Abstract:
The disclosure belongs to the technical field of precision test and measurement, and provides a two-dimensional photoelectric autocollimation method and device based on wavefront measurement and correction. According to the disclosure, a link of wavefront measurement and correction of a reference light path is added to a traditional autocollimator measuring method. By using wavefront distortion information of the reference light path in the instrument and driving a deformable mirror to compensate for phase distortion of a beam, the link realizes measurement and control on aberration of the optical system of the autocollimator and improves the imaging quality and spot positioning accuracy of the optical system, thereby improving the angle measurement accuracy of the autocollimator. At the same time, by introducing the link, the autocollimator has the ability to resist interference from the external environment, so that the resolution and stability of angle measurement of the autocollimator are further improved. The method makes the traditional autocollimator have a nano-radian order (5×10−9 rad, that is 0.001″) angle resolution and a sub-microradian order (10−7 rad, that is 0.02″) angle measurement accuracy. The disclosure has the technical advantage of realizing angle measurement with high resolution, high accuracy and high stability under the same conditions, and has the abilities to resist environmental disturbances and compensate for errors caused by the disturbances.
Abstract:
The present invention provides a large-scale high-speed rotary equipment measuring and intelligent learning assembly method and device based on vector minimization geometry center, mass center, the center of gravity and the center of inertia, belonging to the technical field of mechanical assembly. The method includes the steps of establishing a four-parameter circular profile measuring model for a single stage of rotor, simplifying the established four-parameter circular profile measuring model for the single stage of rotor, and establishing a four-target optimization model of the geometry center, mass center, the center of gravity and the center of inertia of multiple stages of rotors based on the angular orientation mounting position of each stage of rotor. The device include a base, an air flotation shaft system, an aligning and tilt regulating workbench, precise force sensors, a static balance measuring platform, an upright column, a lower transverse measuring rod, a lower telescopic inductive sensor, an upper transverse measuring rod and an upper lever type inductive sensor.
Abstract:
A method for measuring a dip angle of oppositely crossly placed paired quartered ring-quartered circle nested polar plates. An annular coplanar capacitance measuring head of a sensor unit consists of four quarter round metal plates and four quarter circular-ring-shaped metal plates, the eight metal plates are coplanar and concentric with one another, and a quarter round metal plate and a quarter circular-ring-shaped metal plate corresponding to the same sector angle form a capacitor. Two annular coplanar capacitance measuring heads are arranged on two round insulating substrates, the two round insulating substrates are used as two bottom surfaces of a cylindrical container, the cylindrical container is transversely arranged, and an insulating liquid equal to ½ volume of the cylindrical container is injected into the cylindrical container in a sealing manner. Potential leads extract potentials of the sixteen metal plates and are connected to an input end of a capacitance measuring unit, and the capacitance measuring unit is connected to a dip measuring unit. When the cylindrical container tilts, the relative positions of the two annular coplanar capacitance measuring heads and the insulating liquid are changed, and a dip angle value can be calculated by measuring the change of a capacitance value. Also disclosed is a device for measuring a dip angle of oppositely crossly placed paired quartered ring-quartered circle nested polar plates.
Abstract:
A method and equipment based on multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into spectrum shifts of the multi-core FBG probe, and to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the multi-core FBG probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
Abstract:
Optical windows based on a multi-period master-slave nested ring array of concentric rings are suited for electromagnetic shielding. A metal grid of the ring array has basic rings, concentric sub-ring pairs, secondary sub-rings, filling rings, concentric modulation ring pairs, and modulation sub-rings. Basic rings and concentric modulation ring pairs form a two-dimensional orthogonal array. External rings of concentric modulation ring pairs are externally tangentially connected to basic rings. Concentric sub-ring pairs and filling rings are arranged within basic rings, secondary sub-rings are arranged within concentric sub-ring pairs, and modulation sub-rings are arranged within concentric modulation ring pairs. Where rings are tangentially connected, wires overlap or metal ensures reliable electrical connections between connected rings, thus all rings are conductive. The metal grid structure significantly reduces non-uniformity of grid high-order diffracted light intensity distribution, causing stray light distribution caused by diffraction to be more uniform and imaging to be less affected.
Abstract:
A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
Abstract:
A magnetically suspended and plane-drove vibration isolator with zero stiffness comprises an upper mounting plate, a lower mounting plate and a main body. A sleeve of the main body is lubricated and supported against the lower mounting plate by a magnetically suspended planar motor. A piston cylinder fitted in the sleeve is lubricated against the sleeve by a cylindrical air bearing surface. The angle degree of freedom between the upper mounting plate and the lower mounting plate is decoupled by a spherical air bearing. A position close-loop control system is formed to precisely control the relative position between the upper mounting plate and the lower mounting plate.
Abstract:
A vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing has a main body, in which a sleeve and a lower mounting plate, a piston cylinder and the sleeve are both lubricated and supported with air bearing surfaces respectively, and the angle degree of freedom between a upper mounting plate and the lower mounting plate is decoupled with a spherical air bearing; a position close-loop control system comprising voice coil motors, displacement sensors, limit switches, a controller and a driver is introduced, and the relative position between the upper mounting plate and the lower mounting plate is precisely controlled.
Abstract:
A magnetically suspended and plane-drove vibration isolator with zero stiffness comprises an upper mounting plate, a lower mounting plate and a main body. A sleeve of the main body is lubricated and supported against the lower mounting plate by a magnetically suspended planar motor. A piston cylinder fitted in the sleeve is lubricated against the sleeve by a cylindrical air bearing surface. The angle degree of freedom between the upper mounting plate and the lower mounting plate is decoupled by a spherical air bearing. A position close-loop control system is formed to precisely control the relative position between the upper mounting plate and the lower mounting plate.