公开(公告)号：US06810105B2

公开(公告)日：2004-10-26

申请号：US10242496

申请日：2002-09-12

Applicant: Mehran Nasser-Ghodsi ,  Phil Wood

Inventor： Mehran Nasser-Ghodsi ,  Phil Wood

IPC: G01N23223

CPC classification number: G01N23/2252 ,  H01J2237/2445

Abstract: The present invention includes a system for efficient and effective detection and characterization of dishing and/or erosion. An x-ray emission inducer is used to scan a target on a sample. The target can be scanned at an acute incident angle to allow characterization of the dishing and/or erosion and analysis of the metallization or thin film layer topology.

Abstract translation: 本发明包括用于有效和有效地检测和表征凹陷和/或侵蚀的系统。 X射线发射诱导剂用于扫描样品上的靶。 可以以锐角入射角扫描靶，以便表征金属化或薄膜层拓扑的凹陷和/或腐蚀和分析。

公开(公告)号：US06670615B2

公开(公告)日：2003-12-30

申请号：US10245545

申请日：2002-09-18

Applicant: William H Gilmore ,  Keith Graham Dicks

Inventor： William H Gilmore ,  Keith Graham Dicks

IPC: H01J3700

CPC classification number: H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2482

Abstract: An electron detection device for use with an electron microscope defining a sample chamber. The device comprises a housing which in use is mounted to and opens into or forms part of a sample chamber of an electron microscope. A support structure is attached to the detection device housing and is in communication with the sample chamber in use. The support structure supports within it a member from which depends a phosphor scintillator, the member being movable between an extended position in which the phosphor scintillator is close enough to a sample to be struck by electrons and a retracted position. A control system controls movement of the member; and a detector monitors light emitted by the phosphor scintillator in response to electron impact.

公开(公告)号：US20030057377A1

公开(公告)日：2003-03-27

申请号：US10245545

申请日：2002-09-18

Applicant: OXFORD INSTRUMENTS ANALYTICAL LIMITED

Inventor： William H. Gilmore ,  Keith Graham Dicks

IPC: H01J037/244

CPC classification number: H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2482

Abstract: An electron detection device for use with an electron microscope defining a sample chamber. The device comprises a housing which in use is mounted to and opens into or forms part of a sample chamber of an electron microscope. A support structure is attached to the detection device housing and is in communication with the sample chamber in use. The support structure supports within it a member from which depends a phosphor scintillator, the member being movable between an extended position in which the phosphor scintillator is close enough to a sample to be struck by electrons and a retracted position. A control system controls movement of the member; and a detector monitors light emitted by the phosphor scintillator in response to electron impact.

Abstract translation: 一种电子检测装置，用于定义样品室的电子显微镜。 该装置包括壳体，其在使用中安装到电子显微镜的样品室的开口或部分中。 支撑结构附接到检测装置壳体并且在使用中与样品室连通。 支撑结构在其内部支撑着一个构件，从该构件可以取决于荧光体闪烁体，该构件可以在其中荧光体闪烁体足够接近待被电子撞击的样品的延伸位置和缩回位置之间移动。 控制系统控制构件的移动; 并且检测器响应于电子轰击而监视由荧光体闪烁体发射的光。

公开(公告)号：US20020190219A1

公开(公告)日：2002-12-19

申请号：US10218816

申请日：2002-08-14

Inventor： Paul E. Mooney

IPC: H01J037/244

CPC classification number: H01J37/224 ,  G01T1/20 ,  G01T1/2018 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2446 ,  H01J2237/26

Abstract: A resolution enhancement device is provided which utilizes either high extra-mural absorbent optical fibers in the transfer optic, and/or which uses a transfer optic which is bonded to the scintillator without the use of any glues or adhesives. The device provides improved resolution of electron images from electron microscopes while not reducing the sensitivity of the apparatus.

Abstract translation: 提供一种分辨率增强装置，其利用转移光学元件中的高级外墙吸收光纤，和/或使用在不使用任何胶水或粘合剂的情况下结合闪烁体的转移光学元件。 该装置提供电子显微镜的电子图像的改进的分辨率，同时不降低装置的灵敏度。

公开(公告)号：US20020158200A1

公开(公告)日：2002-10-31

申请号：US10084768

申请日：2002-02-26

Inventor： Masami Terauchi

IPC: H01J037/256

CPC classification number: H01J37/256 ,  H01J37/244 ,  H01J2237/2445 ,  H01J2237/2446

Abstract: An electron microscope is offered which is fitted with an X-ray spectrometer having a compact optical system and high resolution. The spectrometer has a spectrometer chamber whose inside is evacuated by a vacuum pumping system. A diffraction grating having unequally spaced grooves is placed in the chamber. An X-ray detector is mounted to an end of the chamber. The X-ray spectrometer is mounted to the sidewall of the electron microscope via a gate valve. A specimen is irradiated with an electron beam and emits characteristic X-rays, which are made to impinge on the face of the grating at a large angle with respect to the normal line to the face. Diffracted X-rays from the grating reach the X-ray detector and are detected.

Abstract translation: 提供了一种电子显微镜，配有具有紧凑光学系统和高分辨率的X射线光谱仪。 光谱仪具有光谱室，其内部由真空泵送系统抽真空。 具有不等间隔的凹槽的衍射光栅放置在腔室中。 X射线检测器安装在腔室的一端。 X射线光谱仪通过闸阀安装在电子显微镜的侧壁上。 用电子束照射样品，并发射特征X射线，其相对于与脸部的法线成大角度而被撞击在光栅的表面上。 来自光栅的衍射X射线到达X射线检测器并被检测。

公开(公告)号：US20020088940A1

公开(公告)日：2002-07-11

申请号：US09985317

申请日：2001-11-02

Inventor： Kenji Watanabe ,  Hirosi Sobukawa ,  Nobuharu Noji ,  Tohru Satake ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Mamoru Nakasuji ,  Masahiro Hatakeyama ,  Takeshi Murakami ,  Yuichiro Yamazaki ,  Ichirota Nagahama ,  Takamitsu Nagai ,  Kazuyoshi Sugihara

IPC: H01J037/28

CPC classification number: H01J37/28 ,  H01J37/224 ,  H01J37/244 ,  H01J2237/006 ,  H01J2237/20221 ,  H01J2237/2445 ,  H01J2237/2817

Abstract: An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary electron optical system converges secondary electrons emitted from the sample. A detector converts the converged secondary electrons into an optical image through a fluorescent screen and focuses the image to a line sensor. A controller controls the charge transfer time of the line sensor at which the picked-up line image is transferred between each pair of adjacent pixel rows provided in the line sensor in association with the moving speed of a stage for moving the sample.

Abstract translation: 图像投影型的电子束检查系统包括用于将从电子枪发射的电子束成形为矩形构造的一次电子光学系统，并将成形的电子束施加到要检查的样品表面。 二次电子光学系统收敛从样品发射的二次电子。 检测器通过荧光屏将会聚的二次电子转换成光学图像，并将图像聚焦到线传感器。 一个控制器控制线传感器的电荷转移时间，该线传感器在行传感器中设置的每对相邻像素行之间与用于移动样本的平台的移动速度相关联地传送拾取线图像。

公开(公告)号：US06201241B1

公开(公告)日：2001-03-13

申请号：US09461826

申请日：1999-12-15

Applicant: Hirotami Koike

Inventor： Hirotami Koike

IPC: H01J37252

CPC classification number: H01J37/252 ,  H01J2237/2445

Abstract: An organic substance analyzer, which comprises a irradiating unit for irradiating a specimen containing organic substances with an electron beam, a spectrum detecting unit for detecting spectrum of fluorescent light emitted from said specimen, a storage unit for storing a shape of a reference spectrum of fluorescent light of each specific type of organic substance when the electron beam is irradiated on said specific type of organic substance, and a searching unit for classification and identifying organic substances in the specimen by comparing the shape of said stored reference spectrum with that of said detected spectrum, whereby the electron beam having higher energy than light is irradiated the specimen for analysis, fluorescent light with spectrum in wider range is emitted from the specimen even in ultraviolet range, and organic substances in the specimen are discriminated and identified by comparing shapes of the measured spectral pattern obtained from the fluorescent light with a reference spectral pattern stored in memory in advance.

Abstract translation: 一种有机物质分析装置，其特征在于，包括：用电子束照射含有有机物质的检体的照射单元，检测从上述样本发出的荧光的光谱的光谱检测单元，存储荧光基准光谱的形状的存储单元 当电子束照射在所述特定类型的有机物质上时，每种特定类型的有机物质的光;以及搜索单元，用于通过将所述存储的参考光谱的形状与所述检测光谱的形状进行比较来分类和鉴定样品中的有机物质 由此，对于具有比光更高的能量的电子束照射用于分析的试样，即使在紫外线范围内也从试样发射具有更宽范围的光谱的荧光，并且通过比较测定的样品的形状来鉴别和鉴定样品中的有机物质 从荧光灯获得的光谱图案 提前存储在存储器中的参考光谱图。

公开(公告)号：US6107637A

公开(公告)日：2000-08-22

申请号：US132220

申请日：1998-08-11

Applicant: Masahiro Watanabe ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

Inventor： Masahiro Watanabe ,  Takashi Hiroi ,  Maki Tanaka ,  Hiroyuki Shinada ,  Yasutsugu Usami

IPC: G01Q30/04 ,  G01Q30/20 ,  G21K7/00 ,  H01J37/21 ,  H01J37/304 ,  G01N21/86

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/20 ,  H01J37/21 ,  H01J37/222 ,  H01J37/226 ,  H01J37/265 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/20235 ,  H01J2237/20292 ,  H01J2237/216 ,  H01J2237/2445 ,  H01J2237/24578 ,  H01J2237/2482 ,  H01J2237/2487 ,  H01J2237/2814 ,  H01J2237/2817 ,  H01J2237/2826 ,  H01J2237/304 ,  H01J2237/3175

Abstract: An electronic beam type exposure or inspection or measurement apparatus and method including an electron optical system, an electron beam image detection optical system for detecting a secondary electron beam image generated from an inspected object by electron beams irradiated from the electron optical system, and an optical height detection apparatus for optically detecting a height of a surface in an area on the inspected object. A focus controller is provided for calculating a focus control current or a focus control voltage based on a correction parameter between a height of a surface on the inspected object and a focus control current or a focus control voltage and supplying the same to an objective lens of the electron optical system in such a manner that an electron beam is focused on the inspected object in a properly- focused state. A deflection controller is provided for correcting an image distortion containing a magnification error of an electron beam image caused on the basis of the focus control, and an image processor is provided for inspecting or measuring a pattern formed on the inspected object based on a secondary electron beam image.

Abstract translation: 一种电子束式曝光或检查或测量装置和方法，包括电子光学系统，用于通过从电子光学系统照射的电子束检测从检查对象产生的二次电子束图像的电子束图像检测光学系统和光学 高度检测装置，用于光学检测被检查物体上的区域中的表面的高度。 提供了一种聚焦控制器，用于基于检测对象上的表面的高度与聚焦控制电流或聚焦控制电压之间的校正参数来计算聚焦控制电流或聚焦控制电压，并将其提供给 电子光学系统以使得电子束以适当聚焦的状态聚焦在被检查物体上。 提供一种偏转控制器，用于校正基于焦点控制引起的包含电子束图像的放大误差的图像失真，并且提供图像处理器，用于基于二次电子来检查或测量形成在被检查物体上的图案 光束图像。

公开(公告)号：US5724131A

公开(公告)日：1998-03-03

申请号：US511351

申请日：1995-08-04

Applicant: Wai Kin Chim ,  Daniel Siu Hung Chan ,  Jacob Chee Hong Phang ,  Jing Mei Tao ,  Yong Yu Liu

Inventor： Wai Kin Chim ,  Daniel Siu Hung Chan ,  Jacob Chee Hong Phang ,  Jing Mei Tao ,  Yong Yu Liu

IPC: H01J37/244 ,  G01N21/71

CPC classification number: H01J37/244 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: An integrated emission microscope with an emitted radiation detection system for collecting and analyzing radiation from a device under test. A semi-ellipsoidal mirror of high ellipticity directs emitted radiation from the device under test through an aperture to a radiation guide, Which transmits the radiation to spectral analyzer. The device under test may be mounted on a scanning stage. The system permits high spatial resolution selected area spectroscopic analysis, panchromatic imaging, and spectroscopic mapping of the emitted radiation from the device under test.

Abstract translation: 一种具有发射辐射检测系统的集成放射显微镜，用于收集和分析来自被测器件的辐射。 高椭圆率的半椭球镜将被测器件的辐射通过孔径引导到辐射导向器，辐射导向器将辐射传输到光谱分析仪。 被测设备可以安装在扫描台上。 该系统允许高空间分辨率选择的区域光谱分析，全色成像和来自被测器件的发射辐射的光谱映射。

公开(公告)号：US5387794A

公开(公告)日：1995-02-07

申请号：US178693

申请日：1994-01-10

Applicant: Takao Marui

Inventor： Takao Marui

IPC: G01N23/04 ,  G01N23/207 ,  H01J37/22 ,  H01J37/295 ,  H01J37/28

CPC classification number: H01J37/2955 ,  H01J37/22 ,  H01J2237/2445

Abstract: A detector for electrons diffracted by a sample irradiated with an electron beam uses a fluorescent screen to output optical signals representing the diffraction pattern formed by the diffracted electrons, and a TV camera to convert these optical signals to electrical signals. A photoelectric converter is used to determine the brightness of each position on the fluorescent screen but its position is controlled such that the converter will not obstruct the view of the fluorescent screen from the TV camera. Coordinate data on the positions at which the measured brightness is greater than a specified standard brightness value may be stored and relied upon in moving the photoelectric converter, or the light-receiving end of an optical fiber connected thereto, relative to the fluorescent screen.

Abstract translation: 由用电子束照射的样品衍射的电子的检测器使用荧光屏输出表示由衍射电子形成的衍射图案的光信号，以及TV摄像机将这些光信号转换为电信号。 使用光电转换器来确定荧光屏上每个位置的亮度，但其位置被控制，使得转换器不会阻碍荧光屏从电视摄像机的视野。 在测量亮度大于指定标准亮度值的位置上的坐标数据可以相对于荧光屏移动光电转换器或与其连接的光纤的光接收端移动。