Two-dimensional Photoelectric Autocollimation Method and Device Based on Wavefront Measurement and Correction

    公开(公告)号:US20230032319A1

    公开(公告)日:2023-02-02

    申请号:US17477638

    申请日:2021-09-17

    Abstract: The disclosure belongs to the technical field of precision test and measurement, and provides a two-dimensional photoelectric autocollimation method and device based on wavefront measurement and correction. According to the disclosure, a link of wavefront measurement and correction of a reference light path is added to a traditional autocollimator measuring method. By using wavefront distortion information of the reference light path in the instrument and driving a deformable mirror to compensate for phase distortion of a beam, the link realizes measurement and control on aberration of the optical system of the autocollimator and improves the imaging quality and spot positioning accuracy of the optical system, thereby improving the angle measurement accuracy of the autocollimator. At the same time, by introducing the link, the autocollimator has the ability to resist interference from the external environment, so that the resolution and stability of angle measurement of the autocollimator are further improved. The method makes the traditional autocollimator have a nano-radian order (5×10−9 rad, that is 0.001″) angle resolution and a sub-microradian order (10−7 rad, that is 0.02″) angle measurement accuracy. The disclosure has the technical advantage of realizing angle measurement with high resolution, high accuracy and high stability under the same conditions, and has the abilities to resist environmental disturbances and compensate for errors caused by the disturbances.

    Method and device for measuring dip angle of oppositely crossly placed paired quartered ring-quartered circle nested polar plates

    公开(公告)号:US10145683B2

    公开(公告)日:2018-12-04

    申请号:US15307300

    申请日:2015-03-31

    Abstract: A method for measuring a dip angle of oppositely crossly placed paired quartered ring-quartered circle nested polar plates. An annular coplanar capacitance measuring head of a sensor unit consists of four quarter round metal plates and four quarter circular-ring-shaped metal plates, the eight metal plates are coplanar and concentric with one another, and a quarter round metal plate and a quarter circular-ring-shaped metal plate corresponding to the same sector angle form a capacitor. Two annular coplanar capacitance measuring heads are arranged on two round insulating substrates, the two round insulating substrates are used as two bottom surfaces of a cylindrical container, the cylindrical container is transversely arranged, and an insulating liquid equal to ½ volume of the cylindrical container is injected into the cylindrical container in a sealing manner. Potential leads extract potentials of the sixteen metal plates and are connected to an input end of a capacitance measuring unit, and the capacitance measuring unit is connected to a dip measuring unit. When the cylindrical container tilts, the relative positions of the two annular coplanar capacitance measuring heads and the insulating liquid are changed, and a dip angle value can be calculated by measuring the change of a capacitance value. Also disclosed is a device for measuring a dip angle of oppositely crossly placed paired quartered ring-quartered circle nested polar plates.

    Multi-period master-slave nested ring array electromagnetic shielding optical window having concentric rings

    公开(公告)号:US09686892B2

    公开(公告)日:2017-06-20

    申请号:US15118820

    申请日:2014-12-16

    Abstract: Optical windows based on a multi-period master-slave nested ring array of concentric rings are suited for electromagnetic shielding. A metal grid of the ring array has basic rings, concentric sub-ring pairs, secondary sub-rings, filling rings, concentric modulation ring pairs, and modulation sub-rings. Basic rings and concentric modulation ring pairs form a two-dimensional orthogonal array. External rings of concentric modulation ring pairs are externally tangentially connected to basic rings. Concentric sub-ring pairs and filling rings are arranged within basic rings, secondary sub-rings are arranged within concentric sub-ring pairs, and modulation sub-rings are arranged within concentric modulation ring pairs. Where rings are tangentially connected, wires overlap or metal ensures reliable electrical connections between connected rings, thus all rings are conductive. The metal grid structure significantly reduces non-uniformity of grid high-order diffracted light intensity distribution, causing stray light distribution caused by diffraction to be more uniform and imaging to be less affected.

    Magnetically suspended and plane-drove vibration isolator
    57.
    发明授权
    Magnetically suspended and plane-drove vibration isolator 有权
    磁悬浮和平面驱动隔振器

    公开(公告)号:US09429209B2

    公开(公告)日:2016-08-30

    申请号:US14421409

    申请日:2014-02-19

    Abstract: A magnetically suspended and plane-drove vibration isolator with zero stiffness comprises an upper mounting plate, a lower mounting plate and a main body. A sleeve of the main body is lubricated and supported against the lower mounting plate by a magnetically suspended planar motor. A piston cylinder fitted in the sleeve is lubricated against the sleeve by a cylindrical air bearing surface. The angle degree of freedom between the upper mounting plate and the lower mounting plate is decoupled by a spherical air bearing. A position close-loop control system is formed to precisely control the relative position between the upper mounting plate and the lower mounting plate.

    Abstract translation: 具有零刚度的磁悬浮和平面驱动隔振器包括上安装板,下安装板和主体。 主体的套筒通过磁悬浮的平面电机被润滑并支撑在下安装板上。 安装在套筒中的活塞气缸通过圆柱形空气轴承表面抵靠套筒润滑。 上安装板和下安装板之间的角度自由度由球形空气轴承分离。 形成位置闭环控制系统,以精确地控制上安装板和下安装板之间的相对位置。

    Vibration isolator with zero stiffness whose angle degree of freedom is decoupled with spherical air bearing
    58.
    发明授权
    Vibration isolator with zero stiffness whose angle degree of freedom is decoupled with spherical air bearing 有权
    具有零刚度的隔振器,其角度自由度用球形空气轴承解耦

    公开(公告)号:US09429208B2

    公开(公告)日:2016-08-30

    申请号:US14421378

    申请日:2014-02-19

    Abstract: A vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing has a main body, in which a sleeve and a lower mounting plate, a piston cylinder and the sleeve are both lubricated and supported with air bearing surfaces respectively, and the angle degree of freedom between a upper mounting plate and the lower mounting plate is decoupled with a spherical air bearing; a position close-loop control system comprising voice coil motors, displacement sensors, limit switches, a controller and a driver is introduced, and the relative position between the upper mounting plate and the lower mounting plate is precisely controlled.

    Abstract translation: 具有零刚度的隔振器,其角度自由度用球形空气轴承解耦,其主体具有主体,其中套筒和下安装板,活塞缸和套筒分别被润滑并支撑在空气轴承表面上, 上安装板和下安装板之间的角度自由度用球形空气轴承分离; 引入了包括音圈电机,位移传感器,限位开关,控制器和驱动器的位置闭环控制系统,并且精确地控制了上安装板和下安装板之间的相对位置。

    MAGNETICALLY SUSPENDED AND PLANE-DROVE VIBRATION ISOLATOR
    59.
    发明申请
    MAGNETICALLY SUSPENDED AND PLANE-DROVE VIBRATION ISOLATOR 有权
    磁悬浮和平面驱动振动隔离器

    公开(公告)号:US20150219180A1

    公开(公告)日:2015-08-06

    申请号:US14421409

    申请日:2014-02-19

    Abstract: A magnetically suspended and plane-drove vibration isolator with zero stiffness comprises an upper mounting plate, a lower mounting plate and a main body. A sleeve of the main body is lubricated and supported against the lower mounting plate by a magnetically suspended planar motor. A piston cylinder fitted in the sleeve is lubricated against the sleeve by a cylindrical air bearing surface. The angle degree of freedom between the upper mounting plate and the lower mounting plate is decoupled by a spherical air bearing. A position close-loop control system is formed to precisely control the relative position between the upper mounting plate and the lower mounting plate.

    Abstract translation: 具有零刚度的磁悬浮和平面驱动隔振器包括上安装板,下安装板和主体。 主体的套筒通过磁悬浮的平面电机被润滑并支撑在下安装板上。 安装在套筒中的活塞气缸通过圆柱形空气轴承表面抵靠套筒润滑。 上安装板和下安装板之间的角度自由度由球形空气轴承分离。 形成位置闭环控制系统,以精确地控制上安装板和下安装板之间的相对位置。

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