466B2

公开(公告)日：2014-05-20

申请号：US13183346

申请日：2011-07-14

Applicant: Damian W. Ashmead ,  Francis J. Deck

Inventor： Damian W. Ashmead ,  Francis J. Deck

IPC: G01N21/01 ,  G01J3/28

CPC classification number: G01J3/024 ,  G01J3/0218 ,  G01J3/10 ,  G01J3/42 ,  G01N21/3151 ,  G01N2021/035 ,  G01N2021/3181

Abstract: An optical device is provided that includes a converging lens device, a transmitting optical fiber, a sample holder, and a receiving optical fiber. The converging lens device focuses light onto the transmitting optical fiber, which receives the focused light through an entrance face and transmits the light from an exit face, through a sample, and onto the receiving optical fiber. The sample holder holds the sample for analysis. The receiving optical fiber receives the light through an entrance face of the receiving optical fiber after transmission through the sample. The converging lens device is positioned to focus the light onto the entrance face of the transmitting optical fiber such that a half-angle of the angular distribution of the focused light that reaches the entrance face of the transmitting optical fiber is selected to underfill an entrance aperture of the entrance face of the receiving optical fiber in both a spatial dimension and an angular dimension.

Abstract translation: 提供一种光学装置，其包括会聚透镜装置，发射光纤，样本保持器和接收光纤。 会聚透镜装置将光聚焦到发射光纤上，发射光纤通过入射面接收聚焦光，并将光从出射面透过样品，并传输到接收光纤上。 样品架持有样品进行分析。 接收光纤在通过样品传输后通过接收光纤的入射面接收光。 会聚透镜装置被定位成将光聚焦到发射光纤的入射面上，使得到达发射光纤的入射面的聚焦光的角度分布的半角被选择为向下填充入射孔 在空间尺寸和角度尺寸上的接收光纤的入射面。

公开(公告)号：US20130248713A1

公开(公告)日：2013-09-26

申请号：US13564102

申请日：2012-08-01

Applicant: Boris Gelmont ,  Tatiana Globus ,  Robert M. Weikle ,  Arthur Weston Lichtenberger ,  Nathan Swami ,  Ramakrishnan Parthasarathy ,  Alexei Bykhovski

Inventor： Boris Gelmont ,  Tatiana Globus ,  Robert M. Weikle ,  Arthur Weston Lichtenberger ,  Nathan Swami ,  Ramakrishnan Parthasarathy ,  Alexei Bykhovski

IPC: G01J3/02

CPC classification number: G01J3/024 ,  G01N21/3563 ,  G01N21/3581 ,  G01N21/4788

Abstract: A method and apparatus for enhanced THz radiation coupling to molecules, includes the steps of depositing a test material near the discontinuity edges of a slotted member, and enhancing the THz radiation by transmitting THz radiation through the slots. The molecules of the test material are illuminated by the enhanced THz radiation that has been transmitted through the slots, thereby producing an increased coupling of EM radiation in the THz spectral range to said material. The molecules can be bio-molecules, explosive materials, or species of organisms. The slotted member can be a semiconductor film, a metallic film, in particular InSb, or layers thereof. THz detectors sense near field THz radiation that has been transmitted through said slots and the test material.

Abstract translation: 用于增强与分子耦合的THz辐射的方法和装置包括以下步骤：在开槽部件的不连续边缘附近沉积测试材料，以及通过将THz辐射透过狭槽来增强THz辐射。 测试材料的分子被已经通过狭缝传输的增强的THz辐射照射，从而产生在THz光谱范围内的EM辐射与所述材料的增加的耦合。 分子可以是生物分子，爆炸物质或生物物种。 开槽构件可以是半导体膜，金属膜，特别是InSb或其层。 THz检测器检测已经通过所述槽和测试材料传输的近场THz辐射。

公开(公告)号：US08462406B2

公开(公告)日：2013-06-11

申请号：US12769247

申请日：2010-04-28

Applicant: Tokuji Takizawa ,  Kazumi Kimura ,  Nobuyuki Tochigi ,  Masayasu Teramura

Inventor： Tokuji Takizawa ,  Kazumi Kimura ,  Nobuyuki Tochigi ,  Masayasu Teramura

IPC: H04N1/46 ,  G01J3/28 ,  G03G15/04 ,  G03G15/00

CPC classification number: G01N21/251 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/20 ,  G01J3/2803 ,  G01J3/50 ,  G03G15/0131 ,  G03G15/0194 ,  G03G15/50 ,  G03G2215/0132 ,  G03G2215/0164

Abstract: A spectral colorimetric apparatus for detecting a color of an image of a subject, including: an illumination optical system illuminating the subject on a detection surface; a spectral optical system including a spectral element spectrally separating the beam diffused by the subject and a light receiving element array detecting a spectral intensity distribution; and a guiding optical system for guiding a beam diffused by the subject, wherein: the detection surface is parallel to a spectral plane including a principal ray of a beam entering the spectral optical system and a principal ray of a beam spectrally separated; the principal ray of the beam enters the spectral optical system within the spectral plane obliquely to a line joining a center of the light receiving element array with a surface vertex of the spectral element; and a light receiving surface of the light receiving element array is orthogonal to the spectral plane.

Abstract translation: 一种用于检测被摄体的图像的颜色的光谱比色装置，包括：照射光学系统，在检测面上照射被摄体; 光谱光学系统，包括频谱分离由对象漫射的光束的光谱元件和检测光谱强度分布的光接收元件阵列; 以及引导光学系统，用于引导被对象漫射的光束，其中：所述检测表面平行于包括进入所述光谱系统的光束的主光线和光谱分离的光束的主光束的光谱平面; 光束的主射线进入光谱平面内的光谱系统，倾斜于连接光接收元件阵列的中心与光谱元件的表面顶点的线; 并且光接收元件阵列的光接收表面与光谱平面正交。

公开(公告)号：US08451443B2

公开(公告)日：2013-05-28

申请号：US12822668

申请日：2010-06-24

Applicant: Tokuji Takizawa ,  Kazumi Kimura

Inventor： Tokuji Takizawa ,  Kazumi Kimura

IPC: G01J3/28 ,  G02B5/18 ,  G02B27/44

CPC classification number: G02B5/1861 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/10 ,  G01J3/20 ,  G01J3/2803 ,  G01J3/50 ,  G01J3/501 ,  G01J2003/468

Abstract: A concave reflection type diffraction optical element used for a Rowland type spectrometer, in which: the Rowland type spectrometer detects wavelengths in a range including a wavelength λ1 or more and a wavelength λ2 or less (λ1 r, where R indicates a meridional line curvature radius of the reference surface and r indicates a sagittal line curvature radius thereof.

Abstract translation: 用于Rowland型光谱仪的凹面反射型衍射光学元件，其中：Rowland型光谱仪检测波长λ1以上且波长λ2以下（λ1<λ2）的波长范围。 凹面反射型衍射光学元件具有波长λ处的衍射效率D（λ），其在波长λa满足λ1 @λa <7λ1 +3λ2 10时显示局部最大值和最大值; 凹面反射型衍射光学元件包括具有变形形状的基准面; 并且满足以下条件：R> r，其中R表示基准面的子午线曲率半径，r表示矢状线曲率半径。

公开(公告)号：US08437582B2

公开(公告)日：2013-05-07

申请号：US12409003

申请日：2009-03-23

Applicant: Peter Kiesel ,  Oliver Schmidt

Inventor： Peter Kiesel ,  Oliver Schmidt

IPC: G02B6/00 ,  G02B6/12

CPC classification number: G02F1/29 ,  G01J1/42 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/26 ,  G01J3/2803 ,  G01J9/00 ,  G02B5/008 ,  G02B5/284 ,  G02B6/29317 ,  G02B6/4204 ,  G02B6/4298

Abstract: Input light, such as from an optical sensor or stimulus-wavelength converter, includes one or more light or dark sub-bands. The input light is transmitted, such as through a transmissive layer or transmission component, to obtain effects due to transmission with lateral variation. A detector can, for example, obtain spectral information or other photon energy information about the sub-bands due to lateral variation. For each light or dark sub-band, a transmission component can, for example, provide a respective light or dark spot, and spot position can be used to obtain spectral information such as absolute wavelength or wavelength change. A photosensing component can sense or detect transmitted light or output photons, such as with a photosensor array or a position-sensitive detector. Circuitry can use photosensed quantities to obtain, e.g. a differential signal or information about time of wavelength change.

Abstract translation: 诸如来自光学传感器或刺激波长转换器的输入光包括一个或多个浅或暗的子带。 传输输入光，例如通过透射层或透射分量，以获得由于具有横向变化的透射而产生的影响。 检测器可以例如由于横向变化而获得关于子带的光谱信息或其他光子能量信息。 对于每个光或暗子带，透射分量可以例如提供相应的光斑或暗点，并且光斑位置可用于获得诸如绝对波长或波长变化的光谱信息。 感光组件可以感测或检测透射光或输出光子，例如用光电传感器阵列或位置敏感检测器。 电路可以使用光照量来获得，例如。 差分信号或有关波长变化时间的信息。

公开(公告)号：US08248609B2

公开(公告)日：2012-08-21

申请号：US12612300

申请日：2009-11-04

Applicant: Tza-Huei Wang ,  Kelvin J. Liu

Inventor： Tza-Huei Wang ,  Kelvin J. Liu

IPC: G01J3/46

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/10 ,  G01J3/44

Abstract: A cylindrical illumination confocal spectroscopy system has a fluidic device having a fluid channel defined therein, an objective lens unit arranged proximate the fluidic device, an illumination system in optical communication with the objective lens unit to provide light to illuminate a sample through the objective lens unit, and a detection system in optical communication with the objective lens unit to receive at least a portion of light that passes through the objective lens unit from the sample. The illumination system includes a beam-shaping lens unit constructed and arranged to provide a substantially planar illumination beam that subtends across, and is longer than, a lateral dimension of the fluid channel.

Abstract translation: 圆柱形照明共焦光谱系统具有其中限定有流体通道的流体装置，靠近流体装置布置的物镜单元，与物镜单元光学连通的照明系统，以提供通过物镜单元照射样品的光 以及与所述物镜单元光学通信以从所述样品接收经过所述物镜单元的至少一部分光的检测系统。 照明系统包括光束整形透镜单元，其被构造和布置成提供对准流体通道的横向尺寸并且比其更长的基本上平面的照明光束。

公开(公告)号：US08248598B2

公开(公告)日：2012-08-21

申请号：US12598342

申请日：2008-05-21

Applicant: Reinhold Hoenicka ,  Alexander Fink

Inventor： Reinhold Hoenicka ,  Alexander Fink

IPC: G01J3/00

CPC classification number: G01B11/026 ,  G01B2210/50 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/024 ,  G01J3/12 ,  G02B21/0064

Abstract: According to the invention, a method for compensating for temperature related measurement errors in an optical arrangement, comprising at least one lens is designed with a view to an economical and reliable as possible compensation for temperature related measurement errors without significant increased production expense, wherein a multicolored beam is passed through the optical arrangement, which is focused at points at varying distances from the lens as a result of the chromatic aberration of the lens, at least a part of the spectrum of the light beam being at least partly reflected within the optical arrangement and directed to a detector device by means of which a determination of a spectrum is carried out, the temperature of the arrangement is determined from the spectrum recorded by the detection device and a compensation for temperature related measurement errors is carried out based on the temperature determined thus. A corresponding optical arrangement in disclosed.

Abstract translation: 根据本发明，一种用于补偿包括至少一个透镜的光学装置中与温度相关的测量误差的方法被设计为为了经济可靠地对与温度相关的测量误差的可能的补偿进行设计，而没有显着增加的生产费用，其中 多色光束通过光学装置，其由于透镜的色差而聚焦在与透镜变化的距离处的点处，光束的光谱的至少一部分至少部分地在光学 布置并且被引导到检测器装置，通过该检测器装置执行光谱的确定，根据由检测装置记录的光谱确定装置的温度，并且基于温度进行与温度有关的测量误差的补偿 因此确定。 所公开的对应的光学布置。