公开(公告)号：US06822251B1

公开(公告)日：2004-11-23

申请号：US10705410

申请日：2003-11-10

Applicant: Jonathan W. Arenberg ,  Frank R. Hassell

Inventor： Jonathan W. Arenberg ,  Frank R. Hassell

IPC: G01J100

CPC classification number: G03F7/70891 ,  B82Y10/00 ,  F24S23/71 ,  F28F3/12 ,  G03F7/70033 ,  G03F7/70175 ,  G21K1/06 ,  G21K2201/065

Abstract: A collector optic assembly for a EUV radiation source. The collector optic assembly includes an elliptical meniscus having a reflective Si/Mo coating for collecting and reflecting EUV radiation generated by the source. The meniscus is machined from a single piece of silicon. The collector optic assembly further includes a heat exchanger that includes cooling channels through which flows a liquid coolant. The heat exchanger is fabricated from a plurality of machined silicon sections fused together by a glass frit bonding process. The meniscus is fused to a front side of the heat exchanger by a glass frit bonding process. A liquid coolant inlet manifold and a liquid coolant outlet manifold are also each machined from a single silicon block and are mounted to a back side of the heat exchanger.

Abstract translation: 用于EUV辐射源的收集器光学组件。 收集器光学组件包括具有反射Si / Mo涂层的椭圆形弯液面，用于收集和反射源产生的EUV辐射。 弯液面由一片硅片加工而成。 收集器光学组件还包括热交换器，其包括冷却通道，液体冷却剂通过冷却通道流动。 热交换器由多个通过玻璃料接合工艺熔合在一起的加工硅部分制成。 弯液面通过玻璃料接合工艺熔合到热交换器的前侧。 液体冷却剂入口歧管和液体冷却剂出口歧管也由单个硅块加工而成，并且安装在热交换器的背面。

公开(公告)号：US06809327B2

公开(公告)日：2004-10-26

申请号：US10284022

申请日：2002-10-29

Applicant: Robert Bristol

Inventor： Robert Bristol

IPC: G01J100

CPC classification number: G03F7/70033 ,  G03F7/70916 ,  G03F7/70958

Abstract: Apparatus comprising a plasma source to generate a spectrum of radiation that includes extreme ultraviolet radiation, a reflector to generate a beam of extreme ultraviolet radiation from the spectrum of radiation, and a thin film to pass at least a portion of the extreme ultraviolet radiation.

公开(公告)号：US06797965B2

公开(公告)日：2004-09-28

申请号：US10252510

申请日：2002-09-24

Applicant: Hideaki Abe

Inventor： Hideaki Abe

IPC: G01J100

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/21 ,  H01J37/3174 ,  H01J2237/216 ,  H01J2237/2817

Abstract: A charged particle beam apparatus includes a charged particle source which generates a charged particle beam, a condenser lens which converges the charged particle beam, a deflector which deflects the charged particle beam to scan a sample with the charged particle beam, an objective lens which converges the charged particle beam on the surface of the sample, a sample position imaginary variation detection part which detects an imaginary variation of a sample position caused by variation of the focal position of the charged particle beam due to variation in the potential of the sample, and a sample position imaginary variation compensation part which compensates for the detected imaginary variation of the sample position.

Abstract translation: 带电粒子束装置包括产生带电粒子束的带电粒子源，会聚带电粒子束的聚光透镜，使带电粒子束偏转以用带电粒子束扫描样品的偏转器，收敛的物镜 样品表面上的带电粒子束，样品位置虚拟变形检测部分，其检测由于样品的电位变化引起的带电粒子束的焦点位置的变化引起的样本位置的虚拟变化;以及 样本位置虚拟变化补偿部分，其补偿检测到的样本位置的虚拟变化。

公开(公告)号：US06781680B1

公开(公告)日：2004-08-24

申请号：US10602701

申请日：2003-06-25

Applicant: Munehiro Ogasawara ,  Jun Takamatsu ,  Hitoshi Sunaoshi ,  Naoharu Shimomura

Inventor： Munehiro Ogasawara ,  Jun Takamatsu ,  Hitoshi Sunaoshi ,  Naoharu Shimomura

IPC: G01J100

CPC classification number: H01J37/304 ,  H01J2237/30433 ,  H01J2237/3175

Abstract: A method for adjusting an optical system of an energy beam apparatus by using a mark signal that is obtained by one-dimensionally or two-dimensionally scanning a mark on a sample with an energy beam. The mark has a one-dimensional or two-dimensional periodic structure. A first mark signal is detected by scanning the mark with a beam. The mark is set on the optical axis of the optical system. A second mark signal is detected by scanning the mark with a beam. The mark is located at a position that is deviated from the optical axis. A deviation of a deflection position is determined based on a phase difference between the first and second mark signals.

公开(公告)号：US06765660B2

公开(公告)日：2004-07-20

申请号：US10424026

申请日：2003-04-28

Applicant: John F. Nolan

Inventor： John F. Nolan

IPC: G01J100

CPC classification number: G01J1/4257

Abstract: A system is disclosed for analyzing an illumination field of a line of laser illumination. The system includes a first movable unit, a second movable unit, and a sensor unit. The first movable unit includes a first opening through which at least a portion of the illumination field may pass. The first movable unit is adapted for movement in a first direction. The sensor unit is adapted to receive illumination and to produce a sensor output signal representative a characteristic of the illumination field. The second movable unit includes a second opening through which at least a portion of the illumination field may pass. The second movable unit is positioned between the first movable unit and the sensor unit and is adapted for movement between at least a first position in which very little or no light from the illumination field may reach the sensor unit, and a second position in which a relatively high amount of light from the illumination field may reach the sensor unit.

Abstract translation: 公开了一种用于分析激光照射线的照明场的系统。 该系统包括第一可移动单元，第二可移动单元和传感器单元。 第一可移动单元包括第一开口，照明场的至少一部分可以通过该第一开口。 第一可移动单元适于沿第一方向运动。 传感器单元适于接收照明并产生表示照明场的特征的传感器输出信号。 第二可移动单元包括第二开口，照明场的至少一部分可以穿过该第二开口。 第二可移动单元位于第一可移动单元和传感器单元之间，并且适于在至少第一位置和第二位置之间移动，在第一位置中，来自照明区域的光很少或不能到达传感器单元， 来自照明区域的相对高的光量可能到达传感器单元。

公开(公告)号：US06765220B2

公开(公告)日：2004-07-20

申请号：US09756660

申请日：2001-01-10

Applicant: Albert W. Kongable ,  Mark T. Myers

Inventor： Albert W. Kongable ,  Mark T. Myers

IPC: G01J100

CPC classification number: G01J5/522 ,  G01J1/58

Abstract: A compact infrared (IR) scene generator capable of generating multiple-color mid-IR scenes through the use of readily available commercial near-IR lasers and a fluorescent conversion material (FCM). Such a scene generator would be useful to test IR imaging sensors in a controlled laboratory environment. In operation, each laser emits energy at an initial wavelength outside the operating band of an IR imaging sensor. This energy of a first set of wavelengths is written onto the FCM in patterns, which collectively form an IR scene. The FCM absorbs the energy and radiates it at wavelengths longer than the initial wavelengths, i.e., a second set of wavelengths. As these longer wavelengths are within the operating waveband of the IR imaging sensor, the patterns written onto the FCM are detectable by it.

Abstract translation: 通过使用易于获得的商用近红外激光器和荧光转换材料（FCM），能够产生多色中红外场景的小型红外（IR）场景发生器。 这样的场景发生器将有助于在受控的实验室环境中测试IR成像传感器。 在操作中，每个激光器以IR成像传感器的工作频带外的初始波长发射能量。 将第一组波长的能量以共同形成IR场景的图案写入FCM。 FCM吸收能量并以比初始波长长的波长辐射它，即第二组波长。 由于这些较长的波长在IR成像传感器的工作波段内，写入FCM的图案可以被它检测到。

公开(公告)号：US06750957B1

公开(公告)日：2004-06-15

申请号：US09889307

申请日：2001-11-02

Applicant: Xavier Jean-Francois Levecq ,  Samuel Henri Bucourt

Inventor： Xavier Jean-Francois Levecq ,  Samuel Henri Bucourt

IPC: G01J100

CPC classification number: G01J9/00

Abstract: A device for the analysis of an optical wavefront includes an array (ML) of microlenses (Li), and signal processing elements. Each mircolens (Li) defines a subaperature (Spi), and focuses an elementary surface of the wavefront, intercepted by the subaperature, for forming a spot (Ti) on the detector. For each subaperature (Spi), a zone (Zi) of assumed localization of the spot is defined. The processing unit makes it possible to establish a measurement file associating to each subaperature the position of this spot. The structure of the array (ML) presents one or several local variations. By comparing the contribution of these local variations taken from the measurement file, with their contribution taken from a reference file, the displacement between the subaperature from which a detected spot is derived and the subaperature that defines the zone of assumed localization wherein the spot is located is measured.

Abstract translation: 用于分析光波前的装置包括微透镜（Li）的阵列（ML）和信号处理元件。 每个微透镜（Li）定义了一个分层（Spi），并且聚焦由该分层截取的波前的基本表面，以在检测器上形成点（Ti）。 对于每个子分类（Spi），定义了点的假定定位的区域（Zi）。 处理单元使得可以建立与每个子档相关联的该位置的测量文件。 阵列（ML）的结构呈现一个或多个局部变化。 通过比较从测量文件获得的这些局部变化的贡献与其从参考文件获得的贡献，导出检测到的斑点的子分层与定义假定定位区域的子空间之间的位移，其中斑点位于 被测量。

公开(公告)号：US06717661B1

公开(公告)日：2004-04-06

申请号：US09771303

申请日：2001-01-26

Applicant: Aaron C. Bernstein ,  Jean-Claude M. Diels

Inventor： Aaron C. Bernstein ,  Jean-Claude M. Diels

IPC: G01J100

CPC classification number: G01J9/02

Abstract: An apparatus and method for wavefront sensing that includes: employing two moiré gratings in an optical path; optically Fourier transforming a moiré deflectogram produced by the gratings; variably transmitting the transformed moiré deflectogram; and receiving an image of the variably transmitted and transformed moiré deflectogram. The variable transmission is best accomplished by transmission filter, a transmissive optic encoding intensity information upon the moiré deflectogram as a function of fringe angle. For example, the function can be a triangular transmission function centered on the (0,0) order spatial frequency spot and oriented at 45 degrees to the y-axis. The optical Fourier transform is accomplished by a lens and the variable transmission by an apodized slit.

Abstract translation: 一种用于波前感测的装置和方法，包括：在光路中采用两个莫尔光栅; 光学傅立叶变换由光栅产生的莫尔偏转图; 可变地传输变形的莫尔偏转图; 并接收可变发射和变换的莫尔偏转图的图像。 可变传输最好通过传输滤波器来实现，传输滤波器是基于莫尔偏转图作为边缘角的函数的透射光学编码强度信息。 例如，该函数可以是以（0,0）阶空间频率点为中心并以与y轴成45度取向的三角形传递函数。 光学傅立叶变换由透镜和可变透镜通过变迹缝完成。

公开(公告)号：US06710363B1

公开(公告)日：2004-03-23

申请号：US09722908

申请日：2000-11-27

Applicant: Phil Trigiani

Inventor： Phil Trigiani

IPC: G01J100

CPC classification number: G01N21/6447 ,  G01J3/10 ,  G01M3/228 ,  G01N21/91 ,  G01N2021/6439 ,  G01N2201/062

Abstract: The present application reveals a lamp and a method for detecting leaks in air-conditioning and refrigeration systems. The lamp uses one or more light-emitting diodes (LEDs) as a light source to detect fluorescent dyes that have been added to the air-conditioning or refrigeration system.

Abstract translation: 本申请揭示了一种用于检测空调和制冷系统中的泄漏的灯和方法。 该灯使用一个或多个发光二极管（LED）作为光源来检测已添加到空调或制冷系统中的荧光染料。

公开(公告)号：US06664553B2

公开(公告)日：2003-12-16

申请号：US09941940

申请日：2001-08-30

Applicant: D. Allan Roberts ,  Doug Cohen ,  David S. Smith

Inventor： D. Allan Roberts ,  Doug Cohen ,  David S. Smith

IPC: G01J100

CPC classification number: G01J5/522

Abstract: An apparatus for simulating a blackbody utilizes several plates to absorb and reflect electromagnetic radiation. Electromagnetic radiation entering the apparatus from a certain view is reflected from one plate to another, until the direction of travel of the electromagnetic radiation is reversed. Each time the electromagnetic radiation is reflected, the majority of the electromagnetic radiation is absorbed resulting in a negligible amount of incoming electromagnetic radiation escaping the apparatus.

Abstract translation: 用于模拟黑体的装置利用几个板来吸收和反射电磁辐射。 从某一角度进入设备的电磁辐射从一个板反射到另一个板，直到电磁辐射的行进方向相反。 每次电磁辐射被反射时，电磁辐射的大部分被吸收，导致远离设备的入射电磁辐射量可以忽略不计。