Liquid vaporizer-feeder
    42.
    发明授权
    Liquid vaporizer-feeder 失效
    液体蒸发器供料器

    公开(公告)号:US5272880A

    公开(公告)日:1993-12-28

    申请号:US822179

    申请日:1992-01-16

    CPC classification number: B01J3/02 B01F3/022 C23C16/4481

    Abstract: A liquid vaporizer-feeder has a unitary housing structure for both a control valve for controlling the amount of a liquid passing therethrough and a vaporization valve for causing the liquid from the control valve to be vaporized and transported out by a carrier gas. The housing structure has a throughhole through which the two valves are connected. The throughhole is short and narrow, and has a portion made even narrower such that the pressure in the liquid passing therethrough is increased, preventing bubbles from forming in the throughhole. As a result, vaporized liquid can be supplied at a steadier rate, for example, to a reaction chamber.

    Abstract translation: 液体蒸发器给料器具有用于控制通过其中的液体量的控制阀和用于使来自控制阀的液体被载气气化并输出的汽化阀的整体外壳结构。 壳体结构具有连接两个阀的通孔。 通孔短而窄,并且具有更窄的部分,使得通过其中的液体中的压力增加,防止在通孔中形成气泡。 结果,蒸发的液体可以以更稳定的速率供应到例如反应室。

    Method of preventing condensation of air borne moisture onto objects in
a vessel during pumping thereof
    44.
    发明授权
    Method of preventing condensation of air borne moisture onto objects in a vessel during pumping thereof 失效
    在其泵送期间防止航空箱内水汽稠化物体的冷凝方法

    公开(公告)号:US5205051A

    公开(公告)日:1993-04-27

    申请号:US714864

    申请日:1991-06-13

    Applicant: Steven Hurwitt

    Inventor: Steven Hurwitt

    CPC classification number: H01L21/67017 C23C14/564 H01L21/67739

    Abstract: A pressure sealed chamber such as a load lock for a apparatus for processing substrates is operated with a guide plate spaced from a substrate supported therein so as to form a gap which covers the substrate surface to be protected from contamination by moisture condensing in the chamber during the rapid evacuation thereof. During the evacuation of the chamber, by either pumping or venting, clean dry gas is introduced through an orifice in the center of the plate so as to flow outwardly from the edge of the gap at a pressure sufficient to displace or otherwise prevent gas borne moisture condensate in the chamber from entering the gap and contaminating the surface to be protected of the substrate. During the evacuation of the chamber, gas is introduced through the gap at a flow rate less that of the evacuating gas.

    Abstract translation: 用于处理基板的设备的负载锁定的压力密封室由与支撑在其中的基板间隔开的引导板进行操作,以形成覆盖基板表面的间隙,以防止在室内的湿气冷凝的污染 迅速撤离。 在室抽真空期间,通过泵送或排气,清洁的干燥气体通过板的中心的孔口被引入,以便以足够的压力从间隙的边缘向外流动以替代或以其它方式防止气体湿气 室内的冷凝物不会进入间隙并污染待保护的表面。 在室的排空过程中,气体以比排气减少的流量通过间隙引入。

    Liquid addition funnel for pressure reactors
    45.
    发明授权
    Liquid addition funnel for pressure reactors 失效
    用于压力反应器的液体加料漏斗

    公开(公告)号:US5073348A

    公开(公告)日:1991-12-17

    申请号:US549666

    申请日:1990-07-09

    CPC classification number: B01L99/00 B01J3/02 B01J4/001

    Abstract: A pressure equalizing liquid addition funnel for a closed system reactor is described. The funnel includes an internal valve stem which seats in the outlet port and extends therethrough and which defines a lumen which extends axially from below the outlet port upwardly to a port in the valve stem in the upper portion of said flask. The valve stem then terminates in a valve cap which is threadedly mounted on the funnel whereby rotation of the cap will cause the valve to engage or disengage a valve seat at the outlet.

    Abstract translation: 描述了用于封闭系统反应器的均压液体加料漏斗。 漏斗包括内部阀杆,其位于出口端口并延伸穿过其中,并且限定了从出口端口的下方向上延伸到所述烧瓶的上部中的阀杆中的端口的内腔。 阀杆然后终止于螺纹安装在漏斗上的阀盖,由此盖的旋转将导致阀在出口处接合或脱离阀座。

    Apparatus for carrying out catalyzed chemical reactions and for studying
catalysis
    46.
    发明授权
    Apparatus for carrying out catalyzed chemical reactions and for studying catalysis 失效
    用于进行催化化学反应和研究催化的装置

    公开(公告)号:US5009849A

    公开(公告)日:1991-04-23

    申请号:US372095

    申请日:1989-06-28

    Abstract: Disclosed are an apparatus adapted for use in a temporal analysis of products (TAP) system for studying catalytic reactions, a catalytic reactor provided with heat exchange capability and useful in the TAP system, and an apparatus for use in gas processing which can also be used in a TAP system. The gas processing apparatus includes a manifold for introduction of a plurality of gases into a gas processing system. The manifold comprises a plurality of channels through which gas may flow toward the gas processing system, and a mixing chamber having an inlet in communication with the plurality of channels and an outlet in communication with the gas processing system. At least one of the channels has a rapidly operable feed valve at the terminus of the channel at which it communicates with the chamber inlet. The mixing chamber has a void volume that is small relative to the working volume of the gas processing system. The catalytic reactor comprises any of several novel combinations of catalytic reaction chamber and constructions providing for transfer of heat to the chamber. The novel TAP system apparatus includes a housing and, within the housing, a catalytic reactor, a collimating slit or the like for providing a resolved pulse of product gas, an analytical device for real time analysis of the product pulse, and circuitry for coordinating the product pulse with scanning of the analytical device. The TAP apparatus may also include a cryogenic surface surrounding the product pulse path, a low residence time mixing zone ahead of the reactor, and/or a manifold of the type described above.

    Abstract translation: 公开了一种适用于时间分析用于研究催化反应的产物(TAP)系统的设备,具有热交换能力并且在TAP系统中有用的催化反应器的设备,以及也可用于气体处理的设备 在TAP系统中。 气体处理装置包括用于将多种气体引入气体处理系统的歧管。 歧管包括多个通道,气体可以通过该通道流向气体处理系统,以及具有与多个通道连通的入口和与气体处理系统连通的出口的混合室。 至少一个通道在通道的末端具有快速可操作的进料阀,在该通道的端部与腔室入口连通。 混合室具有相对于气体处理系统的工作容积小的空隙体积。 催化反应器包括催化反应室的几种新型组合和提供将热量传递到室的结构的任何一种。 该新型TAP系统装置包括壳体,并且在壳体内部具有催化反应器,准直缝隙等,用于提供产物气体的分辨脉冲,用于产物脉冲的实时分析的分析装置和用于协调 产品脉冲与扫描分析装置。 TAP设备还可以包括围绕产物脉冲路径的低温表面,反应器前面的低停留时间混合区域和/或上述类型的歧管。

    Sluice type apparatus for discharging material batches
    49.
    发明授权
    Sluice type apparatus for discharging material batches 失效
    用于卸料的闸门式装置

    公开(公告)号:US4830233A

    公开(公告)日:1989-05-16

    申请号:US73995

    申请日:1987-07-16

    CPC classification number: B65G53/4691 B01D35/16 B01J3/02

    Abstract: A sluice type apparatus for discharging batches of material from a pressurized enclosure has a container with an upper inlet and a lower outlet each closable by a slide gate. Preferably, each slide gate has two slide gate members driven by respective piston cylinder devices so that one gate is closed while the other gate is open and vice versa. At least the slide gate members for opening and closing the inlet are withdrawn from their inlet closing position into a respective outwardly closed or sealed chamber for making it easier to keep the container pressurized. The seals between the chamber entrance slots and the respective slide gate member are not required to be precision seals because any material that may pass into these outwardly closed or sealed chambers is easily removed again.

    Abstract translation: 用于从加压外壳排出批料的闸阀式装置具有容器,其具有可由滑动门关闭的上入口和下出口。 优选地,每个滑动门具有由相应的活塞气缸装置驱动的两个滑动门构件,使得一个门关闭,而另一个门打开,反之亦然。 至少用于打开和关闭入口的滑动门构件从其入口关闭位置被抽出到相应的向外关闭或密封的室中,以使得容易保持容器的加压。 腔室入口槽和相应的滑动门构件之间的密封件不需要是精密密封件,因为可以再次进入这些向外关闭或密封的腔室中的任何材料。

    Booster type high-pressure vessel
    50.
    发明授权
    Booster type high-pressure vessel 失效
    增压型高压容器

    公开(公告)号:US4690618A

    公开(公告)日:1987-09-01

    申请号:US780681

    申请日:1985-09-26

    Abstract: In a booster type high-pressure container including an outer cylinder associated with upper and lower lids and an inner cylinder fitted in the outer cylinder with a gap clearance retained therebetween, a booster chamber is provided between a piston disposed within the inner cylinder at its bottom portion and the lower lid of the outer cylinder, a boosting liquid medium is injected into the booster chamber for pushing up the inner cylinder jointly with the piston to boost the pressure within the inner cylinder, and the gap clearance communicates with the booster chamber.

    Abstract translation: 在包括与上盖和下盖相关联的外筒的增压型高压容器和装配在外筒中的内筒之间保持有间隙的增压型高压容器中,在设置在其内底筒内的活塞之间设置增压室 外筒的下盖和下盖,将增压液体介质注入到增压室中,以与活塞一起向上推动内筒,以提高内筒内的压力,并且间隙与增压室连通。

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