Method for producing synthetic quartz glass granules
    54.
    发明授权
    Method for producing synthetic quartz glass granules 有权
    生产合成石英玻璃颗粒的方法

    公开(公告)号:US09409810B2

    公开(公告)日:2016-08-09

    申请号:US14390991

    申请日:2013-03-20

    Abstract: The production of quartz glass granules comprises the granulation of pyrogenically produced silicic acid and the formation of a SiO2 granulate (9), the drying and cleaning of the SiO2 granulate (9) by heating in an atmosphere containing halogen, and the vitrification of the SiO2 granulate (9) under a treatment gas which contains at least 30% by volume of helium and/or hydrogen. This process is time-consuming and expensive. In order to provide a method which, starting from a porous SiO2 granulate (9), allows the cost-effective production of dense, synthetic quartz glass granules suitable for melting bubble-free components of quartz glass, the invention proposes that the cleaning and vitrification of the SiO2 granulate (9) and a post-treatment of the vitrified quartz glass granules are carried out in each case in a rotary tube (6) of a rotary kiln (1), said rotary tube rotating about a central axis (7), wherein the rotary tube (6) comprises an inner wall made of a ceramic material during vitrification, and wherein the vitrified quartz glass granules are subjected to a post-treatment during a treatment period of at least 10 minutes in an atmosphere which contains less than 20% of helium or hydrogen at a treatment temperature of 300° C. or more.

    Abstract translation: 石英玻璃颗粒的生产包括热解产生的硅酸的成粒和SiO 2颗粒的形成(9),通过在含卤素的气氛中加热来干燥和清洁SiO 2颗粒(9),并且SiO 2的玻璃化 颗粒(9)在含有至少30体积%的氦和/或氢气的处理气体下。 这个过程是耗时且昂贵的。 为了提供从多孔SiO 2颗粒(9)开始的方法,可以成本有效地生产适合于熔化石英玻璃的无气泡组分的致密合成石英玻璃颗粒,本发明提出了清洁和玻璃化 的二氧化硅颗粒(9)的后处理和玻璃化的石英玻璃颗粒的后处理在每种情况下在旋转窑(1)的旋转管(6)中进行,所述旋转管围绕中心轴线(7)旋转, 其中旋转管(6)在玻璃化期间包括由陶瓷材料制成的内壁,并且其中所述玻璃化石英玻璃颗粒在至少10分钟的处理期间在包含小于 在300℃或更高的处理温度下,20%的氦气或氢气。

    SILICON BLOCK, METHOD FOR PRODUCING THE SAME, CRUCIBLE OF TRANSPARENT OR OPAQUE FUSED SILICA SUITED FOR PERFORMING THE METHOD, AND METHOD FOR THE PRODUCTION THEREOF
    55.
    发明申请
    SILICON BLOCK, METHOD FOR PRODUCING THE SAME, CRUCIBLE OF TRANSPARENT OR OPAQUE FUSED SILICA SUITED FOR PERFORMING THE METHOD, AND METHOD FOR THE PRODUCTION THEREOF 有权
    硅块,其制造方法,用于实施该方法的透明或OPAQUS熔融二氧化硅的可溶性及其生产方法

    公开(公告)号:US20160032483A1

    公开(公告)日:2016-02-04

    申请号:US14817839

    申请日:2015-08-04

    Abstract: A method for producing a solar crucible includes providing a crucible base body of transparent or opaque fused silica having an inner wall, providing a dispersion containing amorphous SiO2 particles, applying a SiO2-containing slip layer to at least a part of the inner wall by using the dispersion, drying the slip layer to form a SiO2-containing grain layer and thermally densifying the SiO2-containing grain layer to form a diffusion barrier layer. The dispersion contains a dispersion liquid and amorphous SiO2 particles that form a coarse fraction and a fine fraction with SiO2 nanoparticles. The weight percentage of the SiO2 nanoparticles based on the solids content of the dispersion is in the range between 2 and 15% by weight. The SiO2-containing grain layer is thermally densified into the diffusion barrier layer through the heating up of the silicon in the crystal growing process.

    Abstract translation: 一种制造太阳能坩埚的方法包括:提供具有内壁的透明或不透明的熔融二氧化硅的坩埚基体,提供含有非晶SiO 2颗粒的分散体,通过使用含有SiO 2的滑移层至少部分内壁 分散,干燥滑移层以形成含SiO 2的晶粒层,并且热致密化含SiO2的晶粒层以形成扩散阻挡层。 该分散体含有分散液体和无定形SiO 2颗粒,其形成粗级分和具有SiO 2纳米颗粒的细级分。 基于分散体的固体含量的SiO 2纳米颗粒的重量百分比在2至15重量%的范围内。 通过晶体生长过程中的硅的加热,将含SiO 2的晶粒层热致密化成扩散阻挡层。

    Method of inspecting synthetic silicia glass molded body
    56.
    发明授权
    Method of inspecting synthetic silicia glass molded body 有权
    检查合成石英玻璃成型体的方法

    公开(公告)号:US08679994B2

    公开(公告)日:2014-03-25

    申请号:US13961499

    申请日:2013-08-07

    Abstract: A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.

    Abstract translation: 合成石英玻璃成型体的检查方法包括:用波长248nm的Hg灯的光谱线照射合成石英玻璃成型体; 测量由合成石英玻璃成型体发出的光; 以及可以包括筛选满足亮线强度和荧光强度的比例为一定值以下的条件的部分的处理,或者可以包括确定最小值和 测量的荧光强度的最大值在一定范围内是否满足。

    METHOD OF INSPECTING SYNTHETIC SILICIA GLASS MOLDED BODY
    57.
    发明申请
    METHOD OF INSPECTING SYNTHETIC SILICIA GLASS MOLDED BODY 有权
    检查合成二氧化硅玻璃模制体的方法

    公开(公告)号:US20130320219A1

    公开(公告)日:2013-12-05

    申请号:US13961499

    申请日:2013-08-07

    Abstract: A method of inspecting a synthetic silica glass molded body includes: irradiating the synthetic silica glass molded body with a spectrum line of an Hg lamp having a wavelength of 248 nm; measuring light emitted by the synthetic silica glass molded body; and a procedure which may include screening a portion which satisfies a condition that a ratio of the bright line intensity and the fluorescent light intensity is of a certain value or less, or which may include determining whether a condition that a ratio of a minimum value and a maximum value of a measured fluorescent light intensity is in a certain range is satisfied or not.

    Abstract translation: 合成石英玻璃成型体的检查方法包括:用波长248nm的Hg灯的光谱线照射合成石英玻璃成型体; 测量由合成石英玻璃成型体发出的光; 以及可以包括筛选满足亮线强度和荧光强度的比例为一定值以下的条件的部分的处理,或者可以包括确定最小值和 测量的荧光强度的最大值在一定范围内是否满足。

    HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM
    58.
    发明申请
    HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM 有权
    高纯度合成二氧化硅及其制造的半导体夹具

    公开(公告)号:US20130115391A1

    公开(公告)日:2013-05-09

    申请号:US13809231

    申请日:2011-07-08

    Abstract: Hollow ingots of transparent synthetic vitreous silica glass of external diameter greater than 400 mm and internal diameter greater than 300 mm are disclosed. The ingots are substantially free from bubbles or inclusions greater than 100 μm in diameter, have no more than 100 ppB of any individual metallic impurity, and have chlorine concentration less than 5 ppM. Also disclosed are methods for producing such ingots, in which a porous soot body of density greater than 0.4 g/cm3 is deposited on an oxidation resistant mandrel. The soot body is dehydrated on a mandrel comprising graphite, carbon fibre reinforced carbon, silicon carbide, silicon impregnated silicon carbide, silicon carbide-coated graphite or vitreous silica, either under vacuum or in the presence of a reducing gas, and then sintered to transparent pore-free glass under vacuum or in an atmosphere of helium.

    Abstract translation: 公开了外径大于400mm,内径大于300mm的透明合成玻璃石英玻璃的中空铸锭。 锭基本上没有直径大于100um的气泡或夹杂物,具有不超过100ppB的任何单独的金属杂质,并且氯浓度小于5ppM。 还公开了生产这种锭的方法,其中密度大于0.4g / cm 3的多孔烟灰体沉积在抗氧化心轴上。 在真空下或在还原气体存在下,烟灰体在包括石墨,碳纤维增强碳,碳化硅,硅浸渍的碳化硅,碳化硅涂覆的石墨或玻璃状二氧化硅的心轴上脱水,然后烧结成透明 无孔玻璃在真空或氦气氛中。

    SYNTHETIC SILICA GLASS MOLDED BODY, METHOD OF MOLDING THE SAME, AND METHOD OF INSPECTING SYNTHETIC SILICA GLASS MOLDED BODY
    60.
    发明申请
    SYNTHETIC SILICA GLASS MOLDED BODY, METHOD OF MOLDING THE SAME, AND METHOD OF INSPECTING SYNTHETIC SILICA GLASS MOLDED BODY 审中-公开
    合成二氧化硅玻璃成型体,其成型方法和检查合成二氧化硅玻璃模体

    公开(公告)号:US20110130265A1

    公开(公告)日:2011-06-02

    申请号:US11885510

    申请日:2006-02-08

    Abstract: A method of molding a synthetic silica glass molded body by accommodating a synthetic silica glass block in a mold provided with a pressing portion, and by pressing the block while heating, the method comprising: a step of washing the synthetic silica glass block so that a concentration of copper which is present on the surface of the synthetic silica glass block is 2 ng/cm2 or less, and so that a concentration of aluminium thereon is 10 ng/cm2 or less, before accommodating the synthetic silica glass block in the mold; a step of heating high purity carbon powders in which a content of copper is 40 wt.ppb or less and a content of aluminium is 100 wt.ppb or less at a temperature condition of 1200° C. to 1900° C.; a step of heating the mold at a temperature condition of 1700° C. to 1900° C.; a step of applying the high purity carbon powders after the heating step on the inner surface of the mold after the heating step, before accommodating the synthetic silica glass block in the mold; and a step of molding the synthetic silica glass block in a predetermined form by pressing the block by means of the pressing portion while heating so as to the temperature of the block can be within a hold temperature range of 1500° C. to 1700° C., after accommodating the washed synthetic silica glass block in the mold.

    Abstract translation: 一种通过将合成石英玻璃块容纳在具有按压部分的模具中并通过在加热时加压块来成型合成石英玻璃成型体的方法,所述方法包括:洗涤合成石英玻璃块,使得 存在于合成石英玻璃块的表面上的铜的浓度在将合成石英玻璃块容纳在模具中之前为2ng / cm 2以下,使其上的铝浓度为10ng / cm 2以下。 在1200℃至1900℃的温度条件下,加热铜含量为40重量ppm以下,铝含量为100重量ppm以下的高纯度碳粉末的工序。 在1700℃至1900℃的温度条件下加热模具的步骤。 在将合成石英玻璃块容纳在模具中之后,在加热步骤之后将高纯度碳粉末加热到模具的内表面之后的步骤; 以及通过在加热的同时通过按压部分压块而使预定形式的合成石英玻璃块成型的步骤,使得块的温度可以在1500℃至1700℃的保持温度范围内 在将洗涤的合成石英玻璃块容纳在模具中之后。

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