DETECTING DEVICE AND MEASURING DEVICE

    公开(公告)号:US20230133711A1

    公开(公告)日:2023-05-04

    申请号:US17975617

    申请日:2022-10-28

    Abstract: A detecting device of the present disclosure includes a light emitting portion that emits light and a light receiving portion including an angle limiting member that limits an angle of incidence of light from the light emitting portion, wherein the light receiving portion has a first light receiving region and a second light receiving region that is spaced further from the light emitting portion than the first light receiving region is, the angle limiting member includes a first limiting region corresponding to the first light receiving region and a second limiting region corresponding to the second light receiving region, and the degree of angle limitation of the second limiting region is smaller than the degree of angle limitation of the first limiting region.

    Proximity sensor with infrared ink coating

    公开(公告)号:US11143551B2

    公开(公告)日:2021-10-12

    申请号:US16416054

    申请日:2019-05-17

    Abstract: A sensor comprising a light emitter and light detector directly covered and encapsulated by a layer of light transmissive compound. A gap in the light transmissive compound between the light emitter and the light detector filled with an infrared ink. In some embodiments, an infrared ink can cover at least a portion of a top surface of the sensor and define apertures above the light detector and/or light emitter.

    Integrated bound-mode spectral/angular sensors

    公开(公告)号:US10989590B2

    公开(公告)日:2021-04-27

    申请号:US16542505

    申请日:2019-08-16

    Abstract: A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.

    Method and apparatus for characterizing laser gain chips

    公开(公告)号:US10732105B1

    公开(公告)日:2020-08-04

    申请号:US16277917

    申请日:2019-02-15

    Abstract: A system adapted for characterizing gain chips and a method for characterizing gain chips are disclosed. The system includes a probe light source that generates an output light signal characterized by a wavelength that can be varied in response to a wavelength control signal and a mounting stage adapted for receiving a gain chip characterized by a waveguide having a reflective face on a first surface of the gain chip and a transparent face on a second surface of the gain chip. The system also includes an optical system that focuses the output light signal into the waveguide through the transparent face; and a controller that causes the probe light source to generate the output light signal and measures an intensity of light both with and without the gain chip being powered for each of a plurality of different wavelengths to form a gain profile for the gain chip.

    INTEGRATED BOUND-MODE SPECTRAL/ANGULAR SENSORS

    公开(公告)号:US20200003613A1

    公开(公告)日:2020-01-02

    申请号:US16542505

    申请日:2019-08-16

    Applicant: STC.UNM

    Abstract: A 2-D sensor array includes a semiconductor substrate and a plurality of pixels disposed on the semiconductor substrate. Each pixel includes a coupling region and a junction region, and a slab waveguide structure disposed on the semiconductor substrate and extending from the coupling region to the region. The slab waveguide includes a confinement layer disposed between a first cladding layer and a second cladding layer. The first cladding and the second cladding each have a refractive index that is lower than a refractive index of the confinement layer. Each pixel also includes a coupling structure disposed in the coupling region and within the slab waveguide. The coupling structure includes two materials having different indices of refraction arranged as a grating defined by a grating period. The junction region comprises a p-n junction in communication with electrical contacts for biasing and collection of carriers resulting from absorption of incident radiation.

    Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber

    公开(公告)号:US10210963B2

    公开(公告)日:2019-02-19

    申请号:US15366652

    申请日:2016-12-01

    Abstract: A method includes generating light in a light generating chamber, causing a portion of the generated light to pass through a tube having a roughened inner surface, and detecting the portion of the generated light that has passed through the tube using a photodetector. The roughened inner surface of the tube has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. In one example, the method includes outputting a signal from the photodetector to a controller, with the signal corresponding to the detected portion of the generated light. The light generated in the light generating chamber can be extreme ultraviolet (EUV) light. In tests using roughened and non-roughened protection tubes, the roughened tube was found to minimize or essentially eliminate the contribution to EUV energy from grazing incidence reflections off the inner surface of the tube.

    Gas imager employing an array imager pixels with order filters

    公开(公告)号:US10191022B2

    公开(公告)日:2019-01-29

    申请号:US15242231

    申请日:2016-08-19

    Abstract: A spectral radiation gas detector has at least one lenslet with a circular blazed grating for diffraction of radiation to a focal plane. A detector is located at the focal plane receiving radiation passing through the at least one lenslet for detection at a predetermined diffraction order. A plurality of order filters are associated with the at least one lenslet to pass radiation at wavelengths corresponding to the predetermined diffraction order, each filter blocking a selected set of higher orders. A controller is adapted to compare intensity at pixels in the detector associated with each of the plurality of order filters and further adapted to determine a change in intensity exceeding a threshold.

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