公开(公告)号：US06977364B2

公开(公告)日：2005-12-20

申请号：US10627638

申请日：2003-07-28

Applicant: Willy M. Sander

Inventor： Willy M. Sander

IPC: G01J1/44 ,  G01J1/02 ,  G01J1/16 ,  G01J1/42 ,  G01J3/28 ,  G03F7/20 ,  H01L21/027 ,  H04N5/361 ,  H04N5/369 ,  H01J40/14 ,  H01L27/00 ,  H04N9/64

CPC classification number: H04N5/361 ,  G01J1/1626 ,  G01J1/4228 ,  G01J3/2803 ,  G01J2001/444

Abstract: A method is used to perform dark current compensation in a sensor (e.g., a CCD or CMOS sensor). A first and second array of devices (e.g., pixels) in the sensor are used to determine a first dark current value. The first array of pixels in the sensor receives impinging light and generates optical energy values therefrom. The second array of pixels in the sensor are used to determine a second dark current value at substantially a same time as the generating of the optical energy values. The second array of devices being non-sensitive to the impinging light. The first and second dark current values are used to compensate the optical energy values.

Abstract translation: 一种方法用于在传感器（例如，CCD或CMOS传感器）中执行暗电流补偿。 传感器中的第一和第二设备阵列（例如像素）用于确定第一暗电流值。 传感器中的第一像素阵列接收入射光并从其产生光能值。 传感器中的第二像素阵列用于在与产生光能值基本相同的时间确定第二暗电流值。 第二阵列的装置对撞击光不敏感。 第一和第二暗电流值用于补偿光能值。

公开(公告)号：US06875985B2

公开(公告)日：2005-04-05

申请号：US10227553

申请日：2002-08-22

Applicant: Colin David John Skelton

Inventor： Colin David John Skelton

IPC: G01N21/35 ,  G01J1/16 ,  G01J1/32 ,  G01N21/27 ,  G01N21/17

CPC classification number: G01N21/274 ,  G01J1/1626 ,  G01J1/32

Abstract: An infrared absorption gauge includes a detector circuit including a detector for detecting electromagnetic radiation from a sample and for generating a signal representing the radiation received, and means for stabilizing a response characteristic of the detector to the radiation detected thereby, said stabilizing means having a GaAs diode for directing radiation at the detector and means for controlling the radiation source in dependence upon the signal generated by the detector. The stabilizing means thus acts as a negative feedback loop and seeks to maintain the overall illumination irradiating the detector (i.e. the combined illumination that is reflected back from the sample and that is emitted by the GaAs diode), at a substantially constant predetermined level, which tends to linearize and extend the frequency response of the detector to the radiation detected.

Abstract translation: 红外吸收计包括检测器电路，其包括用于检测来自样本的电磁辐射并用于产生表示接收的辐射的信号的检测器，以及用于将检测器的响应特性稳定到由此检测的辐射的装置，所述稳定装置具有GaAs 用于在检测器处引导辐射的二极管，以及根据由检测器产生的信号来控制辐射源的装置。 因此，稳定装置用作负反馈回路，并且寻求维持照射检测器的总体照明（即从样品反射并由GaAs二极管发射的组合照明），基本上恒定的预定水平， 倾向于将检测器的频率响应线性化并扩展到所检测到的辐射。

公开(公告)号：US20050002103A1

公开(公告)日：2005-01-06

申请号：US10855124

申请日：2004-05-27

Applicant: Jon Bechtel ,  Frederick Bauer ,  Joseph Stam ,  Robert Knapp ,  Robert Turnbull ,  David Schmidt ,  G. Poe ,  David Plangger ,  Robert Nixon ,  Eric Fossum ,  Timothy Steenwyk

Inventor： Jon Bechtel ,  Frederick Bauer ,  Joseph Stam ,  Robert Knapp ,  Robert Turnbull ,  David Schmidt ,  G. Poe ,  David Plangger ,  Robert Nixon ,  Eric Fossum ,  Timothy Steenwyk

IPC: G01J1/02 ,  B60H1/00 ,  B60H1/26 ,  B60H1/34 ,  B60Q1/02 ,  B60Q1/08 ,  B60Q1/14 ,  B60R1/04 ,  B60R1/08 ,  B60R16/027 ,  B60S1/08 ,  G01J1/16 ,  G01J1/46 ,  H01L31/10 ,  G02B5/08

CPC classification number: G01J1/1626 ,  B60Q1/1423 ,  B60Q2300/052 ,  B60Q2300/054 ,  B60Q2300/112 ,  B60Q2300/312 ,  B60Q2300/314 ,  B60Q2300/337 ,  B60Q2400/30 ,  B60R1/088 ,  G01J1/46

Abstract: Equipment on automotive vehicle is controlled by a system including at least one semiconductor light sensor having variable sensitivity to light. Each light sensor generates a light signal indicative of the intensity of light incident on the light sensor. Control logic varies the sensitivity of the light sensor and generates equipment control signals based on received light signals. Sensitivity of light sensors may be varied by changing the integration time for producing charge from light incident on light transducers, by selecting between light transducers of different sensitivity within the light sensor, by using a light transducer with a sensitivity that is a function of the amount of incident light, and the like. Controlled equipment includes devices such as automatically dimming rearview mirrors, headlamps, and moisture removal means.

Abstract translation: 机动车辆上的设备由包括至少一个具有对光敏感度可变的半导体光传感器的系统控制。 每个光传感器产生指示入射在光传感器上的光的强度的光信号。 控制逻辑改变光传感器的灵敏度，并根据接收到的光信号产生设备控制信号。 光传感器的灵敏度可以通过改变从入射到光换能器上的光产生电荷的积分时间，通过使用具有灵敏度的光传感器在光传感器内选择不同灵敏度的光换能器来改变灵敏度 的入射光等。 受控设备包括诸如自动调光后视镜，前照灯和除湿装置的装置。

公开(公告)号：US5753903A

公开(公告)日：1998-05-19

申请号：US743206

申请日：1996-11-05

Applicant: Craig Lyle Mahaney

Inventor： Craig Lyle Mahaney

IPC: G01J1/16 ,  G01J1/32

CPC classification number: G01J1/32 ,  G01J1/16 ,  G01J2001/4247

Abstract: The intensity of each lamp which illuminates an object at an inspection station is controlled by controlling driving voltage applied to a power supply which supplies electrical power to the lamp. A phototransistor is used to sense the intensity of the lamp through an optical fiber. The sensor is followed by a digitally-controlled, variable gain circuit whose output is fed to an A-D converter. A microprocessor analyzes the digital signal from the A-D converter and corrects the driving voltage to the power supply to keep the intensity output of the lamp constant, as seen by a camera of a machine vision system. In this way, feedback corrects for a degraded lamp output due to aging. Preferably, the control of the level of lamp intensity can be changed from a remote system console of the machine vision system to reduce the need for access to internal parts, thereby reducing the probability that human error may cause a malfunction. The method and system of the present invention are particularly useful for inspection of digital versatile discs (DVD's) where the illumination must be changed. Also, the method and system are particularly useful in automated production lines where both audio and DVD discs are inspected. The lamp intensity control method and system can quickly change intensities for the appropriate discs.

Abstract translation: 通过控制施加到向灯提供电力的电源的驱动电压来控制在检查站照亮物体的每个灯的强度。 光电晶体管用于通过光纤感测灯的强度。 传感器后面是数字控制的可变增益电路，其输出被馈送到A-D转换器。 微处理器分析来自A-D转换器的数字信号，并校正电源的驱动电压，以保持灯的强度输出恒定，如机器视觉系统的相机所见。 以这种方式，由于老化，反馈校正灯的输出恶化。 优选地，可以从机器视觉系统的远程系统控制台改变灯强度的控制，以减少对内部部件的访问的需要，从而减少人为错误可能导致故障的概率。 本发明的方法和系统对于必须改变照明的数字通用盘（DVD）的检查特别有用。 此外，该方法和系统在检查音频和DVD光盘的自动化生产线中特别有用。 灯强度控制方法和系统可以快速改变适当光盘的强度。

公开(公告)号：US5646421A

公开(公告)日：1997-07-08

申请号：US735314

申请日：1996-10-25

Applicant: Hui Chun Liu

Inventor： Hui Chun Liu

IPC: G01J1/16 ,  H01L31/0304 ,  H01L31/0352 ,  H01L31/101 ,  H01L31/108 ,  H01L29/06

CPC classification number: B82Y20/00 ,  H01L31/035236

Abstract: A quantum well intersubband infrared (IR) photodetector has a spectral response tunable by an external voltage. The photodetector consists of multiple doped quantum wells with different well widths and barrier heights. The preferred embodiment is made by repeating the whole structure of the active region of a multiple quantum well intersubband IR photodetector. Differences between repeats or groups of well widths and barrier heights result in differences in the spectral IR response of the different repeats. The device resistance of a given group is designed to be very different from those for all the other groups. As a function of an applied voltage, the repeat with the highest resistance will be turned on to detect IR with the response peak at a wavelength .lambda..sub.1. Subsequently, the next highest resistance repeat will turn on when increasing voltage with its response peaked at .lambda..sub.2, and so on. Since .lambda..sub.1, .lambda..sub.2 are different from each other, a voltage tunable multicolor photodetector is realized.

Abstract translation: 量子阱子带内红外（IR）光电探测器具有通过外部电压可调谐的光谱响应。 光电检测器由具有不同阱宽度和势垒高度的多个掺杂量子阱组成。 优选实施例是通过重复多量子阱子带间IR光电检测器的有源区的整个结构来进行的。 重复或阱宽度组和屏障高度之间的差异导致不同重复的光谱IR响应的差异。 给定组的设备电阻设计为与所有其他组的设备电阻非常不同。 作为施加电压的函数，将打开具有最高电阻的重复，以在波长λ1处具有响应峰值来检测IR。随后，当增加电压时，下一个最高电阻重复将导通，其响应在λ 2，等等。 由于λ1，λ2彼此不同，所以实现了电压可调多色光电检测器。

公开(公告)号：US5430290A

公开(公告)日：1995-07-04

申请号：US266715

申请日：1994-06-28

Applicant: Jean-Pierre Merle ,  Francis Devos

Inventor： Jean-Pierre Merle ,  Francis Devos

IPC: G01J1/16 ,  G01J1/46 ,  G01S3/784 ,  G01S17/10 ,  H01J40/14

CPC classification number: G01S17/107 ,  G01J1/1626 ,  G01J1/46 ,  G01S3/784

Abstract: The present invention relates to a photosensitive element (1) for detecting flashes of light (2).According to the invention, said photosensitive element (1) includes a control device (4) knowing the instant of the emission of the flashes of light (2) and capable of switching said photosensitive element into one or the other of two different states:a positive accumulation state in which the accumulation capacitor (12) is charged by the light energy from said photosensitive element (1); anda negative accumulation state in which the accumulation capacitor (12) is discharged by the light energy from said photosensitive element (1).

Abstract translation: 本发明涉及用于检测闪光（2）的光敏元件（1）。 根据本发明，所述感光元件（1）包括知道所述闪光（2）的发射时刻的控制装置（4），并且能够将所述感光元件切换成两种不同状态中的一种或另一种： 积累电容器（12）由来自所述光敏元件（1）的光能充电的正累积状态; 以及累积电容器（12）由来自所述感光元件（1）的光能量放电的负累积状态。

公开(公告)号：US5369397A

公开(公告)日：1994-11-29

申请号：US874394

申请日：1992-04-27

Applicant: Jacob Y. Wong

Inventor： Jacob Y. Wong

IPC: G01J1/16 ,  G01J1/18 ,  G01N21/25 ,  G01N21/31 ,  G01N21/35 ,  G08B17/117 ,  G08B29/20 ,  G08B17/10

CPC classification number: G01N21/255 ,  G01N21/3504 ,  G08B17/117 ,  G08B29/20 ,  G01J2001/161 ,  G01J2001/182 ,  G01N21/314 ,  G01N2201/0228 ,  G01N2201/06186 ,  G01N2201/0696

Abstract: The fire detector includes a carbon dioxide sensor and a microcomputer. When the rate of increase of the concentration of carbon dioxide at the sensor exceeds a threshold, an alarm is produced. The threshold is set at one of three possible levels by the microcomputer in response to the state of the atmosphere at the sensor as determined by the microcomputer based on several variables that are derived from the sensed concentration of carbon dioxide. The derived variables include the average concentration of carbon dioxide, the average rate of change of carbon dioxide concentration, the monotonicity of the increase or decrease of the carbon dioxide concentration and the range of concentrations sensed in each cycle of operation. The threshold setting is determined every ten seconds. In this way, the setting of the rate threshold is responsive to variations in the carbon dioxide level at the sensor that are caused by entities other than a fire, such as the presence or absence of people in a closed room.

Abstract translation: 火灾探测器包括二氧化碳传感器和微型计算机。 当传感器中二氧化碳浓度增加的速度超过阈值时，会产生报警。 由微型计算机响应于由微型计算机确定的气氛状态，根据从感测到的二氧化碳浓度导出的几个变量，阈值被设置在三个可能的水平之一。 衍生变量包括二氧化碳的平均浓度，二氧化碳浓度的平均变化率，二氧化碳浓度的增加或减少的单调性以及在每个操作周期中感测到的浓度范围。 阈值设置每10秒钟确定一次。 以这种方式，速率阈值的设置响应于由火焰以外的实体引起的传感器处的二氧化碳水平的变化，例如在封闭房间中存在或不存在人。

公开(公告)号：US5270222A

公开(公告)日：1993-12-14

申请号：US638468

申请日：1990-12-31

Applicant: Mehrdad M. Moslehi

Inventor： Mehrdad M. Moslehi

IPC: G01B11/06 ,  G01B11/30 ,  G03F7/20 ,  H01L21/00 ,  H01L21/66 ,  H01L21/68 ,  G01J1/16 ,  H01L21/268

CPC classification number: H01L21/682 ,  B24B37/013 ,  G01B11/0616 ,  G01B11/303 ,  G03F7/70483 ,  H01L21/67207 ,  H01L21/67253 ,  H01L21/67276 ,  H01L22/20 ,  H01L22/26 ,  H01L22/12

Abstract: A sensor (210) for diagnosis and prognosis of semiconductor device fabrication processes measures specular, scattered, and total surface reflectances and transmittances of semiconductor wafers (124). The sensor (210) comprises a sensor arm (212) and an opto-electronic control box (214), for directing coherent electromagnetic or optical energy in the direction of semiconductor wafer (124). Opto-electronic control box (214) includes circuitry for measuring the amounts of laser powers coherently reflected from and transmitted through the semiconductor wafer (124) surface and the amounts of electromagnetic powers scatter reflected from and transmitted through the semiconductor wafer (124) surface. The present invention determines specular, scattered, and total reflectance and transmittance as well as surface roughness values for semiconductor wafer (124) based on measurements of coherent and scatter reflected and transmitted laser powers. The sensor (210) of the present invention can also provide a go/no-go test of semiconductor fabrication process quality. A process control computer associates with the sensor (210) to respond to spectral reflectance and transmittance measurements yielding surface roughness and thickness measurements as well as diagnosis/prognosis analysis results and control signals.

Abstract translation: 用于半导体器件制造工艺的诊断和预测的传感器（210）测量半导体晶片（124）的镜面，散射和总表面反射率和透射率。 传感器（210）包括传感器臂（212）和光电子控制箱（214），用于在半导体晶片（124）的方向上引导相干的电磁或光能。 光电子控制盒（214）包括用于测量从半导体晶片（124）表面相干反射并透射通过半导体晶片（124）表面的激光功率的量以及从半导体晶片（124）表面反射并透射通过半导体晶片（124）表面的电磁功率的量。 本发明基于相干和散射反射和透射的激光功率的测量来确定半导体晶片（124）的镜面，散射，全反射率和透射率以及表面粗糙度值。 本发明的传感器（210）还可以提供半导体制造工艺质量的去/禁止测试。 过程控制计算机与传感器（210）相关联，以响应光谱反射率和透射率测量，产生表面粗糙度和厚度测量以及诊断/预后分析结果和控制信号。

公开(公告)号：US5179422A

公开(公告)日：1993-01-12

申请号：US700441

申请日：1991-05-15

Applicant: Lauren M. Peterson

Inventor： Lauren M. Peterson

IPC: G01J1/16 ,  G01N21/31 ,  G01N21/35 ,  G01N21/39 ,  G01N21/94

CPC classification number: G01N21/94 ,  G01J1/1626 ,  G01N21/314 ,  G01N21/3554 ,  G01N21/39

Abstract: A system for detecting minute amounts of water contaminant in semi-conductor microelectronic integrated circuits (MIC) includes two lasers 11,12 producing electromagnetic radiation at two discrete wavelengths. Each laser beam being sent through a chopper 13 and 14 respectively and combined via mirror 16 and beam splitter 17 to form a single two part beam along optical axis 22. The beam passes through a reflective beam splitter 26, a quarter wave plate 28 and lens 29 to be directed to a MIC 31 that is mounted onto drive mechanisms 31 and 32. Diffuse reflections from the bottom of the MIC or specular reflections from metallization layers pass back through MIC 31, lens 29, quarter wave plate 28, beam splitter 27 and through lens 48 to detector 47 which compares the intensity of the radiation at the two wavelengths with the intensities of the wavelengths as detected by detector 21 through a lock-in amplifier 49.

Abstract translation: 用于检测半导体微电子集成电路（MIC）中微量水污染物的系统包括两个产生两个离散波长的电磁辐射的激光器11,12。 每个激光束分别通过斩波器13和14发送，并通过反射镜16和分束器17组合，以沿着光轴22形成单个两部分光束。光束通过反射分束器26，四分之一波片28和透镜 29被引导到安装在驱动机构31和32上的MIC31.来自MIC底部的扩散反射或来自金属化层的镜面反射通过MIC31，透镜29，四分之一波片28，分束器27和 通过透镜48到检测器47，其将两个波长处的辐射的强度与由检测器21通过锁定放大器49检测的波长的强度进行比较。

公开(公告)号：US5163332A

公开(公告)日：1992-11-17

申请号：US793990

申请日：1991-11-18

Applicant: Jacob Y. Wong

Inventor： Jacob Y. Wong

IPC: G01N21/35 ,  G01J1/16 ,  G01J1/18 ,  G01N1/00 ,  G01N1/22 ,  G01N21/03 ,  G01N21/05 ,  G01N21/25 ,  G01N21/31 ,  G01N21/61 ,  G08B17/10 ,  G08B17/117 ,  G08B29/20

CPC classification number: G01N21/0303 ,  G01N1/2258 ,  G01N21/05 ,  G01N21/255 ,  G01N21/3504 ,  G08B17/117 ,  G08B29/20 ,  G01J2001/161 ,  G01J2001/182 ,  G01N2001/2261 ,  G01N2021/0321 ,  G01N2021/0385 ,  G01N2021/052 ,  G01N21/0332 ,  G01N21/314 ,  G01N2201/0228 ,  G01N2201/06186 ,  G01N2201/0696

Abstract: A diffusion-type gas sample chamber for use in a gas analyzer consists of an elongated hollow tube having an inwardly-facing specularly-reflective surface that permits the tube to function also as a light pipe for transmitting radiation from a source to a detector through the sample gas. A number of filtering apertures in the wall of the otherwise non-porous hollow tube permit the sample gas to enter and exit freely under ambient pressure. Particles of smoke and dust of a size greater than 0.1 micron are kept out of the chamber by use of a semi-permeable membrane that spans the apertures in the hollow tube. Condensation of the sample gas components is prevented by heating the sample chamber electrically to a temperature above the dew point of the component of concern.

Abstract translation: 用于气体分析仪的扩散型气体样本室由具有朝内的镜面反射表面的细长的中空管组成，该中空管允许管也用作用于将辐射从源传输到检测器的光管 样气 否则无孔中空管的壁中的多个过滤孔允许样品气体在环境压力下自由进出。 通过使用跨越中空管中的孔的半透膜将尺寸大于0.1微米的烟尘颗粒保持在室外。 通过将样品室电加热到高于所关注部件的露点的温度来防止样品气体组分的冷凝。