公开(公告)号：US07180584B2

公开(公告)日：2007-02-20

申请号：US10686584

申请日：2003-10-17

Applicant: Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

Inventor： Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

IPC: G01N21/00

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/95615 ,  G01N2201/0618 ,  G01N2201/0634

Abstract: A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution. Further, process conditions of a manufacturing line are controlled by analyzing a cause of defect and a factor of defect which occurs on the pattern.

Abstract translation: 一种用于以高分辨率检查被检查物体上的图案的微细缺陷的图案检测方法及其装置以及以高产率制造半导体晶片等半导体基板的半导体基板的制造方法和系统。 通过将通过物镜的环形照明照射到安装在台架上的晶片上，检查被检查物体上的微细图案，晶片上具有微细精细图案。 照明光可以根据在物镜的光瞳上检测到的图像而被圆形或椭圆偏振并且被控制，并且通过检测来自晶片的反射光来获得图像信号。 将图像信号与参考图像信号进行比较，并且检测出显示不一致的图案的一部分作为缺陷，从而同时以高分辨率检测微细微图案或微细图案上的缺陷。 此外，通过分析缺陷的原因和在图案上发生的缺陷因素来控制生产线的工艺条件。

公开(公告)号：US07135667B2

公开(公告)日：2006-11-14

申请号：US11188243

申请日：2005-07-22

Applicant: Mark F. Oldham ,  Howard G. King ,  Douwe D. Haga ,  Tracy L. Ferea

Inventor： Mark F. Oldham ,  Howard G. King ,  Douwe D. Haga ,  Tracy L. Ferea

IPC: H01L27/00 ,  G01T1/20 ,  G01N21/86 ,  G01V8/00

CPC classification number: G01N21/76 ,  G01J3/10 ,  G01J3/4406 ,  G01N21/6428 ,  G01N21/645 ,  G01N21/6452 ,  G01N21/6456 ,  G01N2201/062 ,  G01N2201/0627 ,  G01N2201/0633 ,  G01N2201/0634

Abstract: An apparatus for imaging an array of a plurality of features associated with a sample tile. The apparatus can comprise a stage that supports the sample tile in an illumination region, and an illumination source having a plurality of LEDs adapted to emit light. At least a portion of the light can illuminate the illumination region. Additionally, the apparatus can comprise an image collecting device adapted to selectively collect images of either a first signal when the illumination source is illuminating the illumination region, or a second signal absent illumination of the illumination region. The first signal can have wavelengths effectively different from the wavelengths of the portion of the light emitted by the LEDs that illuminates the illumination region.

Abstract translation: 一种用于对与样本瓦片相关联的多个特征的阵列进行成像的装置。 该装置可以包括在照明区域中支撑样品瓦的台，以及具有适于发光的多个LED的照明源。 光的至少一部分可以照亮照明区域。 另外，该装置可以包括图像采集装置，适于当照明源照射照明区域时选择性地收集第一信号的图像，或者不存在照明区域的照明的第二信号。 第一信号可以具有与照亮照明区域的LED发射的光的部分的波长有效地不同的波长。

公开(公告)号：US20060243926A1

公开(公告)日：2006-11-02

申请号：US11371154

申请日：2006-03-07

Applicant: Alex Waluszko

Inventor： Alex Waluszko

IPC: G01J3/10

CPC classification number: G01N21/6447 ,  G01J1/08 ,  G01J1/58 ,  G01N21/6428 ,  G01N21/6456 ,  G01N27/44721 ,  G01N2201/0634

Abstract: A method and apparatus for genomic or proteomic research to visualize fluorescent-labeled DNA, RNA or protein samples that have been separated for documentation and analysis. The apparatus includes a novel radiation source for uniformly irradiating the samples which comprises a grid constructed from a continuous, serpentine-shaped ultraviolet light producing tube that is strategically formed to provide a multiplicity of side-by-side, immediately adjacent irradiating segments. In one form of the invention the apparatus also includes a first conversion plate that is carried by the housing at a location intermediate the radiation source and the sample-supporting platform for converting the radiation emitted from the source to radiation at a second wavelength.

Abstract translation: 用于基因组或蛋白质组学研究的方法和装置，用于可视化分离的用于文献和分析的荧光标记的DNA，RNA或蛋白质样品。 该装置包括用于均匀照射样品的新型辐射源，其包括由连续的蛇形形状的紫外线产生管构成的格栅，其被策略地形成以提供多个并排的紧邻照射段。 在本发明的一种形式中，该装置还包括第一转换板，该第一转换板由位于辐射源之间的位置处的壳体和用于将从源发射的辐射转换成第二波长的辐射的样品支撑平台的位置承载。

公开(公告)号：US07081637B2

公开(公告)日：2006-07-25

申请号：US10851308

申请日：2004-05-21

Applicant: Alex Waluszko

Inventor： Alex Waluszko

IPC: H01J1/62

CPC classification number: G01N21/6428 ,  G01J1/08 ,  G01J1/58 ,  G01N21/6447 ,  G01N21/6456 ,  G01N27/44721 ,  G01N2201/0634

Abstract: A method and apparatus for genomic or proteomic research to visualize fluorescent labeled DNA, RNA or protein samples that have been separated for documentation and analysis. The apparatus includes a novel radiation source for uniformly irradiating the samples which comprises a grid constructed from a continuous, serpentine shaped ultraviolet light producing tube that is strategically formed to provide a multiplicity of side-by-side, immediately adjacent irradiating segments. In one form of the invention the apparatus also includes a first conversion plate that is carried by the housing at a location intermediate the radiation source and the sample supporting platform for converting the radiation emitted from the source to radiation at a second wavelength.

公开(公告)号：US20050127303A1

公开(公告)日：2005-06-16

申请号：US10851308

申请日：2004-05-21

Applicant: Alex Waluszko

Inventor： Alex Waluszko

IPC: G01J1/08 ,  G01J1/58 ,  G01N21/64 ,  G01N27/447 ,  G01T1/18

CPC classification number: G01N21/6428 ,  G01J1/08 ,  G01J1/58 ,  G01N21/6447 ,  G01N21/6456 ,  G01N27/44721 ,  G01N2201/0634

Abstract: A method and apparatus for genomic or proteomic research to visualize fluorescent labeled DNA, RNA or protein samples that have been separated for documentation and analysis. The apparatus includes a novel radiation source for uniformly irradiating the samples which comprises a grid constructed from a continuous, serpentine shaped ultraviolet light producing tube that is strategically formed to provide a multiplicity of side-by-side, immediately adjacent irradiating segments. In one form of the invention the apparatus also includes a first conversion plate that is carried by the housing at a location intermediate the radiation source and the sample supporting platform for converting the radiation emitted from the source to radiation at a second wavelength.

公开(公告)号：US20050004956A1

公开(公告)日：2005-01-06

申请号：US10612790

申请日：2003-07-02

Applicant: Behnam Pourdeyhimi

Inventor： Behnam Pourdeyhimi

IPC: D21G9/00 ,  G01N20060101 ,  G01N21/86 ,  G01N21/89 ,  G01N21/898 ,  G06E1/04 ,  G06F9/00 ,  G06F15/00 ,  G06K9/00 ,  G06T7/00 ,  G06T7/40

CPC classification number: G01N21/8983 ,  D21G9/0009 ,  G01N21/86 ,  G01N21/8914 ,  G01N21/8915 ,  G01N33/346 ,  G01N33/365 ,  G01N2021/8681 ,  G01N2021/869 ,  G01N2021/8812 ,  G01N2021/8822 ,  G01N2021/8917 ,  G01N2201/0634 ,  G06T7/0004 ,  G06T7/42 ,  G06T2207/30124

Abstract: Optical methods for evaluating various surface and physical optical properties of structures made wholly or partially from fibers, polymers, films or a combination thereof. Such methods are comprised of special illumination, special software algorithms and controls that provide a unique solution for evaluating such properties as fiber orientation distribution function, basis weight uniformity, fuzz and pilling, texture, and other physical and surface properties.

Abstract translation: 用于评估由纤维，聚合物，膜或其组合完全或部分制成的结构的各种表面和物理光学性质的光学方法。 这些方法由特殊照明，特殊软件算法和控制组成，为评估纤维取向分布函数，基重均匀性，绒毛和起球，质地和其他物理和表面性质等特性提供了独特的解决方案。

公开(公告)号：US20040031567A1

公开(公告)日：2004-02-19

申请号：US10217805

申请日：2002-08-13

Applicant: The Boeing Company

Inventor： Roger W. Engelbart ,  Craig Walters

IPC: B32B031/00

CPC classification number: G01N21/88 ,  G01N21/8806 ,  G01N2021/8472 ,  G01N2021/888 ,  G01N2201/0618 ,  G01N2201/0634 ,  G01N2201/0636

Abstract: The present invention provides an improved system for identifying defects in a composite structure by providing a light source such that defects, and in particular dark defects on a dark background and/or light defects on a light background, can be identified by capturing images of the illuminated composite structure. In particular, the improved system for identifying defects in a composite structure may provide a reflective surface, dispersion elements, and multiple and/or moveable light source(s) and/or camera(s) in order to ensure that the most accurate images of any area of the composite structure, even curved or contoured areas, are captured and processed. As a result, the system of the present invention permits the operator to quickly identify and correct defects which would otherwise create structural flaws or inconsistencies that may affect the integrity of the composite structure.

Abstract translation: 本发明提供了一种用于通过提供光源来识别复合结构中的缺陷的改进的系统，使得可以通过捕获图像的图像来识别缺陷，特别是暗背景上的暗缺陷和/或光背景上的光缺陷 照明复合结构。 特别地，用于识别复合结构中的缺陷的改进的系统可以提供反射表面，色散元件以及多个和/或可移动的光源和/或照相机，以便确保最准确的图像 复合结构的任何区域，甚至弯曲或轮廓区域被捕获和处理。 结果，本发明的系统允许操作者快速地识别和纠正否则将产生可能影响复合结构的完整性的结构缺陷或不一致的缺陷。

公开(公告)号：US20240337593A1

公开(公告)日：2024-10-10

申请号：US18296145

申请日：2023-04-05

Applicant: Baker Hughes Holdings LLC

Inventor： Jakub Joseph Prchlik ,  Arlo Dante Petitjean ,  James Ryan Tunningley ,  Robert Badea

IPC: G01N21/31 ,  G01M15/14

CPC classification number: G01N21/31 ,  G01M15/14 ,  G01N2201/0634

Abstract: A first set of data characterizing a spectrum of light emitted or reflected by an object is received from a linear light sensor. Each pixel of the linear light sensor corresponds to a specified range of light frequencies. The data includes a first intensity of each pixel at a first sample rate. A subset of pixels is classified as points of interest within the first set of data. A second sample rate of each pixel is determined for each of the subset of pixels. A second set of data characterizing the spectrum of the light is retrieved. The second set of data includes a second intensity of each of the subset of pixels at the second sample rate. The first set of data and the second set of data are combined to produce a third set of data characterizing the spectrum.

公开(公告)号：US20240255441A1

公开(公告)日：2024-08-01

申请号：US18418249

申请日：2024-01-20

Applicant: UTPVISION S.R.L.

Inventor： Roberto Finazzi ,  Sergio Sigala

IPC: G01N21/952 ,  G01M13/005 ,  G01N21/88

CPC classification number: G01N21/952 ,  G01N21/8806 ,  G01M13/005 ,  G01N2201/0634

Abstract: An apparatus for detecting surface defects in objects comprises one or more illuminating devices configured to emit at least a light radiation and illuminate an object to be inspected. The detection apparatus is further configured to measure the light radiation received by the object, and also comprises one or more image acquisition devices configured to acquire one or more images of the object, when illuminated by the illuminating device, and a data processor configured to process the images acquired by the image acquisition device and provide detection data indicative of the presence of surface defects on the object.

公开(公告)号：US20240192127A1

公开(公告)日：2024-06-13

申请号：US18530760

申请日：2023-12-06

Applicant: Endress+Hauser Conducta GmbH+Co. KG

Inventor： Joachim Bolle ,  Andreas Bayer ,  Thilo Krätschmer

IPC: G01N21/25 ,  G01N21/27

CPC classification number: G01N21/255 ,  G01N21/27 ,  G01N2201/0634 ,  G01N2201/0666

Abstract: An optical measuring system for determining a measured variable in a medium includes a light source and a container with medium. The light source radiates measuring light into the container on a first light path, wherein the measuring light is converted into reception light as a function of the measured variable and radiates reference light past the container on a second light path. A diffusion disk is arranged between the container and a receiver, wherein the diffusion disk is configured and arranged such that the reception light impinges on the receiver through the diffusion disk. The diffusion disk is configured such that the reference light impinges on the receiver through the diffusion disk. The receiver receives the reception light and the reference light, and a data processing unit connected to the light source and to the receiver determines the measured variable from the measuring light and the reception light.