Abstract:
An infrared sensor includes an infrared detecting device, a lens, a member, a gap and a spacer. The lens is disposed above the infrared detecting device. The member forms an external surface and includes a first opening having a maximum internal diameter. The gap is disposed between the member and the lens. The spacer is disposed between the member and the lens so as to form the gap, and that is directly contact with lens. The spacer has a circular inner periphery, in planar view, which has a larger internal diameter than the maximum internal diameter of the first opening of the member.
Abstract:
An infrared sensor includes: an infrared detecting device; a lens disposed above the infrared detecting device; an member that is disposed at a side of an upper surface of the lens and includes an opening; and a gap that intervenes between the member and the lens and has a wider range than the opening.
Abstract:
A thermal detector includes a substrate, a support member, a spacer member, a thermal detection element, a detection circuit and a wiring part. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The thermal detection element is supported on the support member. The wiring part connects between the detection circuit and the thermal detection element, and has first through third conductive layer parts and a plurality of plugs. The first conductive layer part includes at least one layer disposed in the substrate. The second conductive layer part includes at least one layer disposed in the spacer member. The third conductive layer part includes at least one layer supported by the support member. The plugs respectively connect adjacent layers of the first conductive layer part, the second conductive layer part and the third conductive layer part, in a thickness direction of the substrate.
Abstract:
A THz radiation detector comprising a vertical antenna separated from a suspended platform by an isolating thermal air gap for concentrating THz radiation energy into a smaller suspended MEMS platform upon which a thermal sensor element is located. THz photon energy is converted into electrical energy via a thermally isolated air gap between plates of a coupling capacitor separated by a plurality of nano-tip spacers that determine the gap distance. The capacitor couples energy from the antenna to the thermal sensor.
Abstract:
Manufacturing opto-electronic modules (1) includes providing a substrate wafer (PW) on which detecting members (D) are arranged; providing a spacer wafer (SW); providing an optics wafer (OW), the optics wafer comprising transparent portions (t) transparent for light generally detectable by the detecting members and at least one blocking portion (b) for substantially attenuating or blocking incident light generally detectable by the detecting members; and preparing a wafer stack (2) in which the spacer wafer (SW) is arranged between the substrate wafer (PW) and the optics wafer (OW) such that the detecting members (D) are arranged between the substrate wafer and the optics wafer. Emission members (E) for emitting light generally detectable by the detecting members (D) can be arranged on the substrate wafer (PW). Single modules (1) can be obtained by separating the wafer stack (2) into separate modules.
Abstract:
This electromagnetic radiation detector consists of a plurality of elementary detection micro-sites, each including a micro-detector provided with a membrane (2) that is sensitive to the radiation in question and each being provided in a micro-cavity or micro-capsule defined by a substrate (1), by an upper wall (5) used as a window that is transparent to said radiation and by side walls (4), said membrane (2) being suspended above substrate (1) by means of at least two support arms (6) that include an electrically conducting layer (17), with the ends of said arms (6) being anchored in side walls (4).
Abstract:
In a bolometer-type THz-wave detector in a micro-bridge structure in which a temperature detecting portion (diaphragm) including a bolometer thin film is supported by a supporting portion in a state suspended from a circuit substrate, a member (dielectric cover) made of a dielectric material for efficiently collecting a THz wave is added to an upper part of the temperature detecting portion, and when a refractive index of the dielectric cover is n, thickness is t, and a wavelength of the THz wave is λ, a setting is made so as to have nt>λ, and a gap between the dielectric cover and the temperature detecting portion is set at integral multiples of λ/2. By this arrangement, an absorption of the THz wave can be improved using a structure and manufacturing method of a bolometer-type infrared detector, and a high-performance bolometer-type THz-wave detector can be manufactured with a high yield.
Abstract:
An infrared detection element is configured to prevent decreases in detection precision when a beam bends. The infrared detection element basically has a substrate structure, a light receiver configured and arranged to receive infrared rays and at least one beam having one end fixed to the substrate and another end fixed to the light receiver to support the light receiver above the substrate. At least one protuberance is provided on at least one of the substrate, the light receiver and the beam with the at least one protuberance being configured and arranged to limit direct contact between any two of the beam, the light receiver and the substrate structure during bending of the beam, except at the at least one protuberance.
Abstract:
A novel wave guide assembly for use in an IR thermometer of the type used in measuring temperature of the tympanic membrane of the ear for body temperature determinations. The assembly provides a unique arrangement of spacers and a protective sheath to create a durable yet inexpensive wave guide. The spacer includes radially offset contact points that induce moment arms to absorb shock and other forms of rough handling encountered in daily use.