公开(公告)号：US20140211366A1

公开(公告)日：2014-07-31

申请号：US14033434

申请日：2013-09-20

Applicant: wiSpry, Inc.

Inventor： Arthur S. Morris, III ,  Dana DeReus ,  Norito Baytan

IPC: H01G7/00

CPC classification number: H01G5/16 ,  B81B3/0008 ,  B81B3/0016 ,  B81B3/0051 ,  B81B2201/0221 ,  B81C1/00166 ,  B81C1/00476 ,  B81C2201/0109 ,  B81C2201/013 ,  H01G5/18 ,  H01G7/00

Abstract: Systems, devices, and methods for micro-electro-mechanical system (MEMS) tunable capacitors can include a fixed actuation electrode attached to a substrate, a fixed capacitive electrode attached to the substrate, and a movable component positioned above the substrate and movable with respect to the fixed actuation electrode and the fixed capacitive electrode. The movable component can include a movable actuation electrode positioned above the fixed actuation electrode and a movable capacitive electrode positioned above the fixed capacitive electrode. At least a portion of the movable capacitive electrode can be spaced apart from the fixed capacitive electrode by a first gap, and the movable actuation electrode can be spaced apart from the fixed actuation electrode by a second gap that is larger than the first gap.

Abstract translation: 用于微机电系统（MEMS）可调谐电容器的系统，装置和方法可以包括附接到基板的固定致动电极，附接到基板的固定电容电极和位于基板上方的可移动部件， 固定的致动电极和固定的电容电极。 可移动部件可以包括位于固定致动电极上方的可动致动电极和位于固定电容电极上方的可动电容电极。 可移动电容电极的至少一部分可以通过第一间隙与固定电容电极间隔开，并且可移动致动电极可以通过比第一间隙大的第二间隙与固定的致动电极间隔开。

公开(公告)号：US20140167189A1

公开(公告)日：2014-06-19

申请号：US13718614

申请日：2012-12-18

Applicant: Robert F. Steimle ,  Ruben B. Montez

Inventor： Robert F. Steimle ,  Ruben B. Montez

IPC: B81C1/00 ,  B81B3/00

CPC classification number: B81B3/001 ,  B81B3/0005 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2203/0181 ,  B81B2203/06 ,  B81C1/0096 ,  B81C2201/115 ,  G01P15/0802 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: A mechanism for reducing stiction in a MEMS device by decreasing surface area between two surfaces that can come into close contact is provided. Reduction in contact surface area is achieved by increasing surface roughness of one or both of the surfaces. The increased roughness is provided by forming a micro-masking layer on a sacrificial layer used in formation of the MEMS device, and then etching the surface of the sacrificial layer. The micro-masking layer can be formed using nanoclusters. When a next portion of the MEMS device is formed on the sacrificial layer, this portion will take on the roughness characteristics imparted on the sacrificial layer by the etch process. The rougher surface decreases the surface area available for contact in the MEMS device and, in turn, decreases the area through which stiction can be imparted.

Abstract translation: 提供了一种用于通过减小可以紧密接触的两个表面之间的表面积来减小MEMS器件中的静摩擦的机构。 通过增加一个或两个表面的表面粗糙度来实现接触表面积的减小。 通过在用于形成MEMS器件的牺牲层上形成微掩模层，然后蚀刻牺牲层的表面来提供增加的粗糙度。 微掩模层可以使用纳米团簇形成。 当MEMS器件的下一部分形成在牺牲层上时，该部分将通过蚀刻工艺承受赋予牺牲层的粗糙度特性。 较粗糙的表面减小了可用于MEMS器件中的接触的表面积，并且进而降低了可赋予粘性的面积。

公开(公告)号：US20130295374A1

公开(公告)日：2013-11-07

申请号：US13990930

申请日：2011-11-30

Applicant: Jie Tang ,  Qian Cheng ,  Norio Shinya ,  Han Zhang ,  Luchang Qin

Inventor： Jie Tang ,  Qian Cheng ,  Norio Shinya ,  Han Zhang ,  Luchang Qin

IPC: H01G9/04 ,  C01B31/02

CPC classification number: H01G9/058 ,  B81B2201/0221 ,  B81C1/00158 ,  B82B1/002 ,  B82B3/0047 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/05 ,  C01B32/184 ,  C01B2204/04 ,  H01G11/32 ,  H01G11/36 ,  Y02E60/13 ,  Y02T10/7022 ,  Y10S977/742 ,  Y10S977/842 ,  Y10S977/948 ,  Y10T428/25 ,  Y10T428/30

Abstract: A graphene sheet film as a film-like assembly of two or more graphene sheets 11 to 25 is provided. The graphene sheet film uses a graphene sheet assembly 101 that includes: first carbon nanotubes 31 to 48 that join the graphene sheets 11 to 25 to each other and form graphene sheet laminates 61 to 65 in which the graphene sheets 11 to 25 are laminated with the sheet planes being paralleled to each other; and second carbon nanotubes 51 to 56 that connect the graphene sheet laminates 61 to 65 to each other. This makes it possible to provide a graphene sheet film having high capacitor performance with respect to energy density and output density, a method for producing the same, and a graphene sheet capacitor using such graphene sheet films.

Abstract translation: 提供了作为两个或更多个石墨烯片11至25的膜状组件的石墨烯片薄膜。 石墨烯片薄膜使用石墨烯片组件101，其包括：将石墨烯片11〜25彼此接合并形成石墨烯片11〜25的石墨烯片层压体61〜65的第一碳纳米管31〜48与石墨烯片11〜 平面彼此平行; 以及将石墨烯片层叠体61〜65彼此连接的第二碳纳米管51〜56。 这使得可以提供相对于能量密度和输出密度具有高电容器性能的石墨烯薄膜，其制造方法和使用这种石墨烯薄膜的石墨烯薄片电容器。

公开(公告)号：US20130154054A1

公开(公告)日：2013-06-20

申请号：US13326409

申请日：2011-12-15

Applicant: Christopher V. JAHNES ,  Anthony K. STAMPER

Inventor： Christopher V. JAHNES ,  Anthony K. STAMPER

IPC: H01L29/02 ,  G06F17/50

CPC classification number: H01G5/18 ,  B81B2201/0221 ,  B81C99/0065 ,  H01G5/38 ,  H03H3/0076

Abstract: Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming for MEMS capacitor devices, and design structures are disclosed. The method includes identifying a process variation related to a formation of micro-electro-mechanical structure (MEMS) capacitor devices across a substrate. The method further includes providing design offsets or process offsets in electrode areas of the MEMS capacitor devices across the substrate, based on the identified process variation.

Abstract translation: 公开了微电子机械结构（MEMS）电容器件，用于MEMS电容器件的电容器微调和设计结构。 该方法包括识别跨越衬底形成微机电结构（MEMS）电容器器件的过程变化。 该方法还包括基于所识别的过程变化，在跨越衬底的MEMS电容器器件的电极区域中提供设计偏移或过程偏移。

公开(公告)号：US20110291167A1

公开(公告)日：2011-12-01

申请号：US13048048

申请日：2011-03-15

Applicant: Yoshiaki Shimooka ,  Hiroaki Yamazaki

Inventor： Yoshiaki Shimooka ,  Hiroaki Yamazaki

IPC: H01L29/78

CPC classification number: B81C1/00246 ,  B81B2201/0221 ,  B81C2203/0735 ,  B81C2203/0771 ,  H01G5/40 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

Abstract: In one embodiment, a semiconductor device includes a substrate having a through hole, and a MEMS capacitor provided above the substrate. The device further includes an integrated circuit configured to control the MEMS capacitor, the circuit including transistors on the substrate and being provided under the MEMS capacitor and on the substrate. Further, an area on the substrate immediately under the MEMS capacitor overlaps at least partially with the through hole.

Abstract translation: 在一个实施例中，半导体器件包括具有通孔的衬底和设置在衬底上方的MEMS电容器。 该装置还包括被配置为控制MEMS电容器的集成电路，该电路包括在该基板上的晶体管并且设置在该MEMS电容器下方和该基板上。 此外，在MEMS电容器正下方的衬底上的区域至少部分地与通孔重叠。

公开(公告)号：US20110050251A1

公开(公告)日：2011-03-03

申请号：US12846314

申请日：2010-07-29

Applicant: Axel FRANKE ,  Alexander Buhmann ,  Marian Keck

Inventor： Axel FRANKE ,  Alexander Buhmann ,  Marian Keck

IPC: G01R27/26

CPC classification number: G01P15/125 ,  B81B3/0094 ,  B81B2201/0221 ,  B81B2201/0235 ,  B81B2201/033 ,  G01D5/2412 ,  H02N1/008

Abstract: A capacitive sensor and a capacitive actuator having at least one seismic mass deflectably mounted on a substrate. A comb electrode having comb fingers is mounted on the seismic mass, and a comb electrode having comb fingers is mounted on the substrate in such a way that the comb fingers are situated parallel to a deflection direction of the seismic mass and interlock in a comb-like manner. The characteristic curve of the sensor or actuator is adjusted by optimizing the geometry of at least one comb electrode, in particular of at least one comb finger.

Abstract translation: 电容式传感器和电容式致动器，其具有可偏转地安装在基板上的至少一个地震质量块。 具有梳齿的梳状电极安装在地震块上，并且具有梳齿的梳形电极以这样的方式安装在基底上，使得梳齿平行于抗震块的偏转方向定位， 喜欢的方式 通过优化至少一个梳状电极，特别是至少一个梳齿的几何形状来调节传感器或致动器的特性曲线。

公开(公告)号：US07085122B2

公开(公告)日：2006-08-01

申请号：US10850958

申请日：2004-05-21

Applicant: Ming C. Wu ,  Hung D. Nguyen ,  Doo-Young Hah ,  Pamela R. Patterson

Inventor： Ming C. Wu ,  Hung D. Nguyen ,  Doo-Young Hah ,  Pamela R. Patterson

IPC: H01G7/00

CPC classification number: H01G5/06 ,  B81B2201/0221 ,  B81B2203/0136 ,  B81C1/00007

Abstract: A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.

Abstract translation: 描述了具有角度垂直梳驱动（AVC）致动器的MEMS可调谐电容器，其中在紧凑的空间中实现高电容和宽的连续调谐范围。 梳指旋转一个较小的垂直角度，这允许比常规侧梳驱动装置更宽的调谐范围。 该装置的制造是直接的，并涉及单个深反应离子蚀刻步骤，随后释放和平面外组装角梳。

公开(公告)号：US12050102B2

公开(公告)日：2024-07-30

申请号：US17025977

申请日：2020-09-18

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Enri Duqi

IPC: B81B7/00 ,  G01B7/16 ,  G01L1/14 ,  H01G5/01 ,  H01G5/16 ,  H01H1/00 ,  H03K17/975 ,  G06F3/044

CPC classification number: G01B7/22 ,  B81B7/0058 ,  G01L1/14 ,  H01G5/01 ,  H01G5/16 ,  H01H1/0036 ,  H03K17/975 ,  B81B2201/0221 ,  B81B2201/0292 ,  B81B2203/0154 ,  B81B2203/0181 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2203/056 ,  B81B2207/012 ,  G06F3/044

Abstract: A button device includes a MEMS sensor having a MEMS strain detection structure and a deformable substrate configured to undergo deformation under the action of an external force. The MEMS strain detection structure includes a mobile element carried by the deformable substrate via at least a first and a second anchorage, the latter fixed with respect to the deformable substrate and configured to displace and generate a deformation force on the mobile element in the presence of the external force; and stator elements capacitively coupled to the mobile element. The deformation of the mobile element causes a capacitance variation between the mobile element and the stator elements. Furthermore, the MEMS sensor is configured to generate detection signals correlated to the capacitance variation.

公开(公告)号：US20230294977A1

公开(公告)日：2023-09-21

申请号：US17696370

申请日：2022-03-16

Applicant: Knowles Electronics, LLC

Inventor： Peter V. Loeppert ,  Michael Pedersen

IPC: B81B3/00

CPC classification number: B81B3/0086 ,  B81B2201/0221 ,  B81B2203/0127

Abstract: A microelectromechanical systems (MEMS) device comprises a MEMS die that comprises first and second diaphragms, a first plurality of electrodes each disposed on the first diaphragm, and a second plurality of electrodes each disposed on the second diaphragm. A fixed dielectric element is disposed between the first and second diaphragms and includes a plurality of apertures. The MEMS die further comprises a third plurality of electrodes, wherein each of the third plurality comprises a first conductive layer disposed on the first diaphragm proximate to at least one of the first plurality and a second conductive layer disposed on the second diaphragm proximate to at least one of the second plurality, and a conductive pin that extends through an aperture of the plurality of apertures and electrically connects the first conductive layer to the second conductive layer.

公开(公告)号：US20230161020A1

公开(公告)日：2023-05-25

申请号：US17919482

申请日：2021-04-16

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： Egbertus Reinier JACOBS

IPC: G01S7/52 ,  G01S15/89 ,  B81B7/02 ,  B06B1/06

CPC classification number: G01S7/5208 ,  G01S15/8913 ,  G01S7/52092 ,  B81B7/02 ,  B06B1/06 ,  B81B2201/0221 ,  B06B2201/55

Abstract: An acoustic imaging probe having an adjustable effective elevation length. The acoustic 5imaging probe has a transducer element, comprising a plurality of acoustic transducers, that is divided into a plurality of sets of adjacent transducers. A processing module controls how many sets contribute to an acoustic pulse emitted by the acoustic transducer element during an imaging process, to thereby adjust an effective elevation length of the acoustic imaging probe.